MA34759B1 - Interface améliorée entre une couche de matériau à base d'éléments des groupes i-iii-vi2 et un substrat en molybdène - Google Patents
Interface améliorée entre une couche de matériau à base d'éléments des groupes i-iii-vi2 et un substrat en molybdèneInfo
- Publication number
- MA34759B1 MA34759B1 MA36038A MA36038A MA34759B1 MA 34759 B1 MA34759 B1 MA 34759B1 MA 36038 A MA36038 A MA 36038A MA 36038 A MA36038 A MA 36038A MA 34759 B1 MA34759 B1 MA 34759B1
- Authority
- MA
- Morocco
- Prior art keywords
- iii
- material layer
- adaptation layer
- layer based
- group elements
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 title 1
- 239000000463 material Substances 0.000 title 1
- 229910052750 molybdenum Inorganic materials 0.000 title 1
- 239000011733 molybdenum Substances 0.000 title 1
- 230000006978 adaptation Effects 0.000 abstract 4
- 238000000151 deposition Methods 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02491—Conductive materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02614—Transformation of metal, e.g. oxidation, nitridation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Photovoltaic Devices (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
La présente invention porte sur un procédé pour la fabrication d'une couche mince constituée d'un alliage d'éléments des groupes I-III-VI et ayant des propriétés photovoltaïques. Le procédé selon l'invention comprend des premières étapes consistant à : a) déposer une couche d'adaptation (MO) sur un substrat (SUB) et b) déposer au moins une couche (GERME) comprenant au moins des éléments des groupes I et/ou III, sur ladite couche d'adaptation. La couche d'adaptation est déposée dans des conditions de quasi-vide et l'étape b) comprend une première opération consistant à déposer une première couche d'éléments des groupes I et/ou III, dans les mêmes conditions que le dépôt de la couche d'adaptation, sans exposition de la couche d'adaptation à de l'air.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10306519A EP2469580A1 (fr) | 2010-12-27 | 2010-12-27 | Interface améliorée entre une couche de matériau I-III-VI2 et un substrat de molybdène |
PCT/EP2011/073401 WO2012089558A1 (fr) | 2010-12-27 | 2011-12-20 | Interface améliorée entre une couche de matériau à base d'éléments des groupes i-iii-vi2 et un substrat en molybdène |
Publications (1)
Publication Number | Publication Date |
---|---|
MA34759B1 true MA34759B1 (fr) | 2013-12-03 |
Family
ID=43899614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MA36038A MA34759B1 (fr) | 2010-12-27 | 2013-06-24 | Interface améliorée entre une couche de matériau à base d'éléments des groupes i-iii-vi2 et un substrat en molybdène |
Country Status (11)
Country | Link |
---|---|
US (1) | US20130269780A1 (fr) |
EP (2) | EP2469580A1 (fr) |
JP (1) | JP2014502592A (fr) |
KR (1) | KR20140031190A (fr) |
CN (1) | CN103460337B (fr) |
AU (1) | AU2011351600B2 (fr) |
BR (1) | BR112013016541A2 (fr) |
MA (1) | MA34759B1 (fr) |
TN (1) | TN2013000258A1 (fr) |
WO (1) | WO2012089558A1 (fr) |
ZA (1) | ZA201304566B (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9246025B2 (en) | 2012-04-25 | 2016-01-26 | Guardian Industries Corp. | Back contact for photovoltaic devices such as copper-indium-diselenide solar cells |
US9419151B2 (en) | 2012-04-25 | 2016-08-16 | Guardian Industries Corp. | High-reflectivity back contact for photovoltaic devices such as copper—indium-diselenide solar cells |
US9935211B2 (en) | 2012-04-25 | 2018-04-03 | Guardian Glass, LLC | Back contact structure for photovoltaic devices such as copper-indium-diselenide solar cells |
US8809674B2 (en) | 2012-04-25 | 2014-08-19 | Guardian Industries Corp. | Back electrode configuration for electroplated CIGS photovoltaic devices and methods of making same |
KR101389832B1 (ko) * | 2012-11-09 | 2014-04-30 | 한국과학기술연구원 | 구리인듐셀레늄(cigs) 또는 구리아연주석황(czts)계 박막형 태양전지 및 그의 제조방법 |
FR3028668B1 (fr) * | 2014-11-13 | 2016-12-30 | Nexcis | Procede de fabrication d'une cellule photovoltaique |
US10128237B2 (en) * | 2016-06-24 | 2018-11-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Methods of gate replacement in semiconductor devices |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6480025A (en) * | 1987-09-21 | 1989-03-24 | Hitachi Ltd | Apparatus for manufacturing semiconductor |
JPH0877544A (ja) * | 1994-06-30 | 1996-03-22 | Fuji Electric Co Ltd | 磁気記録媒体及びその製造方法 |
JPH0936408A (ja) * | 1995-07-25 | 1997-02-07 | Yazaki Corp | 薄膜太陽電池の製造方法及びインジウム−セレン合金の製造方法 |
JP3804881B2 (ja) * | 1996-04-29 | 2006-08-02 | 株式会社半導体エネルギー研究所 | 半導体装置の作製装置および半導体装置の作製方法 |
AU2001272899A1 (en) * | 2000-04-10 | 2001-10-23 | Davis, Joseph And Negley | Preparation of cigs-based solar cells using a buffered electrodeposition bath |
CN1151560C (zh) * | 2002-03-08 | 2004-05-26 | 清华大学 | 一种铜铟镓硒薄膜太阳能电池及其制备方法 |
FR2849532B1 (fr) * | 2002-12-26 | 2005-08-19 | Electricite De France | Procede de fabrication d'un compose i-iii-vi2 en couches minces, favorisant l'incorporation d'elements iii |
US7736940B2 (en) * | 2004-03-15 | 2010-06-15 | Solopower, Inc. | Technique and apparatus for depositing layers of semiconductors for solar cell and module fabrication |
JP4676771B2 (ja) * | 2004-05-20 | 2011-04-27 | 新光電気工業株式会社 | 化合物半導体太陽電池の製造方法 |
EP1810344A2 (fr) * | 2004-11-10 | 2007-07-25 | Daystar Technologies, Inc. | Systeme utilisant une plaque pour la formation de cellules solaires a film mince |
WO2009076322A2 (fr) * | 2007-12-06 | 2009-06-18 | Craig Leidholm | Procédés et dispositifs de traitement d'une couche de précurseur dans un environnement de groupe via |
DE102009011496A1 (de) * | 2009-03-06 | 2010-09-16 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur thermischen Umsetzung metallischer Precursorschichten in halbleitende Schichten mit Chalkogenrückgewinnung |
US20100255660A1 (en) * | 2009-04-07 | 2010-10-07 | Applied Materials, Inc. | Sulfurization or selenization in molten (liquid) state for the photovoltaic applications |
TW201042065A (en) * | 2009-05-22 | 2010-12-01 | Ind Tech Res Inst | Methods for fabricating copper indium gallium diselenide (CIGS) compound thin films |
JP2013504215A (ja) * | 2009-09-02 | 2013-02-04 | ボルマン、ブレント | Via族環境において前駆体層を処理するための方法およびデバイス |
CN101771105A (zh) * | 2009-12-01 | 2010-07-07 | 郭玉钦 | 连续生产线制备铜铟镓硒软体薄膜太阳能光电池的方法 |
-
2010
- 2010-12-27 EP EP10306519A patent/EP2469580A1/fr not_active Withdrawn
-
2011
- 2011-12-20 BR BR112013016541A patent/BR112013016541A2/pt not_active IP Right Cessation
- 2011-12-20 US US13/995,269 patent/US20130269780A1/en not_active Abandoned
- 2011-12-20 AU AU2011351600A patent/AU2011351600B2/en not_active Ceased
- 2011-12-20 EP EP11797018.6A patent/EP2666184B1/fr active Active
- 2011-12-20 KR KR1020137019771A patent/KR20140031190A/ko not_active Application Discontinuation
- 2011-12-20 CN CN201180063663.2A patent/CN103460337B/zh active Active
- 2011-12-20 WO PCT/EP2011/073401 patent/WO2012089558A1/fr active Application Filing
- 2011-12-20 JP JP2013546662A patent/JP2014502592A/ja active Pending
-
2013
- 2013-06-14 TN TNP2013000258A patent/TN2013000258A1/fr unknown
- 2013-06-20 ZA ZA2013/04566A patent/ZA201304566B/en unknown
- 2013-06-24 MA MA36038A patent/MA34759B1/fr unknown
Also Published As
Publication number | Publication date |
---|---|
EP2666184A1 (fr) | 2013-11-27 |
ZA201304566B (en) | 2014-09-25 |
JP2014502592A (ja) | 2014-02-03 |
US20130269780A1 (en) | 2013-10-17 |
AU2011351600A1 (en) | 2013-07-04 |
WO2012089558A1 (fr) | 2012-07-05 |
TN2013000258A1 (en) | 2014-11-10 |
EP2469580A1 (fr) | 2012-06-27 |
CN103460337B (zh) | 2016-09-14 |
EP2666184B1 (fr) | 2021-01-06 |
KR20140031190A (ko) | 2014-03-12 |
CN103460337A (zh) | 2013-12-18 |
BR112013016541A2 (pt) | 2016-09-27 |
AU2011351600B2 (en) | 2015-09-17 |
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