KR970053294A - 반도체 웨이퍼 고정장치 - Google Patents

반도체 웨이퍼 고정장치 Download PDF

Info

Publication number
KR970053294A
KR970053294A KR1019950049710A KR19950049710A KR970053294A KR 970053294 A KR970053294 A KR 970053294A KR 1019950049710 A KR1019950049710 A KR 1019950049710A KR 19950049710 A KR19950049710 A KR 19950049710A KR 970053294 A KR970053294 A KR 970053294A
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
clamp
ring
semiconductor
chip pattern
Prior art date
Application number
KR1019950049710A
Other languages
English (en)
Other versions
KR100207451B1 (ko
Inventor
이채영
박영규
이석준
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950049710A priority Critical patent/KR100207451B1/ko
Priority to JP13499496A priority patent/JPH09181153A/ja
Priority to TW085106919A priority patent/TW315505B/zh
Priority to US08/764,586 priority patent/US5842690A/en
Publication of KR970053294A publication Critical patent/KR970053294A/ko
Application granted granted Critical
Publication of KR100207451B1 publication Critical patent/KR100207451B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B5/00—Clamps
    • B25B5/16—Details, e.g. jaws, jaw attachments
    • B25B5/163—Jaws or jaw attachments

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 반도체 에이퍼 에지(edge) 부분의 수율을 향상시키기 위해 클램프의 형성을 개선시킨 반도체 웨이퍼 고정장치에 관한 것이다. 상기 목적을 달성하기 위하여 본 발명은, 평평한 상면을 갖고 반도체 웨이퍼가 놓여지는 플레튼(Platen)과, 상기 플레튼과 반도체 웨이퍼의 사이에 위치하며 탄성력을 갖는 오링과, 상기 오링에 대향되도록 위치하여 반도체 웨이퍼의 상면을 눌러서 고정시키는 클램프(
Clamp)를 구비하는 반도체 웨이퍼 고정장치에 있어서, 상기 클램프는 상기 반도체 웨이퍼의 직경보다 더 큰 내경을 갖는 링형의 판으로서, 상기 반도체 웨이퍼 상의 칩패턴에 따라 상기 칩패턴과 반도체 웨이퍼 외주면 사이의 간격이 일정치 이상이 되는 위치에 대응되도록 다수의 돌기가 내주면에서 중심을 향하여 형성된 것을 특징으로 하는 반도체 웨이퍼 고정장치를 제공한다.
본 발명은 반도체 웨이퍼 표면의 칩패턴에 따라 반도체 칩을 손상시키지 않도록 웨이퍼의 에지부분 만을 고정시킴으로서 수율을 향상시키는 동시에 고정력을 향상시킬 수 있는 효과가 있다.

Description

반도체 웨이퍼 고정장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제4도는 본 발명에 의한 클램프의 형상과 웨이퍼를 고정하는 위치를 나타내는 평면도이다.

Claims (3)

  1. 평평한 상면을 갖고 반도체 웨이퍼가 놓여지는 플레튼(Platen)과, 상기 플레튼과 반도체 웨이퍼의 사이에 위치하며 탄성력을 갖는 오링과, 상기 오링에 대향되도록 위치하여 반도체 웨이퍼의 상면을 눌러서 고정시키는 클램프(Clamp)를 구비하는 반도체 웨이퍼 고정장치에 있어서, 상기 클램프는 상기 반도체 웨이퍼의 직경보다 더 큰 내경을 갖는 링형의 판으로서, 상기 반도체 웨이퍼 상의 칩패턴에 따라 상기 칩패턴과 반도체 웨이퍼 외주면 사이의 간격이 일정치 이상이 되는 위치에 대응되도록 다수의 돌기가 내주면에서 중심을 향하여 형성된 것을 특징으로 하는 반도체 웨이퍼 고정장치.
  2. 제1항에 있어서, 상기 클램프의 다수의 돌기는 서로 다른 길이를 갖도록 형성된 것을 특징으로 하는 반도체 웨이퍼 고정장치.
  3. 제1항에 있어서, 상기 클램프의 다수의 돌기는 끝단으로 갈수록 폭이 좁아지게 형성된 것을 특징으로 하는 반도체 웨이퍼 고정장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950049710A 1995-12-14 1995-12-14 반도체 웨이퍼 고정장치 KR100207451B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019950049710A KR100207451B1 (ko) 1995-12-14 1995-12-14 반도체 웨이퍼 고정장치
JP13499496A JPH09181153A (ja) 1995-12-14 1996-05-29 半導体ウェーハ固定装置
TW085106919A TW315505B (ko) 1995-12-14 1996-06-08
US08/764,586 US5842690A (en) 1995-12-14 1996-12-13 Semiconductor wafer anchoring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950049710A KR100207451B1 (ko) 1995-12-14 1995-12-14 반도체 웨이퍼 고정장치

Publications (2)

Publication Number Publication Date
KR970053294A true KR970053294A (ko) 1997-07-31
KR100207451B1 KR100207451B1 (ko) 1999-07-15

Family

ID=19439964

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950049710A KR100207451B1 (ko) 1995-12-14 1995-12-14 반도체 웨이퍼 고정장치

Country Status (4)

Country Link
US (1) US5842690A (ko)
JP (1) JPH09181153A (ko)
KR (1) KR100207451B1 (ko)
TW (1) TW315505B (ko)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100308209B1 (ko) * 1998-06-20 2001-11-30 윤종용 리플로우공정을 위한 히터 어셈블리의 클램프
FR2783970B1 (fr) * 1998-09-25 2000-11-03 Commissariat Energie Atomique Dispositif autorisant le traitement d'un substrat dans une machine prevue pour traiter de plus grands substrats et systeme de montage d'un substrat dans ce dispositif
EP1028176A1 (de) * 1999-02-12 2000-08-16 Balzers Hochvakuum AG Werkstückhaltevorrichtung sowie Verfahren zu ihrem Betrieb
IT1313173B1 (it) * 1999-08-09 2002-06-17 Essetre Di Sella Giovanni Macchina utensile per la lavorazione del legno atta a lavorare pezzidi dimensioni variabili e forme complesse e relativo metodo
IT1313128B1 (it) * 1999-08-09 2002-06-17 Essetre Di Sella Giovanni Gruppo di fissaggio per il bloccaggio dei pezzi da lavorare sul pianodi lavoro di una macchina utensile per la lavorazione del legno e
US6299151B1 (en) * 1999-12-23 2001-10-09 General Electric Company Fluid distribution system
GB0002837D0 (en) * 2000-02-08 2000-03-29 British Aerospace Assembling composite structures
JP2001338878A (ja) * 2000-03-21 2001-12-07 Sharp Corp サセプタおよび表面処理方法
US20040099375A1 (en) * 2002-11-21 2004-05-27 Yanghua He Edge-contact ring for a wafer pedestal
JP4332409B2 (ja) * 2003-10-31 2009-09-16 キヤノン株式会社 基板保持機構およびそれを用いた露光装置並びにデバイス製造方法
US20050176252A1 (en) * 2004-02-10 2005-08-11 Goodman Matthew G. Two-stage load for processing both sides of a wafer
DE102004050822A1 (de) * 2004-10-19 2006-04-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum Kühlen plattenförmiger Substrate
WO2007028404A1 (de) * 2005-09-06 2007-03-15 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Vorrichtung zur aufnahme von plattenförmigen materialien für zumindest einen trennvorgang
US20080002923A1 (en) * 2006-06-30 2008-01-03 Seagate Technology Llc Fluid bearing workholder for precision centering
KR100856019B1 (ko) * 2008-02-22 2008-09-02 (주)타이닉스 플라즈마 처리장치의 기판 홀더
TWI381480B (zh) * 2008-03-20 2013-01-01 Mjc Probe Inc 晶圓固著裝置及其方法
US8276898B2 (en) * 2008-06-11 2012-10-02 Lam Research Corporation Electrode transporter and fixture sets incorporating the same
CN102319680B (zh) * 2011-08-23 2014-05-14 广东志成华科光电设备有限公司 一种smd led贴片分光机的芯片定位装置
US9136155B2 (en) * 2011-11-17 2015-09-15 Lam Research Ag Method and device for processing wafer shaped articles
JP5977038B2 (ja) 2012-02-15 2016-08-24 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置
US9502278B2 (en) * 2013-04-22 2016-11-22 International Business Machines Corporation Substrate holder assembly for controlled layer transfer
US9227261B2 (en) * 2013-08-06 2016-01-05 Globalfoundries Inc. Vacuum carriers for substrate bonding
JP5538613B1 (ja) * 2013-11-13 2014-07-02 東京エレクトロン株式会社 接合装置及び接合システム
CN104851832B (zh) * 2014-02-18 2018-01-19 北京北方华创微电子装备有限公司 一种固定装置、反应腔室及等离子体加工设备
JP6284996B1 (ja) * 2016-11-04 2018-02-28 Ｔｏｗａ株式会社 検査方法、樹脂封止装置、樹脂封止方法及び樹脂封止品の製造方法
NL2021006B1 (en) 2018-05-29 2019-12-04 Suss Microtec Lithography Gmbh Holding apparatus and method for holding a substrate
CN109624109A (zh) * 2019-02-20 2019-04-16 广州安特激光技术有限公司 一种晶圆片切割装置的承载台

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4075302A (en) * 1977-06-13 1978-02-21 University Of Illinois Foundation Apparatus for gripping and holding small workpieces
DE2802791A1 (de) * 1978-01-23 1979-07-26 Niedecker Herbert Vorrichtung zum bestimmen und spannen von werkstuecken
US4473455A (en) * 1981-12-21 1984-09-25 At&T Bell Laboratories Wafer holding apparatus and method
US4928936A (en) * 1986-12-02 1990-05-29 Nikon Corporation Loading apparatus
US5228501A (en) * 1986-12-19 1993-07-20 Applied Materials, Inc. Physical vapor deposition clamping mechanism and heater/cooler
DE3803411A1 (de) * 1988-02-05 1989-08-17 Leybold Ag Vorrichtung zur halterung von werkstuecken
US5262029A (en) * 1988-05-23 1993-11-16 Lam Research Method and system for clamping semiconductor wafers
US4952299A (en) * 1988-10-31 1990-08-28 Eaton Corporation Wafer handling apparatus
US5152707A (en) * 1990-11-13 1992-10-06 Zenith Electronics Corporation Conformable anvil for supporting in-process face panels of tension mask color cathode ray tubes
US5451261A (en) * 1992-09-11 1995-09-19 Matsushita Electric Industrial Co., Ltd. Metal film deposition apparatus and metal film deposition method
DE4305750C2 (de) * 1993-02-25 2002-03-21 Unaxis Deutschland Holding Vorrichtung zum Halten von flachen, kreisscheibenförmigen Substraten in der Vakuumkammer einer Beschichtungs- oder Ätzanlage
US5513594A (en) * 1993-10-20 1996-05-07 Mcclanahan; Adolphus E. Clamp with wafer release for semiconductor wafer processing equipment

Also Published As

Publication number Publication date
TW315505B (ko) 1997-09-11
KR100207451B1 (ko) 1999-07-15
US5842690A (en) 1998-12-01
JPH09181153A (ja) 1997-07-11

Similar Documents

Publication Publication Date Title
KR970053294A (ko) 반도체 웨이퍼 고정장치
KR970059842A (ko) 기판유지장치 및 이를 이용한 노광장치
KR920005811A (ko) 정전 척
KR880005684A (ko) 반도체장치
KR880014643A (ko) 반도체소자 제조장치
KR960020633A (ko) 반도체 칩 탑재용 기판
KR0128239Y1 (ko) 웨이퍼 고정용 지지구조
KR970030589A (ko) 본딩장치용 클램프기구
KR970063418A (ko) 반도체 소자 제조용 레티클
KR970053329A (ko) 반도체 장치의 이동형 트레이 홀더
KR970030614A (ko) 반도체 소자 제조용 링형 클램프
KR970052733A (ko) X-선 마스크 제작을 위한 실리콘 습식식각용 웨이퍼 척
KR200195087Y1 (ko) 반도체웨이퍼의웨트에칭장치
KR960026619A (ko) 막질 적층형 스크라이브 라인 영역을 갖는 반도체장치
KR970018191A (ko) 플라즈마를 이용하는 식각장비
KR970063403A (ko) 반도체 소자 제조용 래티클
JPS54112164A (en) Manufacture of semiconductor device
KR970003891A (ko) 반도체 리드 프레임 커팅 방법
KR970023960A (ko) 트위저
KR970053699A (ko) 패드마운터를 구비한 히터블럭
KR950025885A (ko) 노광마스크 형성방법
KR970030256A (ko) 스핀 코팅장치
KR950021191A (ko) 반도체 제조공정 체임버(chamber)의 실링(sealing)장치
KR970052044A (ko) 반도체제조장치의 웨이퍼클램프
KR980003890A (ko) 웨이퍼 정렬 노광 장치의 웨이퍼 고정 수단

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment
FPAY Annual fee payment
EXPY Expiration of term