KR970008325A - 진공실을 급속히 진공시키기 위한 장치 - Google Patents
진공실을 급속히 진공시키기 위한 장치 Download PDFInfo
- Publication number
- KR970008325A KR970008325A KR1019960027015A KR19960027015A KR970008325A KR 970008325 A KR970008325 A KR 970008325A KR 1019960027015 A KR1019960027015 A KR 1019960027015A KR 19960027015 A KR19960027015 A KR 19960027015A KR 970008325 A KR970008325 A KR 970008325A
- Authority
- KR
- South Korea
- Prior art keywords
- pump
- vacuum chamber
- check valve
- vacuum
- rapidly evacuating
- Prior art date
Links
- 238000010521 absorption reaction Methods 0.000 claims abstract 2
- 238000007664 blowing Methods 0.000 claims abstract 2
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/06—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials
- H01L21/08—Preparation of the foundation plate
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Jet Pumps And Other Pumps (AREA)
Abstract
제1진공펌프(14), 바람직하게는 송풍펌프와, 이 제1펌프(14)의 흡입측을 진공실(5)과 연결시키고 제1첵크밸브(16)와 연결된 흡입연결편과, 결합관(20)에 의해 제1펌프(14)와 연결된 제2진공펌프(15)와, 결합관(20)과 연결된 송출나비밸브(17)로 구성된 진공실(5)의 급속진공화를 위한 장치에는, 제2펌프(15)의 흡수측에 연결되고 제2첵크 밸브(13)가 중간에 연결되고 진공챔버(5)와 연결되어 있는 보조관(19)과, 결합관(20)에 연결된 제3첵크밸브(12)가 구비된다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 직렬 및 병렬식 접속이 가능한 펌프를 갖춘 본 발명에 따르는 장치의 도면.
Claims (1)
- 제1진공펌프(14), 바람직하게는 송풍펌프와, 이 제1펌프(14)의 흡입측을 진공실(5)과 연결시키고 제1첵크밸브(16)와 연결된 흡입연결편과, 결합관(20)에 의해 제1펌프(14)와 연결된 제2진공펌프(15)와, 결합관(20)과 연결된 송출나비밸브(17)로 구성된 진공실(5)의 급속진공화를 위한 장치에 있어서, 제2펌프(15)의 흡수측에 연결되고 제2첵크밸브(13)가 중간에 연결되고 진공챔버(5)와 연결되어 있는 보조관(19)과, 결합관(20)에 연결된 제3첵크밸브(12)로 구성된 것을 특징으로 하는 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19524609.8 | 1995-07-06 | ||
DE19524609A DE19524609A1 (de) | 1995-07-06 | 1995-07-06 | Vorrichtung zum raschen Evakuieren einer Vakuumkammer |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970008325A true KR970008325A (ko) | 1997-02-24 |
KR100221782B1 KR100221782B1 (ko) | 1999-10-01 |
Family
ID=7766147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960027015A KR100221782B1 (ko) | 1995-07-06 | 1996-07-04 | 진공실을 급속히 진공시키기 위한 장치 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6004109A (ko) |
EP (1) | EP0752531B2 (ko) |
JP (1) | JP3822675B2 (ko) |
KR (1) | KR100221782B1 (ko) |
DE (2) | DE19524609A1 (ko) |
ES (1) | ES2124052T5 (ko) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19831123A1 (de) * | 1998-07-11 | 2000-01-13 | Pfeiffer Vacuum Gmbh | Gasballasteinrichtung für mehrstufige Verdrängerpumpen |
DE19929519A1 (de) * | 1999-06-28 | 2001-01-04 | Pfeiffer Vacuum Gmbh | Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage |
DE19962445A1 (de) * | 1999-12-22 | 2001-06-28 | Leybold Vakuum Gmbh | Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung |
RO118309B1 (ro) * | 2000-07-04 | 2003-04-30 | Adrian Bodea | Instalatie de vid pentru tratarea otelului |
DE10144210A1 (de) * | 2001-09-08 | 2003-03-27 | Sgi Prozess Technik Gmbh | Pumpensystem |
US6589023B2 (en) | 2001-10-09 | 2003-07-08 | Applied Materials, Inc. | Device and method for reducing vacuum pump energy consumption |
SE0201335L (sv) * | 2002-05-03 | 2003-03-25 | Piab Ab | Vakuumpump och sätt att tillhandahålla undertryck |
GB0214273D0 (en) * | 2002-06-20 | 2002-07-31 | Boc Group Plc | Apparatus for controlling the pressure in a process chamber and method of operating same |
GB0401396D0 (en) * | 2004-01-22 | 2004-02-25 | Boc Group Plc | Pressure control method |
JP4633370B2 (ja) * | 2004-02-17 | 2011-02-16 | 財団法人国際科学振興財団 | 真空装置 |
JP4931793B2 (ja) * | 2004-03-05 | 2012-05-16 | オイ コーポレイション | 質量分析計の焦点面検出器アセンブリ |
DE102004059486A1 (de) * | 2004-12-10 | 2006-06-22 | Leybold Vacuum Gmbh | Vakuum-Anlage |
FR2883934B1 (fr) * | 2005-04-05 | 2010-08-20 | Cit Alcatel | Pompage rapide d'enceinte avec limitation d'energie |
KR100730323B1 (ko) | 2007-03-15 | 2007-06-19 | 한국뉴매틱(주) | 필터 카트리지를 이용한 진공 시스템 |
DE102007060174A1 (de) * | 2007-12-13 | 2009-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe sowie Verfahren zum Betreiben einer Vakuumpumpe |
US8042566B2 (en) * | 2008-07-23 | 2011-10-25 | Atmel Corporation | Ex-situ component recovery |
BR112012018803B1 (pt) * | 2009-12-24 | 2021-09-28 | Sumitomo Seika Chemicals Co., Ltd. | Aparelho de bomba de vácuo dupla e sistema de purificação de gás |
GB201007814D0 (en) * | 2010-05-11 | 2010-06-23 | Edwards Ltd | Vacuum pumping system |
FR2967219B1 (fr) * | 2010-11-05 | 2012-12-07 | Centre Nat Rech Scient | Installation de pompage pour l'obtention d'un vide pousse et procede de pompage mettant en oeuvre une telle installation |
DE102011015464B4 (de) * | 2010-11-30 | 2012-09-06 | Von Ardenne Anlagentechnik Gmbh | Vakuumpumpeinrichtung und -verfahren für staubhaltige Gase |
CH706231B1 (fr) | 2012-03-05 | 2016-07-29 | Ateliers Busch Sa | Installation de pompage et procédé de contrôle d'une telle installation. |
KR101995358B1 (ko) | 2012-06-28 | 2019-07-02 | 스털링 인더스트리 컨설트 게엠베하 | 챔버를 배기시키기 위한 방법 및 펌프 장치 |
DE102013108090A1 (de) * | 2013-07-29 | 2015-01-29 | Hella Kgaa Hueck & Co. | Pumpenanordnung |
DE102013219464A1 (de) * | 2013-09-26 | 2015-03-26 | Inficon Gmbh | Evakuierung einer Folienkammer |
DE102013223556A1 (de) * | 2013-11-19 | 2015-05-21 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems |
FR3017425A1 (fr) * | 2014-02-12 | 2015-08-14 | Adixen Vacuum Products | Systeme de pompage et procede de descente en pression dans un sas de chargement et de dechargement |
KR101505505B1 (ko) | 2014-03-24 | 2015-03-24 | 주식회사 누리텍 | 유기 랭킨 사이클용 유기용매 공급장치 |
AT14171U1 (de) * | 2014-04-15 | 2015-05-15 | Tropper Maschinen Und Anlagen Gmbh | Fahrzeug, insbesondere zur Futteraufbereitung |
CN104863857B (zh) * | 2015-04-15 | 2017-02-22 | 武汉新芯集成电路制造有限公司 | 一种抽气泵的抽气系统及抽气泵 |
DE202016007609U1 (de) | 2016-12-15 | 2018-03-26 | Leybold Gmbh | Vakuumpumpsystem |
US11460034B2 (en) * | 2018-11-15 | 2022-10-04 | Flowserve Management Company | Apparatus and method for evacuating very large volumes |
GB2579360A (en) | 2018-11-28 | 2020-06-24 | Edwards Ltd | Multiple chamber vacuum exhaust system |
US11815095B2 (en) * | 2019-01-10 | 2023-11-14 | Elival Co., Ltd | Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps |
US11492020B2 (en) | 2020-05-05 | 2022-11-08 | Flowserve Management Company | Method of intelligently managing pressure within an evacuated transportation system |
Family Cites Families (17)
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US2652188A (en) * | 1948-07-08 | 1953-09-15 | Cyr Rob Roy | Automatic tank pump down |
DE1024668B (de) * | 1955-08-31 | 1958-02-20 | Erwin Lothar Holland Merten | Mehrstufige Hochvakuumpumpe |
DE1114981B (de) * | 1960-06-29 | 1961-10-12 | Leybolds Nachfolger E | Verfahren zur Evakuierung von Behaeltern, welche dampffoermige Bestandteile neben Permanentgasen enthalten, und Vorrichtung zur Durchfuehrung des Verfahrens |
DD96304A1 (ko) * | 1972-02-29 | 1973-03-12 | ||
DE2462187A1 (de) * | 1974-06-24 | 1976-09-02 | Siemens Ag | Fluessigkeitsring-vakuumpumpe mit vorgeschaltetem seitenkanal-ringverdichter |
DD118144B1 (de) * | 1975-05-07 | 1988-11-30 | Lothar Reissmueller | Verfahren und einrichtung zur schnellen evakuierung kleiner behaelter |
US4505647A (en) * | 1978-01-26 | 1985-03-19 | Grumman Allied Industries, Inc. | Vacuum pumping system |
DD200534A1 (de) * | 1981-08-10 | 1983-05-11 | Siegfried Panzer | Verfahren zur periodischen evakuierung eines rezipienten |
DE3573152D1 (en) * | 1984-04-11 | 1989-10-26 | Hitachi Ltd | Screw type vacuum pump |
DE3639512A1 (de) * | 1986-11-20 | 1988-06-01 | Alcatel Hochvakuumtechnik Gmbh | Vakuumpumpsystem mit einer waelzkolbenpumpe |
US4850806A (en) * | 1988-05-24 | 1989-07-25 | The Boc Group, Inc. | Controlled by-pass for a booster pump |
FR2640697B1 (fr) * | 1988-12-16 | 1993-01-08 | Cit Alcatel | Ensemble de pompage pour l'obtention de vides eleves |
JPH076496B2 (ja) * | 1990-01-19 | 1995-01-30 | 日東工器株式会社 | 真空ポンプにおける吸引系切換装置 |
JPH04326943A (ja) * | 1991-04-25 | 1992-11-16 | Hitachi Ltd | 真空排気システム及び排気方法 |
DE4136950A1 (de) * | 1991-11-11 | 1993-05-13 | Pfeiffer Vakuumtechnik | Mehrstufiges vakuumpumpsystem |
DE4213763B4 (de) * | 1992-04-27 | 2004-11-25 | Unaxis Deutschland Holding Gmbh | Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung |
DE19500823A1 (de) * | 1995-01-13 | 1996-07-18 | Sgi Prozess Technik Gmbh | Vakuum-Pumpstand |
-
1995
- 1995-07-06 DE DE19524609A patent/DE19524609A1/de not_active Withdrawn
-
1996
- 1996-05-21 ES ES96108037T patent/ES2124052T5/es not_active Expired - Lifetime
- 1996-05-21 EP EP96108037A patent/EP0752531B2/de not_active Expired - Lifetime
- 1996-05-21 DE DE59600761T patent/DE59600761D1/de not_active Expired - Fee Related
- 1996-07-02 JP JP17257296A patent/JP3822675B2/ja not_active Expired - Fee Related
- 1996-07-02 US US08/674,535 patent/US6004109A/en not_active Expired - Fee Related
- 1996-07-04 KR KR1019960027015A patent/KR100221782B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP3822675B2 (ja) | 2006-09-20 |
DE19524609A1 (de) | 1997-01-09 |
ES2124052T3 (es) | 1999-01-16 |
EP0752531B2 (de) | 2003-06-18 |
ES2124052T5 (es) | 2004-03-16 |
US6004109A (en) | 1999-12-21 |
EP0752531B1 (de) | 1998-11-04 |
EP0752531A1 (de) | 1997-01-08 |
JPH0925876A (ja) | 1997-01-28 |
KR100221782B1 (ko) | 1999-10-01 |
DE59600761D1 (de) | 1998-12-10 |
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