FR2967219B1 - Installation de pompage pour l'obtention d'un vide pousse et procede de pompage mettant en oeuvre une telle installation - Google Patents

Installation de pompage pour l'obtention d'un vide pousse et procede de pompage mettant en oeuvre une telle installation

Info

Publication number
FR2967219B1
FR2967219B1 FR1059155A FR1059155A FR2967219B1 FR 2967219 B1 FR2967219 B1 FR 2967219B1 FR 1059155 A FR1059155 A FR 1059155A FR 1059155 A FR1059155 A FR 1059155A FR 2967219 B1 FR2967219 B1 FR 2967219B1
Authority
FR
France
Prior art keywords
pumping
obtaining
installation
pushed vacuum
pushed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1059155A
Other languages
English (en)
Other versions
FR2967219A1 (fr
Inventor
Laurent Veyre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Claude Bernard Lyon 1 UCBL
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Claude Bernard Lyon 1 UCBL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Claude Bernard Lyon 1 UCBL filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1059155A priority Critical patent/FR2967219B1/fr
Priority to PCT/FR2011/052547 priority patent/WO2012059679A1/fr
Publication of FR2967219A1 publication Critical patent/FR2967219A1/fr
Application granted granted Critical
Publication of FR2967219B1 publication Critical patent/FR2967219B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0269—Surge control by changing flow path between different stages or between a plurality of compressors; load distribution between compressors
FR1059155A 2010-11-05 2010-11-05 Installation de pompage pour l'obtention d'un vide pousse et procede de pompage mettant en oeuvre une telle installation Expired - Fee Related FR2967219B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1059155A FR2967219B1 (fr) 2010-11-05 2010-11-05 Installation de pompage pour l'obtention d'un vide pousse et procede de pompage mettant en oeuvre une telle installation
PCT/FR2011/052547 WO2012059679A1 (fr) 2010-11-05 2011-10-31 Installation de pompage pour l'obtention d'un vide poussé et procédé de pompage mettant en oeuvre une telle installation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1059155A FR2967219B1 (fr) 2010-11-05 2010-11-05 Installation de pompage pour l'obtention d'un vide pousse et procede de pompage mettant en oeuvre une telle installation

Publications (2)

Publication Number Publication Date
FR2967219A1 FR2967219A1 (fr) 2012-05-11
FR2967219B1 true FR2967219B1 (fr) 2012-12-07

Family

ID=44114430

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1059155A Expired - Fee Related FR2967219B1 (fr) 2010-11-05 2010-11-05 Installation de pompage pour l'obtention d'un vide pousse et procede de pompage mettant en oeuvre une telle installation

Country Status (2)

Country Link
FR (1) FR2967219B1 (fr)
WO (1) WO2012059679A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2998010A1 (fr) * 2012-11-09 2014-05-16 Centre Nat Rech Scient Dispositif de pompage, comprenant un ensemble de pompes en series et un element de commutation commun
BE1022169B1 (nl) * 2014-11-28 2016-02-24 Ergox Bvba Centraal stofzuigsysteem en gebruik ervan
DE102015106279A1 (de) * 2015-04-23 2016-10-27 Mobilplan Industrie- Und Umwelttechnik Ventileinrichtung und Verfahren zum Betrieb der Ventileinrichtung
GB2579360A (en) * 2018-11-28 2020-06-24 Edwards Ltd Multiple chamber vacuum exhaust system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5002797A (en) * 1989-04-10 1991-03-26 The United States Of America As Represented By The Secretary Of The Army Process for aluminum-encapsulated ammonium perchlorate by vapor deposition
JPH04326943A (ja) * 1991-04-25 1992-11-16 Hitachi Ltd 真空排気システム及び排気方法
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption

Also Published As

Publication number Publication date
FR2967219A1 (fr) 2012-05-11
WO2012059679A1 (fr) 2012-05-10

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Effective date: 20180731