KR960042075A - 코로나 방전 건 - Google Patents

코로나 방전 건 Download PDF

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Publication number
KR960042075A
KR960042075A KR1019960013344A KR19960013344A KR960042075A KR 960042075 A KR960042075 A KR 960042075A KR 1019960013344 A KR1019960013344 A KR 1019960013344A KR 19960013344 A KR19960013344 A KR 19960013344A KR 960042075 A KR960042075 A KR 960042075A
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South Korea
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electrode
oxide layer
corona discharge
biased
properties
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KR1019960013344A
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KR0157373B1 (ko
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레오나드 버퀼 로저
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제프리 엘. 포맨
인터내셔널 비지네스 머신즈 코포레이션
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Publication of KR960042075A publication Critical patent/KR960042075A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12—Measuring electrostatic fields or voltage-potential
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2648—Characterising semiconductor materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

실리콘 기판 상의 매우 얇은 산화층들의 두께를 측정하는 방법. 코로나 방전소스는 산화층의 표면상에 조정된 일정 전하밀도를 반복하여 피착한다. 각각의 전하 피착에 대해 산화물 표면 전위의 결과적인 변화를 측정한다. 가정된 산화층 두께에 대한 시작 값을 선택함으로써, 코로나 방전 단계당 실리콘 밴드벤딩에서의 근사 변화가 판정된다.산화층 표면 전위에 대한 밴드벤팅에서의 누적 변화들로 바이어스에 대한 실험 밴드벤딩 특성이 얻어진다. 바이어스에 대한 이론 밴드벤딩 특성이 설정된다. 실험 및 이론 특성들은 이들의 소정 점들에서 일치되고, 이어서 가정된 산화층 두께는 두 특성이 실리콘 축적 영역에서 겹치게 될 때까지 반복된다. 두 특성이 겹칠 수 있게 하는 반복된 산화층 두께가 찾고자 하는 산화층 두께가 된다.최종 얻어진 실험 특성은 산화층의 계면 상태 밀도를 판정하는 데에도 사용된다. 특별히 설계된 코로나 방전 건들에 대해서 산화층 두께 및 계면 상태 밀도 측정 기술에서 사용하기 위해 기술하였다.

Description

코로나 방전 건
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따라 산화층 두께가 측정되는 시료 내에 존재하는 전계 패턴에 대한 이상적인 단면도.

Claims (5)

  1. 코로나 방전 건(corona discharge gun)에 있어서, 팁(tip)에서 소정 극성의 이온들의 소스를 제공하는 바이어스된 니들(needle) 형상 전극; 바이어스된 포커싱 링(focusing ring) 전극; 및 중앙에 어퍼튜어(aperture)된 디스크를 갖는 바이어스된 마스킹 전극을 포함하며; 상기 전극들은 서로로부터 절연되고, 상기 링 전극, 상기 어퍼튜어된 디스크 및 상기 니들 형상 전극이 서로에 관하여 동축 관계에 있도록 지지되며, 상기 링 전극은 상기 니들 형성 전극 및 상기마스킹 전극에 관하여 중간에 배치되는 것을 특징으로 하는 코로나 방전 건.
  2. 제1항에 있어서, 상기 링 전극 및 상기 마스킹 전극은 상기 이온들의 극성과 동일한 극성을 갖는 전압으로바이어스된 것을 특징으로 하는 코로나 방전 건.
  3. 코로나 방전 건에 있어서, 비수직 방위의 적어도 하나의 바이어스된 니들 형상 전극으로서, 상기 적어도하나의 니들 형상 전극 각각의 팁에서 소정 극성의 이온들의 소스를 제공하며; 바이어된 포커싱 링 전극; 및 중앙에 어퍼튜어된 디스크를 갖는 바이어스된 마스킹 전극을 포함하며; 상기 전극들은 서로로부터 절연되고, 상기 링 전극 및 상기어퍼튜어된 디스크가 동축 관게에 있도록 지지되며, 상기 링 전극은 각각의 상기 팁 및 상기 마스킹 전극에 관하여 중간에 배치되는 것을 특징으로 하는 코로나 방전 건.
  4. 제3항에 있어서, 상기 링 전극 및 상기 마스킹 전극은 상기 이온들의 극성과 동일한 극성을 갖는 전압으로바이어스되는 것을 특징으로 하는 코로나 방전 건.
  5. 코로나 방전 건에 있어서, 제1 축에 대해서 동축 관게에 있는 두 개의 바이어스된 니들 형상 전극들로서,상기 니들 형상 전극들의 팁들은 서로에 대해서 면하고 있으며, 소정 극성의 이온들의 소스를 제공하며; 바이어스된 포커싱 링 전극; 및 중앙에 어퍼튜어된 디스크를 갖는 바이어스된 마스킹 전극을 포함하며; 상기 전극들은 서로로부터 절연되고, 상기 링 전극 및 상기 어퍼튜어된 디스크가 제2 축에 관하여 동축 관계에 있도록 지지되며, 상기 제1 축 및 상기 제2축은 서로에 대해 수직하고, 상기 서로 면하여 있는 팀들간 중앙에서 서로 교차하며, 상기 링 전극은 상기 서로 면하고있는팁들 및 상기 마스킹 전극에 관하여 중간에 배치되는 것을 특징으로 하는 코로나 방전 건.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960013344A 1995-05-12 1996-04-27 코로나 방전 건 KR0157373B1 (ko)

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US08/440,502 US5644223A (en) 1995-05-12 1995-05-12 Uniform density charge deposit source
US8/440,502 1995-05-12

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JP (1) JP3245051B2 (ko)
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JPH08316278A (ja) 1996-11-29
US5644223A (en) 1997-07-01
TW288180B (en) 1996-10-11
KR0157373B1 (ko) 1999-02-18
JP3245051B2 (ja) 2002-01-07

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