KR960034162A - 테트라페놀 화합물 및 이의 제조방법 - Google Patents
테트라페놀 화합물 및 이의 제조방법 Download PDFInfo
- Publication number
- KR960034162A KR960034162A KR1019960005887A KR19960005887A KR960034162A KR 960034162 A KR960034162 A KR 960034162A KR 1019960005887 A KR1019960005887 A KR 1019960005887A KR 19960005887 A KR19960005887 A KR 19960005887A KR 960034162 A KR960034162 A KR 960034162A
- Authority
- KR
- South Korea
- Prior art keywords
- sulfonyl
- naphthoquinonediazide
- hydrogen
- novolak resin
- compound
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C245/00—Compounds containing chains of at least two nitrogen atoms with at least one nitrogen-to-nitrogen multiple bond
- C07C245/02—Azo compounds, i.e. compounds having the free valencies of —N=N— groups attached to different atoms, e.g. diazohydroxides
- C07C245/06—Azo compounds, i.e. compounds having the free valencies of —N=N— groups attached to different atoms, e.g. diazohydroxides with nitrogen atoms of azo groups bound to carbon atoms of six-membered aromatic rings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/01—Sulfonic acids
- C07C309/28—Sulfonic acids having sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton
- C07C309/45—Sulfonic acids having sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton containing nitrogen atoms, not being part of nitro or nitroso groups, bound to the carbon skeleton
- C07C309/52—Sulfonic acids having sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton containing nitrogen atoms, not being part of nitro or nitroso groups, bound to the carbon skeleton the carbon skeleton being further substituted by doubly-bound oxygen atoms
- C07C309/53—Sulfonic acids having sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton containing nitrogen atoms, not being part of nitro or nitroso groups, bound to the carbon skeleton the carbon skeleton being further substituted by doubly-bound oxygen atoms the carbon skeleton containing carbon atoms of quinone rings
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
- C07C39/12—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings
- C07C39/15—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings with all hydroxy groups on non-condensed rings, e.g. phenylphenol
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Materials For Photolithography (AREA)
Abstract
본 요약은 일반식(Ⅰ)의 화합물 및 이의 제조방법에 관한 것이고, 본 발명의 화합물은 탁월한 특성을 나타내는 양성 내식막용 감광체로서 사용할 수 있다;
상기 식에서 R1, R2, R3및 R4는 소수, 1,2-나프토퀴논디아지드-4-설포닐 또는 1,2-나프토퀴논다아지드-5-설포닐이다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (8)
- 일반식(Ⅰ)의 테트라페놀 화합물.상기 식에서, R1, R2, R3및 R4는 서로 독립적으로 수소, 1,2-나프토퀴논디아지드-4-설포닌 또는 1,2-나프토퀴논디아지드-5-설포닐이다.
- 제1항에 있어서, R1, R2, R3및 R4가 모두 수소인 화합물.
- 제1항에 있어서, R1, R2, R3및 R4중의 하나 이상이 1,2-나프토퀴논디아지드-4-설포닐 또느 1,2-나프토퀴논디아지드-5-설포닐인 화합물.
- 4,4´-메틸렌비스(2-하이드록시메틸-3,6-디메틸페놀)을 p-크레솔과 반응시킴을 포함하여, 제1항의 화합물을 제조하는 방법.
- 4,4´-메틸렌비스(2-[2-하이드록시-5-메틸페놀)을 3,6-디메틸페놀]을 1,2-나프토퀴논디아지드-4-설포닐 할라이드 또는 1,2-나프토퀴논디아지드-5-설포닐 할라이드와 반응시킴을 포함하여, 제3항의 화합물을 제조하는 방법.
- 일반식(Ⅰ)의 테트라페놀 화합물을 포함하는 감광제.상기 식에서, R1, R2, R3및 R4중의 하나는 1,2-나프토퀴논디아지-4-설포닐 또는 1,2-나프토퀴논디아지-5-설포닐이고, 나머지는 서로 독립적으로 수소, 1,2-나프토퀴논디아지-4-설포닐 또는 1,2-나프토퀴논디아지-5-설포닐이다.
- 알칼리 가용성 노볼락 수지와 제6항의 감광제를 포함하는 감광성 수지 조성물.
- 제7항에 있어서, 알칼리 가용성 노볼락 수지가 페놀 화합물과 알데히드와의 축합물이고, 겔 투과 크로마토그래피의 패턴에서 스티렌으로 전환시 분자량이 900 이하인 이의 부분에 대한 면적율이 미반응 페놀 화합물에 대한 패턴의 면적을 제외한 패턴의 전체 면적을 기준으로 하여 25% 이하인 조성물.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07048219A JP3139319B2 (ja) | 1995-03-08 | 1995-03-08 | テトラフェノール系化合物、その製法および用途 |
JP95-048219 | 1995-03-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960034162A true KR960034162A (ko) | 1996-10-22 |
KR100395581B1 KR100395581B1 (ko) | 2003-11-28 |
Family
ID=12797311
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960005887A KR100395581B1 (ko) | 1995-03-08 | 1996-03-07 | 테트라페놀화합물및이의제조방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US5726217A (ko) |
EP (1) | EP0731074B1 (ko) |
JP (1) | JP3139319B2 (ko) |
KR (1) | KR100395581B1 (ko) |
DE (1) | DE69604314T2 (ko) |
SG (1) | SG81886A1 (ko) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0781424B1 (de) * | 1994-09-12 | 1998-11-18 | Siemens Aktiengesellschaft | Photolithographische strukturerzeugung |
JP3600713B2 (ja) * | 1997-08-06 | 2004-12-15 | 東京応化工業株式会社 | ポジ型ホトレジスト組成物 |
JP3729641B2 (ja) | 1998-05-29 | 2005-12-21 | 東京応化工業株式会社 | ポジ型ホトレジスト組成物およびレジストパターンの形成方法 |
JP3369471B2 (ja) | 1998-05-29 | 2003-01-20 | 東京応化工業株式会社 | ポジ型ホトレジスト組成物およびレジストパターンの形成方法 |
JP3688469B2 (ja) | 1998-06-04 | 2005-08-31 | 東京応化工業株式会社 | ポジ型ホトレジスト組成物およびこれを用いたレジストパターンの形成方法 |
US6387982B1 (en) | 1998-11-23 | 2002-05-14 | Dentsply Detrey G.M.B.H. | Self etching adhesive primer composition and polymerizable surfactants |
JP3499165B2 (ja) | 1999-09-27 | 2004-02-23 | 東京応化工業株式会社 | ポジ型ホトレジスト組成物、感光性膜付基板、およびレジストパターンの形成方法 |
JP4179579B2 (ja) | 2000-05-08 | 2008-11-12 | 東洋合成工業株式会社 | 1,2−ナフトキノンジアジド系感光剤の製造方法 |
JP2002035684A (ja) * | 2000-07-28 | 2002-02-05 | Clariant (Japan) Kk | 保護膜の形成方法 |
TWI263864B (en) * | 2001-01-17 | 2006-10-11 | Tokyo Ohka Kogyo Co Ltd | Positive photoresist composition |
JP3708049B2 (ja) | 2001-12-26 | 2005-10-19 | 東京応化工業株式会社 | ポジ型ホトレジスト組成物 |
JP2003195495A (ja) | 2001-12-26 | 2003-07-09 | Tokyo Ohka Kogyo Co Ltd | ポジ型ホトレジスト組成物 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2552891B2 (ja) * | 1988-01-26 | 1996-11-13 | 富士写真フイルム株式会社 | ポジ型フオトレジスト組成物 |
JPH05204148A (ja) * | 1992-01-27 | 1993-08-13 | Sumitomo Chem Co Ltd | レジスト組成物の製造方法 |
US5384228A (en) * | 1992-04-14 | 1995-01-24 | Tokyo Ohka Kogyo Co., Ltd. | Alkali-developable positive-working photosensitive resin composition |
JP3466218B2 (ja) * | 1992-06-04 | 2003-11-10 | 住友化学工業株式会社 | ポジ型レジスト組成物 |
-
1995
- 1995-03-08 JP JP07048219A patent/JP3139319B2/ja not_active Expired - Lifetime
-
1996
- 1996-02-29 SG SG9606126A patent/SG81886A1/en unknown
- 1996-03-07 KR KR1019960005887A patent/KR100395581B1/ko not_active IP Right Cessation
- 1996-03-07 DE DE69604314T patent/DE69604314T2/de not_active Expired - Lifetime
- 1996-03-07 EP EP96103563A patent/EP0731074B1/en not_active Expired - Lifetime
- 1996-03-08 US US08/613,243 patent/US5726217A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0731074A3 (en) | 1997-01-08 |
DE69604314D1 (de) | 1999-10-28 |
JP3139319B2 (ja) | 2001-02-26 |
JPH08245461A (ja) | 1996-09-24 |
SG81886A1 (en) | 2001-08-21 |
KR100395581B1 (ko) | 2003-11-28 |
DE69604314T2 (de) | 2000-03-02 |
EP0731074B1 (en) | 1999-09-22 |
US5726217A (en) | 1998-03-10 |
EP0731074A2 (en) | 1996-09-11 |
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