KR960033640A - 레이저 각인장치에 있어서의 각인위치 보정장치 - Google Patents

레이저 각인장치에 있어서의 각인위치 보정장치 Download PDF

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Publication number
KR960033640A
KR960033640A KR1019960006539A KR19960006539A KR960033640A KR 960033640 A KR960033640 A KR 960033640A KR 1019960006539 A KR1019960006539 A KR 1019960006539A KR 19960006539 A KR19960006539 A KR 19960006539A KR 960033640 A KR960033640 A KR 960033640A
Authority
KR
South Korea
Prior art keywords
lens
movement distance
correction
engraving
divided image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
KR1019960006539A
Other languages
English (en)
Korean (ko)
Inventor
아키히코 소오다
코오지 미수기
코오지 요시다
Original Assignee
안자키 사토루
카부시키가이샤 코마쯔세이사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 안자키 사토루, 카부시키가이샤 코마쯔세이사쿠쇼 filed Critical 안자키 사토루
Publication of KR960033640A publication Critical patent/KR960033640A/ko
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
KR1019960006539A 1995-03-22 1996-03-12 레이저 각인장치에 있어서의 각인위치 보정장치 Abandoned KR960033640A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP06286195A JP3413645B2 (ja) 1995-03-22 1995-03-22 レーザ刻印装置における刻印位置補正装置
JP95-62861 1995-03-22

Publications (1)

Publication Number Publication Date
KR960033640A true KR960033640A (ko) 1996-10-22

Family

ID=13212509

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960006539A Abandoned KR960033640A (ko) 1995-03-22 1996-03-12 레이저 각인장치에 있어서의 각인위치 보정장치

Country Status (5)

Country Link
US (1) US5896233A (enExample)
EP (1) EP0873811A1 (enExample)
JP (1) JP3413645B2 (enExample)
KR (1) KR960033640A (enExample)
WO (1) WO1996029175A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09277069A (ja) * 1996-04-12 1997-10-28 Komatsu Ltd 液晶マスク、液晶式レーザマーカ及びそれを用いた刻印方法
FR2821678B1 (fr) * 2001-03-02 2004-06-18 Teem Photonics Module de deflexion optique
KR20040044554A (ko) * 2001-10-25 2004-05-28 토레이 엔지니어링 컴퍼니, 리미티드 레이저빔에 의한 식별코드의 마킹 방법 및 장치
US7220627B2 (en) * 2003-04-21 2007-05-22 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a semiconductor device where the scanning direction changes between regions during crystallization and process
US7397592B2 (en) * 2003-04-21 2008-07-08 Semiconductor Energy Laboratory Co., Ltd. Beam irradiation apparatus, beam irradiation method, and method for manufacturing a thin film transistor
US7476629B2 (en) * 2003-04-21 2009-01-13 Semiconductor Energy Laboratory Co., Ltd. Beam irradiation apparatus, beam irradiation method, and method for manufacturing thin film transistor
CN101331592B (zh) * 2005-12-16 2010-06-16 株式会社半导体能源研究所 激光照射设备、激光照射方法和半导体装置的制造方法
US9018561B2 (en) * 2007-05-23 2015-04-28 Cymer, Llc High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier
CN102248817B (zh) * 2010-05-21 2013-07-03 深圳泰德激光科技有限公司 激光打标的校正方法和校正装置以及激光打标系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4045201A (en) * 1976-07-09 1977-08-30 American Atomics Corporation Method and apparatus for subdividing a gas filled glass tube
JPS6046978A (ja) * 1983-08-20 1985-03-14 長尾曹達株式会社 セラミック多孔体の製造患法
JPS6046978U (ja) * 1983-09-05 1985-04-02 渋谷工業株式会社 レ−ザ光線の加工位置移動装置
JPH01228688A (ja) * 1988-03-09 1989-09-12 Mitsubishi Electric Corp レーザ加工機の加工ヘッド
JP2840103B2 (ja) * 1990-02-26 1998-12-24 川崎製鉄株式会社 高クロム含有圧延用素材鋼の製造方法
JPH03248784A (ja) * 1990-02-28 1991-11-06 Hitachi Ltd レーザマーキングシステム
KR950013780B1 (ko) * 1990-05-22 1995-11-16 후루까와 뗀끼 고요교오 가부시끼가이샤 이동하고 있는 길다란 물건의 길이를 측정하는 장치 및 그 방법
JPH0439646A (ja) * 1990-06-05 1992-02-10 Konica Corp ハロゲン化銀カラー写真感光材料
JP2701183B2 (ja) * 1991-08-09 1998-01-21 株式会社小松製作所 液晶マスク式レーザマーカ
EP0724928A1 (en) * 1993-09-30 1996-08-07 Komatsu Ltd. Transmission type liquid crystal mask marker
EP0729806A1 (en) * 1993-11-19 1996-09-04 Komatsu Ltd. Laser marking method and apparatus therefor

Also Published As

Publication number Publication date
JP3413645B2 (ja) 2003-06-03
EP0873811A4 (enExample) 1998-10-28
WO1996029175A1 (en) 1996-09-26
EP0873811A1 (en) 1998-10-28
US5896233A (en) 1999-04-20
JPH08257771A (ja) 1996-10-08

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Legal Events

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A201 Request for examination
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19960312

PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 19960312

Comment text: Request for Examination of Application

PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 19980929

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 19990329

NORF Unpaid initial registration fee
PC1904 Unpaid initial registration fee