KR960029834A - 액정표시장치 및 그 제조방법 - Google Patents

액정표시장치 및 그 제조방법 Download PDF

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KR960029834A
KR960029834A KR1019960001879A KR19960001879A KR960029834A KR 960029834 A KR960029834 A KR 960029834A KR 1019960001879 A KR1019960001879 A KR 1019960001879A KR 19960001879 A KR19960001879 A KR 19960001879A KR 960029834 A KR960029834 A KR 960029834A
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South Korea
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liquid crystal
display device
wirings
crystal display
drain
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KR1019960001879A
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마사토시 와카기
켕이찌 오니사와
마사히코 안도
토시키 카네코
테쯔로 미네무라
토모히로 오카다
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카나이 쯔또무
가부시기가이샤 히다찌세이사구쇼
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Publication of KR960029834A publication Critical patent/KR960029834A/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13458—Terminal pads
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G02F1/13629—Multilayer wirings

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)

Abstract

본 발명은 박막트랜지스터(TFT)에 의해서 구동하는 액티브매트릭스형 액정표시장치 및 그 제조방법에 관한 것으로서, 간략한 공정으로 제조할 수 있는 동시에 수율이 높고, 또한 화상표시특성이 뛰어난 액정표시장치를 제공하는 것을 목적으로 한 것이며, 그 구성에 있어서, 복수의 드레인배선과, 복수의 드레인배선과 매트릭스형상으로 교차하는 복수의 게이트배선과 이들 교차부의 근처에 배치된 복수의 박막트랜지스터와, 각각의 박막트랜지스터에 접속된 복수의 화소전극을 가진 기판과 대향하는 기판과의 사이에 끼워져 유지된 액정층을 가지고, 복수의 드레인배선과 복수의 게이트배선의 각 단자부는 금속막을 투영도전막으로 피복한 구조로 한 것을 특징으로 한 것이다.

Description

액정표시장치 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 액정표시장치의 TFT쪽 기판의 평면모식도, 제2도는 제1도의 A－A′단면모식도.

Claims (10)

  1. 복수의 드레인배선과, 상기 복수의 드레인배선과 매트릭스형상으로 교차하는 복수의 게이트배선과, 이들 교차부의 근처에 배치된 복수의 박막트랜지스터와, 각각의 박막트랜지스터에 접속된 복수의 화소전극을 가진 기판과, 상기 기판에 대향하는 기판과, 상기 기판과 대향하는 기판과의 사이에 끼워져 유지된 액정층을 가진 액정표시장치로서, 상기 복수의 드레인배선과 복수의 게이트배선의 각 단자부는 금속막을 투명도전막으로 피복한 구조인 것을 특징으로 하는 액정표시장치.
  2. 제1항에 있어서, 상기 복수의 화소전극은 투명도전막으로 구성되는 것을 특징으로 하는 액정표시장치.
  3. 제2항에 있어서, 상기 복수의 화소전극을 구성하는 투명도전막과, 상기 복수의 드레인배선의 각 단자부 및 상기 복수의 게이트배선의 각 단자부를 피복하는 투명도전막은 동일한 재질로 구성되는 것을 특징으로 하는 액정표시장치.
  4. 제1항에 있어서, 상기 복수의 드레인배선과 상기 복수의 게이트배선과의 사이에 절연층이 끼워져 유지된 것을 특징으로 하는 액정표시장치.
  5. 제1항에 있어서, 상기 복수의 드레인배선과 상기 절연층과의 사이에 반도체층이 끼워져 유지된 것을 특징으로 하는 액정표시장치.
  6. 제1항에 있어서, 상기 복수의 드레인배선과 상기 복수의 게이트배선은, Al, Cr, Mo, Ta, Ti, W, Nb, Fe, Co, Ni로부터 선택된 적어도 1종의 재료로 구성되는 것을 특징으로 하는 액정표시장치.
  7. 제5항에 있어서, 상기 반도체층은, 비정질실리콘으로 이루어진 것을 특징으로 하는 액정표시장치.
  8. 제5항에 있어서, 상기 반도체층은, 결정층을 함유한 실리콘으로 이루어진 것을 특징으로 하는 액정표시장치.
  9. 기판위에 소오스전극 및 드레인배선을 형성하는 공정과, 상기 기판, 소오스전극 및 드레인배선위에 반도체막, 절연막 및 금속막을 순차형성하고, 이들을 동일의 매스크패턴을 사용해서 패터닝해서 게이트배선을 형성하는 공정과, 상기 게이트배선위에 보호성 절연막을 형성하고, 그 위에 포토레지스트를 형성하는 공정과, 상기 포토레지스트에 의해 상기 보호설절연막을 패터닝 후, 그 위에 투명도전막을 형성하는 공정과, 상기 포토레지스트패턴이 형성된 영역의 투명도전막을 제거하고, 소오스전극 및 드레인배선의 단자부와 화소전극을 형성하는 공정을 가진 것을 특징으로 하는 액정표시장치의 제조방법.
  10. 기판위에 소오스전극 및 드레인배선을 형성하는 공정과, 상기 기판, 소오스전극 및 드레인배선위에 반도체막과 제1의 절연막을 순차형성하고, 상기 반도체막과 제1의 절연막을 동일의 마스크패턴을 사용해서 패터닝하는 공정과, 제2의 절연막과 금속막을 순차형성하고, 이들을 동일의 마스크패턴을 사용하여 패터닝해서 게이트배선을 형성하는 공정과, 상기 게이트배선위에 보호성절연막을 형성하고, 그 위에 포토레지스트를 형성하는 공정과, 상기 포토레지스트패턴이 형성된 영역의 상기 투명도전막을 제거하고, 상기 드레인배선 및 게이트배선의 단자부와 화소전극을 형성하는 공정을 가진 것을 특징으로 하는 액정표시장치의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960001879A 1995-01-30 1996-01-29 액정표시장치 및 그 제조방법 KR960029834A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1229895A JP3225772B2 (ja) 1995-01-30 1995-01-30 液晶表示装置の製造方法
JP95-12298 1995-01-30

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US (1) US5777702A (ko)
EP (1) EP0724183B1 (ko)
JP (1) JP3225772B2 (ko)
KR (1) KR960029834A (ko)
CN (1) CN1075201C (ko)
DE (1) DE69622607T2 (ko)

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KR100291268B1 (ko) * 1998-07-08 2001-07-12 윤종용 액정표시장치

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JPH08201849A (ja) 1996-08-09
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US5777702A (en) 1998-07-07

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