KR960019111A - 플루오르 다이아몬드형 카본 보호 코팅 - Google Patents
플루오르 다이아몬드형 카본 보호 코팅 Download PDFInfo
- Publication number
- KR960019111A KR960019111A KR1019950024801A KR19950024801A KR960019111A KR 960019111 A KR960019111 A KR 960019111A KR 1019950024801 A KR1019950024801 A KR 1019950024801A KR 19950024801 A KR19950024801 A KR 19950024801A KR 960019111 A KR960019111 A KR 960019111A
- Authority
- KR
- South Korea
- Prior art keywords
- magnetic recording
- recording medium
- medium device
- film
- magnetic
- Prior art date
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
- G11B5/726—Two or more protective coatings
- G11B5/7262—Inorganic protective coating
- G11B5/7264—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S427/00—Coating processes
- Y10S427/103—Diamond-like carbon coating, i.e. DLC
- Y10S427/106—Utilizing plasma, e.g. corona, glow discharge, cold plasma
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/90—Magnetic feature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Abstract
플루오르 다이아몬드형 카본으로 형성되며 플라즈마 인핸스드 화학 기상 증착 공정 또는 다른 적절한 방법으로 증착되어 우수한 마찰 감소 특성과 스틱션 감소 특성을 제공하는 본 발명에 따른 자기 지록매체 디바이스 표면용 내마모 보호코팅이 제공된다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 내마모 DLC의 중간층과 FDLC의 상부층의 덮혀진 기록 디바이스의 상부층의 개략 확대 단면도,
제3도는 본 발명의 FDLC 또는 DLC/FDLC 보호 코팅으로 덮혀진 자기 디스크의 상부층의 개략 확대 단면도.
Claims (20)
- 최상부 보호층으로서 내마모성 및 감소된 스틱션(reduced stiction)의 플루오르 다이아몬드형 카본막(flourinated diamond-like carbon film)을 가진 자기 기록 매체 디바이스.
- 제1항에 있어서, 상기 자기 기록매체 디바이스는 자기 기록 디스크와, 자기 판독 헤드 및 기록 헤드와, 다른 적절한 기록 디바이스로 이루어진 그룹에서 선택되는 자기 기록 매체 디바이스.
- 제1항에 있어서, 상기 카본막은 FDLC층의 전체 두께에 걸쳐 플루오르(fluorine)를 함유하는 자기 기록 매체 디바이스.
- 제1항에 있어서, 상기 카본막의 F/(F+C)의 원자비는 약 2 내지 70원자 퍼센트 사이에, 바람직하게는 약 10 내지 40원자 퍼센트 사이에 있는 자기 기록 매체 디바이스.
- 제3항에 있어서, 상기 카본막은 약 0 내지 40원자 퍼센트 사이에 바람직하게는 약 0 내지 20원자 퍼센트 사이의 원자 농도의 수소를 함유하는 자기 기록 매체 디바이스.
- 제1항에 있어서, 상기 카본막의 내마모성은 비플루오르 다이아몬형 카본막(non-fluorinated diamond-like cdrbon film)의 내마모성의 약 0.2 내지 약 1 사이의 범위에 있는 자기 기록 매체 디바이스.
- 제1항에 있어서, 상기 FDLC 막은 보호되는 표면위에 바로 증착되는 자기 기록 매체 디바이스.
- 제1항에 있어서, 상기 FDLC 막의 두께는 약 4㎚ 내지 30㎚ 사이, 바람직하게는 약 5㎚ 내지 약 10㎚ 사이인 자기 기록 매체 디바이스.
- 제1항에 있어서, 중간 다이아몬형 카본막은 FDLC 막과 보호되는 표면 사이에 증착되는 자기 기록 매체 디바이스.
- 제9항에 있어서, 상기 DLC 막의 두께는 약 2㎚ 내지 약 10㎚ 사이, 바람직하게는 약 3㎚ 내지 약 5㎚ 사이인 자기 기록 매체 디바이스.
- 제9항에 있어서, 상기 FDLC 막은 두께는 약 3㎚ 내지 30㎚ 사이, 바람직하게는 약 5㎚ 내지 약 7㎚ 사이인 자기 기록 매체 디바이스.
- 자기기록 매체디바이스로서, 상부 표면에 코팅된 자기물질을 가진 지지 구조체와, 상기 자기 물질의 최상부 표면을 덮는 플로오르 다이아몬드형 카본 물질(fluorinated diamond-like carbon material)의 보호 코팅을 포함하는 자기 기록 매체 디바이스.
- 제12항에 있어서, 상기 보호 코팅은 FDLC 층의 전체 두께에 걸쳐 플루오르를 함유하는 자기 기록 매체 디바이스.
- 제12항에 있어서, 상기 자기 기록 매체 디바이스는 자기기록 디스크와, 자기 판독 및 기록헤드와, 다른 적절한 디바이스로 이루어진 그룹에서 선택되는 자기 기록 매체 디바이스.
- 제12항에 있어서, 상기 FDLC 막과 상기 자기 물질의 최상부 표면 사이에는 중간 다이아몬드형 카본막이 증착되는 자기 기록 매체 디바이스.
- 제12항에 있어서, 상기 FDLC 막의 두께는 약 3㎚ 내지 약 30㎚ 사이, 바람직하게는 약 5㎚ 내지 약 10㎚ 사이인 자기 기록 매체 디바이스.
- 자기기록 매체 디바이스의 제조방법으로, 지지 구조체상에 정보 또는 판독 및 기록 정보를 저장할 수 있는 자기 활성물질을 증착하는 단계와, 상기 자기 활성물질의 최상부 표면상에 플루오르 다이아몬드형 카본막의 보호 코팅을 증착하는 단계를 포함하는 자기 기록 매체 디바이스의 제조방법.
- 제17항에 있어서, 증착된 상기 FDLC 막의 두께는 약 30㎚ 내지 약 30㎚ 사이인 자기 기록 매체 디바이스의 제조방법.
- 제17항에 있어서, 상기 FDLC 막은 상기 전체 두께에 걸쳐 플루오르를 함유하는 자기 기록 매체 디바이스의 제조방법.
- 제17항에 있어서, 상기 자기 활성물질의 최상부 표면에 중간 DLC 막을 증착한 다음에 상기 DLC 막의 상부에 FDLC 막을 증착하는 단계를 더 포함하는 자기 기록 매체 디바이스의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US333,405 | 1994-11-02 | ||
US08/333,405 US5462784A (en) | 1994-11-02 | 1994-11-02 | Fluorinated diamond-like carbon protective coating for magnetic recording media devices |
Publications (2)
Publication Number | Publication Date |
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KR960019111A true KR960019111A (ko) | 1996-06-17 |
KR100281619B1 KR100281619B1 (ko) | 2001-02-15 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950024801A KR100281619B1 (ko) | 1994-11-02 | 1995-08-09 | 플루오르화 다이아몬드형 카본 보호 코팅 |
Country Status (5)
Country | Link |
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US (2) | US5462784A (ko) |
EP (1) | EP0710952A1 (ko) |
JP (1) | JPH08212540A (ko) |
KR (1) | KR100281619B1 (ko) |
CN (2) | CN1073252C (ko) |
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US4647494A (en) * | 1985-10-31 | 1987-03-03 | International Business Machines Corporation | Silicon/carbon protection of metallic magnetic structures |
JPS63275035A (ja) * | 1987-05-07 | 1988-11-11 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
JPH0721858B2 (ja) * | 1989-12-11 | 1995-03-08 | 松下電器産業株式会社 | 磁気記録媒体およびその製造方法 |
US5159508A (en) * | 1990-12-27 | 1992-10-27 | International Business Machines Corporation | Magnetic head slider having a protective coating thereon |
US5609948A (en) * | 1992-08-21 | 1997-03-11 | Minnesota Mining And Manufacturing Company | Laminate containing diamond-like carbon and thin-film magnetic head assembly formed thereon |
JPH06162491A (ja) * | 1992-11-16 | 1994-06-10 | Hitachi Ltd | 磁気記録媒体とその製造方法及び磁気記録装置 |
DE4410003C1 (de) * | 1994-03-23 | 1995-03-16 | Herbert Haiduk | Zahnbürste |
JPH07282914A (ja) * | 1994-04-05 | 1995-10-27 | Canon Inc | コネクタ |
US5462784A (en) * | 1994-11-02 | 1995-10-31 | International Business Machines Corporation | Fluorinated diamond-like carbon protective coating for magnetic recording media devices |
-
1994
- 1994-11-02 US US08/333,405 patent/US5462784A/en not_active Expired - Lifetime
-
1995
- 1995-08-09 KR KR1019950024801A patent/KR100281619B1/ko not_active IP Right Cessation
- 1995-10-02 US US08/537,497 patent/US5674638A/en not_active Expired - Fee Related
- 1995-10-06 EP EP95115753A patent/EP0710952A1/en not_active Withdrawn
- 1995-10-17 CN CN95109588A patent/CN1073252C/zh not_active Expired - Lifetime
- 1995-10-26 JP JP7278684A patent/JPH08212540A/ja active Pending
-
2001
- 2001-01-23 CN CN01103032A patent/CN1332446A/zh active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100368963B1 (ko) * | 1999-06-08 | 2003-01-24 | 인터내셔널 비지네스 머신즈 코포레이션 | 표면 에너지가 낮은 물질로 코팅된 자기 헤드 |
Also Published As
Publication number | Publication date |
---|---|
US5674638A (en) | 1997-10-07 |
CN1073252C (zh) | 2001-10-17 |
US5462784A (en) | 1995-10-31 |
CN1332446A (zh) | 2002-01-23 |
KR100281619B1 (ko) | 2001-02-15 |
JPH08212540A (ja) | 1996-08-20 |
CN1155140A (zh) | 1997-07-23 |
EP0710952A1 (en) | 1996-05-08 |
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