KR960013984A - 할로겐함유가스의 정제방법 - Google Patents

할로겐함유가스의 정제방법 Download PDF

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Publication number
KR960013984A
KR960013984A KR1019950032545A KR19950032545A KR960013984A KR 960013984 A KR960013984 A KR 960013984A KR 1019950032545 A KR1019950032545 A KR 1019950032545A KR 19950032545 A KR19950032545 A KR 19950032545A KR 960013984 A KR960013984 A KR 960013984A
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KR
South Korea
Prior art keywords
halogen
containing gas
purifying
iron
hydroxide
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KR1019950032545A
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English (en)
Inventor
켄지 오스카
히데키 후쿠다
사토시 아라카와
Original Assignee
야마자키 로이치
닛폰파이오니쿠스 가부시키가이샤
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Application filed by 야마자키 로이치, 닛폰파이오니쿠스 가부시키가이샤 filed Critical 야마자키 로이치
Publication of KR960013984A publication Critical patent/KR960013984A/ko

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/01—Chlorine; Hydrogen chloride
    • C01B7/07—Purification ; Separation
    • C01B7/0743—Purification ; Separation of gaseous or dissolved chlorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/28—Selection of materials for use as drying agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/09—Bromine; Hydrogen bromide
    • C01B7/096—Bromine
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/20—Fluorine
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0003—Chemical processing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0054—Hydrogen halides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0062—Water

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Inorganic Chemistry (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

1. 청구범위에 기재된 발명이 속한 기술분야
본 발명은 할로겐함유가스의 정제방법에 관한 것이다.
2. 발명이 해결하려고 하는 기술적 과제
본 발명은 염소, 불소등의 할로겐가스중에 불순물로서 함유되어 있는 할로겐화수소 또는 수분을 효율적으로 제거하는 방법에 관한 것이다.
3. 발명의 해결방법의 요지
본 발명은 할로겐함유가스를 알카리토류금속의 수산화물 및 산화철을 유효성분으로서 함유하는 정제제와 접촉시켜서 할로겐함유가스중에 불순물로서 함유되어 있는 할로겐화수소 또는 수분을 제거하는 방법에 관한 것이다.
4. 발명의 중요한 용도
본 발명은 반도체제조과정에서 단결정 실리콘막, 알루미늄막 및 알루미늄 합금막의 에칭 등에 유용하다.

Description

할로겐함유가스의 정제방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (11)

  1. 할로겐함유가스를 알칼리토류금속의 수산화물 및 산화철을 유효성분으로 하는 정제제와 접촉시켜 그 할로겐함유가스중에 불순물로서 포함되어 있는 할로겐화수소 및 수분의 적어도 1종을 제거하는 것을 특징으로 하는 할로겐함유가스의 정제방법.
  2. 제1항에 있어서, 정제제가 알칼리토류금속의 수산화물 및 산화철을 혼합한 조성물로부터 성형된 것인 할로겐함유가스의 정제방법.
  3. 제1항에 있어서, 정제제가 알칼리토류금속의 수산화물 및 산화철에 담체물질을 배합시킨 조성물로부터 성형된 것인 할로겐함유가스의 정제방법.
  4. 제1항에 있어서, 할로겐함유가스가 염소가스, 불소가스 및 브롬가스에서 선택된 적어도 1종을 함유하는 할로겐함유가스의 정제방법.
  5. 제1항에 있어서, 할로겐함유가스가 불활성가스로 희석된 염소가스, 불소가스 및 브롬가스에서 선택된 적어도 1종을 함유하는 할로겐함유가스의 정제방법.
  6. 제1항에 있어서, 할로겐함유가스가 염화수소, 불화수소 및 브롬화수소에서 선택된 적어도 1종인 할로겐함유가스의 정제방법.
  7. 제1항에 있어서, 알카리토류금속의 수산화물과 산화철과의 혼합비율이 알카리토류금속 : 철의 금속원자비(M : Fe)로 15 : 1－1 : 12인 할로겐함유가스의 정제방법.
  8. 제1항에 있어서, 알카리토류금속의 수산화물이 수산화스트론튬인 할로겐함유가스의 정제방법.
  9. 제1항에 있어서, 산화철이 사삼산화철, 산화철(Ⅱ), 수산화철(Ⅱ), 산화철(Ⅲ) 및 수산화철(Ⅲ)에서 선택된 적어도 1종인 할로겐함유가스의 정제방법.
  10. 제9항에 있어서, 산화철중의 사삼산화철의 함유량이 60중량% 이상인 할로겐함유가스의 정제방법.
  11. 제2항에 있어서, 조성물의 성형시에 결합제로서 폴리비닐알콜, 폴리에틸렌글리콜, 폴리프로필렌글리콜, 메틸셀룰로오스 및 카르복시메틸셀룰로오스에서 선택된 적어도 1종이 첨가된 할로겐함유가스의 정제방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950032545A 1994-10-05 1995-09-29 할로겐함유가스의 정제방법 KR960013984A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-266382 1994-10-05
JP26638294A JP3566995B2 (ja) 1994-10-05 1994-10-05 ハロゲンガスの精製方法

Publications (1)

Publication Number Publication Date
KR960013984A true KR960013984A (ko) 1996-05-22

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US (1) US5589148A (ko)
EP (1) EP0705639B1 (ko)
JP (1) JP3566995B2 (ko)
KR (1) KR960013984A (ko)
DE (1) DE69513615T2 (ko)
TW (1) TW274056B (ko)

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Also Published As

Publication number Publication date
JPH08109008A (ja) 1996-04-30
DE69513615D1 (de) 2000-01-05
JP3566995B2 (ja) 2004-09-15
EP0705639B1 (en) 1999-12-01
DE69513615T2 (de) 2000-05-04
TW274056B (ko) 1996-04-11
US5589148A (en) 1996-12-31
EP0705639A1 (en) 1996-04-10

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