DE69513615T2 - Verfahren zum Reinigen von Halogen-enthaltendem Gas - Google Patents

Verfahren zum Reinigen von Halogen-enthaltendem Gas

Info

Publication number
DE69513615T2
DE69513615T2 DE69513615T DE69513615T DE69513615T2 DE 69513615 T2 DE69513615 T2 DE 69513615T2 DE 69513615 T DE69513615 T DE 69513615T DE 69513615 T DE69513615 T DE 69513615T DE 69513615 T2 DE69513615 T2 DE 69513615T2
Authority
DE
Germany
Prior art keywords
containing gas
purifying
halogen
purifying halogen
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69513615T
Other languages
English (en)
Other versions
DE69513615D1 (de
Inventor
Kenji Otsuka
Hideki Fukuda
Satoshi Arakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Application granted granted Critical
Publication of DE69513615D1 publication Critical patent/DE69513615D1/de
Publication of DE69513615T2 publication Critical patent/DE69513615T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/01—Chlorine; Hydrogen chloride
    • C01B7/07—Purification ; Separation
    • C01B7/0743—Purification ; Separation of gaseous or dissolved chlorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/28—Selection of materials for use as drying agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/09—Bromine; Hydrogen bromide
    • C01B7/096—Bromine
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/20—Fluorine
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0003—Chemical processing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0054—Hydrogen halides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0062—Water

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Inorganic Chemistry (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Treating Waste Gases (AREA)
DE69513615T 1994-10-05 1995-09-05 Verfahren zum Reinigen von Halogen-enthaltendem Gas Expired - Fee Related DE69513615T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26638294A JP3566995B2 (ja) 1994-10-05 1994-10-05 ハロゲンガスの精製方法

Publications (2)

Publication Number Publication Date
DE69513615D1 DE69513615D1 (de) 2000-01-05
DE69513615T2 true DE69513615T2 (de) 2000-05-04

Family

ID=17430165

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69513615T Expired - Fee Related DE69513615T2 (de) 1994-10-05 1995-09-05 Verfahren zum Reinigen von Halogen-enthaltendem Gas

Country Status (6)

Country Link
US (1) US5589148A (de)
EP (1) EP0705639B1 (de)
JP (1) JP3566995B2 (de)
KR (1) KR960013984A (de)
DE (1) DE69513615T2 (de)
TW (1) TW274056B (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100194212B1 (ko) * 1995-12-06 1999-06-15 윤종용 반도체 제조 설비용 가스 배관의 성능 평가 방법
US6589494B1 (en) 1998-03-31 2003-07-08 Institut Francais Du Petrole Process for eliminating halogen-containing compounds contained in a gas or liquid using an adsorbent composition based on at least one metallic element
FR2780300B1 (fr) * 1998-06-25 2000-11-10 Rhodia Chimie Sa Procede de traitement de gaz ou de liquides issus de reformage catalytique
US6352676B1 (en) * 1999-02-16 2002-03-05 Air Products And Chemicals, Inc. Abatement of F2 using small particle fluidized bed
US6468490B1 (en) 2000-06-29 2002-10-22 Applied Materials, Inc. Abatement of fluorine gas from effluent
US6689252B1 (en) * 1999-07-28 2004-02-10 Applied Materials, Inc. Abatement of hazardous gases in effluent
US6391146B1 (en) 2000-04-11 2002-05-21 Applied Materials, Inc. Erosion resistant gas energizer
US6673323B1 (en) 2000-03-24 2004-01-06 Applied Materials, Inc. Treatment of hazardous gases in effluent
JP2002154995A (ja) * 2000-11-21 2002-05-28 Toray Ind Inc 塩素化芳香族化合物の製造法
US6824748B2 (en) * 2001-06-01 2004-11-30 Applied Materials, Inc. Heated catalytic treatment of an effluent gas from a substrate fabrication process
US6425265B1 (en) * 2001-09-26 2002-07-30 Praxair Technology, Inc. Process and apparatus for purifying hydrogen bromide
US6709487B1 (en) 2002-10-22 2004-03-23 Air Products And Chemicals, Inc. Adsorbent for moisture removal from fluorine-containing fluids
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
WO2007053626A2 (en) 2005-10-31 2007-05-10 Applied Materials, Inc. Process abatement reactor
FR2958183B1 (fr) * 2010-04-06 2014-09-05 Inst Francais Du Petrole Procede permettant l'elimination d'halogenures d'hydrogene en phase gazeuse
CN113321367B (zh) * 2021-08-04 2021-11-30 清大国华环境集团股份有限公司 一种含卤素废弃物的预处理资源化方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA595809A (en) * 1960-04-05 W. Ravenscroft Arthur Purification of fluorine contaminated with hydrogen fluoride
US1359047A (en) * 1919-03-15 1920-11-16 Francis C Frary Drying gas
US2785055A (en) * 1951-04-04 1957-03-12 Gulf Oil Corp Process for drying and purifying chlorine gas
BE568078A (de) * 1957-07-31
GB1037704A (en) * 1963-07-19 1966-08-03 Mifalei Yam Hamelah B M Storage of bromine
US3772425A (en) * 1971-02-16 1973-11-13 Pullman Inc Treatment of halogen-containing gas mixture
US4201751A (en) * 1975-05-06 1980-05-06 Heinz Gresch Gas purification
US4131626A (en) * 1976-12-21 1978-12-26 Allied Chemical Corporation Process for producing bromine
DE2931546A1 (de) * 1979-08-03 1981-02-26 Heinz Ing Grad Hoelter Verfahren und vorrichtung zur trockenen chemisorption hinter wirbelbettkohlefeuerungsanlagen zur abscheidung von so tief 2 , no tief x , hcl und hf aus rauchgasen
JPS56130211A (en) * 1980-03-18 1981-10-13 Nippon Kokan Kk <Nkk> Method for removal of hydrogen chloride in waste gas
JPS57127424A (en) * 1981-01-30 1982-08-07 Unitika Ltd Treatment of waste gas
DE8403770U1 (de) * 1984-02-08 1987-11-12 Environment Protection Engineers, Inc., Southfield, Mich. Vorrichtung zum Reinigen von Pyrolysegas mit einer Einrichtung zum Eintragen eines teilchenförmigen Neutralisationsmittels in den Pyrolysegasstrom
JPS624430A (ja) * 1985-07-01 1987-01-10 Mitsubishi Heavy Ind Ltd 排ガス処理方法
EP0173640A3 (de) * 1984-07-30 1986-12-30 Mitsubishi Jukogyo Kabushiki Kaisha Methode zum Behandeln von Abgas
JP2732262B2 (ja) * 1988-09-26 1998-03-25 日本パイオニクス株式会社 アルシンの精製方法
JP2700412B2 (ja) * 1989-06-08 1998-01-21 日本パイオニクス株式会社 水素化物ガスの精製方法
DE3927794A1 (de) * 1989-08-23 1991-02-28 Metallgesellschaft Ag Verfahren zur abscheidung saurer verbindungen aus heissen gasen
JPH06177B2 (ja) * 1990-02-05 1994-01-05 株式会社荏原総合研究所 Ｃ１ｆ▲下３▼を含有する排ガスの処理方法
JPH04156919A (ja) * 1990-10-19 1992-05-29 Ebara Res Co Ltd ハロゲン系化合物を含有する排ガスの処理方法
DE4323647C2 (de) * 1993-07-15 1995-09-28 Schramberg Magnetfab Vorrichtung und Granulat-Material zum Reinigen von Prozeßabgasen im Trockenverfahren
JPH07308538A (ja) * 1994-03-24 1995-11-28 Japan Pionics Co Ltd 有害ガスの浄化剤
JPH07275644A (ja) * 1994-04-06 1995-10-24 Japan Pionics Co Ltd 有害ガスの浄化装置

Also Published As

Publication number Publication date
US5589148A (en) 1996-12-31
KR960013984A (ko) 1996-05-22
EP0705639B1 (de) 1999-12-01
DE69513615D1 (de) 2000-01-05
EP0705639A1 (de) 1996-04-10
JPH08109008A (ja) 1996-04-30
JP3566995B2 (ja) 2004-09-15
TW274056B (de) 1996-04-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee