DE69619219D1 - Verfahren zum Reinigen von Halogen-enthaltendem Gas - Google Patents

Verfahren zum Reinigen von Halogen-enthaltendem Gas

Info

Publication number
DE69619219D1
DE69619219D1 DE69619219T DE69619219T DE69619219D1 DE 69619219 D1 DE69619219 D1 DE 69619219D1 DE 69619219 T DE69619219 T DE 69619219T DE 69619219 T DE69619219 T DE 69619219T DE 69619219 D1 DE69619219 D1 DE 69619219D1
Authority
DE
Germany
Prior art keywords
containing gas
halogen
cleaning
cleaning halogen
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69619219T
Other languages
English (en)
Other versions
DE69619219T2 (de
Inventor
Kenji Otsuka
Satoshi Arakawa
Youji Nawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Publication of DE69619219D1 publication Critical patent/DE69619219D1/de
Application granted granted Critical
Publication of DE69619219T2 publication Critical patent/DE69619219T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/60—Inorganic bases or salts
    • B01D2251/602—Oxides

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
DE69619219T 1996-02-29 1996-11-12 Verfahren zum Reinigen von Halogen-enthaltendem Gas Expired - Fee Related DE69619219T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06742196A JP3716030B2 (ja) 1996-02-29 1996-02-29 有害ガスの浄化方法

Publications (2)

Publication Number Publication Date
DE69619219D1 true DE69619219D1 (de) 2002-03-21
DE69619219T2 DE69619219T2 (de) 2002-08-29

Family

ID=13344436

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69619219T Expired - Fee Related DE69619219T2 (de) 1996-02-29 1996-11-12 Verfahren zum Reinigen von Halogen-enthaltendem Gas

Country Status (6)

Country Link
US (1) US5756060A (de)
EP (1) EP0792681B1 (de)
JP (1) JP3716030B2 (de)
KR (1) KR100465211B1 (de)
DE (1) DE69619219T2 (de)
TW (1) TW370470B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2754893B1 (fr) * 1996-10-21 1999-01-08 Sfim Ind Gyroscope a fibre optique multimode
US6338312B2 (en) 1998-04-15 2002-01-15 Advanced Technology Materials, Inc. Integrated ion implant scrubber system
KR100592579B1 (ko) * 1997-10-17 2006-06-26 가부시키가이샤 에바라 세이사꾸쇼 반도체제조 배기가스의 처리방법 및 장치
JP3649426B2 (ja) * 1997-10-31 2005-05-18 日本パイオニクス株式会社 有害ガスの浄化方法
TW581708B (en) * 1998-09-22 2004-04-01 Japan Pionics Cleaning agent and cleaning method for halogen-containing exhaust gas
JP4276333B2 (ja) * 1998-09-22 2009-06-10 日本パイオニクス株式会社 排ガスの浄化方法
US6309618B1 (en) * 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
US6790419B1 (en) 1999-06-11 2004-09-14 Honeywell Intellectual Properties Inc. Purification of gaseous inorganic halide
DE19962734A1 (de) * 1999-12-23 2001-06-28 Wolf Dieter Hamisch Verfahren zur Entfernung von gasförmigem Bortrifluorid und zur Vorbehandlung von Prozessabgasen
US6471750B1 (en) * 2001-08-08 2002-10-29 Advanced Technology Materials, Inc. Gas cabinet assembly comprising back migration scrubber unit
TWI302476B (en) * 2005-07-06 2008-11-01 Ind Tech Res Inst Cleaning agent of treating acid gas and method for cleaning with the cleaning agent
FR2958183B1 (fr) * 2010-04-06 2014-09-05 Inst Francais Du Petrole Procede permettant l'elimination d'halogenures d'hydrogene en phase gazeuse
US9440218B2 (en) * 2013-06-13 2016-09-13 Clariant Corporation Methods and active materials for reducing halide concentration in gas streams

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB211491A (en) * 1923-02-15 1925-02-26 Francois Van Kerkhoven A concealable hood for an automobile
SU916380A1 (ru) * 1980-08-07 1982-03-30 Vasilij F Fedorenko Способ извлечения брома из бромовоздушной смеси1
DE3046010C2 (de) * 1980-12-05 1982-11-04 Siemens AG, 1000 Berlin und 8000 München Radargerät zur Überwachung eines Luftraumes
US4556547A (en) * 1982-02-01 1985-12-03 Takeda Chemical Industries, Ltd. Process for treatment of gases
CA1216136A (en) * 1983-03-03 1987-01-06 Toshio Aibe Method for removal of poisonous gases
US4594231A (en) * 1983-09-22 1986-06-10 Takeda Chemical Industries, Ltd. Method for removal of poisonous gases
JPS6068051A (ja) * 1983-09-22 1985-04-18 Takeda Chem Ind Ltd 有害ガス吸着剤
JPS61204022A (ja) * 1985-02-12 1986-09-10 Taiyo Sanso Kk ガス中の酸分の除去方法及び装置
JPS6222062A (ja) * 1985-07-23 1987-01-30 Nippon Paionikusu Kk 検知剤
JPS62125827A (ja) * 1985-11-25 1987-06-08 Seitetsu Kagaku Co Ltd 三塩化ホウ素含有ガスの除害法
US5499587A (en) * 1986-06-17 1996-03-19 Intevep, S.A. Sulfur-sorbent promoter for use in a process for the in-situ production of a sorbent-oxide aerosol used for removing effluents from a gaseous combustion stream
JPS63232844A (ja) * 1986-10-07 1988-09-28 Ebara Res Co Ltd 有害ガス吸収剤
JPS6415135A (en) * 1987-07-09 1989-01-19 Nissan Girdler Catalyst Honeycomb molded body and process for removing harmful component by using the molded body
DE3869301D1 (de) * 1987-08-31 1992-04-23 Japan Pionics Methode zum reinigen von giftige komponenten enthaltendem gas.
DE4010321A1 (de) * 1990-03-30 1991-10-02 Aquamot Ag Verfahren zur beseitigung der saeure- und schwermetallverunreinigungen aus fluessigkeiten
US5378444A (en) * 1991-12-11 1995-01-03 Japan Pionics Co., Ltd. Process for cleaning harmful gas
US5316998A (en) * 1992-05-05 1994-05-31 Discovery Chemicals, Inc. HCl adsorbent and method for making and using same
JP3260825B2 (ja) * 1992-06-26 2002-02-25 日本パイオニクス株式会社 有害ガスの浄化方法
JP2581642B2 (ja) * 1993-05-10 1997-02-12 宇部興産株式会社 エッチング排ガス除害剤及び排ガス処理方法
JPH07308538A (ja) * 1994-03-24 1995-11-28 Japan Pionics Co Ltd 有害ガスの浄化剤
JPH07275646A (ja) * 1994-04-06 1995-10-24 Japan Pionics Co Ltd 有害ガスの浄化剤

Also Published As

Publication number Publication date
EP0792681B1 (de) 2002-02-13
JPH09234337A (ja) 1997-09-09
EP0792681A1 (de) 1997-09-03
JP3716030B2 (ja) 2005-11-16
US5756060A (en) 1998-05-26
KR970061340A (ko) 1997-09-12
DE69619219T2 (de) 2002-08-29
TW370470B (en) 1999-09-21
KR100465211B1 (ko) 2005-04-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee