KR950034650A - 반도체 제조장비의 웨이퍼 장착 카세트 - Google Patents

반도체 제조장비의 웨이퍼 장착 카세트 Download PDF

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Publication number
KR950034650A
KR950034650A KR1019940012215A KR19940012215A KR950034650A KR 950034650 A KR950034650 A KR 950034650A KR 1019940012215 A KR1019940012215 A KR 1019940012215A KR 19940012215 A KR19940012215 A KR 19940012215A KR 950034650 A KR950034650 A KR 950034650A
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KR
South Korea
Prior art keywords
wafer
shelf
semiconductor manufacturing
mounting cassette
wafer mounting
Prior art date
Application number
KR1019940012215A
Other languages
English (en)
Other versions
KR0135049B1 (ko
Inventor
이경수
Original Assignee
양승택
재단법인 한국전자통신연구소
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 양승택, 재단법인 한국전자통신연구소 filed Critical 양승택
Priority to KR1019940012215A priority Critical patent/KR0135049B1/ko
Priority to US08/353,255 priority patent/US5577621A/en
Priority to JP30509794A priority patent/JP2702080B2/ja
Publication of KR950034650A publication Critical patent/KR950034650A/ko
Application granted granted Critical
Publication of KR0135049B1 publication Critical patent/KR0135049B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

본 발명은 반도체소자 제조장치에 사용되는 웨이퍼 장착카세트에 관한 것으로, 특히, 웨이퍼의 크기에 제약됨이 없이, 소정 범위내에서 여러가지 크기의 웨이퍼를 장입할 수 있는 반도체 제조장비의 웨이퍼 장착카세트에 관한 것이다.
종래의 웨이퍼 장착카세트는 크기가 다른 웨이퍼를 다룰 때에는 제조장치내의 모든 도구를 교체해야 하는 문제점들이 있었다.
본 발명은 상술한 문제점들을 극복하기 위한 것으로 여러크기의 웨이퍼를 동시에 각각 장입할 수 있도록 복수개의 단턱을 갖는 적어도 2개 이상의 선반과, 이 선반을 지지하는 선반고정수단으로 구성한다.

Description

반도체 제조방비의 웨이퍼 장착 카세트
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
베1도는 본 발명의 전체적인 사시도.

Claims (4)

  1. 반도체의 공정장비중 복수개의 에이퍼를 장착하여 공정을 진행하기 위한 반도체제조방지의 웨이퍼 장착 카세트에 있어서, 상기 웨이퍼의 크기에 상관없이 수용할 수 있는 선반수단과, 상기 선반수단을 소정간격으로 적어도 2개 이상 고정할 수 있는 선반고정수단을 포함하는 것을 특징으로 하는 반도체 제조방비의 웨이퍼 장착 카세트.
  2. 제1항에 있어서, 상기 선반수단은 상부에 서로 다른 직경을 갖는 웨이퍼를 각각 장착할 수 잇도록 형성한 단턱(11)과, 일측이 소정길이 연장되어 상기 선반고정수단에 연결고정되는 연결편(12)을 구비한 한쌍의 선반(10)으로 구성된 것을 특징으로 하는 반도체 제조장비의 웨이퍼 장착카세트.
  3. 제3항에 있어서, 상기 단턱(11)은 장착되는 웨이퍼의 직경과 일치하는 원호형상을 갖는 것을 특징으로 하는 반도체 제조장비의 에이퍼 장착카세트.
  4. 제1항에 있어서, 상기 선반고정수단은 상기 선반의 연결편(12)이 삽입되어 고정되는 복수개의 요홈(21)을 구비한 대립된 구조의 한쌍의 지지프레임(20)과, 상기 지지프레임을 연결고정하는 고정프레임(30)으로 구성된 것을 특징으로 하는 반도체 제조방비의 웨이퍼 장착카세트.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940012215A 1994-05-31 1994-05-31 반도체 제조장비의 웨이퍼 장착 카세트 KR0135049B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1019940012215A KR0135049B1 (ko) 1994-05-31 1994-05-31 반도체 제조장비의 웨이퍼 장착 카세트
US08/353,255 US5577621A (en) 1994-05-31 1994-12-02 Wafer installing cassette for semiconductor manufacturing apparatus
JP30509794A JP2702080B2 (ja) 1994-05-31 1994-12-08 半導体の製造装備のウエハ装着のカセット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940012215A KR0135049B1 (ko) 1994-05-31 1994-05-31 반도체 제조장비의 웨이퍼 장착 카세트

Publications (2)

Publication Number Publication Date
KR950034650A true KR950034650A (ko) 1995-12-28
KR0135049B1 KR0135049B1 (ko) 1998-04-20

Family

ID=19384396

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940012215A KR0135049B1 (ko) 1994-05-31 1994-05-31 반도체 제조장비의 웨이퍼 장착 카세트

Country Status (3)

Country Link
US (1) US5577621A (ko)
JP (1) JP2702080B2 (ko)
KR (1) KR0135049B1 (ko)

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KR100946442B1 (ko) * 2002-10-10 2010-03-10 하이디스 테크놀로지 주식회사 기판 적재용 카세트

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Also Published As

Publication number Publication date
JPH07326657A (ja) 1995-12-12
KR0135049B1 (ko) 1998-04-20
JP2702080B2 (ja) 1998-01-21
US5577621A (en) 1996-11-26

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