KR950024625A - 플립 칩 캐리어 모듈의 표면 실장 공정 - Google Patents
플립 칩 캐리어 모듈의 표면 실장 공정 Download PDFInfo
- Publication number
- KR950024625A KR950024625A KR1019950000161A KR19950000161A KR950024625A KR 950024625 A KR950024625 A KR 950024625A KR 1019950000161 A KR1019950000161 A KR 1019950000161A KR 19950000161 A KR19950000161 A KR 19950000161A KR 950024625 A KR950024625 A KR 950024625A
- Authority
- KR
- South Korea
- Prior art keywords
- chip
- substrate
- chip carrier
- flip
- amoeba
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract 26
- 241000224489 Amoeba Species 0.000 claims abstract 13
- 230000015572 biosynthetic process Effects 0.000 claims abstract 12
- 229910000679 solder Inorganic materials 0.000 claims abstract 7
- 239000002775 capsule Substances 0.000 claims abstract 4
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 241000224421 Heterolobosea Species 0.000 claims description 3
- 210000003001 amoeba Anatomy 0.000 claims description 3
- 230000010365 information processing Effects 0.000 claims description 3
- 238000005476 soldering Methods 0.000 claims 7
- 238000005245 sintering Methods 0.000 claims 4
- 239000002274 desiccant Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 2
- 239000011368 organic material Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 239000004642 Polyimide Substances 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000011889 copper foil Substances 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 239000011152 fibreglass Substances 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 210000000056 organ Anatomy 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000008393 encapsulating agent Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000969 carrier Substances 0.000 description 1
Classifications
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- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Combinations Of Printed Boards (AREA)
Abstract
본 발명은 캡술제와 칩 기판 간에 및/또는 캡슐제와 칩 캐리어 기판 표면 간의 경계를 따른 플립-칩 C4 접합부 사이에 아메바와 같은 솔더 브리지가 형성하는 것을 방지하기 위해 표면 실장 캡술화된 플립-칩 캐리어 모듈을 취급하고 보관하기 위한 공정에 관한 것이다. 상기 캠슐제의 자유로운 수분 농도는 회로 기판에 상기 모듈을 실장하는 데 사용된 리플로우 열처리 동안 선정된 안전한 한계값 미만으로 유지된다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 아메바(amoebas)를 방지하기 위해 칩 캐리어(chip carriers)를 취급하고/보관하기 위한 본 발명에 따른 공정의 실시도.
제2도는 상호접합 구조를 만들기 위한 본 발명에 따른 공정의 다른 실시도.
제3도는 본 발명의 정보 처리 시스템을 제조하기 위한 공정도.
Claims (20)
- 표면 실장, 플립-칩 기판을 취급하고 보관하는 공정(A process for handling and storing surface-mount,flip-chip substrates)에 있어서, 칩 캐리어 기판(chip carrier substrate)을 제조하는 단계, 상기 기판으로부터 칩을 체적 만큼(by a voIume)분리하는 솔더 접합부(solder connections)를 사용하여 상기 칩 캐리어 기판에 플립 칩(flip chip)을 직접 접합시키는 단계, 및 리플로우 솔더링 동안(during the reflow soldering) 아메바(amoebas)를 형성하게 되는 분위기 기압으로부터의 충분한 수분이 캡슐내로 확산하는 것을 방지함으로써 후속하는 표면-실장, 솔더 리플로우 접합 동안 아메바의 형성을 방지하는 단계를 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관공정.
- 상호접합 어셈블리를 제조하는 공정(A process for manufacturing an interconnect assembly)에 있어서, 칩 캐리어 기판을 제조하는 단계, 상기 기판으로부터 칩을 체적만큼 분리하는 솔더 접합부를 사용하여 상기 칩캐리어 기판에 플립 칩을 직접 접합시키는 단계, 상기 솔더 접합부를 보호하기 위해 유기 재료(organic material)로서 상기 플립 칩과 상기 캐리어 기판 간의 상기 체적을 캡슐화시키는 단계, 상기 칩 캐리어를 표면 실장 접합하기 위해 회로 기판에 표면 접촉부의 어레이(an array of surface contacts)를 제공하는 단계, 상기 회로 기판의 표면 접촉부에 상기 칩 캐리어 기판을 리플로우 솔더링(reflow soldering)하는 단계, 및 리플로우 솔더링 동안(during the reflow soldering) 아메바(amoebas)를 형성하게 되는 분위기 기압으로부터의 충분한 습도가 캡슐제속으로 확산하는 것을 방지함으로써 후속하는 기판-실장, 리플로우 솔더링 동안 아메바의 형성을 방지하는 단계를 포함하는 것을 특징으로하는 상호접합 어셈블리의 제조 공정.
- 정보 처리 시스템을 제조하는 공정(A process for manufacturing information handling system)에 있어서, 칩 캐리어 기판을 제조하는 단계, 상기 기판으로부터 칩을 체적만큼 분리하는 솔더 접합부를 사용하여 상기 칩 캐리어 기관에 플립 칩을 직접 접합시키는 단계, 상기 솔더 접합부를 보호하기 위해 유기 재료로서 상기 플립 칩과 상기 캐리어 기판 간의 상기 체적을 캡슐화시키는 단계, 상기 칩 캐리어를 표면 실장 접합하기 위해 회로 기판에 표면 접촉부의 어레이를 제공하는 단계, 상기 회로 기판의 표면 접촉부에 상기 칩 캐리어 기판을 리플로우 솔더링하는 단계, 리플로우 솔더링 동안 아메바를 형성하게 되는 충분한 수분이 캡슐제내로 확산하는 것을 방지함으로써 아메바의 형성을 방지하는 단계, 봉입부(an enc1osure)에 상기 회로 기판을 실장하는 단계, 컴퓨터 주변장치와 통신하기 위한 신호 I/O 수단을 상기 회로 기판에 접합시키는 단계, 및 전원 공급 수단을 상기 회로 기관에 접합시키는 단계를 포함하는 것을 특징으로 하는 정보 처리 시스템의 제조 공정.
- 제1항에 있어서, 상기 아메바의 형성을 방지하는 단계는 리플로우 이전에 상승된 온도에서 상기 칩 캐리어를 보관하는 것을 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제4항에 있어서, 상기 상승된 온도는 적어도 약 40℃인 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제1항에 있어서. 상기 아메바의 형성을 방지하는 단계는 리플로우 이전에 밀봉되어 거의 공기가 희박한 백(a sealed approximately air tight bag)에 상기 칩 캐리어를 보관하는 것을 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제6항에 있어서, 상기 밀봉된 백은 또한 건조제(desiccant)를 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제1항에 있어서, 상기 아메바의 형성을 방지하는 단계는 적어도 약 12시간 동안 적어도 약 100℃의 온도에서 상기 칩 캐리어를 소결하는 것을 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제8항에 있어서, 상기 칩 캐리어는 약 24시간 동안 약 125℃의 온도에서 소결되는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제1항에 있어서, 상기 아메바의 형성을 방지하는 단계는 제조 후 일주일 이상 동안 상기 칩이 분위기 기압에 노출되기 전에 상기 회로 기판에 상기 칩 캐리어를 리플로우 솔더링하거나 또는 상승된 온도에서 소결하는 것을 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제1항에 있어서, 상기 캐리어 기판의 제조는 세라믹 재료층을 제조하는 것을 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제1항에 있어서. 상기 캐리어 기판의 제조는 가요성 폴리이미드 및 동 포일층을 도포(laminating flexible layers of polyimide and copper foil)하는 것을 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제1항에 있어서, 상기 캐리어 기판의 제조는 섬유로 보강된 단단한 유기 재료 기판(a rigid board of organic materlal)을 형성하는 것을 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제13항에 있어서, 상기 섬유는 유리섬유(fiberglass)를 포함하는 것을 특징으로 하는 표면 실장, 플립-칩 기판의 취급 및 보관 공정.
- 제2항에 있어서. 상기 아메바의 형성을 방지하는 단계는 리플로우 이전에 밀봉되어 거의 공기가 희박한 백(a sealed approximately air tight bag)에 상기 칩 캐리어를 보관하는 것을 포함하는 것을 특징으로 하는 상호접합 어셈블리의 제조 공정.
- 제15항에 있어서, 상기 밀봉된 백은 또한 건조제(desiccant)를 포함하는 것을 특징으로 하는 상호접합 어셈블리의 제조 공정.
- 제2항에 있어서, 상기 아메바의 형성을 방지하는 단계는 적어도 약 12시간 동안 적어도 약 100℃의 온도에서 상기 칩 캐리어를 소결하는 것을 포함하는 것을 특징으로 하는 상호접합 어셈블리의 제조 공정.
- 제17항에 있어서, 상기 칩 캐리어는 약 24시간 동안 약 125℃의 온도에서 소결되는 것을 특징으로 하는 상호접합 어셈블리의 제조 공정.
- 제3항에 있어서, 상기 아메바의 형성을 방지하는 단계는 리플로우 이전에 밀봉되어 거의 공기가 희박한 백(a sealed approximately air tight bag)에 상기 칩 캐리어를 보관하는 것을 포함하는 것을 특징으로 하는 정보 처리 시스템의 제조 공정.
- 제2항에 있어서, 상기 아메바의 형성을 방지하는 단계는 습도 상태에의 노출에 따라 상기 상호접합 구조를 소결하는 것을 포함하는 것을 특징으로 하는 상호접합 어셈블리의 제조 공정.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US8/178,994 | 1994-01-07 | ||
US08/178,994 US5473814A (en) | 1994-01-07 | 1994-01-07 | Process for surface mounting flip chip carrier modules |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950024625A true KR950024625A (ko) | 1995-08-21 |
KR0156065B1 KR0156065B1 (ko) | 1998-12-15 |
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KR1019950000161A KR0156065B1 (ko) | 1994-01-07 | 1995-01-06 | 플립 칩 캐리어 모듈의 표면 실장 공정 |
Country Status (5)
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US (2) | US5473814A (ko) |
KR (1) | KR0156065B1 (ko) |
CN (1) | CN1137505C (ko) |
MY (1) | MY125582A (ko) |
TW (1) | TW255983B (ko) |
Families Citing this family (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2113752C (en) * | 1994-01-19 | 1999-03-02 | Stephen Michael Rooks | Inspection system for cross-sectional imaging |
JP2664878B2 (ja) * | 1994-01-31 | 1997-10-22 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 半導体チップパッケージおよびその製造方法 |
US5834339A (en) | 1996-03-07 | 1998-11-10 | Tessera, Inc. | Methods for providing void-free layers for semiconductor assemblies |
JP3348528B2 (ja) * | 1994-07-20 | 2002-11-20 | 富士通株式会社 | 半導体装置の製造方法と半導体装置及び電子回路装置の製造方法と電子回路装置 |
US5655703A (en) * | 1995-05-25 | 1997-08-12 | International Business Machines Corporation | Solder hierarchy for chip attachment to substrates |
US5572405A (en) * | 1995-06-07 | 1996-11-05 | International Business Machines Corporation (Ibm) | Thermally enhanced ball grid array package |
US5756380A (en) * | 1995-11-02 | 1998-05-26 | Motorola, Inc. | Method for making a moisture resistant semiconductor device having an organic substrate |
FR2742293B1 (fr) * | 1995-12-07 | 2000-03-24 | Sagem | Assemblage de cartes electroniques, et procede de fabrication d'un tel assemblage |
US5891795A (en) * | 1996-03-18 | 1999-04-06 | Motorola, Inc. | High density interconnect substrate |
US6000126A (en) * | 1996-03-29 | 1999-12-14 | General Dynamics Information Systems, Inc. | Method and apparatus for connecting area grid arrays to printed wire board |
US6033930A (en) * | 1996-07-23 | 2000-03-07 | Matsushita Electronics Corporation | Lead frame carrying method and lead frame carrying apparatus |
US5766021A (en) * | 1996-10-01 | 1998-06-16 | Augat Inc. | BGA interconnectors |
US6635514B1 (en) * | 1996-12-12 | 2003-10-21 | Tessera, Inc. | Compliant package with conductive elastomeric posts |
US5891754A (en) * | 1997-02-11 | 1999-04-06 | Delco Electronics Corp. | Method of inspecting integrated circuit solder joints with x-ray detectable encapsulant |
US5994166A (en) | 1997-03-10 | 1999-11-30 | Micron Technology, Inc. | Method of constructing stacked packages |
US6330967B1 (en) | 1997-03-13 | 2001-12-18 | International Business Machines Corporation | Process to produce a high temperature interconnection |
US5953623A (en) * | 1997-04-10 | 1999-09-14 | International Business Machines Corporation | Ball limiting metal mask and tin enrichment of high melting point solder for low temperature interconnection |
US5790384A (en) * | 1997-06-26 | 1998-08-04 | International Business Machines Corporation | Bare die multiple dies for direct attach |
JPH1154884A (ja) * | 1997-08-06 | 1999-02-26 | Nec Corp | 半導体装置の実装構造 |
US6369451B2 (en) * | 1998-01-13 | 2002-04-09 | Paul T. Lin | Solder balls and columns with stratified underfills on substrate for flip chip joining |
US6235996B1 (en) * | 1998-01-28 | 2001-05-22 | International Business Machines Corporation | Interconnection structure and process module assembly and rework |
US6121679A (en) * | 1998-03-10 | 2000-09-19 | Luvara; John J. | Structure for printed circuit design |
US6310303B1 (en) | 1998-03-10 | 2001-10-30 | John J. Luvara | Structure for printed circuit design |
US6177728B1 (en) * | 1998-04-28 | 2001-01-23 | International Business Machines Corporation | Integrated circuit chip device having balanced thermal expansion |
US6288451B1 (en) * | 1998-06-24 | 2001-09-11 | Vanguard International Semiconductor Corporation | Flip-chip package utilizing a printed circuit board having a roughened surface for increasing bond strength |
US6133064A (en) * | 1999-05-27 | 2000-10-17 | Lsi Logic Corporation | Flip chip ball grid array package with laminated substrate |
US7335965B2 (en) | 1999-08-25 | 2008-02-26 | Micron Technology, Inc. | Packaging of electronic chips with air-bridge structures |
US6709968B1 (en) * | 2000-08-16 | 2004-03-23 | Micron Technology, Inc. | Microelectronic device with package with conductive elements and associated method of manufacture |
US6670719B2 (en) | 1999-08-25 | 2003-12-30 | Micron Technology, Inc. | Microelectronic device package filled with liquid or pressurized gas and associated method of manufacture |
US7276788B1 (en) * | 1999-08-25 | 2007-10-02 | Micron Technology, Inc. | Hydrophobic foamed insulators for high density circuits |
JP2001217340A (ja) * | 2000-02-01 | 2001-08-10 | Nec Corp | 半導体装置及びその製造方法 |
US6677209B2 (en) | 2000-02-14 | 2004-01-13 | Micron Technology, Inc. | Low dielectric constant STI with SOI devices |
US6413827B2 (en) | 2000-02-14 | 2002-07-02 | Paul A. Farrar | Low dielectric constant shallow trench isolation |
US6890847B1 (en) | 2000-02-22 | 2005-05-10 | Micron Technology, Inc. | Polynorbornene foam insulation for integrated circuits |
US6333563B1 (en) | 2000-06-06 | 2001-12-25 | International Business Machines Corporation | Electrical interconnection package and method thereof |
US6640423B1 (en) | 2000-07-18 | 2003-11-04 | Endwave Corporation | Apparatus and method for the placement and bonding of a die on a substrate |
US6534848B1 (en) * | 2000-09-07 | 2003-03-18 | International Business Machines Corporation | Electrical coupling of a stiffener to a chip carrier |
US8143108B2 (en) | 2004-10-07 | 2012-03-27 | Stats Chippac, Ltd. | Semiconductor device and method of dissipating heat from thin package-on-package mounted to substrate |
USRE44438E1 (en) | 2001-02-27 | 2013-08-13 | Stats Chippac, Ltd. | Semiconductor device and method of dissipating heat from thin package-on-package mounted to substrate |
US20020121707A1 (en) * | 2001-02-27 | 2002-09-05 | Chippac, Inc. | Super-thin high speed flip chip package |
US20040070080A1 (en) * | 2001-02-27 | 2004-04-15 | Chippac, Inc | Low cost, high performance flip chip package structure |
FR2822793B1 (fr) * | 2001-03-27 | 2003-07-04 | Meritor Light Vehicle Sys Ltd | Procede d'assemblage d'ouvrants de vehicules |
US6940636B2 (en) * | 2001-09-20 | 2005-09-06 | Analog Devices, Inc. | Optical switching apparatus and method of assembling same |
US6893574B2 (en) * | 2001-10-23 | 2005-05-17 | Analog Devices Inc | MEMS capping method and apparatus |
US20040063237A1 (en) * | 2002-09-27 | 2004-04-01 | Chang-Han Yun | Fabricating complex micro-electromechanical systems using a dummy handling substrate |
US6964882B2 (en) * | 2002-09-27 | 2005-11-15 | Analog Devices, Inc. | Fabricating complex micro-electromechanical systems using a flip bonding technique |
US6933163B2 (en) * | 2002-09-27 | 2005-08-23 | Analog Devices, Inc. | Fabricating integrated micro-electromechanical systems using an intermediate electrode layer |
JP3793143B2 (ja) * | 2002-11-28 | 2006-07-05 | 株式会社シマノ | 自転車用電子制御装置 |
JP2004241542A (ja) * | 2003-02-05 | 2004-08-26 | Matsushita Electric Ind Co Ltd | はんだ付け方法およびこのはんだ付け方法により接合される部品および接合された接合構造体 |
US7192892B2 (en) | 2003-03-04 | 2007-03-20 | Micron Technology, Inc. | Atomic layer deposited dielectric layers |
DE10333841B4 (de) * | 2003-07-24 | 2007-05-10 | Infineon Technologies Ag | Verfahren zur Herstellung eines Nutzens mit in Zeilen und Spalten angeordneten Halbleiterbauteilpositionen und Verfahren zur Herstellung eines Halbleiterbauteils |
US20050126686A1 (en) * | 2003-12-11 | 2005-06-16 | Cheong Yew W. | Combination back grind tape and underfill for flip chips |
US20050137882A1 (en) * | 2003-12-17 | 2005-06-23 | Cameron Don T. | Method for authenticating goods |
JP4496774B2 (ja) * | 2003-12-22 | 2010-07-07 | 日亜化学工業株式会社 | 半導体装置の製造方法 |
US7387478B2 (en) * | 2004-08-27 | 2008-06-17 | Ford Motor Company | Machining system with integrated chip hopper |
US7445141B2 (en) * | 2004-09-22 | 2008-11-04 | International Business Machines Corporation | Solder interconnection array with optimal mechanical integrity |
US7630119B2 (en) * | 2004-09-27 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Apparatus and method for reducing slippage between structures in an interferometric modulator |
US7327510B2 (en) * | 2004-09-27 | 2008-02-05 | Idc, Llc | Process for modifying offset voltage characteristics of an interferometric modulator |
TWI268589B (en) * | 2005-06-03 | 2006-12-11 | Via Tech Inc | Electronic apparatus with thermal module |
US7927948B2 (en) | 2005-07-20 | 2011-04-19 | Micron Technology, Inc. | Devices with nanocrystals and methods of formation |
US20080160173A1 (en) * | 2006-12-27 | 2008-07-03 | Nokia Corporation | Component Moulding Process |
US8362609B1 (en) | 2009-10-27 | 2013-01-29 | Xilinx, Inc. | Integrated circuit package and method of forming an integrated circuit package |
US8810028B1 (en) | 2010-06-30 | 2014-08-19 | Xilinx, Inc. | Integrated circuit packaging devices and methods |
TW201208007A (en) * | 2010-08-02 | 2012-02-16 | Advanced Semiconductor Eng | Semiconductor package |
US9105629B2 (en) * | 2013-03-07 | 2015-08-11 | International Business Machines Corporation | Selective area heating for 3D chip stack |
JP6623508B2 (ja) | 2014-09-30 | 2019-12-25 | 日亜化学工業株式会社 | 光源及びその製造方法、実装方法 |
JP6230520B2 (ja) * | 2014-10-29 | 2017-11-15 | キヤノン株式会社 | プリント回路板及び電子機器 |
WO2017164848A1 (en) * | 2016-03-22 | 2017-09-28 | Intel Corporation | Void reduction in solder joints using off-eutectic solder |
US20190006531A1 (en) * | 2017-06-30 | 2019-01-03 | Semiconductor Components Industries, Llc | CISCSP Package and Related Methods |
US10834827B2 (en) * | 2017-09-14 | 2020-11-10 | HELLA GmbH & Co. KGaA | System for potting components using a cap |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3401126A (en) * | 1965-06-18 | 1968-09-10 | Ibm | Method of rendering noble metal conductive composition non-wettable by solder |
US3429040A (en) * | 1965-06-18 | 1969-02-25 | Ibm | Method of joining a component to a substrate |
US3458925A (en) * | 1966-01-20 | 1969-08-05 | Ibm | Method of forming solder mounds on substrates |
US3518756A (en) * | 1967-08-22 | 1970-07-07 | Ibm | Fabrication of multilevel ceramic,microelectronic structures |
US3554877A (en) * | 1968-02-07 | 1971-01-12 | Us Army | Method of making printed circuit assemblies |
US3657790A (en) * | 1969-04-02 | 1972-04-25 | Hughes Aircraft Co | Apparatus for handling and bonding flip-chips to printed circuit substrates |
US3988405A (en) * | 1971-04-07 | 1976-10-26 | Smith Robert D | Process for forming thin walled articles or thin sheets |
US3791858A (en) * | 1971-12-13 | 1974-02-12 | Ibm | Method of forming multi-layer circuit panels |
US4202007A (en) * | 1978-06-23 | 1980-05-06 | International Business Machines Corporation | Multi-layer dielectric planar structure having an internal conductor pattern characterized with opposite terminations disposed at a common edge surface of the layers |
US4604644A (en) * | 1985-01-28 | 1986-08-05 | International Business Machines Corporation | Solder interconnection structure for joining semiconductor devices to substrates that have improved fatigue life, and process for making |
JPS61271319A (ja) * | 1985-05-24 | 1986-12-01 | Shin Etsu Chem Co Ltd | 半導体封止用エポキシ樹脂組成物 |
JPS61276237A (ja) * | 1985-05-31 | 1986-12-06 | Hitachi Ltd | 半導体パツケ−ジの気密封止方法およびその装置 |
US4681654A (en) * | 1986-05-21 | 1987-07-21 | International Business Machines Corporation | Flexible film semiconductor chip carrier |
KR960015106B1 (ko) * | 1986-11-25 | 1996-10-28 | 가부시기가이샤 히다찌세이사꾸쇼 | 면실장형 반도체패키지 포장체 |
US4766670A (en) * | 1987-02-02 | 1988-08-30 | International Business Machines Corporation | Full panel electronic packaging structure and method of making same |
US5159535A (en) * | 1987-03-11 | 1992-10-27 | International Business Machines Corporation | Method and apparatus for mounting a flexible film semiconductor chip carrier on a circuitized substrate |
US4996939A (en) * | 1988-11-03 | 1991-03-05 | D.E.M. Controls Of Canada, Inc. | Apparatus for drying printed circuit boards |
US5142873A (en) * | 1990-02-15 | 1992-09-01 | E. I. Du Pont De Nemours And Company | Vapor control system for vapor degreasing/defluxing equipment |
US5089440A (en) * | 1990-03-14 | 1992-02-18 | International Business Machines Corporation | Solder interconnection structure and process for making |
US4999699A (en) * | 1990-03-14 | 1991-03-12 | International Business Machines Corporation | Solder interconnection structure and process for making |
JP2657429B2 (ja) * | 1990-04-09 | 1997-09-24 | 株式会社ミクロ技術研究所 | 基板の回路実装方法及びその方法に使用する回路基板 |
US5147084A (en) * | 1990-07-18 | 1992-09-15 | International Business Machines Corporation | Interconnection structure and test method |
US5194930A (en) * | 1991-09-16 | 1993-03-16 | International Business Machines | Dielectric composition and solder interconnection structure for its use |
US5274913A (en) * | 1991-10-25 | 1994-01-04 | International Business Machines Corporation | Method of fabricating a reworkable module |
US5203076A (en) * | 1991-12-23 | 1993-04-20 | Motorola, Inc. | Vacuum infiltration of underfill material for flip-chip devices |
-
1994
- 1994-01-07 US US08/178,994 patent/US5473814A/en not_active Expired - Lifetime
- 1994-12-12 TW TW083111567A patent/TW255983B/zh active
- 1994-12-28 MY MYPI94003537A patent/MY125582A/en unknown
- 1994-12-30 CN CNB941135357A patent/CN1137505C/zh not_active Expired - Lifetime
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1995
- 1995-01-06 KR KR1019950000161A patent/KR0156065B1/ko not_active IP Right Cessation
- 1995-05-25 US US08/450,845 patent/US5535526A/en not_active Expired - Fee Related
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US5535526A (en) | 1996-07-16 |
CN1125356A (zh) | 1996-06-26 |
TW255983B (en) | 1995-09-01 |
MY125582A (en) | 2006-08-30 |
CN1137505C (zh) | 2004-02-04 |
KR0156065B1 (ko) | 1998-12-15 |
US5473814A (en) | 1995-12-12 |
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