KR950015681A - 전자부품의 본딩장치 - Google Patents

전자부품의 본딩장치 Download PDF

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Publication number
KR950015681A
KR950015681A KR1019940029680A KR19940029680A KR950015681A KR 950015681 A KR950015681 A KR 950015681A KR 1019940029680 A KR1019940029680 A KR 1019940029680A KR 19940029680 A KR19940029680 A KR 19940029680A KR 950015681 A KR950015681 A KR 950015681A
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KR
South Korea
Prior art keywords
electronic component
nozzle shaft
lever
nozzle
substrate
Prior art date
Application number
KR1019940029680A
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English (en)
Other versions
KR0145258B1 (ko
Inventor
야스토 오니쯔카
Original Assignee
모리시타 요이찌
미쯔시다덴기산교 가부시기가이샤
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Publication of KR950015681A publication Critical patent/KR950015681A/ko
Application granted granted Critical
Publication of KR0145258B1 publication Critical patent/KR0145258B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B41/00—Arrangements for controlling or monitoring lamination processes; Safety arrangements
    • B32B2041/04—Detecting wrong registration, misalignment, deviation, failure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/79—Apparatus for Tape Automated Bonding [TAB]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
    • Y10T156/1702—For plural parts or plural areas of single part
    • Y10T156/1744—Means bringing discrete articles into assembled relationship
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
    • Y10T156/1702—For plural parts or plural areas of single part
    • Y10T156/1744—Means bringing discrete articles into assembled relationship
    • Y10T156/1746—Plural lines and/or separate means assembling separate sandwiches
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
    • Y10T156/1702—For plural parts or plural areas of single part
    • Y10T156/1744—Means bringing discrete articles into assembled relationship
    • Y10T156/1768—Means simultaneously conveying plural articles from a single source and serially presenting them to an assembly station
    • Y10T156/1771—Turret or rotary drum-type conveyor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
    • Y10T156/1702—For plural parts or plural areas of single part
    • Y10T156/1744—Means bringing discrete articles into assembled relationship
    • Y10T156/1776—Means separating articles from bulk source
    • Y10T156/1778—Stacked sheet source
    • Y10T156/178—Rotary or pivoted picker

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

본 발명은, 전극을 가진 기판에 그 기판을 구동하기 위한 전자부품을 고속이고, 정밀도좋게 본딩할 수 있는 전자부품의 본딩장치를 제공하는 것을 목적으로 한 것이며, 그 구성에 있어서, 기판(2)을 본딩위치(b)에 위치결정하는 테이블장치(c)와, 하단부에 전자부품(1)을 흡착하는 노즐(25)을 가진 노즐샤프트(24)를 구비한 이송헤드(H)와, 둘레가장자리에 이 이송헤드(H)를 방사형상으로 복수개 장착하고, 간헐적으로 회전하므로서, 이 이송헤드(H)를 본딩위치(b)에 이동시키는 회전체(11)와, 이송헤드(H)에 의해 본딩위치(b)에 이송된 전자부품(1)과 기판(2)의 위치어긋남을 검출하는 인식장치(E)와 인식장치(E)에 의해서 검출된 위치어긋남에 의거해서 이송헤드(H)에 설치된 레버를 미소하게 변위시키므로서 노즐샤프트(24)를 미소한 각도회전시키는 구동기구로 구성되는 것을 특징으로 한 것이다.

Description

전자부품의 본딩장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1도는 본 발명의 제 1실시예의 전자부품의 본딩장치의 개요를 설명하는 평면도,
제 2도는 본 발명의 제 1실시예의 전자부품의 본딩장치의 단면도,
제 3도는 본 발명의 제 1실시예의 전자부품의 본딩장치의 노즐샤프트의 승강기구의 사시도,

Claims (3)

  1. 전자부품의 공급장치와, 기판을 본딩위치에 위치결정하는 테이블장치와, 인덱스회전하는 회전체와, 일단부가 상기 회전체에 연결된 암과, 상기 암의 타단부에 수직으로 설치되고, 승강동작과 회전동작을 행하는 노즐샤프트와, 상기 노즐샤프트의 하단부에 설치되고, 상기 전자부품을 흡착하는 노즐로 이루어지고, 상기 회전체의 둘레가장자리에 방사형상으로 설치된 이송헤드로 구성되고 상기 공급장치와 상기 테이블장치와의 사이에 설치된 턴테이블장치와, 상기 노즐샤프트에 연결되고, 상기 노즐샤프트를 승강동작시키는 승강기구와, 상기 본딩위치에 이송된 상기 전자부품과 상기 기판과의 위치어긋남을 검출하는 인식장치와, 상기 노즐샤프트의 상단부에 설치된 밀어붙이기부재와, 상기 암에 연결되고, 상기 밀어붙이기부재에 당접하는 레버와, 상기 레버의 선단부에 부세하는 부세체로 이루어지고, 상기 인식장치에 의해서 검출한 위치어긋남에 의거해서, 상기 노즐샤프트의 축심을 중심으로, 상기 레버를 미소하게 변위시키는 구동기구와, 상기 테이블장치의 위쪽에 있고, 상기 전자부품에 형성된 리드를, 상기 기판에 형성된 전극에 압압해서 압착하는 압착헤드로 구성되는 것을 특징으로 하는 전자부품의 본딩장치.
  2. 제 1항에 있어서, 상기 구동기구는, 상기 레버의 타단부에 당접하는 캠과, 이 캠을 구동하는 모터로 구성되는 것을 특징으로 하는 전자부품의 본딩장치.
  3. 제 1항에 있어서, 상기 구동기구는, 모터에 의해서 회전하는 이송나사와, 상기 이송나사에 나사맞춤하는 너트와, 상기 레버의 타단부에 당접하는 블록으로 구성되는 것을 특징으로 하는 전자부품의 본딩장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940029680A 1993-11-16 1994-11-12 전자부품의 본딩장치 KR0145258B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP93-286576 1993-11-16
JP28657693 1993-11-16

Publications (2)

Publication Number Publication Date
KR950015681A true KR950015681A (ko) 1995-06-17
KR0145258B1 KR0145258B1 (ko) 1998-08-17

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ID=17706212

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KR1019940029680A KR0145258B1 (ko) 1993-11-16 1994-11-12 전자부품의 본딩장치

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US (1) US5591295A (ko)
KR (1) KR0145258B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11749636B2 (en) 2016-03-25 2023-09-05 Shashin Kagaku Co., Ltd. Apparatus for manufacturing electronic device using device chip

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JP3147845B2 (ja) * 1998-02-13 2001-03-19 日本電気株式会社 チップ部品接合装置および方法
JP3828807B2 (ja) * 2000-01-14 2006-10-04 芝浦メカトロニクス株式会社 部品実装装置および部品実装方法
JP4167790B2 (ja) * 2000-03-10 2008-10-22 東レエンジニアリング株式会社 チップ実装装置
JP3588444B2 (ja) * 2000-10-26 2004-11-10 松下電器産業株式会社 電子部品、部品実装装置及び部品実装方法
TWI233651B (en) * 2001-02-01 2005-06-01 Shibaura Mechatronics Corp Electric component compression bonding machine and method
DE10162728A1 (de) * 2001-12-20 2003-07-10 Henkel Kgaa Neue Alkalische Protease aus Bacillus gibsonii (DSM 14393) und Wasch-und Reinigungsmittel enthaltend diese neue Alkalische Protease
US8387851B1 (en) * 2012-05-04 2013-03-05 Asm Technology Singapore Pte. Ltd. Apparatus for aligning a bonding tool of a die bonder
US10109517B1 (en) 2018-01-10 2018-10-23 Lam Research Corporation Rotational indexer with additional rotational axes
CN110137100B (zh) * 2018-02-09 2021-05-07 上海微电子装备（集团）股份有限公司 键合设备及键合方法

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US4372802A (en) * 1980-06-02 1983-02-08 Tokyo Denki Kagaku Kogyo Kabushiki Kaisha Apparatus for mounting chip type circuit elements on printed circuit boards
JPS59161040A (ja) * 1983-03-03 1984-09-11 Shinkawa Ltd インナ−リ−ドボンダ−
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JPH0649351B2 (ja) * 1987-07-03 1994-06-29 昭和電工株式会社 熱収縮性フイルム
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JP2861304B2 (ja) * 1990-07-06 1999-02-24 松下電器産業株式会社 アウターリードボンディング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11749636B2 (en) 2016-03-25 2023-09-05 Shashin Kagaku Co., Ltd. Apparatus for manufacturing electronic device using device chip

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Publication number Publication date
US5591295A (en) 1997-01-07
KR0145258B1 (ko) 1998-08-17

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