KR940009650A - 압력하에 초고순도 질소를 제조하는 방법 및 장치 - Google Patents

압력하에 초고순도 질소를 제조하는 방법 및 장치 Download PDF

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KR940009650A
KR940009650A KR1019930020916A KR930020916A KR940009650A KR 940009650 A KR940009650 A KR 940009650A KR 1019930020916 A KR1019930020916 A KR 1019930020916A KR 930020916 A KR930020916 A KR 930020916A KR 940009650 A KR940009650 A KR 940009650A
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nitrogen
column
reservoir
liquid
purity
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브뤼게롤 쟝-르노드
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티에리 쉬에르
레르 리뀌드, 소시에떼 아노뉨 뿌르 레뛰드 에 렉스쁠로와따시옹데 프로세데 죠르쥬 끌로드
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Publication of KR940009650A publication Critical patent/KR940009650A/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04151—Purification and (pre-)cooling of the feed air; recuperative heat-exchange with product streams
    • F25J3/04242—Cold end purification of the feed air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04254—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using the cold stored in external cryogenic fluids
    • F25J3/0426—The cryogenic component does not participate in the fractionation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/044—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a single pressure main column system only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04763—Start-up or control of the process; Details of the apparatus used
    • F25J3/04866—Construction and layout of air fractionation equipments, e.g. valves, machines
    • F25J3/04951—Arrangements of multiple air fractionation units or multiple equipments fulfilling the same process step, e.g. multiple trains in a network
    • F25J3/04963—Arrangements of multiple air fractionation units or multiple equipments fulfilling the same process step, e.g. multiple trains in a network and inter-connecting equipment within or downstream of the fractionation unit(s)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/02—Processes or apparatus using separation by rectification in a single pressure main column system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/72—Refluxing the column with at least a part of the totally condensed overhead gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/40—Processes or apparatus using other separation and/or other processing means using hybrid system, i.e. combining cryogenic and non-cryogenic separation techniques
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/84—Processes or apparatus using other separation and/or other processing means using filter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2210/00—Processes characterised by the type or other details of the feed stream
    • F25J2210/42—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/42—Nitrogen or special cases, e.g. multiple or low purity N2
    • F25J2215/44—Ultra high purity nitrogen, i.e. generally less than 1 ppb impurities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2250/00—Details related to the use of reboiler-condensers
    • F25J2250/30—External or auxiliary boiler-condenser in general, e.g. without a specified fluid or one fluid is not a primary air component or an intermediate fluid
    • F25J2250/42—One fluid being nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2290/00—Other details not covered by groups F25J2200/00 - F25J2280/00
    • F25J2290/62—Details of storing a fluid in a tank

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Abstract

본 발명은 압력하에 초고순도 질소를 제조하는 방법에 관한 것이다. 본 발명의 방법에 따르면, 실질적으로 제조 압력하에 중간 순도의 기체상 질소가 제조되고, 이 질소는 헤드부 응축기(23)을 구비한 증류 컬럼(11)의 저부로 급송된다. 상기 헤드부 응축기는 저압 컬럼 저부에서의 액체 및, 필요에 따라서는 저장기(10)에 함유된 중간순도 질소에 의해 냉각된다. 상기 컬럼 헤드부로부터 생성물로서 초고순도 질소가 회수되며, 중간 순도 질소가 제조되지 않는 기간동안가 초고순도 질소에 대한 수요가 그 산출량을 초과하는 기간동안에는, 저장기의 액상 질소로부터 얻은 중간순도의 기체상 비축 질소를 컬럼의 저부로 급송하고, 헤드부 응축기에는 상기 저장기로부터 비교적 많은 유량의 액상 실소를 급송한다.

Description

압력하에 초고순도 질소를 제조하는 방법 및 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 초고순도(ultra-pure) 질소의 제조장치를 도시한 것이다.

Claims (9)

  1. -실질적으로 제조 압력하에서 중간순도의 기체상 질소를 제조하고; -이 질소를 헤드부 응축기(23)를 구비한 종류 컬럼(11)의 저부에 급송하며; -상기 헤드부 응축기는 컬럼 저부로부터 유래한 액체 및 저장기(10)에 함유된 중간순도의 액상 질소의 제1흐름으로 냉각시키고; -상기 컬럼의 헤드부로부터 생성물로서 초고순도 질소를 회수하며; -중간순도 질소의 제조작업을 중지하는 기간 동안과 초고순도 질소의 수요가 과대한 기간동안에는 상기 저장기의 액상 질소로부터 얻은 중간순도의 기체상 비축 질소를 상기 컬럼의 저부로 급송하고, 상기 저장기로부터 유래한 액상 질소의 제2흐름(상기 제1흐름보다 많음)을 상기 헤드부 응축기(23)로 급송하는 것을 특징으로 하는, 압력하에 초고순도 질소를 제조하는 방법.
  2. 제1항에 있어서, 상기 중간순도의 질소를 공기의 종류에 의해 제조하되, 증류하고자 하는 공기를 촉매작용에 의해 수소와 일산화탄소로부터 정제하는 것(9에서)을 특징으로 하는 방법.
  3. 제1항에 있어서, 상기 기간들중에, 상기 저장기(10)로부터 액상 질소를 회수하여 증류 컬럼이 영역(13)에 통과시키고, 상기 영역으로부터 얻은 액체의 제1분획은 기화시켜서, 이러한 기화에 의해 얻는 기체를 상기 증류영역을 통해 상승 순환시킨 후에 저장기로 유입시키며, 상기 영역(13)으로터 얻은 나머지 액체는 기화시켜서 중간순도 비축 질소를 얻고, 이를 컬럼(11)의 저부로 급송하는 것을 특징으로 하는 방법.
  4. 제1항에 있어서, 상기 저장기의 질소를 일산화타소로부터 정제한(20A 또는 20B에서) 후에 컬럼(11)의 저부에 급송하는 것을 특징으로 하는 방법.
  5. 제1항에 있어서, 상기 헤드부 응축기(23)로 부터 제2생성물로서 불순한 질소를 회수하는 방법.
  6. -중간순도의 기체상 질소를 제조하기 위한 기구(1); -헤드부 응축기(23)를 가진 증류 컬럼(11); -상기 컬럼의 저부를 헤드부 응축기에 연결시키는 팽창 밸브(28)을 구비한 도관; 및 -중간순도 액상 질소 저장용 저장기(10), 및 이 저장기를 한편으로는 컬럼의 저부에, 다른 한편으로는 헤드부 응축기에 선택적으로 연결시키는 연결수단(18,21)을 포함하는 것을 특징으로 하는, 압력하에 초고순도 질소를 제조하기 위한 장치.
  7. 제6항에 있어서, 상기 중간순도 질소를 제조하기 위한 기구(1)이 공기 압축기(3), 수소와 일산화탄소로부터 정제하기 위한 접촉 반응기(9), 물과 이산화탄소로부터 정제하기 위한 흡착기(5), 증류에 의해 공기를 분리하여 그 헤드부에서 중간순도 질소를 산출하기 위한 컬럼(7), 및 간접 열교환에 의해 공기를 그 이슬점 부근으로 냉각시키고 상기 분리 컬럼(7)을 빠져나온 생성물을 가열하는 것을 확보하는 열교환 라인(6)을 포함하는 것을 특징으로 하는 장치.
  8. 제6항에 있어서, 상기 저장기(10)이, 저장기의 바닥부에 연결된 상부 액체 주입구, 저장기의 상부에 연결된 상부 가스 배출구, 저부 가스 주입구, 및 한편으로는 제1기화기(16)를 통해 저부 가스 주입구에 연결되어 있고다른 한편으로는 제2기화기(17)를 통해 스톱 밸브(19)를 구비한 도관(18)에 의하여 컬럼의 저부에 연결되어 있는 저부 액체 배출구를 포함하는 증류 컬럼의 영역(13)과 연결되는 것을 특징으로 하는 장치.
  9. 제6항에 있어서, 상기 저장기를 컬럼의 저부에 연결시키는 수단(18)이 비축 질소를 일산화탄소로부터 정제하기 위한 여과기(20A,20B)를 포함하는 것을 특징으로 하는 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930020916A 1992-10-09 1993-10-09 압력하에 초고순도 질소를 제조하는 방법 및 장치 KR940009650A (ko)

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Application Number Priority Date Filing Date Title
FR9212012A FR2696821B1 (fr) 1992-10-09 1992-10-09 Procédé et installation de production d'azote ultra-pur sous pression.
FR9212012 1992-10-09

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KR940009650A true KR940009650A (ko) 1994-05-20

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US (1) US5421164A (ko)
EP (1) EP0592323B1 (ko)
JP (1) JPH06137755A (ko)
KR (1) KR940009650A (ko)
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Families Citing this family (8)

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Publication number Priority date Publication date Assignee Title
US5511380A (en) * 1994-09-12 1996-04-30 Liquid Air Engineering Corporation High purity nitrogen production and installation
US5987918A (en) * 1998-03-17 1999-11-23 The Boc Group, Inc. Method of separating nitrogen from air
DE19929798A1 (de) * 1998-11-11 2000-05-25 Linde Ag Verfahren zur Gewinnung von ultrareinem Stickstoff
DE10158330A1 (de) * 2001-11-28 2003-06-18 Linde Ag Verfahren und Vorrichtung zur Herstellung eines hoch reinen tiefkalten Flüssigprodukts aus einer weniger reinen tiefkalten Einsatzflüssigkeit
DE10210324A1 (de) * 2002-03-08 2003-09-18 Linde Ag Verfahren und Vorrichtung zur Herstellung eines hoch reinen Produkts aus einer Einsatzfraktion
DE102008037300A1 (de) 2008-08-11 2010-02-25 Robert Brockmann Herstellung eines Reingases, insbesondere für die Dichtheitsprüfung an einem druckbeaufschlagten Bauteil
CN110817802B (zh) * 2019-10-24 2023-01-24 邯郸钢铁集团有限责任公司 一种利用复合纯化工艺制取超纯氢的系统及方法
CN111874879A (zh) * 2020-07-29 2020-11-03 四川海盛杰低温科技有限公司 一种集成式液氮净化装置

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JPS61190277A (ja) * 1985-02-16 1986-08-23 大同酸素株式会社 高純度窒素および酸素ガス製造装置
JPH0261481A (ja) * 1988-08-24 1990-03-01 Hitachi Ltd 超高純度窒素の製造方法及び装置
FR2660741A1 (fr) * 1990-04-10 1991-10-11 Air Liquide Procede et installation de production d'azote gazeux, et systeme de fourniture d'azote correspondant.
EP0454531B1 (fr) * 1990-04-20 1998-01-21 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé et dispositif d'élaboration d'azote ultra-pur
JP2721591B2 (ja) * 1990-11-30 1998-03-04 大同ほくさん株式会社 超高純度窒素製造装置
FR2670278B1 (fr) * 1990-12-06 1993-01-22 Air Liquide Procede et installation de distillation d'air en regime variable de production d'oxygene gazeux.
US5224336A (en) * 1991-06-20 1993-07-06 Air Products And Chemicals, Inc. Process and system for controlling a cryogenic air separation unit during rapid changes in production

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DE69312843T2 (de) 1998-03-12
EP0592323A1 (fr) 1994-04-13
DE69312843D1 (de) 1997-09-11
US5421164A (en) 1995-06-06
JPH06137755A (ja) 1994-05-20
EP0592323B1 (fr) 1997-08-06
FR2696821B1 (fr) 1994-11-10
FR2696821A1 (fr) 1994-04-15

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