KR930009109B1 - 실리콘 노즐 - Google Patents
실리콘 노즐 Download PDFInfo
- Publication number
- KR930009109B1 KR930009109B1 KR1019850007532A KR850007532A KR930009109B1 KR 930009109 B1 KR930009109 B1 KR 930009109B1 KR 1019850007532 A KR1019850007532 A KR 1019850007532A KR 850007532 A KR850007532 A KR 850007532A KR 930009109 B1 KR930009109 B1 KR 930009109B1
- Authority
- KR
- South Korea
- Prior art keywords
- cross
- sectional area
- section
- hole
- inlet
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title description 15
- 229910052710 silicon Inorganic materials 0.000 title description 14
- 239000010703 silicon Substances 0.000 title description 14
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 30
- 239000010410 layer Substances 0.000 description 20
- 238000005530 etching Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 13
- 239000012530 fluid Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Weting (AREA)
- Nozzles (AREA)
- Special Spraying Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US661,005 | 1984-10-13 | ||
US66100584A | 1984-10-15 | 1984-10-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR860003109A KR860003109A (ko) | 1986-05-19 |
KR930009109B1 true KR930009109B1 (ko) | 1993-09-23 |
Family
ID=24651804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019850007532A KR930009109B1 (ko) | 1984-10-15 | 1985-10-14 | 실리콘 노즐 |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0178596B2 (es) |
JP (1) | JPS6198558A (es) |
KR (1) | KR930009109B1 (es) |
AU (1) | AU582581B2 (es) |
CA (1) | CA1237020A (es) |
DE (1) | DE3581355D1 (es) |
ES (2) | ES8707144A1 (es) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100944884B1 (ko) * | 2007-11-01 | 2010-03-03 | 주식회사 알파켐 | 비충격 프린팅을 위한 노즐 및 이를 사용한 인쇄방법 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4791436A (en) * | 1987-11-17 | 1988-12-13 | Hewlett-Packard Company | Nozzle plate geometry for ink jet pens and method of manufacture |
DE4222140C2 (de) * | 1992-07-06 | 1994-06-16 | Heinzl Joachim | Aerostatisches Miniaturlager |
US6120131A (en) * | 1995-08-28 | 2000-09-19 | Lexmark International, Inc. | Method of forming an inkjet printhead nozzle structure |
US6183064B1 (en) | 1995-08-28 | 2001-02-06 | Lexmark International, Inc. | Method for singulating and attaching nozzle plates to printheads |
EP0985534A4 (en) * | 1997-05-14 | 2001-03-28 | Seiko Epson Corp | NOZZLE FORMING METHOD FOR INJECTORS AND MANUFACTURING METHOD OF INK JET HEAD |
EP0921004A3 (en) * | 1997-12-05 | 2000-04-26 | Canon Kabushiki Kaisha | Liquid discharge head, recording apparatus, and method for manufacturing liquid discharge heads |
US6491380B2 (en) * | 1997-12-05 | 2002-12-10 | Canon Kabushiki Kaisha | Liquid discharging head with common ink chamber positioned over a movable member |
JP2000198199A (ja) | 1997-12-05 | 2000-07-18 | Canon Inc | 液体吐出ヘッドおよびヘッドカートリッジおよび液体吐出装置および液体吐出ヘッドの製造方法 |
US6463656B1 (en) | 2000-06-29 | 2002-10-15 | Eastman Kodak Company | Laminate and gasket manfold for ink jet delivery systems and similar devices |
JP5407162B2 (ja) * | 2008-04-01 | 2014-02-05 | コニカミノルタ株式会社 | インクジェットヘッド、インクジェットヘッドを備えた塗布装置及びインクジェットヘッドの駆動方法 |
KR101291689B1 (ko) * | 2010-08-17 | 2013-08-01 | 엔젯 주식회사 | 정전기력을 이용하는 액적분사장치용 노즐 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USB789264I5 (es) * | 1969-01-06 | |||
JPS5040616B1 (es) * | 1970-03-18 | 1975-12-25 | ||
US3958255A (en) * | 1974-12-31 | 1976-05-18 | International Business Machines Corporation | Ink jet nozzle structure |
US3921916A (en) * | 1974-12-31 | 1975-11-25 | Ibm | Nozzles formed in monocrystalline silicon |
US3949410A (en) * | 1975-01-23 | 1976-04-06 | International Business Machines Corporation | Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith |
US4157935A (en) * | 1977-12-23 | 1979-06-12 | International Business Machines Corporation | Method for producing nozzle arrays for ink jet printers |
JPS5753366A (en) * | 1980-09-17 | 1982-03-30 | Ricoh Co Ltd | Nozzle plate for liquid jet apparatus |
JPS57116656A (en) * | 1981-01-14 | 1982-07-20 | Sharp Corp | Manufacture of orifice for ink jet printer |
JPS57182449A (en) * | 1981-05-07 | 1982-11-10 | Fuji Xerox Co Ltd | Forming method of ink jet multinozzle |
-
1985
- 1985-03-27 CA CA000477672A patent/CA1237020A/en not_active Expired
- 1985-10-02 AU AU48190/85A patent/AU582581B2/en not_active Expired
- 1985-10-11 DE DE8585112882T patent/DE3581355D1/de not_active Expired - Lifetime
- 1985-10-11 EP EP85112882A patent/EP0178596B2/en not_active Expired - Lifetime
- 1985-10-14 ES ES547845A patent/ES8707144A1/es not_active Expired
- 1985-10-14 KR KR1019850007532A patent/KR930009109B1/ko not_active IP Right Cessation
- 1985-10-15 JP JP60227956A patent/JPS6198558A/ja active Pending
-
1987
- 1987-04-13 ES ES1987296483U patent/ES296483Y/es not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100944884B1 (ko) * | 2007-11-01 | 2010-03-03 | 주식회사 알파켐 | 비충격 프린팅을 위한 노즐 및 이를 사용한 인쇄방법 |
Also Published As
Publication number | Publication date |
---|---|
ES547845A0 (es) | 1987-08-16 |
ES8707144A1 (es) | 1987-08-16 |
EP0178596B2 (en) | 1994-06-01 |
ES296483Y (es) | 1988-04-16 |
EP0178596A3 (en) | 1987-09-16 |
ES296483U (es) | 1987-10-16 |
KR860003109A (ko) | 1986-05-19 |
AU582581B2 (en) | 1989-04-06 |
EP0178596A2 (en) | 1986-04-23 |
DE3581355D1 (de) | 1991-02-21 |
AU4819085A (en) | 1986-04-24 |
EP0178596B1 (en) | 1991-01-16 |
CA1237020A (en) | 1988-05-24 |
JPS6198558A (ja) | 1986-05-16 |
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Legal Events
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A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 19980703 Year of fee payment: 6 |
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LAPS | Lapse due to unpaid annual fee |