DE3581355D1 - Siliziumduesenstruktur und herstellungsverfahren. - Google Patents

Siliziumduesenstruktur und herstellungsverfahren.

Info

Publication number
DE3581355D1
DE3581355D1 DE8585112882T DE3581355T DE3581355D1 DE 3581355 D1 DE3581355 D1 DE 3581355D1 DE 8585112882 T DE8585112882 T DE 8585112882T DE 3581355 T DE3581355 T DE 3581355T DE 3581355 D1 DE3581355 D1 DE 3581355D1
Authority
DE
Germany
Prior art keywords
production method
nozzle structure
silicone nozzle
silicone
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585112882T
Other languages
German (de)
English (en)
Inventor
Herbert A Waggener
Joseph C Zuercher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NCR International Inc
Original Assignee
AT&T Teletype Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24651804&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3581355(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by AT&T Teletype Corp filed Critical AT&T Teletype Corp
Application granted granted Critical
Publication of DE3581355D1 publication Critical patent/DE3581355D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Weting (AREA)
  • Nozzles (AREA)
  • Special Spraying Apparatus (AREA)
DE8585112882T 1984-10-15 1985-10-11 Siliziumduesenstruktur und herstellungsverfahren. Expired - Lifetime DE3581355D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66100584A 1984-10-15 1984-10-15

Publications (1)

Publication Number Publication Date
DE3581355D1 true DE3581355D1 (de) 1991-02-21

Family

ID=24651804

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585112882T Expired - Lifetime DE3581355D1 (de) 1984-10-15 1985-10-11 Siliziumduesenstruktur und herstellungsverfahren.

Country Status (7)

Country Link
EP (1) EP0178596B2 (es)
JP (1) JPS6198558A (es)
KR (1) KR930009109B1 (es)
AU (1) AU582581B2 (es)
CA (1) CA1237020A (es)
DE (1) DE3581355D1 (es)
ES (2) ES8707144A1 (es)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4791436A (en) * 1987-11-17 1988-12-13 Hewlett-Packard Company Nozzle plate geometry for ink jet pens and method of manufacture
DE4222140C2 (de) * 1992-07-06 1994-06-16 Heinzl Joachim Aerostatisches Miniaturlager
US6120131A (en) * 1995-08-28 2000-09-19 Lexmark International, Inc. Method of forming an inkjet printhead nozzle structure
US6183064B1 (en) 1995-08-28 2001-02-06 Lexmark International, Inc. Method for singulating and attaching nozzle plates to printheads
WO1998051506A1 (fr) * 1997-05-14 1998-11-19 Seiko Epson Corporation Procede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre
US6491380B2 (en) * 1997-12-05 2002-12-10 Canon Kabushiki Kaisha Liquid discharging head with common ink chamber positioned over a movable member
EP0921004A3 (en) * 1997-12-05 2000-04-26 Canon Kabushiki Kaisha Liquid discharge head, recording apparatus, and method for manufacturing liquid discharge heads
JP2000198199A (ja) 1997-12-05 2000-07-18 Canon Inc 液体吐出ヘッドおよびヘッドカートリッジおよび液体吐出装置および液体吐出ヘッドの製造方法
US6463656B1 (en) * 2000-06-29 2002-10-15 Eastman Kodak Company Laminate and gasket manfold for ink jet delivery systems and similar devices
KR100944884B1 (ko) * 2007-11-01 2010-03-03 주식회사 알파켐 비충격 프린팅을 위한 노즐 및 이를 사용한 인쇄방법
JP5407162B2 (ja) * 2008-04-01 2014-02-05 コニカミノルタ株式会社 インクジェットヘッド、インクジェットヘッドを備えた塗布装置及びインクジェットヘッドの駆動方法
KR101291689B1 (ko) * 2010-08-17 2013-08-01 엔젯 주식회사 정전기력을 이용하는 액적분사장치용 노즐

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USB789264I5 (es) * 1969-01-06
JPS5040616B1 (es) * 1970-03-18 1975-12-25
US3921916A (en) * 1974-12-31 1975-11-25 Ibm Nozzles formed in monocrystalline silicon
US3958255A (en) * 1974-12-31 1976-05-18 International Business Machines Corporation Ink jet nozzle structure
US3949410A (en) * 1975-01-23 1976-04-06 International Business Machines Corporation Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith
US4157935A (en) * 1977-12-23 1979-06-12 International Business Machines Corporation Method for producing nozzle arrays for ink jet printers
JPS5753366A (en) * 1980-09-17 1982-03-30 Ricoh Co Ltd Nozzle plate for liquid jet apparatus
JPS57116656A (en) * 1981-01-14 1982-07-20 Sharp Corp Manufacture of orifice for ink jet printer
JPS57182449A (en) * 1981-05-07 1982-11-10 Fuji Xerox Co Ltd Forming method of ink jet multinozzle

Also Published As

Publication number Publication date
ES296483Y (es) 1988-04-16
AU4819085A (en) 1986-04-24
EP0178596A3 (en) 1987-09-16
JPS6198558A (ja) 1986-05-16
ES8707144A1 (es) 1987-08-16
ES296483U (es) 1987-10-16
EP0178596B1 (en) 1991-01-16
KR930009109B1 (ko) 1993-09-23
EP0178596A2 (en) 1986-04-23
EP0178596B2 (en) 1994-06-01
ES547845A0 (es) 1987-08-16
AU582581B2 (en) 1989-04-06
KR860003109A (ko) 1986-05-19
CA1237020A (en) 1988-05-24

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN

8327 Change in the person/name/address of the patent owner

Owner name: NCR INTERNATIONAL, INC., DAYTON, OHIO, US

8328 Change in the person/name/address of the agent

Free format text: V. BEZOLD & SOZIEN, 80799 MUENCHEN

8320 Willingness to grant licences declared (paragraph 23)
8321 Willingness to grant licences paragraph 23 withdrawn