CA1237020A - Silicon nozzle structure and method of manufacture - Google Patents
Silicon nozzle structure and method of manufactureInfo
- Publication number
- CA1237020A CA1237020A CA000477672A CA477672A CA1237020A CA 1237020 A CA1237020 A CA 1237020A CA 000477672 A CA000477672 A CA 000477672A CA 477672 A CA477672 A CA 477672A CA 1237020 A CA1237020 A CA 1237020A
- Authority
- CA
- Canada
- Prior art keywords
- nozzle
- silicon
- exit
- entrance
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 29
- 229910052710 silicon Inorganic materials 0.000 title claims description 29
- 239000010703 silicon Substances 0.000 title claims description 29
- 238000004519 manufacturing process Methods 0.000 title description 3
- 239000012528 membrane Substances 0.000 claims abstract description 16
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 10
- 238000005530 etching Methods 0.000 claims description 33
- 239000010410 layer Substances 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 6
- 230000004888 barrier function Effects 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 239000002344 surface layer Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 7
- 238000000576 coating method Methods 0.000 claims 7
- 239000004020 conductor Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 239000011253 protective coating Substances 0.000 claims 1
- 239000011241 protective layer Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 description 4
- 239000003518 caustics Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PHTXVQQRWJXYPP-UHFFFAOYSA-N ethyltrifluoromethylaminoindane Chemical compound C1=C(C(F)(F)F)C=C2CC(NCC)CC2=C1 PHTXVQQRWJXYPP-UHFFFAOYSA-N 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Weting (AREA)
- Nozzles (AREA)
- Special Spraying Apparatus (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US661,005 | 1984-10-13 | ||
| US66100584A | 1984-10-15 | 1984-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1237020A true CA1237020A (en) | 1988-05-24 |
Family
ID=24651804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000477672A Expired CA1237020A (en) | 1984-10-13 | 1985-03-27 | Silicon nozzle structure and method of manufacture |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP0178596B2 (es) |
| JP (1) | JPS6198558A (es) |
| KR (1) | KR930009109B1 (es) |
| AU (1) | AU582581B2 (es) |
| CA (1) | CA1237020A (es) |
| DE (1) | DE3581355D1 (es) |
| ES (2) | ES8707144A1 (es) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4791436A (en) * | 1987-11-17 | 1988-12-13 | Hewlett-Packard Company | Nozzle plate geometry for ink jet pens and method of manufacture |
| DE4222140C2 (de) * | 1992-07-06 | 1994-06-16 | Heinzl Joachim | Aerostatisches Miniaturlager |
| US6120131A (en) * | 1995-08-28 | 2000-09-19 | Lexmark International, Inc. | Method of forming an inkjet printhead nozzle structure |
| US6183064B1 (en) | 1995-08-28 | 2001-02-06 | Lexmark International, Inc. | Method for singulating and attaching nozzle plates to printheads |
| WO1998051506A1 (fr) * | 1997-05-14 | 1998-11-19 | Seiko Epson Corporation | Procede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre |
| US6491380B2 (en) * | 1997-12-05 | 2002-12-10 | Canon Kabushiki Kaisha | Liquid discharging head with common ink chamber positioned over a movable member |
| EP0921004A3 (en) * | 1997-12-05 | 2000-04-26 | Canon Kabushiki Kaisha | Liquid discharge head, recording apparatus, and method for manufacturing liquid discharge heads |
| JP2000198199A (ja) | 1997-12-05 | 2000-07-18 | Canon Inc | 液体吐出ヘッドおよびヘッドカートリッジおよび液体吐出装置および液体吐出ヘッドの製造方法 |
| US6463656B1 (en) * | 2000-06-29 | 2002-10-15 | Eastman Kodak Company | Laminate and gasket manfold for ink jet delivery systems and similar devices |
| KR100944884B1 (ko) * | 2007-11-01 | 2010-03-03 | 주식회사 알파켐 | 비충격 프린팅을 위한 노즐 및 이를 사용한 인쇄방법 |
| JP5407162B2 (ja) * | 2008-04-01 | 2014-02-05 | コニカミノルタ株式会社 | インクジェットヘッド、インクジェットヘッドを備えた塗布装置及びインクジェットヘッドの駆動方法 |
| KR101291689B1 (ko) * | 2010-08-17 | 2013-08-01 | 엔젯 주식회사 | 정전기력을 이용하는 액적분사장치용 노즐 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USB789264I5 (es) * | 1969-01-06 | |||
| JPS5040616B1 (es) * | 1970-03-18 | 1975-12-25 | ||
| US3921916A (en) * | 1974-12-31 | 1975-11-25 | Ibm | Nozzles formed in monocrystalline silicon |
| US3958255A (en) * | 1974-12-31 | 1976-05-18 | International Business Machines Corporation | Ink jet nozzle structure |
| US3949410A (en) * | 1975-01-23 | 1976-04-06 | International Business Machines Corporation | Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith |
| US4157935A (en) * | 1977-12-23 | 1979-06-12 | International Business Machines Corporation | Method for producing nozzle arrays for ink jet printers |
| JPS5753366A (en) * | 1980-09-17 | 1982-03-30 | Ricoh Co Ltd | Nozzle plate for liquid jet apparatus |
| JPS57116656A (en) * | 1981-01-14 | 1982-07-20 | Sharp Corp | Manufacture of orifice for ink jet printer |
| JPS57182449A (en) * | 1981-05-07 | 1982-11-10 | Fuji Xerox Co Ltd | Forming method of ink jet multinozzle |
-
1985
- 1985-03-27 CA CA000477672A patent/CA1237020A/en not_active Expired
- 1985-10-02 AU AU48190/85A patent/AU582581B2/en not_active Expired
- 1985-10-11 DE DE8585112882T patent/DE3581355D1/de not_active Expired - Lifetime
- 1985-10-11 EP EP85112882A patent/EP0178596B2/en not_active Expired - Lifetime
- 1985-10-14 KR KR1019850007532A patent/KR930009109B1/ko not_active IP Right Cessation
- 1985-10-14 ES ES547845A patent/ES8707144A1/es not_active Expired
- 1985-10-15 JP JP60227956A patent/JPS6198558A/ja active Pending
-
1987
- 1987-04-13 ES ES1987296483U patent/ES296483Y/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| ES296483Y (es) | 1988-04-16 |
| AU4819085A (en) | 1986-04-24 |
| EP0178596A3 (en) | 1987-09-16 |
| JPS6198558A (ja) | 1986-05-16 |
| ES8707144A1 (es) | 1987-08-16 |
| ES296483U (es) | 1987-10-16 |
| EP0178596B1 (en) | 1991-01-16 |
| DE3581355D1 (de) | 1991-02-21 |
| KR930009109B1 (ko) | 1993-09-23 |
| EP0178596A2 (en) | 1986-04-23 |
| EP0178596B2 (en) | 1994-06-01 |
| ES547845A0 (es) | 1987-08-16 |
| AU582581B2 (en) | 1989-04-06 |
| KR860003109A (ko) | 1986-05-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |