ES8707144A1 - Procedimiento para la produccion de estructuras de boquillasde silicio - Google Patents
Procedimiento para la produccion de estructuras de boquillasde silicioInfo
- Publication number
- ES8707144A1 ES8707144A1 ES547845A ES547845A ES8707144A1 ES 8707144 A1 ES8707144 A1 ES 8707144A1 ES 547845 A ES547845 A ES 547845A ES 547845 A ES547845 A ES 547845A ES 8707144 A1 ES8707144 A1 ES 8707144A1
- Authority
- ES
- Spain
- Prior art keywords
- manufacture
- nozzle structures
- opening
- silicon nozzle
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 239000012528 membrane Substances 0.000 abstract 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Weting (AREA)
- Nozzles (AREA)
- Special Spraying Apparatus (AREA)
Abstract
METODO DE PRODUCIR ESTRUCTURAS DE BOQUILLAS DE SILICIO. CONSISTE EN: FORMAR UNA CAPA SUPERFICIAL SOBRE LA PRIMERA SUPERFICIE PRINCIPAL (14) DE LA SECCION (10) DE SILICIO; MORDENTAR ANISOTROPICAMENTE UNA CAVIDAD (12) A PARTIR DE LA SEGUNDA SUPERFICIE (16) DE LA SECCION DE SILICIO HACIA LA CAPA (17), ESTABLECIENDOSE UNA BARRERA ELECTROQUIMICA EN LA INTERFASE SILICIO/CAPA PARA DETENER EL MORDENTADO, REVISTIENDO LAS SUPERFICIES (16, 17) CON UN MATERIAL RESISTENTE AL MORDENTADO; Y MORDENTAR ANISOTROPICAMENE UN PASO (13) A TRAVES DE LA CAPA (17) DESDE LA PRIMERA SUPERFICIE DE LA SECCION DE SILICIO. TIENE UTILIDAD EN SISTEMAS DE IMPRESION CON CHORRO DE TINTA DE BOQUILLAS MULTIPLES.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US66100584A | 1984-10-15 | 1984-10-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
ES8707144A1 true ES8707144A1 (es) | 1987-08-16 |
ES547845A0 ES547845A0 (es) | 1987-08-16 |
Family
ID=24651804
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES547845A Expired ES8707144A1 (es) | 1984-10-15 | 1985-10-14 | Procedimiento para la produccion de estructuras de boquillasde silicio |
ES1987296483U Expired ES296483Y (es) | 1984-10-15 | 1987-04-13 | Boquilla para impresion por chorro de tinta |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES1987296483U Expired ES296483Y (es) | 1984-10-15 | 1987-04-13 | Boquilla para impresion por chorro de tinta |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0178596B2 (es) |
JP (1) | JPS6198558A (es) |
KR (1) | KR930009109B1 (es) |
AU (1) | AU582581B2 (es) |
CA (1) | CA1237020A (es) |
DE (1) | DE3581355D1 (es) |
ES (2) | ES8707144A1 (es) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4791436A (en) * | 1987-11-17 | 1988-12-13 | Hewlett-Packard Company | Nozzle plate geometry for ink jet pens and method of manufacture |
DE4222140C2 (de) * | 1992-07-06 | 1994-06-16 | Heinzl Joachim | Aerostatisches Miniaturlager |
US6120131A (en) * | 1995-08-28 | 2000-09-19 | Lexmark International, Inc. | Method of forming an inkjet printhead nozzle structure |
US6183064B1 (en) | 1995-08-28 | 2001-02-06 | Lexmark International, Inc. | Method for singulating and attaching nozzle plates to printheads |
WO1998051506A1 (fr) * | 1997-05-14 | 1998-11-19 | Seiko Epson Corporation | Procede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre |
US6491380B2 (en) * | 1997-12-05 | 2002-12-10 | Canon Kabushiki Kaisha | Liquid discharging head with common ink chamber positioned over a movable member |
EP0921004A3 (en) * | 1997-12-05 | 2000-04-26 | Canon Kabushiki Kaisha | Liquid discharge head, recording apparatus, and method for manufacturing liquid discharge heads |
JP2000198199A (ja) | 1997-12-05 | 2000-07-18 | Canon Inc | 液体吐出ヘッドおよびヘッドカートリッジおよび液体吐出装置および液体吐出ヘッドの製造方法 |
US6463656B1 (en) * | 2000-06-29 | 2002-10-15 | Eastman Kodak Company | Laminate and gasket manfold for ink jet delivery systems and similar devices |
KR100944884B1 (ko) * | 2007-11-01 | 2010-03-03 | 주식회사 알파켐 | 비충격 프린팅을 위한 노즐 및 이를 사용한 인쇄방법 |
JP5407162B2 (ja) * | 2008-04-01 | 2014-02-05 | コニカミノルタ株式会社 | インクジェットヘッド、インクジェットヘッドを備えた塗布装置及びインクジェットヘッドの駆動方法 |
KR101291689B1 (ko) * | 2010-08-17 | 2013-08-01 | 엔젯 주식회사 | 정전기력을 이용하는 액적분사장치용 노즐 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USB789264I5 (es) * | 1969-01-06 | |||
JPS5040616B1 (es) * | 1970-03-18 | 1975-12-25 | ||
US3921916A (en) * | 1974-12-31 | 1975-11-25 | Ibm | Nozzles formed in monocrystalline silicon |
US3958255A (en) * | 1974-12-31 | 1976-05-18 | International Business Machines Corporation | Ink jet nozzle structure |
US3949410A (en) * | 1975-01-23 | 1976-04-06 | International Business Machines Corporation | Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith |
US4157935A (en) * | 1977-12-23 | 1979-06-12 | International Business Machines Corporation | Method for producing nozzle arrays for ink jet printers |
JPS5753366A (en) * | 1980-09-17 | 1982-03-30 | Ricoh Co Ltd | Nozzle plate for liquid jet apparatus |
JPS57116656A (en) * | 1981-01-14 | 1982-07-20 | Sharp Corp | Manufacture of orifice for ink jet printer |
JPS57182449A (en) * | 1981-05-07 | 1982-11-10 | Fuji Xerox Co Ltd | Forming method of ink jet multinozzle |
-
1985
- 1985-03-27 CA CA000477672A patent/CA1237020A/en not_active Expired
- 1985-10-02 AU AU48190/85A patent/AU582581B2/en not_active Expired
- 1985-10-11 DE DE8585112882T patent/DE3581355D1/de not_active Expired - Lifetime
- 1985-10-11 EP EP85112882A patent/EP0178596B2/en not_active Expired - Lifetime
- 1985-10-14 KR KR1019850007532A patent/KR930009109B1/ko not_active IP Right Cessation
- 1985-10-14 ES ES547845A patent/ES8707144A1/es not_active Expired
- 1985-10-15 JP JP60227956A patent/JPS6198558A/ja active Pending
-
1987
- 1987-04-13 ES ES1987296483U patent/ES296483Y/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
ES296483Y (es) | 1988-04-16 |
AU4819085A (en) | 1986-04-24 |
EP0178596A3 (en) | 1987-09-16 |
JPS6198558A (ja) | 1986-05-16 |
ES296483U (es) | 1987-10-16 |
EP0178596B1 (en) | 1991-01-16 |
DE3581355D1 (de) | 1991-02-21 |
KR930009109B1 (ko) | 1993-09-23 |
EP0178596A2 (en) | 1986-04-23 |
EP0178596B2 (en) | 1994-06-01 |
ES547845A0 (es) | 1987-08-16 |
AU582581B2 (en) | 1989-04-06 |
KR860003109A (ko) | 1986-05-19 |
CA1237020A (en) | 1988-05-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD1A | Patent lapsed |
Effective date: 20020506 |