DE68918982T2 - Verfahren zur Trennung integrierter Schaltkreise auf einem Substrat. - Google Patents
Verfahren zur Trennung integrierter Schaltkreise auf einem Substrat.Info
- Publication number
- DE68918982T2 DE68918982T2 DE68918982T DE68918982T DE68918982T2 DE 68918982 T2 DE68918982 T2 DE 68918982T2 DE 68918982 T DE68918982 T DE 68918982T DE 68918982 T DE68918982 T DE 68918982T DE 68918982 T2 DE68918982 T2 DE 68918982T2
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- integrated circuits
- separating integrated
- separating
- circuits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/928—Front and rear surface processing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/185,600 US4822755A (en) | 1988-04-25 | 1988-04-25 | Method of fabricating large area semiconductor arrays |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68918982D1 DE68918982D1 (de) | 1994-12-01 |
DE68918982T2 true DE68918982T2 (de) | 1995-04-27 |
Family
ID=22681669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68918982T Expired - Lifetime DE68918982T2 (de) | 1988-04-25 | 1989-04-24 | Verfahren zur Trennung integrierter Schaltkreise auf einem Substrat. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4822755A (de) |
EP (1) | EP0339912B1 (de) |
JP (1) | JPH01313956A (de) |
DE (1) | DE68918982T2 (de) |
Families Citing this family (58)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5195371A (en) * | 1988-01-13 | 1993-03-23 | The Charles Stark Draper Laboratory, Inc. | Semiconductor chip transducer |
US5067233A (en) * | 1989-07-24 | 1991-11-26 | Grumman Aerospace Corporation | Method of forming an integrated circuit module |
US4966862A (en) * | 1989-08-28 | 1990-10-30 | Cree Research, Inc. | Method of production of light emitting diodes |
US5053836A (en) * | 1989-11-21 | 1991-10-01 | Eastman Kodak Company | Cleaving of diode arrays with scribing channels |
US4997793A (en) * | 1989-11-21 | 1991-03-05 | Eastman Kodak Company | Method of improving cleaving of diode arrays |
US4997792A (en) * | 1989-11-21 | 1991-03-05 | Eastman Kodak Company | Method for separation of diode array chips during fabrication thereof |
US4961821A (en) * | 1989-11-22 | 1990-10-09 | Xerox Corporation | Ode through holes and butt edges without edge dicing |
DE4012080A1 (de) * | 1990-04-14 | 1991-10-17 | Bosch Gmbh Robert | Verfahren zum aufbau von mikromechanischen sensoren |
US5041190A (en) * | 1990-05-16 | 1991-08-20 | Xerox Corporation | Method of fabricating channel plates and ink jet printheads containing channel plates |
US5272114A (en) * | 1990-12-10 | 1993-12-21 | Amoco Corporation | Method for cleaving a semiconductor crystal body |
DE4114660C2 (de) * | 1991-05-06 | 1997-09-18 | Telefunken Microelectron | Verfahren zur Herstellung glaspassivierter Halbleiterbauelemente |
US5192959A (en) * | 1991-06-03 | 1993-03-09 | Xerox Corporation | Alignment of pagewidth bars |
US5160403A (en) * | 1991-08-09 | 1992-11-03 | Xerox Corporation | Precision diced aligning surfaces for devices such as ink jet printheads |
US5198054A (en) * | 1991-08-12 | 1993-03-30 | Xerox Corporation | Method of making compensated collinear reading or writing bar arrays assembled from subunits |
US5221397A (en) * | 1992-11-02 | 1993-06-22 | Xerox Corporation | Fabrication of reading or writing bar arrays assembled from subunits |
DE4317721C1 (de) * | 1993-05-27 | 1994-07-21 | Siemens Ag | Verfahren zur Vereinzelung von Chips aus einem Wafer |
US5580831A (en) * | 1993-07-28 | 1996-12-03 | Fujitsu Limited | Sawcut method of forming alignment marks on two faces of a substrate |
JPH07186388A (ja) * | 1993-11-22 | 1995-07-25 | Xerox Corp | 大規模配列インク・ジェット・プリントヘッドおよびその製造方法 |
US5691248A (en) * | 1995-07-26 | 1997-11-25 | International Business Machines Corporation | Methods for precise definition of integrated circuit chip edges |
US5915370A (en) * | 1996-03-13 | 1999-06-29 | Micron Technology, Inc. | Saw for segmenting a semiconductor wafer |
US5882532A (en) * | 1996-05-31 | 1999-03-16 | Hewlett-Packard Company | Fabrication of single-crystal silicon structures using sacrificial-layer wafer bonding |
US5940685A (en) * | 1996-10-28 | 1999-08-17 | The United States Of America As Represented By The Secretary Of The Air Force | Fabrication of UV-sensitive back illuminated CCD image sensors |
US6448153B2 (en) * | 1996-10-29 | 2002-09-10 | Tru-Si Technologies, Inc. | Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners |
US6498074B2 (en) | 1996-10-29 | 2002-12-24 | Tru-Si Technologies, Inc. | Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners |
US6882030B2 (en) | 1996-10-29 | 2005-04-19 | Tru-Si Technologies, Inc. | Integrated circuit structures with a conductor formed in a through hole in a semiconductor substrate and protruding from a surface of the substrate |
KR100377033B1 (ko) * | 1996-10-29 | 2003-03-26 | 트러시 테크날러지스 엘엘시 | Ic 및 그 제조방법 |
US6290861B1 (en) * | 1997-07-15 | 2001-09-18 | Silverbrook Research Pty Ltd | Method of manufacture of a conductive PTFE bend actuator vented ink jet printer |
US5972781A (en) * | 1997-09-30 | 1999-10-26 | Siemens Aktiengesellschaft | Method for producing semiconductor chips |
US6339881B1 (en) * | 1997-11-17 | 2002-01-22 | Xerox Corporation | Ink jet printhead and method for its manufacture |
US6013540A (en) * | 1998-05-01 | 2000-01-11 | Lucent Technologies, Inc. | Laser diode with substrate-side protection |
US6033489A (en) * | 1998-05-29 | 2000-03-07 | Fairchild Semiconductor Corp. | Semiconductor substrate and method of making same |
US6449831B1 (en) * | 1998-06-19 | 2002-09-17 | Lexmark International, Inc | Process for making a heater chip module |
US6131263A (en) * | 1998-10-26 | 2000-10-17 | Lucent Technologies Inc. | Method and apparatus for releasing laser bars after facet coating |
US20020118253A1 (en) * | 2000-03-21 | 2002-08-29 | Nec Corporation | Ink jet head having improved pressure chamber and its manufacturing method |
JP2001260366A (ja) | 2000-03-21 | 2001-09-25 | Nec Corp | インクジェット記録ヘッドおよびその製造方法 |
EP1148544A1 (de) * | 2000-04-19 | 2001-10-24 | Infineon Technologies AG | Verfahren zum Dünnen eines Substrats |
US6425971B1 (en) * | 2000-05-10 | 2002-07-30 | Silverbrook Research Pty Ltd | Method of fabricating devices incorporating microelectromechanical systems using UV curable tapes |
US6402301B1 (en) | 2000-10-27 | 2002-06-11 | Lexmark International, Inc | Ink jet printheads and methods therefor |
US6629756B2 (en) | 2001-02-20 | 2003-10-07 | Lexmark International, Inc. | Ink jet printheads and methods therefor |
US6982184B2 (en) * | 2001-05-02 | 2006-01-03 | Silverbrook Research Pty Ltd | Method of fabricating MEMS devices on a silicon wafer |
DE10122839B4 (de) * | 2001-05-11 | 2007-11-29 | Qimonda Ag | Verfahren zum Vereinzeln von Halbleiterstrukturen sowie zum Vereinzeln vorbereitetes Halbleitersubstrat |
US6679587B2 (en) * | 2001-10-31 | 2004-01-20 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with a composite substrate |
US6902867B2 (en) * | 2002-10-02 | 2005-06-07 | Lexmark International, Inc. | Ink jet printheads and methods therefor |
US20050023260A1 (en) * | 2003-01-10 | 2005-02-03 | Shinya Takyu | Semiconductor wafer dividing apparatus and semiconductor device manufacturing method |
DE102005046479B4 (de) * | 2005-09-28 | 2008-12-18 | Infineon Technologies Austria Ag | Verfahren zum Spalten von spröden Materialien mittels Trenching Technologie |
EP2373488B1 (de) * | 2008-12-02 | 2013-02-27 | OCE-Technologies B.V. | Verfahren zur herstellung eines tintenstrahldruckkopfs |
US8118405B2 (en) * | 2008-12-18 | 2012-02-21 | Eastman Kodak Company | Buttable printhead module and pagewide printhead |
US10244181B2 (en) | 2009-02-17 | 2019-03-26 | Trilumina Corp. | Compact multi-zone infrared laser illuminator |
US10038304B2 (en) | 2009-02-17 | 2018-07-31 | Trilumina Corp. | Laser arrays for variable optical properties |
US8995493B2 (en) | 2009-02-17 | 2015-03-31 | Trilumina Corp. | Microlenses for multibeam arrays of optoelectronic devices for high frequency operation |
US20130223846A1 (en) | 2009-02-17 | 2013-08-29 | Trilumina Corporation | High speed free-space optical communications |
US8995485B2 (en) | 2009-02-17 | 2015-03-31 | Trilumina Corp. | High brightness pulsed VCSEL sources |
WO2011075609A1 (en) * | 2009-12-19 | 2011-06-23 | Trilumina Corporation | System and method for combining laser arrays for digital outputs |
US8979338B2 (en) | 2009-12-19 | 2015-03-17 | Trilumina Corp. | System for combining laser array outputs into a single beam carrying digital data |
EP2434528A1 (de) * | 2010-09-28 | 2012-03-28 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Aktiver Träger zum Tragen eines Wafer und Freisetzungsverfahren |
US11095365B2 (en) | 2011-08-26 | 2021-08-17 | Lumentum Operations Llc | Wide-angle illuminator module |
JP2015177061A (ja) * | 2014-03-14 | 2015-10-05 | 株式会社東芝 | 半導体装置の製造方法および半導体装置 |
US10336074B1 (en) | 2018-01-18 | 2019-07-02 | Rf Printing Technologies | Inkjet printhead with hierarchically aligned printhead units |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3689389A (en) * | 1969-12-16 | 1972-09-05 | Bell Telephone Labor Inc | Electrochemically controlled shaping of semiconductors |
JPS5124190B2 (de) * | 1971-08-28 | 1976-07-22 | ||
JPS4934280A (de) * | 1972-07-28 | 1974-03-29 | ||
JPS5245879A (en) * | 1975-10-09 | 1977-04-11 | Sanyo Electric Co Ltd | Method of dividing semiconductor element |
JPS5325350A (en) * | 1976-08-23 | 1978-03-09 | Hitachi Ltd | Dicing method of semiconductor substrates |
JPS5591138A (en) * | 1978-12-27 | 1980-07-10 | Nec Corp | Die forming of semiconductor device |
US4295924A (en) * | 1979-12-17 | 1981-10-20 | International Business Machines Corporation | Method for providing self-aligned conductor in a V-groove device |
US4358340A (en) * | 1980-07-14 | 1982-11-09 | Texas Instruments Incorporated | Submicron patterning without using submicron lithographic technique |
US4409319A (en) * | 1981-07-15 | 1983-10-11 | International Business Machines Corporation | Electron beam exposed positive resist mask process |
JPS58171832A (ja) * | 1982-03-31 | 1983-10-08 | Toshiba Corp | 半導体装置の製造方法 |
DE3275447D1 (en) * | 1982-07-03 | 1987-03-19 | Ibm Deutschland | Process for the formation of grooves having essentially vertical lateral silicium walls by reactive ion etching |
JPS60157236A (ja) * | 1984-01-25 | 1985-08-17 | Matsushita Electric Ind Co Ltd | ダイシング法 |
US4542397A (en) * | 1984-04-12 | 1985-09-17 | Xerox Corporation | Self aligning small scale integrated circuit semiconductor chips to form large area arrays |
US4526631A (en) * | 1984-06-25 | 1985-07-02 | International Business Machines Corporation | Method for forming a void free isolation pattern utilizing etch and refill techniques |
JPS6167243A (ja) * | 1984-09-10 | 1986-04-07 | Matsushita Electric Ind Co Ltd | ダイシング法 |
JPS61216338A (ja) * | 1985-03-20 | 1986-09-26 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
US4604161A (en) * | 1985-05-02 | 1986-08-05 | Xerox Corporation | Method of fabricating image sensor arrays |
US4612554A (en) * | 1985-07-29 | 1986-09-16 | Xerox Corporation | High density thermal ink jet printhead |
US4661201A (en) * | 1985-09-09 | 1987-04-28 | Cts Corporation | Preferential etching of a piezoelectric material |
JPS62174941A (ja) * | 1986-01-28 | 1987-07-31 | Nec Corp | 半導体集積回路 |
US4670092A (en) * | 1986-04-18 | 1987-06-02 | Rockwell International Corporation | Method of fabricating a cantilever beam for a monolithic accelerometer |
US4729971A (en) * | 1987-03-31 | 1988-03-08 | Microwave Semiconductor Corporation | Semiconductor wafer dicing techniques |
-
1988
- 1988-04-25 US US07/185,600 patent/US4822755A/en not_active Expired - Lifetime
-
1989
- 1989-04-17 JP JP1097247A patent/JPH01313956A/ja active Granted
- 1989-04-24 DE DE68918982T patent/DE68918982T2/de not_active Expired - Lifetime
- 1989-04-24 EP EP89304072A patent/EP0339912B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE68918982D1 (de) | 1994-12-01 |
JPH01313956A (ja) | 1989-12-19 |
EP0339912B1 (de) | 1994-10-26 |
EP0339912A3 (en) | 1990-02-07 |
JPH0532905B2 (de) | 1993-05-18 |
US4822755A (en) | 1989-04-18 |
EP0339912A2 (de) | 1989-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |