KR910005380A - 화학기상성장장치 및 방법 - Google Patents

화학기상성장장치 및 방법 Download PDF

Info

Publication number
KR910005380A
KR910005380A KR1019900012735A KR900012735A KR910005380A KR 910005380 A KR910005380 A KR 910005380A KR 1019900012735 A KR1019900012735 A KR 1019900012735A KR 900012735 A KR900012735 A KR 900012735A KR 910005380 A KR910005380 A KR 910005380A
Authority
KR
South Korea
Prior art keywords
substrate
chemical vapor
gas
reaction chamber
raw material
Prior art date
Application number
KR1019900012735A
Other languages
English (en)
Other versions
KR940001645B1 (ko
Inventor
다쓰시 하라
노부히로 미사와
도시야 스즈끼
다까유끼 오오바
후미다께 미에노
아끼오 야마구찌
Original Assignee
세끼자와 다다시
후지쓰 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세끼자와 다다시, 후지쓰 가부시끼가이샤 filed Critical 세끼자와 다다시
Publication of KR910005380A publication Critical patent/KR910005380A/ko
Application granted granted Critical
Publication of KR940001645B1 publication Critical patent/KR940001645B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45517—Confinement of gases to vicinity of substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45587—Mechanical means for changing the gas flow
    • C23C16/45591—Fixed means, e.g. wings, baffles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

내용 없음

Description

화학기상성장장치 및 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 제1실시예에 의한 CVD 장치의 구조를 나타내는 개략도.

Claims (12)

  1. 화학기상성장공정을 수행하는 공간을 한정하며 또한 배기용 배기유니트(37)에 연결하기에 적합한 배기구(32,37a)를 갖고 있는 반응실(36)과, 재료막을 성정시킬 기판(33)을 고정시키기위해 상기 반응실내에 구성되는 고정수단(34)과, 상기 고정수단상에 기판을 고정시키기위한 고정수단을 제어되는 온도로 가열하기위한 히터수단(35)과, 상기 반응실내로 하나이상의 원료가스들을 도입하기위해 상기 반응실내에 구성되는 가스인입수단(1,1a-1c)과, 상기 원료가스는 기판의 표면부근에서 행해지는 화학반응시 재료막을 생성하는 반응제종들을 포함하며, 그리고 상기 반응실내의 원료 가스의 분산을 제어하기위해 상기 반응실내의 가스인입수단상에 구성되는 원료가스 분산수단(2,2')를 포함하는 기판의 일부분상에 선택적으로 재료를 성장시키기위한 화학기상성장장치에서, 상기 원료가스 분산수단은 상기 반응실의 공간내에서 기판을 에워싸는 부공간(2a)을 한정하되, 기판의 표면에 수직한 방향에서 거리(D)만큼 격리시키고, 상기 거리는 화학기상성장공정을 행하는 조건하에서 반응실의 공간내부에 실현된 원료가스의 평균 자유 공정의 약 1/2 이하로 하며, 또한 상기 기판의 표면에서의 화학반응의 결과로서 형성되는 부생성물 원료가스들을 자유로이 통과시키기 위해 상기 원료가스 분산수단내부에 부공간을 상기 반응실의 나머지 공간과 유통시키기 위한 개구(2c)가 형성되어 있는 것이 특징인 화학기상성장장치.
  2. 제1항에 있어서, 상기 가스인입수단은 반응실(36)내로 연장되는 튜브(1)를 포함하며, 상기 원료가스 분산수단은 상기 튜브를 통해 부공간(2a)내로 도입되어 기판(33)에 대해 다시 화학반응을 시킴이 없이 기판의 표면에서 반사되도록 칼라부재로서 튜브상에 구성되는 반사판(2,2')을 포함하는 것이 특징인 화학기상성장장치.
  3. 제2항에서, 상기 반사판(2)은 상기 반응실내에 도입된 원료가스와 실질적으로 반응하지 않는 물질로 된 것이 특징인 화학기상 성장장치.
  4. 제2 또는 3항에서, 상기 반사판(2)은 산화실리콘으로된 것이 특징인 화학기상성장장치.
  5. 제2항에서, 상기 반사판(2)은 기판(33)과 대향하는 오목내면(2b)을 갖는 것이 특징인 화학기상성장장치.
  6. 제2항에서, 상기 반사판(2')은 기판(33)과 대향하는 평평한 표면을 갖는 것이 특징인 화학기상성장장치.
  7. 제2항에서, 상기 반사판은 기판이 균일하게 가열되도록 기판으로 다시 적외선을 반사시키기 위한 반사수단을 더 포함하는 것이 특징인 화학기상성장장치.
  8. 제2항에서, 상기 반사수단은 상기 기판에 대향하는 상기 반사판의 내면과 평행하게 연재되는 반사표면을 제공하기위한 반사판(2)상에 제공되는 금속막(2d)으로된 것이 특징인 화학기상성장장치.
  9. 제1항에서, 상기 원료가스 분산수단(2,2')은 상기 부공간(2a)의 상기 거리(D)가 부공간내의 원료가스의 평균자유공정길이의 약 1/3이 되도록 설비되는 것이 특징인 화학기상성장장치.
  10. 제1항에서, 상기 가스인입수단은 상기 원료가스 분산수단(2')이 장치되는 복수의 튜브(1a-1c)로 된 것이 특징인 화학기상 성장장치.
  11. 10-3Torr이하의 조절성장압력에서 화학 기상성장공정에 의해 기판상에 형성된 실리콘의 노출영역상에 선택적으로 텅스텐막을 성장시키기위한 방법에 있어서, 6불화 텅스텐을 필수성분으로하여 구성되는 제1원료가스를 도입하여 상기 실리콘의 노출영역과 접촉시키는 단계와, 상기 제1원료가스를 200℃와 300℃간의 범위내에 온도에서 상기 노출영역내의 실리콘과 반응시켜줌으로서 실리콘에 의해 6불화 텅스텐의 환원결과로서 실리콘의 상기 노출영역상에 텅스텐이 성장되어 제1텅스텐막을 형성단계와, 상기 제1원료가스 반응단계 후 상기 제1원료가스이외에 제2원료가스를 도입하여 상기 제1텅스텐막을 포함하는 기판과 접촉시키는 단계와, 상기 제2원료가스의화학반응의 결과로서 상기 제1텅스텐 막상에 텅스텐을 성장시켜 상기 제1텅스텐막상에 제2텅스텐막을 형성하는 한편, 실리콘과 상기 제1원료가스의 반응의 결과로서 연속적으로 텅스텐을 성장시키는 단계를 포함하는 것이 특징인 화학기상성장방법.
  12. 제11항에서, 상기 제2원료가스는 6불화 텅스텐과 실란을 포함하며, 상기 제2원료가스의 화학반응은 상기 제2원료가스내에 함유된 실란에 의해 상기 제2원료가스내에 함유된 6불화 텅스텐의 화학적 환원을 포함하는 것이 특징인 화학기상 성장방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900012735A 1989-08-18 1990-08-18 화학기상 성장장치 및 방법 KR940001645B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-213477 1989-08-18
JP1213477A JP2506451B2 (ja) 1989-08-18 1989-08-18 化学気相成長装置及び化学気相成長法

Publications (2)

Publication Number Publication Date
KR910005380A true KR910005380A (ko) 1991-03-30
KR940001645B1 KR940001645B1 (ko) 1994-02-28

Family

ID=16639851

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900012735A KR940001645B1 (ko) 1989-08-18 1990-08-18 화학기상 성장장치 및 방법

Country Status (5)

Country Link
US (1) US5264038A (ko)
EP (1) EP0418554B1 (ko)
JP (1) JP2506451B2 (ko)
KR (1) KR940001645B1 (ko)
DE (1) DE69017810D1 (ko)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5421888A (en) * 1992-05-12 1995-06-06 Sony Corporation Low pressure CVD apparatus comprising gas distribution collimator
US5290358A (en) * 1992-09-30 1994-03-01 International Business Machines Corporation Apparatus for directional low pressure chemical vapor deposition (DLPCVD)
JPH0745530A (ja) * 1993-07-27 1995-02-14 Shin Etsu Handotai Co Ltd 縦型気相成長装置
US5595936A (en) * 1993-08-04 1997-01-21 Hyundai Electronics Industries Co., Ltd. Method for forming contacts in semiconductor device
US6035100A (en) * 1997-05-16 2000-03-07 Applied Materials, Inc. Reflector cover for a semiconductor processing chamber
JP3917237B2 (ja) * 1997-05-20 2007-05-23 東京エレクトロン株式会社 レジスト膜形成方法
JP3403357B2 (ja) 1999-06-03 2003-05-06 株式会社半導体先端テクノロジーズ 配線形成方法及び配線形成装置
US6499426B1 (en) 1999-12-10 2002-12-31 Saint-Gobain Industrial Ceramics, Inc. System and method for coating non-planar surfaces of objects with diamond film
US6547876B2 (en) 2001-02-07 2003-04-15 Emcore Corporation Apparatus for growing epitaxial layers on wafers by chemical vapor deposition
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
US7780785B2 (en) 2001-10-26 2010-08-24 Applied Materials, Inc. Gas delivery apparatus for atomic layer deposition
US6916398B2 (en) 2001-10-26 2005-07-12 Applied Materials, Inc. Gas delivery apparatus and method for atomic layer deposition
WO2003054912A1 (en) * 2001-12-20 2003-07-03 Tokyo Electron Limited Method and apparatus comprising a magnetic filter for plasma processing a workpiece
JP2007242850A (ja) * 2006-03-08 2007-09-20 Nec Corp 半導体製造装置及び半導体製造方法
KR102135409B1 (ko) * 2016-11-09 2020-07-17 주식회사 원익아이피에스 로드락챔버 및 이를 포함하는 기판처리장치
KR20200135666A (ko) 2019-05-24 2020-12-03 삼성전자주식회사 기판 처리 장치

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3098763A (en) * 1961-05-29 1963-07-23 Raytheon Co Chemical reactor
US4340462A (en) * 1981-02-13 1982-07-20 Lam Research Corporation Adjustable electrode plasma processing chamber
JPS59207631A (ja) * 1983-05-11 1984-11-24 Semiconductor Res Found 光化学を用いたドライプロセス装置
JPS6091631A (ja) * 1983-10-25 1985-05-23 Toshiba Corp 半導体装置の製造方法
JPS61127119A (ja) * 1984-11-22 1986-06-14 Sanyo Electric Co Ltd シリコン結晶の成長方法
JPS6376876A (ja) * 1986-09-19 1988-04-07 Fujitsu Ltd 気相成長法
US4774416A (en) * 1986-09-24 1988-09-27 Plaser Corporation Large cross-sectional area molecular beam source for semiconductor processing
JPH0772351B2 (ja) * 1986-12-01 1995-08-02 株式会社日立製作所 金属薄膜選択成長方法
US4838201A (en) * 1986-12-12 1989-06-13 Daido Sanso K. K. Apparatus and process for vacuum chemical epitaxy
JPS63153273A (ja) * 1986-12-16 1988-06-25 Matsushita Electric Ind Co Ltd 金属薄膜の選択堆積方法
US5000113A (en) * 1986-12-19 1991-03-19 Applied Materials, Inc. Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process
JPS63227011A (ja) * 1987-03-17 1988-09-21 Fujitsu Ltd 化学気相成長装置
US4980204A (en) * 1987-11-27 1990-12-25 Fujitsu Limited Metal organic chemical vapor deposition method with controlled gas flow rate
JPH0757033B2 (ja) * 1988-06-20 1995-06-14 日通工株式会社 局線インタフェース回路

Also Published As

Publication number Publication date
EP0418554A2 (en) 1991-03-27
KR940001645B1 (ko) 1994-02-28
JPH0376220A (ja) 1991-04-02
DE69017810D1 (de) 1995-04-20
JP2506451B2 (ja) 1996-06-12
EP0418554A3 (en) 1991-07-17
US5264038A (en) 1993-11-23
EP0418554B1 (en) 1995-03-15

Similar Documents

Publication Publication Date Title
KR910005380A (ko) 화학기상성장장치 및 방법
US4446817A (en) Apparatus for vapor deposition of a film on a substrate
US4081313A (en) Process for preparing semiconductor wafers with substantially no crystallographic slip
US4232063A (en) Chemical vapor deposition reactor and process
US4747368A (en) Chemical vapor deposition apparatus with manifold enveloped by cooling means
US4421786A (en) Chemical vapor deposition reactor for silicon epitaxial processes
AU538152B2 (en) Chemical vapour deposition apparatus and process
EP0191855A1 (en) CYLINDRICAL REACTOR AND METHOD FOR PHOTOCHEMICAL DEPOSITION OF THE VAPOR PHASE.
SE8200235L (sv) Forfarande och apparat for kemisk angavsettning av filmer pa kiselskivor
EP0164928A3 (en) Vertical hot wall cvd reactor
JP2002521817A (ja) 赤外線透過性熱リアクタカバー部材
US4651673A (en) CVD apparatus
US4518455A (en) CVD Process
JPS60161616A (ja) 半導体ウエハの赤外線加熱装置
KR850001974B1 (ko) 광화학적 증착방법 및 장치
JPS5936927A (ja) 半導体気相成長装置
JPS5710240A (en) Forming method of insulating film
US4900518A (en) Gaseous organic/inorganic thermal cracker for vacuum chemical epitaxy
JPS5575945A (en) Optical fiber coating method
JPS61289623A (ja) 気相反応装置
KR980011761A (ko) 반도체 소자 제조장치
US5063086A (en) Vacuum deposition process and apparatus for producing films having high uniformity
JP3396309B2 (ja) 半導体製造装置
JPS62160713A (ja) 光励起膜形成装置
SE9500325D0 (sv) Device for heat shielding when SiC is grown by CVD

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
J2X1 Appeal (before the patent court)

Free format text: APPEAL AGAINST DECISION TO DECLINE REFUSAL

G160 Decision to publish patent application
B701 Decision to grant
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20050225

Year of fee payment: 12

LAPS Lapse due to unpaid annual fee