KR890007145A - 웨이퍼 위치 결정 장치 - Google Patents

웨이퍼 위치 결정 장치 Download PDF

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Publication number
KR890007145A
KR890007145A KR1019880013623A KR880013623A KR890007145A KR 890007145 A KR890007145 A KR 890007145A KR 1019880013623 A KR1019880013623 A KR 1019880013623A KR 880013623 A KR880013623 A KR 880013623A KR 890007145 A KR890007145 A KR 890007145A
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KR
South Korea
Prior art keywords
wafer
optical position
position detectors
circumference
optical
Prior art date
Application number
KR1019880013623A
Other languages
English (en)
Other versions
KR910007106B1 (ko
Inventor
가즈오 시마네
노부오 이지마
다쯔로오 가와바다
Original Assignee
야마모도 다꾸마
후지쓰 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 야마모도 다꾸마, 후지쓰 가부시끼가이샤 filed Critical 야마모도 다꾸마
Publication of KR890007145A publication Critical patent/KR890007145A/ko
Application granted granted Critical
Publication of KR910007106B1 publication Critical patent/KR910007106B1/ko

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

Abstract

내용 없음

Description

웨이퍼 위치결정장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 바람직한 실시예를 채용한 장치의 평면도.
제3a도는 운송로보트의 아암이 호옴(home)위치에 있는 제1도와 제2도 장치에 사용되는 운송로보트(11)의 평면도.
제3b도는 아암이 축소상태에 있는 운송로보트의 측면도.
제3c도는 아암이 신장 상태에 있는 운송로보트의 평면도.
제5a도 내지 5d도는 트랜스프오리엔테이션(transpi orientation) 로보트를 도시한 도면.

Claims (5)

  1. 웨이퍼의 원주부를 검파하며, 웨이퍼의 직경과 동일한 직경을 갖는 원의 원주상에 배설된 제1, 제2 및 제3광위치검파기; 웨이퍼를 지지하고, 제1 내지 제3광위치 검파기에 관하여 지지된 웨이퍼를 이동하는 운송수단; 및 제1 내지 제3광위치 검파기 모두가 동시에 웨이퍼의 원주부를 검파하도록 제1 내지 제3광위치 검파기의 출력 신호에 따라 운송수단을 제어하는 제어수단으로 구송되는 웨이퍼 위치결정장치.
  2. 제1항에 있어서, 웨이퍼의 원주를 검파하며 원의 원주상에 배설된 제4광위치 검파기를 더욱 포함하며, 제어수단이 제1 내지 제4광위치 검파기를 제어하여, 4광위치 검파기중에서 임의의 3광위치 검파기가 동시에 웨이퍼의 원주부를 검파하도록 하는 웨이퍼 위치결정장치.
  3. 제2항에 있어서, 제1 내지 제4광위치 검파기가 균등한 간격으로 배치되어 있는 광위치결정 검파기.
  4. 제3항에 있어서, 원의 중심과 인접한 광위치 검파기를 연결하는 선에 의하여 형성된 각이 웨이퍼의 중심과 웨이퍼의 결정 오리엔테이션 플랫부가 편평하게 유지되는 2단을 접속하는 선에 의하여 형성된 각보다 더 큰 것을 특징으로 하는 웨이퍼 위치결정장치.
  5. 제1항에 있어서, 운송수단은 시계방향 및 반시계방향으로 회전되며 신장 또는 축소되는 아암을 갖춘 운송로보트로 구성되며, 아암은 흡입에 의하여 웨이퍼를 지지하기 위한 그의 단부에 흡입구멍을 갖춘 것을 특징으로 하는 웨이퍼 위치결정장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880013623A 1987-10-20 1988-10-19 웨이퍼 위치결정장치 KR910007106B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62-262736 1987-10-20
JP62262736A JPH0620097B2 (ja) 1987-10-20 1987-10-20 ウエハ位置決め装置

Publications (2)

Publication Number Publication Date
KR890007145A true KR890007145A (ko) 1989-06-19
KR910007106B1 KR910007106B1 (ko) 1991-09-18

Family

ID=17379870

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880013623A KR910007106B1 (ko) 1987-10-20 1988-10-19 웨이퍼 위치결정장치

Country Status (5)

Country Link
US (1) US4955780A (ko)
EP (1) EP0313466B1 (ko)
JP (1) JPH0620097B2 (ko)
KR (1) KR910007106B1 (ko)
DE (1) DE3855324T2 (ko)

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Also Published As

Publication number Publication date
US4955780A (en) 1990-09-11
DE3855324T2 (de) 1996-10-10
EP0313466A2 (en) 1989-04-26
JPH01106440A (ja) 1989-04-24
DE3855324D1 (de) 1996-07-04
KR910007106B1 (ko) 1991-09-18
EP0313466A3 (en) 1990-09-05
JPH0620097B2 (ja) 1994-03-16
EP0313466B1 (en) 1996-05-29

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