KR880000750B1 - 연마된 제품 표면의 미세한 결점 검사방법 및 장치 - Google Patents

연마된 제품 표면의 미세한 결점 검사방법 및 장치 Download PDF

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Publication number
KR880000750B1
KR880000750B1 KR8202056A KR820002056A KR880000750B1 KR 880000750 B1 KR880000750 B1 KR 880000750B1 KR 8202056 A KR8202056 A KR 8202056A KR 820002056 A KR820002056 A KR 820002056A KR 880000750 B1 KR880000750 B1 KR 880000750B1
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South Korea
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channel
signal
predetermined
scan
threshold
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Expired
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KR8202056A
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English (en)
Korean (ko)
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KR830010380A (ko
Inventor
제리 앨포오드 다불류
제이 쿠슁 차아르즈
디이 헌트 제이므즈
엘 스미스 마이클
디이 밴더뉴트 리차아드
엘 윌크스 제이므즈
Original Assignee
차알즈 제이 쿠슁
에어론카 일렉트로닉스 인코포레이팃드
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Publication of KR830010380A publication Critical patent/KR830010380A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00—Medicinal preparations containing organic active ingredients
    • A61K31/16—Amides, e.g. hydroxamic acids
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K38/00—Medicinal preparations containing peptides
    • A61K38/04—Peptides having up to 20 amino acids in a fully defined sequence; Derivatives thereof
    • A61K38/12—Cyclic peptides, e.g. bacitracins; Polymyxins; Gramicidins S, C; Tyrocidins A, B or C
    • A61K38/13—Cyclosporins
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00—Medicinal preparations characterised by special physical form
    • A61K9/0012—Galenical forms characterised by the site of application
    • A61K9/0048—Eye, e.g. artificial tears
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61P—SPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
    • A61P27/00—Drugs for disorders of the senses
    • A61P27/02—Ophthalmic agents

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Medicinal Chemistry (AREA)
  • Pharmacology & Pharmacy (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Epidemiology (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Ophthalmology & Optometry (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Gastroenterology & Hepatology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Organic Chemistry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Road Signs Or Road Markings (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Prostheses (AREA)
  • Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
KR8202056A 1981-05-12 1982-05-11 연마된 제품 표면의 미세한 결점 검사방법 및 장치 Expired KR880000750B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/262,866 US4376583A (en) 1981-05-12 1981-05-12 Surface inspection scanning system
US262866 1988-10-26

Publications (2)

Publication Number Publication Date
KR830010380A KR830010380A (ko) 1983-12-30
KR880000750B1 true KR880000750B1 (ko) 1988-05-04

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KR8202056A Expired KR880000750B1 (ko) 1981-05-12 1982-05-11 연마된 제품 표면의 미세한 결점 검사방법 및 장치

Country Status (15)

Country Link
US (1) US4376583A (enExample)
EP (1) EP0065051B1 (enExample)
JP (1) JPS57192844A (enExample)
KR (1) KR880000750B1 (enExample)
AT (1) AT394632B (enExample)
AU (1) AU543465B2 (enExample)
BR (1) BR8202514A (enExample)
CA (1) CA1173930A (enExample)
DE (1) DE3176646D1 (enExample)
DK (1) DK210382A (enExample)
ES (1) ES512098A0 (enExample)
IT (1) IT1237824B (enExample)
MX (1) MX151906A (enExample)
NO (1) NO821555L (enExample)
PT (1) PT74873B (enExample)

Cited By (1)

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US7271890B2 (en) 2003-08-01 2007-09-18 Samsung Electronics Co., Ltd. Method and apparatus for inspecting defects

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US4794265A (en) * 1987-05-08 1988-12-27 Qc Optics, Inc. Surface pit detection system and method
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JPH0690140B2 (ja) 1987-07-02 1994-11-14 富士電機株式会社 光学的表面検査方法
US4875780A (en) * 1988-02-25 1989-10-24 Eastman Kodak Company Method and apparatus for inspecting reticles
JPH01314953A (ja) * 1988-06-16 1989-12-20 Fuji Electric Co Ltd 光学的表面検査装置
US4964340A (en) * 1988-10-07 1990-10-23 Space Services, Incorporated Overlapping stage burn for multistage launch vehicles
JPH0739994B2 (ja) * 1988-10-12 1995-05-01 三菱電機株式会社 微細粒子測定装置
US5127726A (en) * 1989-05-19 1992-07-07 Eastman Kodak Company Method and apparatus for low angle, high resolution surface inspection
DE3941725A1 (de) * 1989-12-18 1991-06-20 Krupp Atlas Elektronik Gmbh Vorrichtung zum erkennen von deformationen auf pressteilen
US5274434A (en) * 1990-04-02 1993-12-28 Hitachi, Ltd. Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line
US5218417A (en) * 1990-12-17 1993-06-08 Siemens Corporation System and methods for measuring the haze of a thin film
US5463459A (en) 1991-04-02 1995-10-31 Hitachi, Ltd. Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process
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US6255666B1 (en) * 1992-12-03 2001-07-03 Brown & Sharpe Surface Inspection Systems, Inc. High speed optical inspection apparatus for a large transparent flat panel using gaussian distribution analysis and method therefor
US6294793B1 (en) * 1992-12-03 2001-09-25 Brown & Sharpe Surface Inspection Systems, Inc. High speed optical inspection apparatus for a transparent disk using gaussian distribution analysis and method therefor
US6262432B1 (en) * 1992-12-03 2001-07-17 Brown & Sharpe Surface Inspection Systems, Inc. High speed surface inspection optical apparatus for a reflective disk using gaussian distribution analysis and method therefor
US6252242B1 (en) * 1992-12-03 2001-06-26 Brown & Sharpe Surface Inspection Systems, Inc. High speed optical inspection apparatus using Gaussian distribution analysis and method therefore
US5448364A (en) * 1993-03-22 1995-09-05 Estek Corporation Particle detection system with reflective line-to-spot collector
US5883710A (en) 1994-12-08 1999-03-16 Kla-Tencor Corporation Scanning system for inspecting anomalies on surfaces
US5864394A (en) * 1994-06-20 1999-01-26 Kla-Tencor Corporation Surface inspection system
US5487879A (en) * 1994-07-15 1996-01-30 Martin Marietta Magnesia Specialities Inc. Stabilized, pressure-hydrated magnesium hydroxide slurry from burnt magnesite and process for its production
US5535005A (en) * 1994-08-25 1996-07-09 Texas Instruments Incorporated Method and system for inspecting polished surface texture
US20040057044A1 (en) * 1994-12-08 2004-03-25 Mehrdad Nikoonahad Scanning system for inspecting anamolies on surfaces
US6462813B1 (en) * 1996-04-12 2002-10-08 Perceptron, Inc. Surface defect inspection system and method
EP0979398B1 (en) * 1996-06-04 2012-01-04 KLA-Tencor Corporation Optical scanning system for surface inspection
US5912732A (en) * 1996-07-05 1999-06-15 Kabushiki Kaisha Topcon Surface detecting apparatus
US6072574A (en) 1997-01-30 2000-06-06 Micron Technology, Inc. Integrated circuit defect review and classification process
JP4527205B2 (ja) * 1997-03-31 2010-08-18 リアル・タイム・メトロジー，インコーポレーテッド 光学検査モジュール、及び統合プロセス工具内で基板上の粒子及び欠陥を検出するための方法
US6034776A (en) * 1997-04-16 2000-03-07 The United States Of America As Represented By The Secretary Of Commerce Microroughness-blind optical scattering instrument
DE19733194B4 (de) * 1997-08-01 2005-06-16 Carl Zeiss Jena Gmbh Laser-Scanning-Mikroskop
US6895109B1 (en) * 1997-09-04 2005-05-17 Texas Instruments Incorporated Apparatus and method for automatically detecting defects on silicon dies on silicon wafers
US6956963B2 (en) * 1998-07-08 2005-10-18 Ismeca Europe Semiconductor Sa Imaging for a machine-vision system
US6324298B1 (en) 1998-07-15 2001-11-27 August Technology Corp. Automated wafer defect inspection system and a process of performing such inspection
US6265232B1 (en) * 1998-08-21 2001-07-24 Micron Technology, Inc. Yield based, in-line defect sampling method
US6222145B1 (en) * 1998-10-29 2001-04-24 International Business Machines Corporation Mechanical strength die sorting
DE10033179B4 (de) * 2000-06-29 2016-06-02 Carl Zeiss Microscopy Gmbh Verfahren zur optischen Detektion einer beleuchteten Probe in mehreren Detektionskanälen
US6747737B2 (en) 2000-06-29 2004-06-08 Carl Zeiss Jena Gmbh Method for optical detection of an illuminated specimen in a plurality of detection channels
US7112812B2 (en) * 2001-12-28 2006-09-26 Applied Materials, Inc. Optical measurement apparatus
US6724476B1 (en) * 2002-10-01 2004-04-20 Advanced Micro Devices, Inc. Low defect metrology approach on clean track using integrated metrology
US7319935B2 (en) * 2003-02-12 2008-01-15 Micron Technology, Inc. System and method for analyzing electrical failure data
DE102004029012B4 (de) * 2004-06-16 2006-11-09 Leica Microsystems Semiconductor Gmbh Verfahren zur Inspektion eines Wafers
US7586617B2 (en) * 2007-06-22 2009-09-08 Schlumberger Technology Corporation Controlling a dynamic signal range in an optical time domain reflectometry
EP2128701A1 (en) * 2008-05-30 2009-12-02 ASML Netherlands BV Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic process
AU2009245853B2 (en) * 2009-12-08 2013-12-19 Radar Portal Systems Pty Ltd High speed photometric stereo pavement scanner
TWI620926B (zh) 2016-11-04 2018-04-11 財團法人工業技術研究院 工件表面檢測方法及應用其之系統
CN108818161B (zh) * 2018-07-24 2020-08-04 上海新昇半导体科技有限公司 硅片的返工系统及方法

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Also Published As

Publication number Publication date
PT74873B (en) 1983-12-02
JPH0341785B2 (enExample) 1991-06-25
BR8202514A (pt) 1983-04-12
US4376583A (en) 1983-03-15
IT8948485A0 (it) 1989-10-26
KR830010380A (ko) 1983-12-30
MX151906A (es) 1985-05-02
ES8308638A1 (es) 1983-09-01
AU543465B2 (en) 1985-04-18
JPS57192844A (en) 1982-11-27
AT394632B (de) 1992-05-25
ATA186482A (de) 1991-10-15
IT1237824B (it) 1993-06-18
EP0065051A3 (en) 1984-05-23
CA1173930A (en) 1984-09-04
IT8948485A1 (it) 1991-04-26
DK210382A (da) 1982-12-30
DE3176646D1 (en) 1988-03-17
EP0065051A2 (en) 1982-11-24
ES512098A0 (es) 1983-09-01
AU7768281A (en) 1982-11-18
PT74873A (en) 1982-06-01
EP0065051B1 (en) 1988-02-10
NO821555L (no) 1983-01-21

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