KR860002088A - 광(光)디스크 메모리 - Google Patents
광(光)디스크 메모리 Download PDFInfo
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- KR860002088A KR860002088A KR1019850005874A KR850005874A KR860002088A KR 860002088 A KR860002088 A KR 860002088A KR 1019850005874 A KR1019850005874 A KR 1019850005874A KR 850005874 A KR850005874 A KR 850005874A KR 860002088 A KR860002088 A KR 860002088A
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- optical memory
- recording film
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- 230000015654 memory Effects 0.000 title claims description 33
- 230000003287 optical effect Effects 0.000 title claims description 31
- 239000000758 substrate Substances 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000010408 film Substances 0.000 claims 38
- 239000000463 material Substances 0.000 claims 18
- 239000003989 dielectric material Substances 0.000 claims 7
- 238000000034 method Methods 0.000 claims 7
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 claims 4
- 239000010949 copper Substances 0.000 claims 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 238000010549 co-Evaporation Methods 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- 239000011669 selenium Substances 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 229910016036 BaF 2 Inorganic materials 0.000 claims 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- GHPGOEFPKIHBNM-UHFFFAOYSA-N antimony(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Sb+3].[Sb+3] GHPGOEFPKIHBNM-UHFFFAOYSA-N 0.000 claims 1
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims 1
- 229910001632 barium fluoride Inorganic materials 0.000 claims 1
- 229910000416 bismuth oxide Inorganic materials 0.000 claims 1
- BRCWHGIUHLWZBK-UHFFFAOYSA-K bismuth;trifluoride Chemical compound F[Bi](F)F BRCWHGIUHLWZBK-UHFFFAOYSA-K 0.000 claims 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 claims 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims 1
- FPHIOHCCQGUGKU-UHFFFAOYSA-L difluorolead Chemical compound F[Pb]F FPHIOHCCQGUGKU-UHFFFAOYSA-L 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 230000004927 fusion Effects 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000001579 optical reflectometry Methods 0.000 claims 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 claims 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1
- 229910052711 selenium Inorganic materials 0.000 claims 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 229910052714 tellurium Inorganic materials 0.000 claims 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도, 제2도 및 제3도는 본 발명에 따른 서로 상이한 광 디스크 메모리의 부분단면도.
* 도면의 주요부분에 대한 부호의 설명
16, 16′,16″: 투명기판, 18 : 홈
20, 20, 20″ : 기록막(기록층) 24, 24′,24″: 유전체
26, 26′, 26″: 보호막 28, 30 : 금속막
32 : 침진실 34 : 지지부개
36 : 모우터 38, 40, 42 : 가열기
44 : 전원 46 : 진공펌프
48, 50 : 반도체레이저다이오드 52, 54, 66, 68, 70 : 렌즈
56, 60 : 거울 62 : 분극분배기
64 : 분극판 72 : 검출기
Claims (33)
- 기판과 기록막으로 이루어진 광메모리에 있어서, 화학적으로 안정한 유전체(24, 24′,24″)와 광선에 의해 광반사율이 변화될 수 있는 반도체물질(22, 22′,22″)로 형성되어진 기판(16, 16′,16″)위에 기록막 (20, 20′,20″)이 형성되어 있는 것을 특징으로 하는 광메모리.
- 제1항에 있어서, 반도체물질(22, 22′,22″)은 그 체적함유율이 40% 이상인 것으로 됨을 특징으로 하는 광메모리.
- 제1항에 있어서, 기록막(20, 20′,20″)의 광두께는 투사되는 광선파장에 비하여 약 1/2정도에 못미치는 광두께를 갖도록 된 것을 특징으로 하는 광메모리.
- 제1항에 있어서, 기판(16, 16′,16″)은 투명한 디스크 형태로 된것을 특징으로 하는 광메모리.
- 제4항에 있어서, 투명한 디스크는 광추적을 하기위하여 흠(18)이 형성되어져 있는 것을 특징으로 하는 광메모리.
- 제1항에 있어서, 반도체물질(22, 22′,22″)은 광선에 의하여 비결정구조 또는 결정성 구조로 상변화가 일어나도록 된 것을 특징으로 하는 광메모리.
- 제6항에 있어서 광선은 레이저광선임을 특징으로 하는 광메모리.
- 제6항에 있어서, 상변화는 레이저광선에 노출된 시간과 출력밀도에 따라 일어남을 특징으로 하는 광메모리.
- 제1항에 있어서의 기록막(20,20′)위에는 기록막(20, 20′)에 투사되는 광선이 금속막(28, 28′)에 의하여 반사되도록 금속막(28, 28′)이 형성된 것임을 특징으로 하는 광메모리.
- 제9항에 있어서, 금속막(28, 28′)은 금·은·구리 및 알루미늄으로 된 박막임을 특징으로하는 광매로리.
- 제1항에 있어서, 반도체물질(22, 22′,22″)은 게트마늄(Ge), 텔루르(Te), 안티몬화인듐(InSb)중 적어도 하나의 물질로 이루어진것을 특징으로하는 광메모리.
- 제1항에 있어서, 유전체물질(22, 22′,22″)은 셀렌(Se), 산화규소(SiO), 산화붕소(B2O3), 산화안티몬(Sb2O3), 산화비스무트(Bi2B3), 산화납(Pbo), 산화규소(SiO2) 및 산화탄탈(Ta2O5)중 적어도 하나의 물질로 이루어진것임을 특징으로 하는 광메모리.
- 제1항에 있어서, 유전체물질(24, 24′,24″)은 플루오르화비스무트(BiF3), 플루오르화리튬(LiF3), 플루오르화납(PbF2), 플루오르화마그네슘(MgF2), 플루오르화바륨(BaF2) 및 플루오르화칼슘(CaF3)중 적어도 하나의 물질로 이루어진것임을 특징으로 하는 광메모리.
- 제1항에 있어서, 기판(16, 16′,16″)위에 형성된 기록막 (20, 20′,20″)은 높은 진공상태와 낮은 압력조건으로 유전체(24, 24′,24″)와 반도체물질(22, 22′,22″)을 공동스팻터링에 의해 기판(22, 22′,2,2″)위에 형성시켜서된 것임을 특징으로하는 광메모리.
- 기판과 기록막으로 이루어진 광메모리에 있어서, 화학적으로 안정한 유전체(24′,24″)와 광선에 의하여 광반사율이 변화될 수 있는 반도체물질(22′, 22″)로 이루어진 기판(16′,16″)위에 형성된기록막(20′,20″)과, 상기 기록막(20′,20″)을 통과하는 광선이 금속막(28′,28″)에 의하여 반사되도록 기록막(20′,20″)위에 형성된 금속막(28′,28″) 및 상기 금속막(28,28')위에 형성된 보호막(26′,28″)으로 이루어진것을 특징으로하는 광메모리.
- 제15항에 있어서, 반도체물질(22′,22″)은 광선에 의하여 비결정구조 또는 결정성구조로 상변화가 일어나도록 된 것을 특징으로 하는 광메모리.
- 제15항에 있어서, 광선은 레미저광선(t)인 것임을 특징으로하는 광메모리.
- 제16항에 있어서, 상변하는 레이저광선(t)에 노출된시간과 출력밀도에 따라 이루어짐을 특징으로하는 광메모리.
- 제15항에 있어서, 반사성금속막(28,28′)은 Cu로 이루어진 것임을 특징으로하는 광메모리.
- 제15항에 있어서, 기판(16′,16″)위에 형성된 기록막(20′,20″)은 높은 진공상태와 낮은 압력조건으로 유전체(24′,24″)와 반도체물질(22′,22″)로 공동 스펏터링에 의해 기판(16′,16″)위체 형성시켜서 된 것임을 특징으로하는 광메모리.
- 기판과 기록막으로 이루어진 광메모리에 있어서, 기판(16″)위에 반투명 금속막(30)이 형성되어있고, 상기 기판(16″)위에는 화학적으로 안정한 유전체(24″)와 광선에 의하여 광반사율이 변화될 수 있는 반도체물질(22″)로 이루어진 기록막(20″)이 형성되어 있으며, 상기 기록막(20″)위에는 이 기록막(28″)를 통과하는 광선이 금속막(28′)에 의해 반사되도록 형성된 반사성 금속막(28′)으로 이루어진 것을 특징으로하는 광메모리.
- 제21항에 있어서, 반사성금속막(28′)위에는 보호막(26′)이 형성되어 있는것을 특징으로 하는 광메모리.
- 제21항에 있어서, 반도체물질(22″)은 광선에 의하여 비결정성구조 또는 결정성구조로 상변화가 일어나도록된 것을 특징으로하는 광메모리.
- 제23항에 있어서, 광선은 레이저광선(L)인것을 특징으로하는 광메모리.
- 제23항에 있어서, 상변화는 레이저광선(L)에 대한 노출시간과 출력밀도에 따라 일어나는 것임을 특징으로하는 메모리.
- 제21항에 있어서, 반투명금속막(30)은 금, 은, 구리, 알루미늄 중에서 적어도 하나의 물질로 형성 되어지되 0.03㎛ 이하의 두께로 이루어진것임을 특징으로하는 광메모리.
- 제21항에 있어서, 기록막(20″)은 기판위에 형성된 기록막(20″)은 높은 진공상태와 저압력하에서 융전체(24″)와 반도체물질(22″)을 공동시펏터링 또는 공동 증착에의해 기판(16″)위에 형성시켜서 된것임을 특징으로하는 광메모리.
- 정보를 저장하고 검색하는 벙법에 있어서, (가) 기록막(20, 20′,20″)을 화학적으로 안정한 유전체(24, 24′,24″)와 광선에 의하여 광반사율이 변화될 수 있는 반도체물질(22, 22′,22″)로 형성시키고, (나)상기 기록막의 선택된 부위에서 반도체물질이 최초의 구조적 변화를 일으키도록 광선을 적용시키고 이 때 광반사율도 변화시키는 단계로 정보를 저장하고 검색하는 방법.
- 제28항에 있어서, 단계 (나)후에 상기 기록막(20, 20′,20″)의 선택된 부위에 상기의 구조적인 변화를 광학적으로 검색하는 단계를 거치는 것을 특징으로하는 방법.
- 제28항에 있어서, 메모리의 기록막(20, 20′,20″)은 투명한 디스크(16, 16′,16″)로 형성된것을 특징으로하는 방법.
- 제28항에 있어서, 메모리의 기록막(20, 20′,20″)은 구조적 변화를 일으키기에는 충분하지만 기록막(20, 20′,20″)상에 홈을 형성하기에는 불충분한 출력밀도하에서 레이저광선을 조사시켜서 광반사율을 변화시킬 수 있도록된 것을 특징으로하는 방법.
- 제28항에 있어서, 단계 (나)후에 반도체물질(22, 22′,22″)내에서 두번째 구조적인 변화가 발생하는 부위체 레이저광선을 재조사시키는 단계를 거치는 것을 특징으로하는 방법.
- 광메모리인자를 제조하는 방법에 있어서, 유전체와 광선에 의하여 광반사율을 변화시킬 수 있는 반도체물질을 포함하는 기록막(20, 20′,20″)을 기판(16, 16′,16″)위에 형성시키기 위하여 기판(16, 16′,16″)상에서, 높은 진공상태와 낮은 압력상태로 반도체물질과 유전체물질을 공동증발단계와 공동스펏터링하는 단계를 거쳐 광메모리 인자를 제조하는 것을 특징으로하는 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59176276A JPS6153090A (ja) | 1984-08-24 | 1984-08-24 | 光デイスク |
JP59-176276 | 1984-08-24 | ||
JP59-211962 | 1984-10-09 | ||
JP59211964A JPS6190341A (ja) | 1984-10-09 | 1984-10-09 | 光デイスク |
Publications (2)
Publication Number | Publication Date |
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KR860002088A true KR860002088A (ko) | 1986-03-26 |
KR890004230B1 KR890004230B1 (ko) | 1989-10-27 |
Family
ID=26497258
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Application Number | Title | Priority Date | Filing Date |
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KR1019850005874A KR890004230B1 (ko) | 1984-08-24 | 1985-08-14 | 광(光) 디스크 메모리 |
Country Status (4)
Country | Link |
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US (1) | US4969141A (ko) |
EP (1) | EP0173523B1 (ko) |
KR (1) | KR890004230B1 (ko) |
DE (1) | DE3580429D1 (ko) |
Families Citing this family (29)
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DE3675845D1 (de) * | 1985-08-15 | 1991-01-10 | Ibm | Optisches aufzeichnungsverfahren. |
JPS63179425A (ja) * | 1987-01-20 | 1988-07-23 | Fuji Photo Film Co Ltd | 光情報記録方法およびその方法に用いられる情報記録媒体 |
JP2512087B2 (ja) * | 1988-06-24 | 1996-07-03 | 株式会社日立製作所 | 光記録媒体および光記録方法 |
EP0458604B1 (en) * | 1990-05-22 | 1997-08-27 | Canon Kabushiki Kaisha | Method and apparatus for recording and reproducing information in cells using multiple interference |
US5666344A (en) * | 1991-06-04 | 1997-09-09 | International Business Machines Corporation | Multiple data surface optical data storage system |
KR100242859B1 (ko) * | 1991-06-20 | 2000-02-01 | 가나이 쓰도무 | 광특성 변형방법, 광학장치, 정보기록매체 그리고 정보기록 방법 및 장치 |
JPH0562239A (ja) * | 1991-06-20 | 1993-03-12 | Hitachi Ltd | 記録媒体及びこれを用いた情報の記録方法 |
US5485452A (en) * | 1991-06-28 | 1996-01-16 | Pioneer Electronic Corporation | Optical information recording medium |
JPH06511343A (ja) * | 1991-10-03 | 1994-12-15 | オーディーエムイー・インタナショナル・ビー・ヴィー | 光ディスク原盤 |
US5253198A (en) * | 1991-12-20 | 1993-10-12 | Syracuse University | Three-dimensional optical memory |
US5194980A (en) * | 1992-05-29 | 1993-03-16 | Eastman Kodak Company | Thresholded, high power laser beam scanning system |
JPH0628713A (ja) * | 1992-07-13 | 1994-02-04 | Pioneer Electron Corp | 光ディスク |
US5864530A (en) * | 1993-01-04 | 1999-01-26 | U.S. Philips Corporation | Multiplane information storage system and record carrier for use in such a system |
US5474874A (en) * | 1993-02-16 | 1995-12-12 | Sony Corporation | Optical recording medium |
CN1054227C (zh) * | 1994-10-31 | 2000-07-05 | 北京航空航天大学 | 记录媒体及其记录和擦除方法 |
US5958649A (en) * | 1995-03-27 | 1999-09-28 | Hitachi, Ltd. | Information recording medium and information memory apparatus |
US5889756A (en) * | 1996-07-25 | 1999-03-30 | Kabushiki Kaisha Toshiba | Phase change optical recording medium |
US5825725A (en) * | 1997-05-06 | 1998-10-20 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of The University Of Oregon | Method and apparatus for reversible optical data storage |
JP4537528B2 (ja) * | 2000-03-29 | 2010-09-01 | 株式会社東芝 | 光記録媒体 |
CA2416149A1 (en) * | 2001-04-12 | 2002-10-24 | Koninklijke Philips Electronics N.V. | Rewritable optical data storage medium and use of such a medium |
JP4006994B2 (ja) * | 2001-12-18 | 2007-11-14 | 株式会社リコー | 立体構造体の加工方法、立体形状品の製造方法及び立体構造体 |
JP4047074B2 (ja) * | 2002-06-03 | 2008-02-13 | Tdk株式会社 | 光記録再生方法及び光記録媒体 |
TWI256629B (en) * | 2002-06-03 | 2006-06-11 | Tdk Corp | Optical recording/reproduction method and optical recording medium |
TWI263993B (en) * | 2002-06-03 | 2006-10-11 | Tdk Corp | Optical recording reproduction method and optical recording medium |
FR2848014A1 (fr) * | 2002-12-03 | 2004-06-04 | Commissariat Energie Atomique | Support d'enregistrement optique irreversible inorganique comportant une couche de dissipation thermique |
TWI245288B (en) * | 2003-03-20 | 2005-12-11 | Sony Corp | Semiconductor memory element and semiconductor memory device using the same |
WO2005023553A1 (ja) * | 2003-09-05 | 2005-03-17 | Nec Corporation | 光学的情報記録媒体及び光学的情報記録再生装置 |
WO2009122570A1 (ja) * | 2008-04-01 | 2009-10-08 | 株式会社 東芝 | 情報記録再生装置 |
WO2009128142A1 (ja) * | 2008-04-15 | 2009-10-22 | 株式会社 東芝 | 情報記録再生装置 |
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EP0045183B1 (en) * | 1980-07-25 | 1984-12-05 | Asahi Kasei Kogyo Kabushiki Kaisha | Recording material |
FR2488711B1 (fr) * | 1980-08-13 | 1985-06-28 | Thomson Csf | Procede thermo-optique d'inscription d'information et support d'information destine a la mise en oeuvre de ce procede |
JPS57205193A (en) * | 1981-06-12 | 1982-12-16 | Fuji Photo Film Co Ltd | Optical information recording medium |
US4425570A (en) * | 1981-06-12 | 1984-01-10 | Rca Corporation | Reversible recording medium and information record |
US4465767A (en) * | 1981-11-27 | 1984-08-14 | Ricoh Company, Ltd. | Optical information recording medium |
JPS58121149A (ja) * | 1981-12-22 | 1983-07-19 | Fujitsu Ltd | 記録媒体 |
JPS5960744A (ja) * | 1982-09-30 | 1984-04-06 | Ricoh Co Ltd | 光磁気記録媒体 |
ATE34244T1 (de) * | 1982-12-06 | 1988-05-15 | Plasmon Data Systems Nv | Informationsspeicherung und - aufzeichnung. |
JPS59104996A (ja) * | 1982-12-08 | 1984-06-18 | Canon Inc | 光記録方法 |
JPS59113534A (ja) * | 1982-12-20 | 1984-06-30 | Canon Inc | 光学記録媒体 |
US4576895A (en) * | 1984-06-18 | 1986-03-18 | International Business Machines Corporation | Optical recording by energy-induced fractionation and homogenization |
-
1985
- 1985-08-14 KR KR1019850005874A patent/KR890004230B1/ko not_active IP Right Cessation
- 1985-08-16 DE DE8585305854T patent/DE3580429D1/de not_active Expired - Lifetime
- 1985-08-16 EP EP85305854A patent/EP0173523B1/en not_active Expired - Lifetime
-
1989
- 1989-04-18 US US07/339,656 patent/US4969141A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR890004230B1 (ko) | 1989-10-27 |
EP0173523A3 (en) | 1987-07-29 |
EP0173523B1 (en) | 1990-11-07 |
EP0173523A2 (en) | 1986-03-05 |
DE3580429D1 (de) | 1990-12-13 |
US4969141A (en) | 1990-11-06 |
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