KR20230094191A - 통합된 오리피스 제한부를 구비한 밸브 - Google Patents
통합된 오리피스 제한부를 구비한 밸브 Download PDFInfo
- Publication number
- KR20230094191A KR20230094191A KR1020237016083A KR20237016083A KR20230094191A KR 20230094191 A KR20230094191 A KR 20230094191A KR 1020237016083 A KR1020237016083 A KR 1020237016083A KR 20237016083 A KR20237016083 A KR 20237016083A KR 20230094191 A KR20230094191 A KR 20230094191A
- Authority
- KR
- South Korea
- Prior art keywords
- valve
- orifice
- wall
- seat
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Lift Valve (AREA)
- Valve Housings (AREA)
- Multiple-Way Valves (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063109496P | 2020-11-04 | 2020-11-04 | |
| US63/109,496 | 2020-11-04 | ||
| PCT/US2021/057663 WO2022098620A1 (en) | 2020-11-04 | 2021-11-02 | Valves with integrated orifice restrictions |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20230094191A true KR20230094191A (ko) | 2023-06-27 |
Family
ID=78819637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020237016083A Pending KR20230094191A (ko) | 2020-11-04 | 2021-11-02 | 통합된 오리피스 제한부를 구비한 밸브 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US11808381B2 (https=) |
| EP (2) | EP4240997B1 (https=) |
| JP (1) | JP2023548331A (https=) |
| KR (1) | KR20230094191A (https=) |
| CN (1) | CN116490710A (https=) |
| TW (1) | TWI900687B (https=) |
| WO (1) | WO2022098620A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021101855A1 (en) * | 2019-11-18 | 2021-05-27 | Swagelok Company | Arrangements and methods for controlled valve flow rate |
| US11761547B1 (en) * | 2022-04-07 | 2023-09-19 | Horiba Stec, Co., Ltd. | Valve orifice insert |
| JP7655884B2 (ja) * | 2022-05-24 | 2025-04-02 | Ckd株式会社 | 流体制御弁およびその製造方法 |
Family Cites Families (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4516606A (en) * | 1983-02-16 | 1985-05-14 | Exxon Research And Engineering Co. | Variable orifice valve assembly |
| US5334864A (en) | 1987-03-26 | 1994-08-02 | Canon Kabushiki Kaisha | Process for selective formation of II-VI group compound film |
| US5335691A (en) | 1992-05-26 | 1994-08-09 | Nupro Company | High pressure diaphragm valve |
| US5314164A (en) | 1992-07-17 | 1994-05-24 | Mks Instruments, Inc. | Pivotal diaphragm, flow control valve |
| DE19638201B4 (de) | 1996-09-19 | 2005-05-04 | Robert Bosch Gmbh | Brennstoffeinspritzventil |
| DE19653832A1 (de) | 1996-12-21 | 1998-06-25 | Bosch Gmbh Robert | Ventil mit kombiniertem Ventilsitzkörper und Spritzlochscheibe |
| JP3941844B2 (ja) * | 1997-06-03 | 2007-07-04 | シーケーディ株式会社 | ガス制御バルブ |
| US6000416A (en) | 1997-06-04 | 1999-12-14 | Furon Company | Compact valve with rolling diaphragm poppet |
| DE19736682A1 (de) | 1997-08-22 | 1999-02-25 | Bosch Gmbh Robert | Brennstoffeinspritzventil |
| US5881997A (en) | 1997-11-24 | 1999-03-16 | Fujikin Incorporated | Metal diaphragm type valve |
| US5909747A (en) | 1998-04-03 | 1999-06-08 | American Meter Company | Radial flow diaphragm valve |
| JP3522535B2 (ja) | 1998-05-29 | 2004-04-26 | 忠弘 大見 | 圧力式流量制御装置を備えたガス供給設備 |
| JP3502561B2 (ja) | 1999-02-22 | 2004-03-02 | Smc株式会社 | レギュレーター |
| DE19946838C1 (de) | 1999-09-30 | 2000-10-19 | Bosch Gmbh Robert | Ventil zum Steuern von Flüssigkeiten |
| KR100426709B1 (ko) | 2000-06-05 | 2004-04-14 | 가부시키가이샤 후지킨 | 오리피스 내장밸브 |
| CA2370819C (en) | 2001-02-09 | 2005-07-26 | Jennmar Corporation | Cable bolt with mixing delay device |
| US20030042459A1 (en) | 2001-08-29 | 2003-03-06 | Gregoire Roger J. | Unitary diaphragm and seat assembly |
| JP4197627B2 (ja) | 2003-06-02 | 2008-12-17 | シーケーディ株式会社 | ガスレギュレータ |
| JP3861206B2 (ja) | 2003-12-08 | 2006-12-20 | 株式会社フジキン | 流体制御器 |
| JP2005188672A (ja) | 2003-12-26 | 2005-07-14 | Neriki:Kk | バルブ装置 |
| EP1721227A4 (en) | 2004-02-27 | 2010-02-03 | Horiba Stec Co Ltd | THROTTLE BODY |
| DE102004033280A1 (de) | 2004-07-09 | 2006-02-02 | Robert Bosch Gmbh | Einspritzventil zur Kraftstoffeinspritzung |
| JP2006090386A (ja) | 2004-09-22 | 2006-04-06 | Kitz Sct:Kk | ダイヤフラムバルブ |
| CN2812071Y (zh) * | 2005-07-18 | 2006-08-30 | 西安交通大学 | 一种带接头的节流元件 |
| JP4549981B2 (ja) | 2006-01-27 | 2010-09-22 | 株式会社キッツエスシーティー | 流体制御機器 |
| JP4256884B2 (ja) | 2006-06-23 | 2009-04-22 | 東京エレクトロン株式会社 | 気化器への原料液供給ユニット |
| EP2003379A1 (en) | 2007-06-12 | 2008-12-17 | Luxembourg Patent Company S.A. | High pressure diaphragm valve with exchangeable seat assembly |
| WO2011163210A1 (en) | 2010-06-22 | 2011-12-29 | Swagelok Company | Clamp ring for welded diaphragms |
| DE102010064268A1 (de) | 2010-12-28 | 2012-06-28 | Robert Bosch Gmbh | Einspritzventil |
| DE102012211665A1 (de) | 2011-08-18 | 2013-02-21 | Robert Bosch Gmbh | Ventil für ein strömendes Fluid |
| US9188989B1 (en) | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
| US9863542B2 (en) * | 2013-02-01 | 2018-01-09 | Swagelok Company | Diaphragm valve with welded diaphragm seat carrier |
| JP6141663B2 (ja) | 2013-03-27 | 2017-06-07 | 株式会社堀場エステック | 流体制御弁 |
| EP2792902B1 (en) | 2013-04-16 | 2016-09-07 | Öhlins Racing Ab | Valve arrangement |
| JP6072648B2 (ja) | 2013-08-12 | 2017-02-01 | 株式会社フジキン | ダイヤフラム弁 |
| JP6335685B2 (ja) | 2014-06-30 | 2018-05-30 | 株式会社フジキン | ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法 |
| JP6602553B2 (ja) | 2015-04-30 | 2019-11-06 | Ckd株式会社 | ダイアフラム、流体制御装置、及びダイアフラムの製造方法 |
| JP6216738B2 (ja) | 2015-05-26 | 2017-10-18 | Ckd株式会社 | パイロット式電磁弁 |
| US10781892B2 (en) | 2015-07-31 | 2020-09-22 | Borgwarner Inc. | Press-fit check valve for a hydraulic tensioner reservoir with metered backflow |
| WO2018021277A1 (ja) | 2016-07-29 | 2018-02-01 | 株式会社フジキン | オリフィス内蔵弁および圧力式流量制御装置 |
| CN110114601B (zh) | 2016-12-26 | 2020-10-27 | 株式会社富士金 | 压电元件驱动式阀以及流量控制装置 |
| JP6929098B2 (ja) * | 2017-03-30 | 2021-09-01 | 株式会社キッツエスシーティー | メタルダイヤフラムバルブ |
| US10982633B2 (en) | 2017-07-03 | 2021-04-20 | Continental Automotive Systems, Inc. | Fuel pump solenoid assembly method |
| WO2019047916A1 (zh) | 2017-09-08 | 2019-03-14 | 江苏科维仪表控制工程有限公司 | 密封性优越式手动高温高压疏水球阀 |
| US11162597B2 (en) * | 2017-10-31 | 2021-11-02 | Fujikin Incorporated | Flow path assembly and valve device |
| US11231026B2 (en) | 2017-10-31 | 2022-01-25 | Fujikin Incorporated | Valve device |
| CN111417809A (zh) * | 2017-11-30 | 2020-07-14 | 株式会社富士金 | 阀装置、使用该阀装置的流体控制装置以及半导体制造装置 |
| US10877495B2 (en) | 2018-03-08 | 2020-12-29 | Emerson Process Management Regulator Technologies, Inc. | Pressure loaded regulator with dual diaphragm and redundant seal |
| US11402029B2 (en) | 2018-04-06 | 2022-08-02 | Fujikin Incorporated | Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method |
| KR102499250B1 (ko) | 2018-09-25 | 2023-02-10 | 가부시키가이샤 후지킨 | 밸브 |
| JP2020204369A (ja) | 2019-06-18 | 2020-12-24 | Ckd株式会社 | ダイアフラムバルブの製造方法 |
| JP2021021408A (ja) | 2019-07-25 | 2021-02-18 | 株式会社ノーリツ | 流量調整弁 |
| WO2021101855A1 (en) | 2019-11-18 | 2021-05-27 | Swagelok Company | Arrangements and methods for controlled valve flow rate |
-
2021
- 2021-11-02 JP JP2023526458A patent/JP2023548331A/ja active Pending
- 2021-11-02 WO PCT/US2021/057663 patent/WO2022098620A1/en not_active Ceased
- 2021-11-02 EP EP21816233.7A patent/EP4240997B1/en active Active
- 2021-11-02 US US17/517,317 patent/US11808381B2/en active Active
- 2021-11-02 KR KR1020237016083A patent/KR20230094191A/ko active Pending
- 2021-11-02 CN CN202180074394.3A patent/CN116490710A/zh active Pending
- 2021-11-02 EP EP25158054.4A patent/EP4530512A3/en not_active Withdrawn
- 2021-11-03 TW TW110141020A patent/TWI900687B/zh active
-
2023
- 2023-09-25 US US18/473,835 patent/US12203568B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20240019034A1 (en) | 2024-01-18 |
| JP2023548331A (ja) | 2023-11-16 |
| EP4530512A2 (en) | 2025-04-02 |
| US12203568B2 (en) | 2025-01-21 |
| WO2022098620A1 (en) | 2022-05-12 |
| EP4240997A1 (en) | 2023-09-13 |
| US11808381B2 (en) | 2023-11-07 |
| EP4240997C0 (en) | 2025-04-02 |
| EP4530512A3 (en) | 2025-05-14 |
| US20220136610A1 (en) | 2022-05-05 |
| TWI900687B (zh) | 2025-10-11 |
| TW202227738A (zh) | 2022-07-16 |
| CN116490710A (zh) | 2023-07-25 |
| EP4240997B1 (en) | 2025-04-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| A201 | Request for examination | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| D21 | Rejection of application intended |
Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D21-EXM-PE0902 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |