JP2023548331A - 一体型オリフィス絞り付きバルブ - Google Patents

一体型オリフィス絞り付きバルブ Download PDF

Info

Publication number
JP2023548331A
JP2023548331A JP2023526458A JP2023526458A JP2023548331A JP 2023548331 A JP2023548331 A JP 2023548331A JP 2023526458 A JP2023526458 A JP 2023526458A JP 2023526458 A JP2023526458 A JP 2023526458A JP 2023548331 A JP2023548331 A JP 2023548331A
Authority
JP
Japan
Prior art keywords
valve
orifice
seat
wall
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023526458A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023548331A5 (https=
JPWO2022098620A5 (https=
Inventor
グライム,サード,ウイリアム,エイチ.
キーパー,ブランデン,ダブリュー.
マッコイ,ジェームス,ジー.
Original Assignee
スウェージロック カンパニー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スウェージロック カンパニー filed Critical スウェージロック カンパニー
Publication of JP2023548331A publication Critical patent/JP2023548331A/ja
Publication of JP2023548331A5 publication Critical patent/JP2023548331A5/ja
Publication of JPWO2022098620A5 publication Critical patent/JPWO2022098620A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00Construction of housing; Use of materials therefor
    • F16K27/02Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236Diaphragm cut-off apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Lift Valve (AREA)
  • Valve Housings (AREA)
  • Multiple-Way Valves (AREA)
JP2023526458A 2020-11-04 2021-11-02 一体型オリフィス絞り付きバルブ Pending JP2023548331A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063109496P 2020-11-04 2020-11-04
US63/109,496 2020-11-04
PCT/US2021/057663 WO2022098620A1 (en) 2020-11-04 2021-11-02 Valves with integrated orifice restrictions

Publications (3)

Publication Number Publication Date
JP2023548331A true JP2023548331A (ja) 2023-11-16
JP2023548331A5 JP2023548331A5 (https=) 2024-11-11
JPWO2022098620A5 JPWO2022098620A5 (https=) 2024-11-11

Family

ID=78819637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023526458A Pending JP2023548331A (ja) 2020-11-04 2021-11-02 一体型オリフィス絞り付きバルブ

Country Status (7)

Country Link
US (2) US11808381B2 (https=)
EP (2) EP4240997B1 (https=)
JP (1) JP2023548331A (https=)
KR (1) KR20230094191A (https=)
CN (1) CN116490710A (https=)
TW (1) TWI900687B (https=)
WO (1) WO2022098620A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021101855A1 (en) * 2019-11-18 2021-05-27 Swagelok Company Arrangements and methods for controlled valve flow rate
US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert
JP7655884B2 (ja) * 2022-05-24 2025-04-02 Ckd株式会社 流体制御弁およびその製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4516606A (en) * 1983-02-16 1985-05-14 Exxon Research And Engineering Co. Variable orifice valve assembly
WO2001094824A1 (en) * 2000-06-05 2001-12-13 Fujikin Incorporated Orifice-built-in valve
CN2812071Y (zh) * 2005-07-18 2006-08-30 西安交通大学 一种带接头的节流元件
US20140217321A1 (en) * 2013-02-01 2014-08-07 Swagelok Company Diaphragm valve with welded diaphragm seat carrier
JP2018168970A (ja) * 2017-03-30 2018-11-01 株式会社キッツエスシーティー メタルダイヤフラムバルブ

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5334864A (en) 1987-03-26 1994-08-02 Canon Kabushiki Kaisha Process for selective formation of II-VI group compound film
US5335691A (en) 1992-05-26 1994-08-09 Nupro Company High pressure diaphragm valve
US5314164A (en) 1992-07-17 1994-05-24 Mks Instruments, Inc. Pivotal diaphragm, flow control valve
DE19638201B4 (de) 1996-09-19 2005-05-04 Robert Bosch Gmbh Brennstoffeinspritzventil
DE19653832A1 (de) 1996-12-21 1998-06-25 Bosch Gmbh Robert Ventil mit kombiniertem Ventilsitzkörper und Spritzlochscheibe
JP3941844B2 (ja) * 1997-06-03 2007-07-04 シーケーディ株式会社 ガス制御バルブ
US6000416A (en) 1997-06-04 1999-12-14 Furon Company Compact valve with rolling diaphragm poppet
DE19736682A1 (de) 1997-08-22 1999-02-25 Bosch Gmbh Robert Brennstoffeinspritzventil
US5881997A (en) 1997-11-24 1999-03-16 Fujikin Incorporated Metal diaphragm type valve
US5909747A (en) 1998-04-03 1999-06-08 American Meter Company Radial flow diaphragm valve
JP3522535B2 (ja) 1998-05-29 2004-04-26 忠弘 大見 圧力式流量制御装置を備えたガス供給設備
JP3502561B2 (ja) 1999-02-22 2004-03-02 Smc株式会社 レギュレーター
DE19946838C1 (de) 1999-09-30 2000-10-19 Bosch Gmbh Robert Ventil zum Steuern von Flüssigkeiten
CA2370819C (en) 2001-02-09 2005-07-26 Jennmar Corporation Cable bolt with mixing delay device
US20030042459A1 (en) 2001-08-29 2003-03-06 Gregoire Roger J. Unitary diaphragm and seat assembly
JP4197627B2 (ja) 2003-06-02 2008-12-17 シーケーディ株式会社 ガスレギュレータ
JP3861206B2 (ja) 2003-12-08 2006-12-20 株式会社フジキン 流体制御器
JP2005188672A (ja) 2003-12-26 2005-07-14 Neriki:Kk バルブ装置
EP1721227A4 (en) 2004-02-27 2010-02-03 Horiba Stec Co Ltd THROTTLE BODY
DE102004033280A1 (de) 2004-07-09 2006-02-02 Robert Bosch Gmbh Einspritzventil zur Kraftstoffeinspritzung
JP2006090386A (ja) 2004-09-22 2006-04-06 Kitz Sct:Kk ダイヤフラムバルブ
JP4549981B2 (ja) 2006-01-27 2010-09-22 株式会社キッツエスシーティー 流体制御機器
JP4256884B2 (ja) 2006-06-23 2009-04-22 東京エレクトロン株式会社 気化器への原料液供給ユニット
EP2003379A1 (en) 2007-06-12 2008-12-17 Luxembourg Patent Company S.A. High pressure diaphragm valve with exchangeable seat assembly
WO2011163210A1 (en) 2010-06-22 2011-12-29 Swagelok Company Clamp ring for welded diaphragms
DE102010064268A1 (de) 2010-12-28 2012-06-28 Robert Bosch Gmbh Einspritzventil
DE102012211665A1 (de) 2011-08-18 2013-02-21 Robert Bosch Gmbh Ventil für ein strömendes Fluid
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP6141663B2 (ja) 2013-03-27 2017-06-07 株式会社堀場エステック 流体制御弁
EP2792902B1 (en) 2013-04-16 2016-09-07 Öhlins Racing Ab Valve arrangement
JP6072648B2 (ja) 2013-08-12 2017-02-01 株式会社フジキン ダイヤフラム弁
JP6335685B2 (ja) 2014-06-30 2018-05-30 株式会社フジキン ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法
JP6602553B2 (ja) 2015-04-30 2019-11-06 Ckd株式会社 ダイアフラム、流体制御装置、及びダイアフラムの製造方法
JP6216738B2 (ja) 2015-05-26 2017-10-18 Ckd株式会社 パイロット式電磁弁
US10781892B2 (en) 2015-07-31 2020-09-22 Borgwarner Inc. Press-fit check valve for a hydraulic tensioner reservoir with metered backflow
WO2018021277A1 (ja) 2016-07-29 2018-02-01 株式会社フジキン オリフィス内蔵弁および圧力式流量制御装置
CN110114601B (zh) 2016-12-26 2020-10-27 株式会社富士金 压电元件驱动式阀以及流量控制装置
US10982633B2 (en) 2017-07-03 2021-04-20 Continental Automotive Systems, Inc. Fuel pump solenoid assembly method
WO2019047916A1 (zh) 2017-09-08 2019-03-14 江苏科维仪表控制工程有限公司 密封性优越式手动高温高压疏水球阀
US11162597B2 (en) * 2017-10-31 2021-11-02 Fujikin Incorporated Flow path assembly and valve device
US11231026B2 (en) 2017-10-31 2022-01-25 Fujikin Incorporated Valve device
CN111417809A (zh) * 2017-11-30 2020-07-14 株式会社富士金 阀装置、使用该阀装置的流体控制装置以及半导体制造装置
US10877495B2 (en) 2018-03-08 2020-12-29 Emerson Process Management Regulator Technologies, Inc. Pressure loaded regulator with dual diaphragm and redundant seal
US11402029B2 (en) 2018-04-06 2022-08-02 Fujikin Incorporated Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method
KR102499250B1 (ko) 2018-09-25 2023-02-10 가부시키가이샤 후지킨 밸브
JP2020204369A (ja) 2019-06-18 2020-12-24 Ckd株式会社 ダイアフラムバルブの製造方法
JP2021021408A (ja) 2019-07-25 2021-02-18 株式会社ノーリツ 流量調整弁
WO2021101855A1 (en) 2019-11-18 2021-05-27 Swagelok Company Arrangements and methods for controlled valve flow rate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4516606A (en) * 1983-02-16 1985-05-14 Exxon Research And Engineering Co. Variable orifice valve assembly
WO2001094824A1 (en) * 2000-06-05 2001-12-13 Fujikin Incorporated Orifice-built-in valve
CN2812071Y (zh) * 2005-07-18 2006-08-30 西安交通大学 一种带接头的节流元件
US20140217321A1 (en) * 2013-02-01 2014-08-07 Swagelok Company Diaphragm valve with welded diaphragm seat carrier
JP2018168970A (ja) * 2017-03-30 2018-11-01 株式会社キッツエスシーティー メタルダイヤフラムバルブ

Also Published As

Publication number Publication date
US20240019034A1 (en) 2024-01-18
EP4530512A2 (en) 2025-04-02
US12203568B2 (en) 2025-01-21
WO2022098620A1 (en) 2022-05-12
EP4240997A1 (en) 2023-09-13
US11808381B2 (en) 2023-11-07
EP4240997C0 (en) 2025-04-02
KR20230094191A (ko) 2023-06-27
EP4530512A3 (en) 2025-05-14
US20220136610A1 (en) 2022-05-05
TWI900687B (zh) 2025-10-11
TW202227738A (zh) 2022-07-16
CN116490710A (zh) 2023-07-25
EP4240997B1 (en) 2025-04-02

Similar Documents

Publication Publication Date Title
US12203568B2 (en) Valves with integrated orifice restrictions
JP5392499B2 (ja) 流体圧機器の弁構造
US7610928B2 (en) Valve and actuator assemblies
CN101506554A (zh) 具有柔性插件的金属密封件
US6575196B1 (en) Valve cartridge with reduced tolerance stack-up
TWI899367B (zh) 具有閥腔蓋佈置的組合以及密封閥腔的方法
WO2019087879A1 (ja) 流路アセンブリおよびバルブ装置
JP7636037B2 (ja) バルブ装置
JPWO2020085300A1 (ja) バルブ装置およびガス供給システム
JP7308542B2 (ja) バルブ装置およびガス供給システム

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20241031

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20241031

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20251118

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260217