TWI900687B - 具有整合孔口限制件之閥 - Google Patents

具有整合孔口限制件之閥

Info

Publication number
TWI900687B
TWI900687B TW110141020A TW110141020A TWI900687B TW I900687 B TWI900687 B TW I900687B TW 110141020 A TW110141020 A TW 110141020A TW 110141020 A TW110141020 A TW 110141020A TW I900687 B TWI900687 B TW I900687B
Authority
TW
Taiwan
Prior art keywords
valve
orifice
wall
seat
annular
Prior art date
Application number
TW110141020A
Other languages
English (en)
Chinese (zh)
Other versions
TW202227738A (zh
Inventor
威廉 Ｈ 格利姆三世
布蘭登 Ｗ 基帕
詹姆斯 Ｇ 麥克柯伊
Original Assignee
美商世偉洛克公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商世偉洛克公司 filed Critical 美商世偉洛克公司
Publication of TW202227738A publication Critical patent/TW202227738A/zh
Application granted granted Critical
Publication of TWI900687B publication Critical patent/TWI900687B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Lift Valve (AREA)
  • Valve Housings (AREA)
  • Multiple-Way Valves (AREA)
TW110141020A 2020-11-04 2021-11-03 具有整合孔口限制件之閥 TWI900687B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202063109496P 2020-11-04 2020-11-04
US63/109,496 2020-11-04

Publications (2)

Publication Number Publication Date
TW202227738A TW202227738A (zh) 2022-07-16
TWI900687B true TWI900687B (zh) 2025-10-11

Family

ID=78819637

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110141020A TWI900687B (zh) 2020-11-04 2021-11-03 具有整合孔口限制件之閥

Country Status (7)

Country Link
US (2) US11808381B2 (https=)
EP (2) EP4240997B1 (https=)
JP (1) JP2023548331A (https=)
KR (1) KR20230094191A (https=)
CN (1) CN116490710A (https=)
TW (1) TWI900687B (https=)
WO (1) WO2022098620A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021101855A1 (en) * 2019-11-18 2021-05-27 Swagelok Company Arrangements and methods for controlled valve flow rate
US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert
JP7655884B2 (ja) * 2022-05-24 2025-04-02 Ckd株式会社 流体制御弁およびその製造方法

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JPH10332020A (ja) * 1997-06-03 1998-12-15 Ckd Corp ガス制御バルブ
EP1300619A1 (en) * 2000-06-05 2003-04-09 Fujikin Incorporated Orifice-built-in valve
US20080061171A1 (en) * 2004-07-09 2008-03-13 Johann Bayer Injection Valve for Fuel Injection
US20140217321A1 (en) * 2013-02-01 2014-08-07 Swagelok Company Diaphragm valve with welded diaphragm seat carrier
US20190178389A1 (en) * 2016-07-29 2019-06-13 Fujikin Incorporated Valve with built-in orifice, and pressure-type flow rate control device

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US5314164A (en) 1992-07-17 1994-05-24 Mks Instruments, Inc. Pivotal diaphragm, flow control valve
DE19638201B4 (de) 1996-09-19 2005-05-04 Robert Bosch Gmbh Brennstoffeinspritzventil
DE19653832A1 (de) 1996-12-21 1998-06-25 Bosch Gmbh Robert Ventil mit kombiniertem Ventilsitzkörper und Spritzlochscheibe
US6000416A (en) 1997-06-04 1999-12-14 Furon Company Compact valve with rolling diaphragm poppet
DE19736682A1 (de) 1997-08-22 1999-02-25 Bosch Gmbh Robert Brennstoffeinspritzventil
US5881997A (en) 1997-11-24 1999-03-16 Fujikin Incorporated Metal diaphragm type valve
US5909747A (en) 1998-04-03 1999-06-08 American Meter Company Radial flow diaphragm valve
JP3522535B2 (ja) 1998-05-29 2004-04-26 忠弘 大見 圧力式流量制御装置を備えたガス供給設備
JP3502561B2 (ja) 1999-02-22 2004-03-02 Ｓｍｃ株式会社 レギュレーター
DE19946838C1 (de) 1999-09-30 2000-10-19 Bosch Gmbh Robert Ventil zum Steuern von Flüssigkeiten
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US20030042459A1 (en) 2001-08-29 2003-03-06 Gregoire Roger J. Unitary diaphragm and seat assembly
JP4197627B2 (ja) 2003-06-02 2008-12-17 シーケーディ株式会社 ガスレギュレータ
JP3861206B2 (ja) 2003-12-08 2006-12-20 株式会社フジキン 流体制御器
JP2005188672A (ja) 2003-12-26 2005-07-14 Neriki:Kk バルブ装置
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WO2011163210A1 (en) 2010-06-22 2011-12-29 Swagelok Company Clamp ring for welded diaphragms
DE102010064268A1 (de) 2010-12-28 2012-06-28 Robert Bosch Gmbh Einspritzventil
DE102012211665A1 (de) 2011-08-18 2013-02-21 Robert Bosch Gmbh Ventil für ein strömendes Fluid
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP6141663B2 (ja) 2013-03-27 2017-06-07 株式会社堀場エステック 流体制御弁
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JP6335685B2 (ja) 2014-06-30 2018-05-30 株式会社フジキン ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法
JP6602553B2 (ja) 2015-04-30 2019-11-06 Ｃｋｄ株式会社 ダイアフラム、流体制御装置、及びダイアフラムの製造方法
JP6216738B2 (ja) 2015-05-26 2017-10-18 Ckd株式会社 パイロット式電磁弁
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JP6929098B2 (ja) * 2017-03-30 2021-09-01 株式会社キッツエスシーティー メタルダイヤフラムバルブ
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US11162597B2 (en) * 2017-10-31 2021-11-02 Fujikin Incorporated Flow path assembly and valve device
US11231026B2 (en) 2017-10-31 2022-01-25 Fujikin Incorporated Valve device
CN111417809A (zh) * 2017-11-30 2020-07-14 株式会社富士金 阀装置、使用该阀装置的流体控制装置以及半导体制造装置
US10877495B2 (en) 2018-03-08 2020-12-29 Emerson Process Management Regulator Technologies, Inc. Pressure loaded regulator with dual diaphragm and redundant seal
US11402029B2 (en) 2018-04-06 2022-08-02 Fujikin Incorporated Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method
KR102499250B1 (ko) 2018-09-25 2023-02-10 가부시키가이샤 후지킨 밸브
JP2020204369A (ja) 2019-06-18 2020-12-24 Ckd株式会社 ダイアフラムバルブの製造方法
JP2021021408A (ja) 2019-07-25 2021-02-18 株式会社ノーリツ 流量調整弁
WO2021101855A1 (en) 2019-11-18 2021-05-27 Swagelok Company Arrangements and methods for controlled valve flow rate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10332020A (ja) * 1997-06-03 1998-12-15 Ckd Corp ガス制御バルブ
EP1300619A1 (en) * 2000-06-05 2003-04-09 Fujikin Incorporated Orifice-built-in valve
US20080061171A1 (en) * 2004-07-09 2008-03-13 Johann Bayer Injection Valve for Fuel Injection
US20140217321A1 (en) * 2013-02-01 2014-08-07 Swagelok Company Diaphragm valve with welded diaphragm seat carrier
US20190178389A1 (en) * 2016-07-29 2019-06-13 Fujikin Incorporated Valve with built-in orifice, and pressure-type flow rate control device

Also Published As

Publication number Publication date
US20240019034A1 (en) 2024-01-18
JP2023548331A (ja) 2023-11-16
EP4530512A2 (en) 2025-04-02
US12203568B2 (en) 2025-01-21
WO2022098620A1 (en) 2022-05-12
EP4240997A1 (en) 2023-09-13
US11808381B2 (en) 2023-11-07
EP4240997C0 (en) 2025-04-02
KR20230094191A (ko) 2023-06-27
EP4530512A3 (en) 2025-05-14
US20220136610A1 (en) 2022-05-05
TW202227738A (zh) 2022-07-16
CN116490710A (zh) 2023-07-25
EP4240997B1 (en) 2025-04-02

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