EP1721227A4 - Flow restrictor - Google Patents

Flow restrictor

Info

Publication number
EP1721227A4
EP1721227A4 EP05723513A EP05723513A EP1721227A4 EP 1721227 A4 EP1721227 A4 EP 1721227A4 EP 05723513 A EP05723513 A EP 05723513A EP 05723513 A EP05723513 A EP 05723513A EP 1721227 A4 EP1721227 A4 EP 1721227A4
Authority
EP
European Patent Office
Prior art keywords
flow restrictor
restrictor
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05723513A
Other languages
German (de)
French (fr)
Other versions
EP1721227A2 (en
Inventor
Daniel T Mudd
William W White
Virginia Miller
Christopher Davis
Kimura Miyoshi
Tadahiro Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Stec Co Ltd
Original Assignee
Horiba Stec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Stec Co Ltd filed Critical Horiba Stec Co Ltd
Priority to EP11164165A priority Critical patent/EP2365412B1/en
Publication of EP1721227A2 publication Critical patent/EP1721227A2/en
Publication of EP1721227A4 publication Critical patent/EP1721227A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K47/00—Means in valves for absorbing fluid energy
    • F16K47/08—Means in valves for absorbing fluid energy for decreasing pressure or noise level and having a throttling member separate from the closure member, e.g. screens, slots, labyrinths

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Control Of Fluid Pressure (AREA)
EP05723513A 2004-02-27 2005-02-24 Flow restrictor Withdrawn EP1721227A4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP11164165A EP2365412B1 (en) 2004-02-27 2005-02-24 Flow restrictor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54810904P 2004-02-27 2004-02-27
PCT/US2005/005653 WO2005086643A2 (en) 2004-02-27 2005-02-24 Flow restrictor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP11164165A Division EP2365412B1 (en) 2004-02-27 2005-02-24 Flow restrictor

Publications (2)

Publication Number Publication Date
EP1721227A2 EP1721227A2 (en) 2006-11-15
EP1721227A4 true EP1721227A4 (en) 2010-02-03

Family

ID=34976064

Family Applications (2)

Application Number Title Priority Date Filing Date
EP11164165A Not-in-force EP2365412B1 (en) 2004-02-27 2005-02-24 Flow restrictor
EP05723513A Withdrawn EP1721227A4 (en) 2004-02-27 2005-02-24 Flow restrictor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP11164165A Not-in-force EP2365412B1 (en) 2004-02-27 2005-02-24 Flow restrictor

Country Status (5)

Country Link
EP (2) EP2365412B1 (en)
JP (2) JP2007531931A (en)
KR (1) KR20060134085A (en)
CN (2) CN102354228B (en)
WO (1) WO2005086643A2 (en)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9690301B2 (en) 2012-09-10 2017-06-27 Reno Technologies, Inc. Pressure based mass flow controller
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP6228768B2 (en) * 2013-07-09 2017-11-08 株式会社堀場エステック Fluid resistance device
WO2015060176A1 (en) * 2013-10-21 2015-04-30 株式会社堀場エステック Fluid control valve
CN104281163A (en) * 2014-10-29 2015-01-14 北京堀场汇博隆精密仪器有限公司 Flow controller
CN104329495B (en) * 2014-10-29 2017-01-18 北京堀场汇博隆精密仪器有限公司 Pressure flow controller
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US11353352B2 (en) * 2016-09-19 2022-06-07 Flow Devices And Systems Inc. Apparatus and methods for self-correcting pressure based mass flow controller
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
CN108526735B (en) * 2018-03-20 2020-09-18 北京控制工程研究所 Method for manufacturing multi-layer pore plate multi-channel throttling assembly of micro-flow control device
DE102019110073A1 (en) 2019-04-16 2020-10-22 Burkert S.A.S. Flow resistance insert and flow measuring or flow control device
KR20220097416A (en) 2019-11-15 2022-07-07 가부시키가이샤 호리바 에스텍 Fluid resistance element and fluid control device
KR102524468B1 (en) * 2020-09-18 2023-04-21 엠케이피 주식회사 Differential pressure generating element for mass flow controller and mass flow controller comprising the same
KR20230094191A (en) 2020-11-04 2023-06-27 스웨이지락 캄파니 Valves with integrated orifice restriction
US11796077B2 (en) 2020-11-06 2023-10-24 Swagelok Company Valve cavity cap arrangements
CN112556773B (en) * 2020-11-27 2023-08-22 国网安徽省电力有限公司电力科学研究院 Gradient deflation SF based on weighing method 6 Method for measuring volume of air chamber
CN112556778B (en) * 2020-11-27 2023-09-26 国网安徽省电力有限公司电力科学研究院 Gradient deflation SF based on constant volume method 6 Method for measuring volume of air chamber
CN112556774B (en) * 2020-11-27 2023-01-31 国网安徽省电力有限公司电力科学研究院 Gradient inflatable SF based on weighing method 6 Method for measuring volume of gas chamber
CN112556776B (en) * 2020-11-27 2023-07-25 国网安徽省电力有限公司电力科学研究院 Gradient inflation and deflation SF based on constant volume method 6 Method for measuring volume of air chamber
CN112556775B (en) * 2020-11-27 2023-07-25 国网安徽省电力有限公司电力科学研究院 Gradient inflation and deflation SF based on weighing method 6 Method for measuring volume of air chamber
CN112556777B (en) * 2020-11-27 2023-08-29 国网安徽省电力有限公司电力科学研究院 Gradient inflatable SF based on constant volume method 6 Method for measuring volume of air chamber
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6039076A (en) * 1998-06-30 2000-03-21 Copes-Vulcan, Inc. High energy loss fluid control device
US20030034074A1 (en) * 2001-08-16 2003-02-20 Mccarty Michael Wildie Fluid pressure reduction device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3851526A (en) * 1973-04-09 1974-12-03 Tylan Corp Fluid flowmeter
JPS543743A (en) * 1977-06-09 1979-01-12 Kubota Ltd Back-mirror support
US4450718A (en) * 1982-04-19 1984-05-29 Advanced Semiconductor Materials N.V. Flow meter including improved laminar flow restrictor device therefor
JPS6014121A (en) * 1983-07-05 1985-01-24 Esutetsuku:Kk Laminar flow element
JPH0222648Y2 (en) * 1985-05-09 1990-06-19
JP3135946B2 (en) * 1991-07-11 2001-02-19 株式会社エステック Method for manufacturing laminar flow element
JPH0863235A (en) * 1994-08-24 1996-03-08 Burutsukusu Instr Kk Differential pressure type mass flow rate control unit
JPH11119835A (en) * 1997-10-13 1999-04-30 Horiba Ltd Mass flow controller and integrated flow rate controller
US6152162A (en) * 1998-10-08 2000-11-28 Mott Metallurgical Corporation Fluid flow controlling
GB0010627D0 (en) * 2000-05-04 2000-06-21 Control Components Fluid flow control device
WO2004020956A2 (en) * 2002-08-28 2004-03-11 Horiba Stec, Inc. Higher accuracy pressure based flow controller
JP3637051B2 (en) * 2003-05-19 2005-04-06 シーケーディ株式会社 Thermal flow meter
US20050016604A1 (en) * 2003-07-21 2005-01-27 Control Components, Inc., A Delaware Corporation Fluid control device and method of making it

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6039076A (en) * 1998-06-30 2000-03-21 Copes-Vulcan, Inc. High energy loss fluid control device
US20030034074A1 (en) * 2001-08-16 2003-02-20 Mccarty Michael Wildie Fluid pressure reduction device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2005086643A2 *

Also Published As

Publication number Publication date
JP5295318B2 (en) 2013-09-18
CN102354228B (en) 2014-07-30
WO2005086643A2 (en) 2005-09-22
WO2005086643A3 (en) 2006-04-27
EP1721227A2 (en) 2006-11-15
EP2365412B1 (en) 2012-10-03
JP2007531931A (en) 2007-11-08
JP2011257004A (en) 2011-12-22
CN1922561A (en) 2007-02-28
KR20060134085A (en) 2006-12-27
CN102354228A (en) 2012-02-15
EP2365412A1 (en) 2011-09-14

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Legal Events

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