CN104329495B - Pressure flow controller - Google Patents
Pressure flow controller Download PDFInfo
- Publication number
- CN104329495B CN104329495B CN201410594276.7A CN201410594276A CN104329495B CN 104329495 B CN104329495 B CN 104329495B CN 201410594276 A CN201410594276 A CN 201410594276A CN 104329495 B CN104329495 B CN 104329495B
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- China
- Prior art keywords
- seat
- flow
- pressure
- base plate
- regulating valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
- F16K17/04—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
- F16K17/06—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded with special arrangements for adjusting the opening pressure
Abstract
The invention relates to the technical field of gas flow control, and discloses a pressure flow controller. The pressure flow controller comprises base plates, an outlet seat, a pressure sensor seat, an adjusting valve seat, a shunt seat, a flow sensor seat and an inlet seat, wherein the outlet seat, the pressure sensor seat, the adjusting valve seat, the shunt seat, the flow sensor seat and the inlet seat are arranged on the base plates; an outlet is formed in the outlet seat, a pressure sensor is arranged in the pressure sensor seat, an adjusting valve is arranged in the adjusting valve seat, a shunt is arranged in the shunt seat, a flow sensor is arranged in the flow sensor seat, and an inlet is formed in the inlet seat; air passages are formed in the base plates; the outlet seat, the pressure sensor seat, the adjusting valve seat, the shunt seat, the flow sensor seat and the inlet seat are respectively communicated with the air passages. According to the pressure flow controller provided by the invention, not only the pressure sensor but also the flow sensor are arranged, and the passages are formed in the base plates, so that the pressure flow controller is convenient to measure and convenient to carry.
Description
Technical field
The present invention relates to gas flow control technology field, more particularly, to a kind of pressure and flow controller, particularly one
Plant high working efficiency and the pressure and flow controller being convenient for carrying.
Background technology
Mass flow controller is controlled logical by flow transducer seat, flow control valve, amplification control circuit and diverter seat
The parts such as road form.The operation such as its working power and flow indication and setting is provided by the flow indication power supply supporting with it.
With the development of production technology, the requirement more and more higher to mass flow controller.Equipment is more and more aborning
It is exquisite, convenient to trend towards.Existing mass flow controller traditional controller only has a kind of function, adjusts flow or adjusts pressure
Power, if in same pipeline when both control pressures in need, when also having control flow, then needs two controllers
Meet use requirement.As in gas chromatograph, the flow controller of air inlet, sometimes for controller flow, measures pressure.Have
When need control pressure again, measure flow.Measuring process is loaded down with trivial details, inefficiency, high cost, and carries inconvenience.
In view of the defect of above-mentioned prior art, it is desirable to provide a kind of high working efficiency and the pressure flow hybrid control being convenient for carrying
Device.
Content of the invention
(1) technical problem to be solved
The technical problem to be solved in the present invention is that existing mass flow controller traditional controller only has a kind of function, adjusts
Amount of restriction or regulation pressure, if in same pipeline when both control pressures in need, when also having control flow, then
Two controllers are needed to meet use requirement.As in gas chromatograph, the flow controller of air inlet is sometimes for controller
Flow, measures pressure.Sometimes need control pressure again, measure flow.Measuring process is loaded down with trivial details, inefficiency, high cost, and takes
With inconvenient problem.
(2) technical scheme
In order to solve above-mentioned technical problem, the invention provides a kind of pressure and flow controller.This pressure and flow controller
Including base plate, and it is arranged at outlet port on base plate, pressure transducer seat, regulating valve seat, diverter seat, flow transducer seat
And inlet port；Described outlet port is built-in with outlet, and described pressure transducer seat is built-in with pressure transducer, in described regulating valve seat
It is equipped with regulating valve, described diverter seat is built-in with diverter, described flow transducer seat is built-in with flow transducer, described import
Seat is built-in with import；It is provided with gas channels, described outlet port, pressure transducer seat, regulating valve seat, diverter in described base plate
Seat, flow transducer seat are connected with described gas channels respectively with inlet port.
Wherein, described base plate includes the first base plate, the second base plate and the 3rd base plate；Described gas channels are located at described second
On base plate, described second base plate be located between described first base plate and the 3rd base plate, described first base plate is provided with multiple with
The through hole of described gas channels connection, described outlet port, pressure transducer seat, regulating valve seat, diverter seat, flow transducer seat
And inlet port is all connected with described through hole.
Wherein, described through hole includes air inlet and venthole, in described regulating valve seat, diverter seat and flow transducer seat
It is provided with described air inlet and venthole, described outlet port is provided with described venthole, described inlet port setting and pressure pass
Sensor seat is provided with described air inlet.
Wherein, described gas channels are provided with three, and described gas channels are respectively communicated with entering in described inlet port
The air inlet of pore, the air inlet of flow transducer seat and diverter seat；Article one, described gas channels are respectively communicated with described flow
The air inlet of the venthole of sensor holder, the venthole of diverter seat and regulating valve seat；Article one, described gas channels are respectively communicated with
The venthole of the venthole of regulating valve seat, the air inlet of pressure transducer seat and outlet port.
Wherein, described base plate, the second base plate and the 3rd base plate are all welded using stacked conducting plate.
Wherein, outlet port, pressure transducer seat, regulating valve seat, diverter seat, flow transducer seat and inlet port with described
It is provided with sealing device between first base plate.
Wherein, described sealing device is sealing ring or sealing gasket.
Wherein, controller, described flow transducer and the pressure transducer input with described controller respectively are also included
Connect, described regulating valve is connected with the outfan of described controller.
(3) beneficial effect
The technique scheme of the present invention has the advantage that in the pressure and flow controller middle outlet seat that the present invention provides
It is equipped with outlet, described pressure transducer seat is built-in with pressure transducer, and described regulating valve seat is built-in with regulating valve, described diverter
Seat is built-in with diverter, and described flow transducer seat is built-in with flow transducer, and described inlet port is built-in with import；Described base plate
Inside it is provided with gas channels, described outlet port, pressure transducer seat, regulating valve seat, diverter seat, flow transducer seat and import
Seat is connected with described gas channels respectively.The pressure and flow controller that the present invention provides is provided with pressure transducer, arranges again
There is flow transducer, and passage is provided with base plate, it is convenient not only to measure, and is convenient for carrying；There is light weight, be convenient for carrying
And the little feature of installing space.
Brief description
Fig. 1 is the structural representation of embodiment of the present invention pressure and flow controller；
Fig. 2 is the structural representation of the lower shoe of embodiment of the present invention pressure and flow controller；
Fig. 3 is the structural representation of the middle base plate of embodiment of the present invention pressure and flow controller；
Fig. 4 is the inside connection diagram of embodiment of the present invention pressure and flow controller.
In figure: 1: outlet port；2: regulating valve seat；3: diverter seat；4: flow transducer seat；5: inlet port；6: lower shoe；
7: middle base plate；8: upper plate；9: import air inlet；10: gas channels；11: flow transducer air inlet；11 ': flow transducer
Venthole；12: diverter air inlet；12 ': diverter venthole；13: regulating valve air inlet；13 ': regulating valve venthole；14:
Outlet venthole；14 ': pressure transducer air inlet 15: pressure transducer seat；16: controller；17: flow transducer；18: adjust
Section valve；19: pressure transducer.
Specific embodiment
In describing the invention, unless otherwise stated, " multiple " are meant that two or more；Term " on ",
The orientation of instruction such as D score, "left", "right", " interior ", " outward " or position relationship are based on orientation shown in the drawings or position relationship,
It is for only for ease of the description present invention and simplifies description, rather than the machine of instruction or hint indication or element must have specifically
Orientation, with specific azimuth configuration and operation, be therefore not considered as limiting the invention.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or is integrally connected；Can
To be to be mechanically connected or electrical connection；Can be to be joined directly together it is also possible to be indirectly connected to by intermediary.For this
For the those of ordinary skill in field, above-mentioned term concrete meaning in the present invention can be understood with concrete condition.
With reference to the accompanying drawings and examples the specific embodiment of the present invention is described in further detail.Following examples
For the present invention is described, but it is not limited to the scope of the present invention.
As shown in figure 1, pressure and flow controller provided in an embodiment of the present invention includes: base plate, and be arranged on base plate
Outlet port 1, pressure transducer seat 15, regulating valve seat 2, diverter seat 3, flow transducer seat 4 and inlet port 5；Outlet port 1 is built-in
There is outlet, pressure transducer seat 15 is built-in with pressure transducer 19, regulating valve seat 2 is built-in with regulating valve, adopt in the present embodiment
Regulating valve 18, in the present embodiment, regulating valve adopts solenoid valve.Diverter seat 3 is built-in with diverter, in flow transducer seat 4
It is equipped with flow transducer 17, inlet port 5 is built-in with import；It is provided with gas channels 10, outlet port 1, pressure transducer in base plate
Seat 15, regulating valve seat 2, diverter seat 3, flow transducer seat 4 are connected with gas channels 10 respectively with inlet port 5.The present invention exists
Pressure transducer and flow transducer are provided with base plate, and passage can be provided with base plate, reduce pressure flow control
The overall volume of device processed；There is light weight, be convenient for carrying and installing space is little.
As shown in Figures 2 and 3, the base plate in pressure and flow controller provided in an embodiment of the present invention include the first base plate 8,
Second base plate 7 and the 3rd base plate 6；Gas channels 10 are located on the second base plate 7, and the second base plate 7 is located at the first base plate 8 and the 3rd bottom
Between plate 6, the first base plate 8 is provided with multiple through holes being connected with gas channels 10, outlet port 1, pressure transducer seat 15, tune
Section valve seat 2, diverter seat 3, flow transducer seat 4 and inlet port 5 are all connected with through hole.It is welded using multi-layer sheet, reduce
The difficulty of processing of gas channels 10, the production cost of saving.Base plate 8, the second base plate 7 and the 3rd base plate 6 are all using multilamellar gold
Belong to plate weld to form.The small volume of flow transducer, diverter and regulating valve in the present embodiment, can be mounted on the first base plate
On 8.
Through hole includes air inlet and venthole, and the first base plate 8 in regulating valve seat 2 is separately provided for the tune of air inlet
Section valve air inlet 13, and the regulating valve venthole 13 ' for giving vent to anger.It is respectively arranged with the first base plate 8 in diverter seat 3
For the diverter air inlet 12 of air inlet, and the diverter venthole 12 ' for giving vent to anger.In flow transducer seat 4 first
The flow transducer air inlet 11 of air inlet, and the flow transducer venthole for giving vent to anger are separately provided on base plate 8
11’.Pressure transducer air inlet 14 ' for air inlet is provided with the first base plate 8 in pressure transducer seat 15.Outlet port 1
Outlet venthole 14 for giving vent to anger is provided with the first interior base plate 8, the first base plate 8 in inlet port 5 is provided with for
The import air inlet 9 of air inlet.
The present embodiment provide pressure and flow controller in gas channels 10 be provided with three, including first passage, second
Passage and third channel.The import air inlet 9 that first passage is respectively communicated with inlet port 5, the air inlet of flow transducer seat 4 are
Flow transducer air inlet 11, and the air inlet of diverter seat 3 is diverter air inlet 12；Gas is entered by import air inlet 9
Enter gas channels 10, gas channels 10 are divided into two, one enters in flow transducer seat 4 from flow transducer air inlet 11,
Another enters in diverter seat 3 from diverter air inlet 12.The venthole that second channel is respectively communicated with flow transducer seat 4 is
Flow transducer venthole 11 ', the venthole of diverter seat 3 are the air inlet regulation of diverter venthole 12 ' and regulating valve seat 2
Valve air inlet 13；Gas enters the gas circuit second channel respectively from diverter venthole 12 ' and flow transducer venthole 11 '
Passage 10, then entered in regulating valve seat 2 by regulating valve air inlet 13.Third channel is respectively communicated with the venthole of regulating valve seat 2
13 ', the air inlet of pressure transducer seat 15 is the outlet venthole 14 of pressure transducer air inlet 14 ' and outlet port 1, and gas enters
The pressure of gas can be measured in the pressure transducer seat 15 entering sealing, eventually pass regulating valve venthole 13 and flow to outlet port
1.
As shown in figure 4, in the present embodiment, being additionally provided with computing circuit and control circuit in the present embodiment.Also include controlling
Device 16 processed, flow transducer 17 and pressure transducer 19 are connected with the input of controller 16 respectively, regulating valve 18 and controller
16 outfan connects.Flow transducer 17 is used for measuring rate-of flow, and pressure transducer 19 is used for measuring media outlet side pressure
Power, measurement signal is delivered to controller 16 by the signal of two sensorses, adopts central processing unit in the present embodiment.In controller 16
Portion is divided into pressure control mode and flow controller mode by external selected pattern, in Stress control and measure flow rate mode
Under, the measurement signal of pressure transducer 19 is compared with the pressure signal setting, and makes pressure transducer 19 by controlling to adjust valve 18
Measurement signal with set pressure signal equal, thus reaching the purpose of control pressure.Now, the signal of flow transducer 17
It is converted directly into flow output signal.In flow-control and under measured pressure pattern, the measurement signal of flow transducer 17 with set
Fixed flow signal compares, and makes the measurement signal of flow transducer 17 and the flow signal phase setting by controlling to adjust valve 18
Deng thus reaching the purpose of control pressure.Now, directly dress is changed to output pressure signal to the signal of pressure transducer 19.
In order to gas is along channel flow in this enforcement, using sealing between outlet port 1, inlet port 5 and the first base plate 8
Device.Equally between regulating valve seat 2, diverter seat 3 and flow transducer seat 4 and the first base plate 8, it is also adopted by sealing device, close
Seal apparatus adopt o type sealing ring or sealing gasket.
In the present embodiment, diverter can place the tube bank of varying number according to different split ratios.And in order to extend this reality
Apply example offer pressure and flow controller life-span, the present embodiment also outlet port 1, pressure transducer seat 15, regulating valve seat 2,
Diverter seat 3, flow transducer seat 4 and inlet port 5 surface are provided with epoxy enamelled coating.Prevent pressure and flow controller rotten
Erosion.
Pressure and flow controller of the present invention is using process: Mersure Controler medium is according to the gas circuit of the first passage of base plate
Passage 10, first simultaneously through diverter seat 3 and flow flow transducer seat 4, diverter 3 shunts to gas, flow sensing
Device can accurately record the rate-of flow passing through.Enter in regulating valve seat 2 by second channel gas again, in regulating valve, set one
Individual flow signal, is set flow signal and is compared with flow measurement signal, if unequal, adjust the openings of sizes of regulating valve, adjust
Throttle body flow, equal with flow measurement signal until setting flow signal, no longer adjust the opening of regulating valve.Gas meeting simultaneously
It flow in pressure transducer seat, the pressure of gas is measured.
In sum, the invention has the advantages that the pressure and flow controller middle outlet seat that the present invention provides is built-in with
Outlet, described pressure transducer seat is built-in with pressure transducer, and described regulating valve seat is built-in with regulating valve, in described diverter seat
It is equipped with diverter, described flow transducer seat is built-in with flow transducer, and described inlet port is built-in with import；Set in described base plate
It is equipped with gas channels, described outlet port, pressure transducer seat, regulating valve seat, diverter seat, flow transducer seat and inlet port divide
Do not connect with described gas channels.The pressure and flow controller that the present invention provides is provided with pressure transducer, is provided with stream again
Quantity sensor, and passage is provided with base plate, it is convenient not only to measure, and is convenient for carrying；There is light weight, be convenient for carrying and pacify
The little feature in dress space.
Further, it is welded using multi-layer sheet, reduce the difficulty of processing of gas channels, the production cost of saving.
Above example only in order to technical scheme to be described, is not intended to limit；Although with reference to the foregoing embodiments
The present invention has been described in detail, it will be understood by those within the art that: it still can be to aforementioned each enforcement
Technical scheme described in example is modified, or carries out equivalent to wherein some technical characteristics；And these modification or
Replace, do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (7)
1. a kind of pressure and flow controller is it is characterised in that include: base plate, and is arranged at outlet port (1) on base plate, pressure
Sensor holder (15), regulating valve seat (2), diverter seat (3), flow transducer seat (4) and inlet port (5)；Described outlet port (1)
It is built-in with outlet, described pressure transducer seat (15) is built-in with pressure transducer (19), described regulating valve seat (2) is built-in with regulation
Valve (18), described diverter seat (3) is built-in with diverter, and described flow transducer seat (4) is built-in with flow transducer (17), institute
State inlet port (5) and be built-in with import；It is provided with gas channels (10), described outlet port (1), pressure transducer seat in described base plate
(15), regulating valve seat (2), diverter seat (3), flow transducer seat (4) and inlet port (5) respectively with described gas channels (10)
Connection；Described gas channels (10) are provided with three, and a described gas channels (10) is respectively communicated with described inlet port (5)
The air inlet of air inlet, the air inlet of flow transducer seat (4) and diverter seat (3)；Article one, described gas channels (10) difference
Connect the air inlet of the venthole, the venthole of diverter seat (3) and regulating valve seat (2) of described flow transducer seat (4)；Article one,
Described gas channels (10) are respectively communicated with the venthole of regulating valve seat (2), the air inlet of pressure transducer seat (15) and outlet port
(1) venthole.
2. pressure and flow controller according to claim 1 it is characterised in that: described base plate include the first base plate (8),
Two base plates (7) and the 3rd base plate (6)；Described gas channels (10) are located on described second base plate (7), described second base plate (7)
Multiple logical with described gas circuit positioned at, between described first base plate (8) and the 3rd base plate (6), described first base plate (8) being provided with
The through hole that road (10) connects, described outlet port (1), pressure transducer seat (15), regulating valve seat (2), diverter seat (3), flow
Sensor holder (4) and inlet port (5) are all connected with described through hole.
3. pressure and flow controller according to claim 2 it is characterised in that: described through hole includes air inlet and gives vent to anger
Hole, is provided with described air inlet and venthole in described regulating valve seat (2), diverter seat (3) and flow transducer seat (4),
Described outlet port (1) is provided with described venthole, and described inlet port (5) and pressure transducer seat (15) are provided with described air inlet
Hole.
4. pressure and flow controller according to claim 2 it is characterised in that: described first base plate (8), the second base plate
And the 3rd base plate (6) is all welded using stacked conducting plate (7).
5. pressure and flow controller according to claim 2 it is characterised in that: described outlet port (1), pressure transducer seat
(15), between regulating valve seat (2), diverter seat (3), flow transducer seat (4) and inlet port (5) and described first base plate (8)
It is provided with sealing device.
6. pressure and flow controller according to claim 5 it is characterised in that: described sealing device be sealing ring or sealing
Pad.
7. pressure and flow controller according to claim 1 it is characterised in that: also include controller (16), described flow
Sensor (17) and pressure transducer (19) are connected with the input of described controller (16) respectively, described regulating valve (18) and institute
The outfan stating controller (16) connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410594276.7A CN104329495B (en) | 2014-10-29 | 2014-10-29 | Pressure flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410594276.7A CN104329495B (en) | 2014-10-29 | 2014-10-29 | Pressure flow controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104329495A CN104329495A (en) | 2015-02-04 |
| CN104329495B true CN104329495B (en) | 2017-01-18 |
Family
ID=52404268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410594276.7A Active CN104329495B (en) | 2014-10-29 | 2014-10-29 | Pressure flow controller |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104329495B (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204187072U (en) * | 2014-10-29 | 2015-03-04 | 北京堀场汇博隆精密仪器有限公司 | A kind of pressure and flow controller |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003280745A (en) * | 2002-03-25 | 2003-10-02 | Stec Inc | Mass-flow controller |
| JP4137666B2 (en) * | 2003-02-17 | 2008-08-20 | 株式会社堀場エステック | Mass flow controller |
| US6907904B2 (en) * | 2003-03-03 | 2005-06-21 | Redwood Microsystems, Inc. | Fluid delivery system and mounting panel therefor |
| CN1922561A (en) * | 2004-02-27 | 2007-02-28 | 霍里巴斯特克公司 | Flow restrictor |
| CN101714003B (en) * | 2009-11-20 | 2012-07-25 | 北京七星华创电子股份有限公司 | Mass flow controller |
| KR101550255B1 (en) * | 2011-05-10 | 2015-09-04 | 가부시키가이샤 후지킨 | Pressure-based flow control device with flow monitor, fluid-supply-system anomaly detection method using same, and method for handling monitor flow anomalies |
| CN202305490U (en) * | 2011-11-04 | 2012-07-04 | 浙江福立分析仪器有限公司 | Electric pneumatic control device for gas chromatographs |
-
2014
- 2014-10-29 CN CN201410594276.7A patent/CN104329495B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204187072U (en) * | 2014-10-29 | 2015-03-04 | 北京堀场汇博隆精密仪器有限公司 | A kind of pressure and flow controller |
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| CN104329495A (en) | 2015-02-04 |
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Address after: No. 23 and 25, No. 40, Beiyuan Road, Chaoyang District, Beijing 100012 Patentee after: Houlibo precision instrument (Beijing) Co., Ltd Address before: 100012 No. 40 Beiyuan Road, Beijing, Chaoyang District Patentee before: BEIJING HORIBA METRON INSTRUMENTS Co.,Ltd. |
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