KR20220100916A - 세라믹 기판, 복합 기판 및 회로 기판 그리고 세라믹 기판의 제조 방법, 복합 기판의 제조 방법, 회로 기판의 제조 방법 및 복수의 회로 기판의 제조 방법 - Google Patents

세라믹 기판, 복합 기판 및 회로 기판 그리고 세라믹 기판의 제조 방법, 복합 기판의 제조 방법, 회로 기판의 제조 방법 및 복수의 회로 기판의 제조 방법 Download PDF

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KR20220100916A
KR20220100916A KR1020227019595A KR20227019595A KR20220100916A KR 20220100916 A KR20220100916 A KR 20220100916A KR 1020227019595 A KR1020227019595 A KR 1020227019595A KR 20227019595 A KR20227019595 A KR 20227019595A KR 20220100916 A KR20220100916 A KR 20220100916A
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South Korea
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ceramic substrate
manufacturing
green sheet
metal layer
firing chamber
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KR1020227019595A
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Korean (ko)
Inventor
유타 츠가와
고지 니시무라
세이지 고바시
요시유키 에시마
아키마사 유아사
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덴카 주식회사
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Application filed by 덴카 주식회사 filed Critical 덴카 주식회사
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  • Structural Engineering (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
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  • Manufacturing Of Printed Wiring (AREA)
KR1020227019595A 2019-11-15 2020-11-13 세라믹 기판, 복합 기판 및 회로 기판 그리고 세라믹 기판의 제조 방법, 복합 기판의 제조 방법, 회로 기판의 제조 방법 및 복수의 회로 기판의 제조 방법 Ceased KR20220100916A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019206751 2019-11-15
JPJP-P-2019-206751 2019-11-15
PCT/JP2020/042421 WO2021095844A1 (ja) 2019-11-15 2020-11-13 セラミック基板、複合基板及び回路基板並びにセラミック基板の製造方法、複合基板の製造方法、回路基板の製造方法及び複数の回路基板の製造方法

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KR20220100916A true KR20220100916A (ko) 2022-07-18

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KR1020227019595A Ceased KR20220100916A (ko) 2019-11-15 2020-11-13 세라믹 기판, 복합 기판 및 회로 기판 그리고 세라믹 기판의 제조 방법, 복합 기판의 제조 방법, 회로 기판의 제조 방법 및 복수의 회로 기판의 제조 방법

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EP (1) EP4059912B1 (https=)
JP (1) JP7168796B2 (https=)
KR (1) KR20220100916A (https=)
CN (1) CN114830837B (https=)
WO (1) WO2021095844A1 (https=)

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DE102023103508A1 (de) * 2023-02-14 2024-08-14 Rogers Germany Gmbh Verfahren zur Herstellung eines Metall-Keramik-Substrats und ein Metall-Keramik-Substrat hergestellt mit einem solchen Verfahren

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018018971A (ja) 2016-07-28 2018-02-01 日立金属株式会社 セラミック基板の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141476A (ja) * 1988-11-21 1990-05-30 Murata Mfg Co Ltd セラミック基板の製造方法
JP3722573B2 (ja) * 1996-12-11 2005-11-30 電気化学工業株式会社 セラミックス基板及びそれを用いた回路基板とその製造方法
JP4483161B2 (ja) * 2002-08-13 2010-06-16 住友電気工業株式会社 窒化アルミニウム焼結体、メタライズ基板、ヒータ、治具および窒化アルミニウム焼結体の製造方法
JP4082610B2 (ja) * 2004-05-07 2008-04-30 Ｔｄｋ株式会社 セラミック基板及びその製造方法
JP2007019123A (ja) * 2005-07-06 2007-01-25 Sumitomo Metal Electronics Devices Inc セラミック回路基板集合体
JP2007198626A (ja) * 2006-01-24 2007-08-09 Tdk Corp 焼成炉
JP2008186897A (ja) * 2007-01-29 2008-08-14 Tdk Corp 多層セラミック基板の製造方法
WO2013146789A1 (ja) * 2012-03-26 2013-10-03 日立金属株式会社 窒化珪素焼結体基板及びその製造方法
EP3255666B1 (en) * 2015-02-02 2021-10-13 Kabushiki Kaisha Toshiba Silicon nitride circuit substrate and electronic component module using same
JP6399252B2 (ja) * 2016-03-28 2018-10-03 日立金属株式会社 回路基板および窒化ケイ素焼結基板の製造方法
JP6672960B2 (ja) * 2016-03-31 2020-03-25 日立金属株式会社 セラミック焼結板の製造方法
JP7321768B2 (ja) 2018-05-23 2023-08-07 信越化学工業株式会社 化学気相成長装置および被膜形成方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018018971A (ja) 2016-07-28 2018-02-01 日立金属株式会社 セラミック基板の製造方法

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