KR20210038980A - 오존수 전달 시스템 및 사용 방법 - Google Patents

오존수 전달 시스템 및 사용 방법 Download PDF

Info

Publication number
KR20210038980A
KR20210038980A KR1020217008472A KR20217008472A KR20210038980A KR 20210038980 A KR20210038980 A KR 20210038980A KR 1020217008472 A KR1020217008472 A KR 1020217008472A KR 20217008472 A KR20217008472 A KR 20217008472A KR 20210038980 A KR20210038980 A KR 20210038980A
Authority
KR
South Korea
Prior art keywords
conduit
ultrapure water
contact device
ozone
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020217008472A
Other languages
English (en)
Korean (ko)
Inventor
하인리히 세이워트
크리스찬 르 티에크
울리히 브라머
Original Assignee
엠케이에스 인스트루먼츠 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엠케이에스 인스트루먼츠 인코포레이티드 filed Critical 엠케이에스 인스트루먼츠 인코포레이티드
Priority to KR1020237040837A priority Critical patent/KR102692467B1/ko
Publication of KR20210038980A publication Critical patent/KR20210038980A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/68—Treatment of water, waste water, or sewage by addition of specified substances, e.g. trace elements, for ameliorating potable water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/72—Treatment of water, waste water, or sewage by oxidation
    • C02F1/78—Treatment of water, waste water, or sewage by oxidation with ozone
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/16—Disinfection or sterilisation of materials or objects, in general; Accessories therefor using chemical substances
    • A61L2/18—Liquid substances
    • A61L2/183—Ozone dissolved in a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
    • B01F23/2322—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles using columns, e.g. multi-staged columns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
    • B01F23/23761—Aerating, i.e. introducing oxygen containing gas in liquids
    • B01F23/237613—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
    • B01F23/23762—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/29—Mixing systems, i.e. flow charts or diagrams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/80—Mixing plants; Combinations of mixers
    • B01F33/81—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles
    • B01F33/811—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles in two or more consecutive, i.e. successive, mixing receptacles or being consecutively arranged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/2132—Concentration, pH, pOH, p(ION) or oxygen-demand
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2211—Amount of delivered fluid during a period
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/78—Details relating to ozone treatment devices
    • C02F2201/782—Ozone generators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Hydrology & Water Resources (AREA)
  • Medicinal Chemistry (AREA)
  • Epidemiology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
KR1020217008472A 2018-08-29 2019-08-27 오존수 전달 시스템 및 사용 방법 Ceased KR20210038980A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020237040837A KR102692467B1 (ko) 2018-08-29 2019-08-27 오존수 전달 시스템 및 사용 방법

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862724368P 2018-08-29 2018-08-29
US62/724,368 2018-08-29
PCT/US2019/048411 WO2020046994A1 (en) 2018-08-29 2019-08-27 Ozonated water delivery system and method of use

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020237040837A Division KR102692467B1 (ko) 2018-08-29 2019-08-27 오존수 전달 시스템 및 사용 방법

Publications (1)

Publication Number Publication Date
KR20210038980A true KR20210038980A (ko) 2021-04-08

Family

ID=69639551

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020217008472A Ceased KR20210038980A (ko) 2018-08-29 2019-08-27 오존수 전달 시스템 및 사용 방법
KR1020237040837A Active KR102692467B1 (ko) 2018-08-29 2019-08-27 오존수 전달 시스템 및 사용 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020237040837A Active KR102692467B1 (ko) 2018-08-29 2019-08-27 오존수 전달 시스템 및 사용 방법

Country Status (9)

Country Link
US (1) US11518696B2 (https=)
EP (1) EP3814284B1 (https=)
JP (1) JP7422135B2 (https=)
KR (2) KR20210038980A (https=)
CN (2) CN119735291A (https=)
IL (1) IL281134A (https=)
SG (1) SG11202100619PA (https=)
TW (1) TWI912238B (https=)
WO (1) WO2020046994A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024020126A1 (en) * 2022-07-20 2024-01-25 Evoqua Water Technologies Llc Mobile ultrapure water system
JP2024035532A (ja) * 2022-09-02 2024-03-14 株式会社荏原製作所 ガス溶解液供給装置

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5261966A (en) 1991-01-28 1993-11-16 Kabushiki Kaisha Toshiba Method of cleaning semiconductor wafers using mixer containing a bundle of gas permeable hollow yarns
EP0598424A3 (en) 1992-11-16 1996-05-15 Novellus Systems Inc Device for removing dissolved gas from a liquid.
JP3174856B2 (ja) 1993-05-07 2001-06-11 日本エア・リキード株式会社 混合ガス供給装置
US6001223A (en) 1995-07-07 1999-12-14 Air Liquide America Corporation On-site ammonia purification for semiconductor manufacture
EP0913233B1 (en) 1997-10-31 2005-05-11 Ebara Corporation Polishing solution supply system
US20070119816A1 (en) 1998-04-16 2007-05-31 Urquhart Karl J Systems and methods for reclaiming process fluids in a processing environment
US7980753B2 (en) 1998-04-16 2011-07-19 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system
JP2000037695A (ja) * 1998-07-24 2000-02-08 Kurita Water Ind Ltd オゾン水供給装置
US6247838B1 (en) 1998-11-24 2001-06-19 The Boc Group, Inc. Method for producing a liquid mixture having a predetermined concentration of a specified component
JP2000262874A (ja) * 1999-03-15 2000-09-26 Mitsubishi Electric Corp オゾン水の製造方法および製造装置
JP3748731B2 (ja) 1999-03-26 2006-02-22 株式会社荏原製作所 砥液供給装置
JP2003512736A (ja) 1999-10-19 2003-04-02 フィファー・スミス・コーポレーション オゾン−溶媒溶液を用いた基体の処理方法及び処理装置
JP2001129376A (ja) * 1999-11-08 2001-05-15 Ishikawajima Harima Heavy Ind Co Ltd オゾン水製造方法及び製造装置
EP1305107B1 (en) 2000-07-31 2006-09-20 Kinetics Chempure Systems, Inc. Method and apparatus for blending process materials
US6805791B2 (en) 2000-09-01 2004-10-19 Applied Science And Technology, Inc. Ozonated water flow and concentration control apparatus
US6884359B2 (en) * 2000-09-27 2005-04-26 Dainippon Ink And Chemicals, Inc. Apparatus and method for controlling resistivity of ultra pure water
US6766818B2 (en) 2001-04-06 2004-07-27 Akrion, Llc Chemical concentration control device
CN1602538A (zh) 2001-11-13 2005-03-30 Fsi国际公司 用于浸渍处理的高级处理控制
US6732017B2 (en) 2002-02-15 2004-05-04 Lam Research Corp. System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
JP2003334433A (ja) 2002-05-16 2003-11-25 Kurita Water Ind Ltd 連続溶解装置、連続溶解方法及び気体溶解水供給装置
EP1367149B1 (en) 2002-05-29 2011-11-16 Toyo Tanso Co., Ltd. Fluorine gas generator
KR20100105906A (ko) 2002-07-19 2010-09-30 엔테그리스, 아이엔씨. 유체유동측정 및 비례유체유동 제어장치
CN1332741C (zh) 2002-07-19 2007-08-22 动力系统有限公司 混合过程原料的方法和设备
CN100374768C (zh) 2002-07-19 2008-03-12 诚实公司 液体流动控制设备及方法
JP3527735B1 (ja) 2002-11-20 2004-05-17 東洋炭素株式会社 フッ素ガス発生装置
US7976718B2 (en) 2003-12-30 2011-07-12 Akrion Systems Llc System and method for selective etching of silicon nitride during substrate processing
US7107128B2 (en) 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow
US20060080041A1 (en) 2004-07-08 2006-04-13 Anderson Gary R Chemical mixing apparatus, system and method
US20060021634A1 (en) 2004-07-08 2006-02-02 Liu Zhi Lewis Method and apparatus for creating ozonated process solutions having high ozone concentration
JP3777451B2 (ja) 2004-08-18 2006-05-24 株式会社プレテック オゾン水生成方法及びオゾン水製造装置
TWI552797B (zh) 2005-06-22 2016-10-11 恩特葛瑞斯股份有限公司 整合式氣體混合用之裝置及方法
TWI402423B (zh) 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7743783B2 (en) 2006-04-04 2010-06-29 Air Liquide Electronics U.S. Lp Method and apparatus for recycling process fluids
JP4830731B2 (ja) 2006-09-06 2011-12-07 栗田工業株式会社 ガス溶解水供給装置
US8448925B2 (en) * 2006-10-17 2013-05-28 Mks Instruments, Inc. Devices, systems, and methods for carbonation of deionized water
EP2104648B1 (en) * 2006-10-17 2013-04-17 MKS Instruments, Inc. System and method for carbonation of deionized water
JP5466817B2 (ja) 2007-09-03 2014-04-09 シャープ株式会社 オゾン水製造装置
JP5020784B2 (ja) 2007-11-08 2012-09-05 野村マイクロ・サイエンス株式会社 オゾン水の製造装置及び製造方法
JP5412135B2 (ja) 2009-02-23 2014-02-12 野村マイクロ・サイエンス株式会社 オゾン水供給装置
US8747762B2 (en) 2009-12-03 2014-06-10 Applied Materials, Inc. Methods and apparatus for treating exhaust gas in a processing system
JP5779321B2 (ja) * 2010-06-18 2015-09-16 シャープ株式会社 高濃度オゾン水の製造方法及び高濃度オゾン水の製造装置
US9056262B2 (en) * 2012-11-08 2015-06-16 Mks Instruments, Inc. Pressure-less ozonated Di-water (DIO3) recirculation reclaim system
US10773221B2 (en) 2016-11-11 2020-09-15 Mks Instruments, Inc. Systems and methods for generating a conductive liquid comprising deionized water with ammonia gas dissolved therein

Also Published As

Publication number Publication date
IL281134A (en) 2021-04-29
WO2020046994A1 (en) 2020-03-05
KR102692467B1 (ko) 2024-08-07
CN119735291A (zh) 2025-04-01
EP3814284A4 (en) 2022-03-23
JP2022502235A (ja) 2022-01-11
EP3814284B1 (en) 2025-06-04
US20200071208A1 (en) 2020-03-05
EP3814284A1 (en) 2021-05-05
CN112601720A (zh) 2021-04-02
TWI912238B (zh) 2026-01-21
KR20230165878A (ko) 2023-12-05
SG11202100619PA (en) 2021-02-25
US11518696B2 (en) 2022-12-06
TW202023962A (zh) 2020-07-01
JP7422135B2 (ja) 2024-01-25

Similar Documents

Publication Publication Date Title
KR101406411B1 (ko) 탈이온수의 탄화 시스템 및 방법
CN102986008B (zh) 用于去离子水的碳酸化的装置、系统及方法
CN100549894C (zh) 控制臭氧化水流量及浓度的设备和方法
KR102692467B1 (ko) 오존수 전달 시스템 및 사용 방법
JP2022502235A5 (https=)
JPH1192104A (ja) 高純度な二酸化塩素水性組成物、その製造方法及び製造装置

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

E601 Decision to refuse application
E801 Decision on dismissal of amendment
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

PE0801 Dismissal of amendment

St.27 status event code: A-2-2-P10-P12-nap-PE0801

A107 Divisional application of patent
PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A18-div-PA0104

St.27 status event code: A-0-1-A10-A16-div-PA0104

PC1202 Submission of document of withdrawal before decision of registration

St.27 status event code: N-1-6-B10-B11-nap-PC1202

R18 Changes to party contact information recorded

Free format text: ST27 STATUS EVENT CODE: A-3-3-R10-R18-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000