JP7422135B2 - オゾン水デリバリシステム及び使用方法 - Google Patents

オゾン水デリバリシステム及び使用方法 Download PDF

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Publication number
JP7422135B2
JP7422135B2 JP2021510328A JP2021510328A JP7422135B2 JP 7422135 B2 JP7422135 B2 JP 7422135B2 JP 2021510328 A JP2021510328 A JP 2021510328A JP 2021510328 A JP2021510328 A JP 2021510328A JP 7422135 B2 JP7422135 B2 JP 7422135B2
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JP
Japan
Prior art keywords
conduit
gas
ozonated water
delivery system
carbon dioxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2021510328A
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English (en)
Japanese (ja)
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JP2022502235A5 (https=
JP2022502235A (ja
Inventor
ザイヴェルト，ハインリヒ
ティク，クリスティアーヌ レ
ブラマー，ウルリヒ
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MKS Inc
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MKS Inc
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Publication of JP2022502235A5 publication Critical patent/JP2022502235A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/72—Treatment of water, waste water, or sewage by oxidation
    • C02F1/78—Treatment of water, waste water, or sewage by oxidation with ozone
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/68—Treatment of water, waste water, or sewage by addition of specified substances, e.g. trace elements, for ameliorating potable water
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/16—Disinfection or sterilisation of materials or objects, in general; Accessories therefor using chemical substances
    • A61L2/18—Liquid substances
    • A61L2/183—Ozone dissolved in a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
    • B01F23/2322—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles using columns, e.g. multi-staged columns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
    • B01F23/23761—Aerating, i.e. introducing oxygen containing gas in liquids
    • B01F23/237613—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
    • B01F23/23762—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/29—Mixing systems, i.e. flow charts or diagrams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/80—Mixing plants; Combinations of mixers
    • B01F33/81—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles
    • B01F33/811—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles in two or more consecutive, i.e. successive, mixing receptacles or being consecutively arranged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/2132—Concentration, pH, pOH, p(ION) or oxygen-demand
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2211—Amount of delivered fluid during a period
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/78—Details relating to ozone treatment devices
    • C02F2201/782—Ozone generators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Hydrology & Water Resources (AREA)
  • Medicinal Chemistry (AREA)
  • Epidemiology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP2021510328A 2018-08-29 2019-08-27 オゾン水デリバリシステム及び使用方法 Active JP7422135B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862724368P 2018-08-29 2018-08-29
US62/724,368 2018-08-29
PCT/US2019/048411 WO2020046994A1 (en) 2018-08-29 2019-08-27 Ozonated water delivery system and method of use

Publications (3)

Publication Number Publication Date
JP2022502235A JP2022502235A (ja) 2022-01-11
JP2022502235A5 JP2022502235A5 (https=) 2022-06-02
JP7422135B2 true JP7422135B2 (ja) 2024-01-25

Family

ID=69639551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021510328A Active JP7422135B2 (ja) 2018-08-29 2019-08-27 オゾン水デリバリシステム及び使用方法

Country Status (9)

Country Link
US (1) US11518696B2 (https=)
EP (1) EP3814284B1 (https=)
JP (1) JP7422135B2 (https=)
KR (2) KR20210038980A (https=)
CN (2) CN119735291A (https=)
IL (1) IL281134A (https=)
SG (1) SG11202100619PA (https=)
TW (1) TWI912238B (https=)
WO (1) WO2020046994A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024020126A1 (en) * 2022-07-20 2024-01-25 Evoqua Water Technologies Llc Mobile ultrapure water system
JP2024035532A (ja) * 2022-09-02 2024-03-14 株式会社荏原製作所 ガス溶解液供給装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000037695A (ja) 1998-07-24 2000-02-08 Kurita Water Ind Ltd オゾン水供給装置
JP2001129376A (ja) 1999-11-08 2001-05-15 Ishikawajima Harima Heavy Ind Co Ltd オゾン水製造方法及び製造装置
JP2003512736A (ja) 1999-10-19 2003-04-02 フィファー・スミス・コーポレーション オゾン−溶媒溶液を用いた基体の処理方法及び処理装置
US20060021634A1 (en) 2004-07-08 2006-02-02 Liu Zhi Lewis Method and apparatus for creating ozonated process solutions having high ozone concentration
JP2006055719A (ja) 2004-08-18 2006-03-02 Pre-Tech Co Ltd オゾン水生成方法及びオゾン水製造装置
JP2008066460A (ja) 2006-09-06 2008-03-21 Kurita Water Ind Ltd ガス溶解水供給装置

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EP0598424A3 (en) 1992-11-16 1996-05-15 Novellus Systems Inc Device for removing dissolved gas from a liquid.
JP3174856B2 (ja) 1993-05-07 2001-06-11 日本エア・リキード株式会社 混合ガス供給装置
US6001223A (en) 1995-07-07 1999-12-14 Air Liquide America Corporation On-site ammonia purification for semiconductor manufacture
EP0913233B1 (en) 1997-10-31 2005-05-11 Ebara Corporation Polishing solution supply system
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JP3748731B2 (ja) 1999-03-26 2006-02-22 株式会社荏原製作所 砥液供給装置
EP1305107B1 (en) 2000-07-31 2006-09-20 Kinetics Chempure Systems, Inc. Method and apparatus for blending process materials
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Publication number Priority date Publication date Assignee Title
JP2000037695A (ja) 1998-07-24 2000-02-08 Kurita Water Ind Ltd オゾン水供給装置
JP2003512736A (ja) 1999-10-19 2003-04-02 フィファー・スミス・コーポレーション オゾン−溶媒溶液を用いた基体の処理方法及び処理装置
JP2001129376A (ja) 1999-11-08 2001-05-15 Ishikawajima Harima Heavy Ind Co Ltd オゾン水製造方法及び製造装置
US20060021634A1 (en) 2004-07-08 2006-02-02 Liu Zhi Lewis Method and apparatus for creating ozonated process solutions having high ozone concentration
JP2006055719A (ja) 2004-08-18 2006-03-02 Pre-Tech Co Ltd オゾン水生成方法及びオゾン水製造装置
JP2008066460A (ja) 2006-09-06 2008-03-21 Kurita Water Ind Ltd ガス溶解水供給装置

Also Published As

Publication number Publication date
IL281134A (en) 2021-04-29
WO2020046994A1 (en) 2020-03-05
KR102692467B1 (ko) 2024-08-07
CN119735291A (zh) 2025-04-01
EP3814284A4 (en) 2022-03-23
JP2022502235A (ja) 2022-01-11
EP3814284B1 (en) 2025-06-04
US20200071208A1 (en) 2020-03-05
EP3814284A1 (en) 2021-05-05
CN112601720A (zh) 2021-04-02
TWI912238B (zh) 2026-01-21
KR20230165878A (ko) 2023-12-05
KR20210038980A (ko) 2021-04-08
SG11202100619PA (en) 2021-02-25
US11518696B2 (en) 2022-12-06
TW202023962A (zh) 2020-07-01

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