EP3814284A4 - Ozonated water delivery system and method of use - Google Patents

Ozonated water delivery system and method of use Download PDF

Info

Publication number
EP3814284A4
EP3814284A4 EP19856235.7A EP19856235A EP3814284A4 EP 3814284 A4 EP3814284 A4 EP 3814284A4 EP 19856235 A EP19856235 A EP 19856235A EP 3814284 A4 EP3814284 A4 EP 3814284A4
Authority
EP
European Patent Office
Prior art keywords
delivery system
water delivery
ozonated water
ozonated
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19856235.7A
Other languages
German (de)
French (fr)
Other versions
EP3814284A1 (en
Inventor
Heinrich SEIWERT
Christiane LE TIEC
Ulrich Brammer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of EP3814284A1 publication Critical patent/EP3814284A1/en
Publication of EP3814284A4 publication Critical patent/EP3814284A4/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/68—Treatment of water, waste water, or sewage by addition of specified substances, e.g. trace elements, for ameliorating potable water
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
    • A61L2/18—Liquid substances or solutions comprising solids or dissolved gases
    • A61L2/183—Ozone dissolved in a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
    • B01F23/2322—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles using columns, e.g. multi-staged columns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
    • B01F23/23761—Aerating, i.e. introducing oxygen containing gas in liquids
    • B01F23/237613—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
    • B01F23/23762—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/29—Mixing systems, i.e. flow charts or diagrams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/80—Mixing plants; Combinations of mixers
    • B01F33/81—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles
    • B01F33/811—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles in two or more consecutive, i.e. successive, mixing receptacles or being consecutively arranged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/2132—Concentration, pH, pOH, p(ION) or oxygen-demand
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2211—Amount of delivered fluid during a period
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/72—Treatment of water, waste water, or sewage by oxidation
    • C02F1/78—Treatment of water, waste water, or sewage by oxidation with ozone
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/78—Details relating to ozone treatment devices
    • C02F2201/782—Ozone generators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Water Supply & Treatment (AREA)
  • Environmental & Geological Engineering (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Hydrology & Water Resources (AREA)
  • Medicinal Chemistry (AREA)
  • Epidemiology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
EP19856235.7A 2018-08-29 2019-08-27 Ozonated water delivery system and method of use Pending EP3814284A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862724368P 2018-08-29 2018-08-29
PCT/US2019/048411 WO2020046994A1 (en) 2018-08-29 2019-08-27 Ozonated water delivery system and method of use

Publications (2)

Publication Number Publication Date
EP3814284A1 EP3814284A1 (en) 2021-05-05
EP3814284A4 true EP3814284A4 (en) 2022-03-23

Family

ID=69639551

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19856235.7A Pending EP3814284A4 (en) 2018-08-29 2019-08-27 Ozonated water delivery system and method of use

Country Status (9)

Country Link
US (1) US11518696B2 (en)
EP (1) EP3814284A4 (en)
JP (1) JP7422135B2 (en)
KR (2) KR20230165878A (en)
CN (1) CN112601720A (en)
IL (1) IL281134A (en)
SG (1) SG11202100619PA (en)
TW (1) TW202023962A (en)
WO (1) WO2020046994A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024020126A1 (en) * 2022-07-20 2024-01-25 Evoqua Water Technologies Llc Mobile ultrapure water system

Citations (2)

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WO2001028950A1 (en) * 1999-10-19 2001-04-26 Phifer Smith Corporation A method and apparatus for treating a substrate with an ozone-solvent solution
WO2006010109A2 (en) * 2004-07-08 2006-01-26 Akrion Technologies, Inc. Method and apparatus for creating ozonated process solutions having high ozone concentration

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EP0598424A3 (en) 1992-11-16 1996-05-15 Novellus Systems Inc Device for removing dissolved gas from a liquid.
JP3174856B2 (en) 1993-05-07 2001-06-11 日本エア・リキード株式会社 Mixed gas supply device
US6001223A (en) 1995-07-07 1999-12-14 Air Liquide America Corporation On-site ammonia purification for semiconductor manufacture
DE69830121T2 (en) 1997-10-31 2006-02-23 Ebara Corp. Polishing slurry dispenser
US7980753B2 (en) 1998-04-16 2011-07-19 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system
US20070119816A1 (en) 1998-04-16 2007-05-31 Urquhart Karl J Systems and methods for reclaiming process fluids in a processing environment
JP2000037695A (en) * 1998-07-24 2000-02-08 Kurita Water Ind Ltd Apparatus for supplying ozone water
US6247838B1 (en) 1998-11-24 2001-06-19 The Boc Group, Inc. Method for producing a liquid mixture having a predetermined concentration of a specified component
JP2000262874A (en) * 1999-03-15 2000-09-26 Mitsubishi Electric Corp Method and apparatus for producing ozone water
JP3748731B2 (en) 1999-03-26 2006-02-22 株式会社荏原製作所 Abrasive fluid supply device
JP2001129376A (en) * 1999-11-08 2001-05-15 Ishikawajima Harima Heavy Ind Co Ltd Method and apparatus for manufacturing ozone water
AU2001281373A1 (en) 2000-07-31 2002-02-13 Kinetics Chempure Systems, Inc. Method and apparatus for blending process materials
US6805791B2 (en) 2000-09-01 2004-10-19 Applied Science And Technology, Inc. Ozonated water flow and concentration control apparatus
US6884359B2 (en) * 2000-09-27 2005-04-26 Dainippon Ink And Chemicals, Inc. Apparatus and method for controlling resistivity of ultra pure water
US6766818B2 (en) 2001-04-06 2004-07-27 Akrion, Llc Chemical concentration control device
WO2003043059A2 (en) 2001-11-13 2003-05-22 Fsi International, Inc. Advanced process control for immersion processing
US6732017B2 (en) 2002-02-15 2004-05-04 Lam Research Corp. System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
JP2003334433A (en) 2002-05-16 2003-11-25 Kurita Water Ind Ltd Continuous dissolving device, continuous dissolving method and apparatus for supplying gas-dissolved water
EP1367149B1 (en) 2002-05-29 2011-11-16 Toyo Tanso Co., Ltd. Fluorine gas generator
JP2005533639A (en) 2002-07-19 2005-11-10 キネティック システムズ，インコーポレーテッド Method and apparatus for compounding process materials
AU2003254011A1 (en) 2002-07-19 2004-02-09 Mykrolis Corporation Fluid flow measuring and proportional fluid flow control device
TWI294792B (en) 2002-07-19 2008-03-21 Mykrolis Corp Liquid flow controller and precision dispense apparatus and system
JP3527735B1 (en) 2002-11-20 2004-05-17 東洋炭素株式会社 Fluorine gas generator
EP1704586A1 (en) 2003-12-30 2006-09-27 Akrion Llc System and method for selective etching of silicon nitride during substrate processing
US7107128B2 (en) 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow
US20060080041A1 (en) 2004-07-08 2006-04-13 Anderson Gary R Chemical mixing apparatus, system and method
JP3777451B2 (en) * 2004-08-18 2006-05-24 株式会社プレテック Ozone water generation method and ozone water production apparatus
TWI552797B (en) 2005-06-22 2016-10-11 恩特葛瑞斯股份有限公司 Apparatus and process for integrated gas blending
TWI402423B (en) 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US7743783B2 (en) 2006-04-04 2010-06-29 Air Liquide Electronics U.S. Lp Method and apparatus for recycling process fluids
JP4830731B2 (en) 2006-09-06 2011-12-07 栗田工業株式会社 Gas dissolved water supply device
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Patent Citations (2)

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WO2001028950A1 (en) * 1999-10-19 2001-04-26 Phifer Smith Corporation A method and apparatus for treating a substrate with an ozone-solvent solution
WO2006010109A2 (en) * 2004-07-08 2006-01-26 Akrion Technologies, Inc. Method and apparatus for creating ozonated process solutions having high ozone concentration

Non-Patent Citations (1)

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Title
See also references of WO2020046994A1 *

Also Published As

Publication number Publication date
JP2022502235A (en) 2022-01-11
CN112601720A (en) 2021-04-02
US11518696B2 (en) 2022-12-06
KR20210038980A (en) 2021-04-08
SG11202100619PA (en) 2021-02-25
WO2020046994A1 (en) 2020-03-05
EP3814284A1 (en) 2021-05-05
IL281134A (en) 2021-04-29
US20200071208A1 (en) 2020-03-05
JP7422135B2 (en) 2024-01-25
KR20230165878A (en) 2023-12-05
TW202023962A (en) 2020-07-01

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