KR20210011395A - 기판 처리 장치 - Google Patents
기판 처리 장치 Download PDFInfo
- Publication number
- KR20210011395A KR20210011395A KR1020207035452A KR20207035452A KR20210011395A KR 20210011395 A KR20210011395 A KR 20210011395A KR 1020207035452 A KR1020207035452 A KR 1020207035452A KR 20207035452 A KR20207035452 A KR 20207035452A KR 20210011395 A KR20210011395 A KR 20210011395A
- Authority
- KR
- South Korea
- Prior art keywords
- cooling
- chamber
- temperature
- cooling body
- heat treatment
- Prior art date
Links
- 238000012545 processing Methods 0.000 title claims description 101
- 239000000758 substrate Substances 0.000 title claims description 37
- 238000001816 cooling Methods 0.000 claims abstract description 161
- 238000010438 heat treatment Methods 0.000 claims abstract description 90
- 230000007246 mechanism Effects 0.000 claims abstract description 58
- 230000003028 elevating effect Effects 0.000 claims abstract description 18
- 238000012546 transfer Methods 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 23
- 238000011282 treatment Methods 0.000 claims description 20
- 238000013459 approach Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 80
- 239000007788 liquid Substances 0.000 description 29
- 239000011248 coating agent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- 238000011161 development Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 239000002826 coolant Substances 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000112 cooling gas Substances 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2018-097196 | 2018-05-21 | ||
JP2018097196 | 2018-05-21 | ||
PCT/JP2019/018443 WO2019225319A1 (ja) | 2018-05-21 | 2019-05-08 | 基板処理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20210011395A true KR20210011395A (ko) | 2021-02-01 |
Family
ID=68617296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020207035452A KR20210011395A (ko) | 2018-05-21 | 2019-05-08 | 기판 처리 장치 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6937906B2 (ja) |
KR (1) | KR20210011395A (ja) |
CN (1) | CN112119482B (ja) |
WO (1) | WO2019225319A1 (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002228375A (ja) | 2001-01-26 | 2002-08-14 | Tokyo Electron Ltd | 加熱処理装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002164333A (ja) * | 2000-11-27 | 2002-06-07 | Tokyo Electron Ltd | 熱処理装置 |
JP2004079677A (ja) * | 2002-08-13 | 2004-03-11 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
JP4519037B2 (ja) * | 2005-08-31 | 2010-08-04 | 東京エレクトロン株式会社 | 加熱装置及び塗布、現像装置 |
JP4781192B2 (ja) * | 2006-07-31 | 2011-09-28 | 大日本スクリーン製造株式会社 | ロードロック装置、それを備えた基板処理装置および基板処理システム |
JP2008244224A (ja) * | 2007-03-28 | 2008-10-09 | Sumitomo Precision Prod Co Ltd | プラズマ処理装置 |
JP2009176862A (ja) * | 2008-01-23 | 2009-08-06 | Sokudo Co Ltd | 基板処理装置 |
JP2010182906A (ja) * | 2009-02-06 | 2010-08-19 | Tokyo Electron Ltd | 基板処理装置 |
JP5322847B2 (ja) * | 2009-08-20 | 2013-10-23 | 東京エレクトロン株式会社 | 加熱処理装置及び熱処理装置 |
JP5107318B2 (ja) * | 2009-08-24 | 2012-12-26 | 東京エレクトロン株式会社 | 加熱処理装置 |
JP5501193B2 (ja) * | 2010-10-26 | 2014-05-21 | 東京エレクトロン株式会社 | 基板処理装置 |
JP3180048U (ja) * | 2012-09-20 | 2012-11-29 | 東京エレクトロン株式会社 | 熱処理装置 |
-
2019
- 2019-05-08 KR KR1020207035452A patent/KR20210011395A/ko not_active Application Discontinuation
- 2019-05-08 JP JP2020521144A patent/JP6937906B2/ja active Active
- 2019-05-08 CN CN201980031901.8A patent/CN112119482B/zh active Active
- 2019-05-08 WO PCT/JP2019/018443 patent/WO2019225319A1/ja active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002228375A (ja) | 2001-01-26 | 2002-08-14 | Tokyo Electron Ltd | 加熱処理装置 |
Also Published As
Publication number | Publication date |
---|---|
CN112119482A (zh) | 2020-12-22 |
JPWO2019225319A1 (ja) | 2021-05-27 |
JP6937906B2 (ja) | 2021-09-22 |
CN112119482B (zh) | 2023-09-05 |
WO2019225319A1 (ja) | 2019-11-28 |
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---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal |