KR20180021914A - 유리 기판의 에지 마감을 위한 방법 및 장치 - Google Patents

유리 기판의 에지 마감을 위한 방법 및 장치 Download PDF

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Publication number
KR20180021914A
KR20180021914A KR1020187004951A KR20187004951A KR20180021914A KR 20180021914 A KR20180021914 A KR 20180021914A KR 1020187004951 A KR1020187004951 A KR 1020187004951A KR 20187004951 A KR20187004951 A KR 20187004951A KR 20180021914 A KR20180021914 A KR 20180021914A
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KR
South Korea
Prior art keywords
vacuum
glass substrate
glass
guiding member
edge
Prior art date
Application number
KR1020187004951A
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English (en)
Korean (ko)
Inventor
제임스 윌리엄 브라운
유세프 카예드 쿼로우쉬
샤이 네게브 샤프리어
유인 탕
나이유에 조우
Original Assignee
코닝 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코닝 인코포레이티드 filed Critical 코닝 인코포레이티드
Publication of KR20180021914A publication Critical patent/KR20180021914A/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/068—Table-like supports for panels, sheets or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/102—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Surface Treatment Of Glass (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
KR1020187004951A 2015-07-21 2016-07-18 유리 기판의 에지 마감을 위한 방법 및 장치 KR20180021914A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562194952P 2015-07-21 2015-07-21
US62/194,952 2015-07-21
PCT/US2016/042781 WO2017015205A1 (en) 2015-07-21 2016-07-18 Methods and apparatuses for edge finishing glass substrates

Publications (1)

Publication Number Publication Date
KR20180021914A true KR20180021914A (ko) 2018-03-05

Family

ID=57834524

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187004951A KR20180021914A (ko) 2015-07-21 2016-07-18 유리 기판의 에지 마감을 위한 방법 및 장치

Country Status (6)

Country Link
US (1) US20180215008A1 (zh)
JP (1) JP2018522810A (zh)
KR (1) KR20180021914A (zh)
CN (1) CN107921601B (zh)
TW (2) TWI792229B (zh)
WO (1) WO2017015205A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020145601A1 (en) * 2019-01-08 2020-07-16 Corning Incorporated Glass laminate article and method of manufacturing the same

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800006792A1 (it) * 2018-06-28 2019-12-28 Sistema di regolazione della pressione dei sistemi di ritegno di lastre in fase di squadratura
CN110893576B (zh) * 2019-11-11 2021-04-16 东旭(锦州)精密光电科技有限公司 抛光机
CN111805307B (zh) * 2020-06-23 2021-12-10 深圳莱宝高科技股份有限公司 基板扫边处理工序及基板加工处理方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2367839A (en) * 1943-09-13 1945-01-23 Firestone Tire & Rubber Co Buffing machine for rubberlike materials
US2444531A (en) * 1946-01-05 1948-07-06 Polaroid Corp Chuck
US2877607A (en) * 1957-08-01 1959-03-17 Edward F Haracz Belts for conveying and supporting flat plates in grinding and polishing machines
US3007288A (en) * 1957-12-16 1961-11-07 Pilkington Brothers Ltd Production of polished bevels on glass plates
US2983241A (en) * 1958-03-11 1961-05-09 Harold M Morganstern Sewing machine with vacuum hold down
US3004766A (en) * 1959-11-02 1961-10-17 Andrew J Bryant Vacuum chuck
DE1923833C3 (de) * 1969-05-09 1975-11-27 Vereinigte Flugtechnische Werke - Fokker Gmbh, 2800 Bremen System zum Aufbau von Vorrichtungen zum Aufspannen von Werkstücken auf Werkzeug maschinentischen
US4060938A (en) * 1976-04-20 1977-12-06 Barron Sr Lee H Glass beveling machine
US4603867A (en) * 1984-04-02 1986-08-05 Motorola, Inc. Spinner chuck
US4739590A (en) * 1985-06-11 1988-04-26 Acc Automation, Inc. Method for seaming glass
US4724222A (en) * 1986-04-28 1988-02-09 American Telephone And Telegraph Company, At&T Bell Laboratories Wafer chuck comprising a curved reference surface
US4719721A (en) * 1986-12-18 1988-01-19 Timesavers, Inc. Conveyor bed assembly and vacuum platen
US5800248A (en) * 1996-04-26 1998-09-01 Ontrak Systems Inc. Control of chemical-mechanical polishing rate across a substrate surface
US5885363A (en) * 1996-08-12 1999-03-23 Kabushiki Kaisha Toshiba Method of cleaning a glass substrate
US5803797A (en) * 1996-11-26 1998-09-08 Micron Technology, Inc. Method and apparatus to hold intergrated circuit chips onto a chuck and to simultaneously remove multiple intergrated circuit chips from a cutting chuck
JP3348429B2 (ja) * 1996-12-26 2002-11-20 信越半導体株式会社 薄板ワーク平面研削方法
JP3011129B2 (ja) * 1997-03-31 2000-02-21 日本電気株式会社 ガラス基板の端面研磨機および端面研磨方法
US6165232A (en) * 1998-03-13 2000-12-26 Towa Corporation Method and apparatus for securely holding a substrate during dicing
US6126527A (en) * 1998-07-10 2000-10-03 Aplex Inc. Seal for polishing belt center support having a single movable sealed cavity
US6152809A (en) * 1998-09-03 2000-11-28 Yenawine; Peter W. Method and apparatus for cold-end processing full-lead crystal
US6428390B1 (en) * 1999-06-29 2002-08-06 Corning Incorporated Method and apparatus for edge finishing glass sheets
JP4013778B2 (ja) * 2003-02-04 2007-11-28 坂東機工株式会社 ガラス板の加工装置
JP2006110642A (ja) * 2004-10-12 2006-04-27 Shiraitekku:Kk 研磨装置
JP4270142B2 (ja) * 2005-03-09 2009-05-27 日本電気硝子株式会社 ガラス基板の製造方法及びその装置
JP5246583B2 (ja) * 2008-02-29 2013-07-24 旭硝子株式会社 ガラス基板吸着テーブル、及びガラス基板加工方法
TWI503206B (zh) * 2009-08-27 2015-10-11 Corning Inc 用以精確修整邊緣的設備及方法
CN102795763B (zh) * 2011-05-24 2015-01-21 洛阳兰迪玻璃机器股份有限公司 一种真空玻璃构件连续加工装置
CN102491054A (zh) * 2011-11-30 2012-06-13 济南德佳玻璃机器有限公司 真空输送带
JP2014233797A (ja) * 2013-06-03 2014-12-15 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス板の製造方法、および、ガラス板の製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020145601A1 (en) * 2019-01-08 2020-07-16 Corning Incorporated Glass laminate article and method of manufacturing the same

Also Published As

Publication number Publication date
US20180215008A1 (en) 2018-08-02
TWI792229B (zh) 2023-02-11
CN107921601A (zh) 2018-04-17
TW202140203A (zh) 2021-11-01
TWI754615B (zh) 2022-02-11
CN107921601B (zh) 2023-06-20
TW201714851A (zh) 2017-05-01
JP2018522810A (ja) 2018-08-16
WO2017015205A1 (en) 2017-01-26

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