KR20170136967A - 원형 웨이퍼 구조를 갖는 석영크리스탈 공진기 및 그 제작방법 - Google Patents

원형 웨이퍼 구조를 갖는 석영크리스탈 공진기 및 그 제작방법 Download PDF

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Publication number
KR20170136967A
KR20170136967A KR1020167032159A KR20167032159A KR20170136967A KR 20170136967 A KR20170136967 A KR 20170136967A KR 1020167032159 A KR1020167032159 A KR 1020167032159A KR 20167032159 A KR20167032159 A KR 20167032159A KR 20170136967 A KR20170136967 A KR 20170136967A
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South Korea
Prior art keywords
metal layer
quartz
package
electrode region
circular member
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KR1020167032159A
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English (en)
Korean (ko)
Inventor
저우지 예
왕 루
한 레이
보 푸
Original Assignee
청두 타임메이커 크리스탈 테크놀로지 컴퍼니 리미티드
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Publication of KR20170136967A publication Critical patent/KR20170136967A/ko

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR1020167032159A 2015-12-22 2016-02-29 원형 웨이퍼 구조를 갖는 석영크리스탈 공진기 및 그 제작방법 KR20170136967A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201510966616.9A CN105634436A (zh) 2015-12-22 2015-12-22 一种具有圆形晶片结构的石英晶体谐振器及其制作方法
CN201510966616.9 2015-12-22
PCT/CN2016/074957 WO2017107307A1 (zh) 2015-12-22 2016-02-29 一种具有圆形晶片结构的石英晶体谐振器及其制作方法

Publications (1)

Publication Number Publication Date
KR20170136967A true KR20170136967A (ko) 2017-12-12

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KR1020167032159A KR20170136967A (ko) 2015-12-22 2016-02-29 원형 웨이퍼 구조를 갖는 석영크리스탈 공진기 및 그 제작방법

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Country Link
JP (1) JP2018504793A (ja)
KR (1) KR20170136967A (ja)
CN (1) CN105634436A (ja)
TW (1) TWI602327B (ja)
WO (1) WO2017107307A1 (ja)

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* Cited by examiner, † Cited by third party
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CN107769750A (zh) * 2017-11-13 2018-03-06 成都泰美克晶体技术有限公司 一种改进电极连接结构的全石英晶体谐振器及其制备方法
CN110224681B (zh) * 2019-07-09 2024-01-26 成都泰美克晶体技术有限公司 一种短h型结构的高频抛光石英晶片
CN110224683B (zh) * 2019-07-09 2024-02-02 成都泰美克晶体技术有限公司 一种长h型结构的高频抛光石英晶片
CN111256673B (zh) * 2020-01-19 2021-09-10 北京晨晶电子有限公司 一种石英音叉和基座的连接结构、连接方法及其应用
CN111313855B (zh) * 2020-03-16 2023-06-13 研创科技（惠州）有限公司 一种新型谐振器组装方法
CN113300689B (zh) * 2021-03-29 2023-01-31 天津大学 具有加固结构的石英谐振器及其形成方法、电子设备
CN113271082A (zh) * 2021-06-22 2021-08-17 泰晶科技股份有限公司 一种具有高斯型电极结构的压电石英晶片及其制造工艺
CN114351094B (zh) * 2021-12-20 2023-08-04 唐山万士和电子有限公司 一种增镀石墨层微天平石英晶片的生产方法
CN116455343B (zh) * 2023-05-15 2024-01-23 烟台明德亨电子科技有限公司 一种晶振用陶瓷基座的加工方法
CN117674764A (zh) * 2023-12-04 2024-03-08 泰晶科技股份有限公司 晶圆级封装谐振器及其制备方法、电子设备
CN117411457B (zh) * 2023-12-14 2024-03-19 西安电子科技大学 一种环形类拱形石英谐振器

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Publication number Priority date Publication date Assignee Title
US3988621A (en) * 1971-09-16 1976-10-26 Citizen Watch Co., Ltd. Supporting structure for a thickness-shear type quartz oscillator
JPS59128812A (ja) * 1983-01-13 1984-07-25 Nippon Dempa Kogyo Co Ltd 圧電振動子
SU1167700A1 (ru) * 1983-12-26 1985-07-15 Всесоюзный Ордена Трудового Красного Знамени Заочный Политехнический Институт Перестраиваемый пьезоэлектрический резонатор
JPH0429229U (ja) * 1990-07-04 1992-03-09
US6590315B2 (en) * 2000-05-26 2003-07-08 William D. Beaver Surface mount quartz crystal resonators and methods for making same
JP2006166390A (ja) * 2004-02-05 2006-06-22 Seiko Epson Corp 圧電振動片、圧電振動子及び圧電発振器
CN1750393B (zh) * 2004-09-13 2012-10-10 威廉·比华 一种表面贴装石英晶体谐振器及制造方法
JP5325151B2 (ja) * 2010-03-31 2013-10-23 日本電波工業株式会社 水晶デバイス、及びその製造方法
JP2012060628A (ja) * 2010-08-07 2012-03-22 Nippon Dempa Kogyo Co Ltd 圧電デバイス及びその製造方法
JP2012074837A (ja) * 2010-09-28 2012-04-12 Nippon Dempa Kogyo Co Ltd 圧電デバイス
CN102957394B (zh) * 2011-08-18 2016-12-21 精工爱普生株式会社 振动元件、振子、电子装置、电子设备、移动体及振动元件的制造方法
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JP2015019240A (ja) * 2013-07-11 2015-01-29 日本電波工業株式会社 圧電振動片、圧電振動片の製造方法、圧電デバイス、及び圧電デバイスの製造方法
JP2015173366A (ja) * 2014-03-12 2015-10-01 日本電波工業株式会社 圧電振動片及び圧電デバイス
CN205179003U (zh) * 2015-12-22 2016-04-20 成都泰美克晶体技术有限公司 一种具有圆形晶片结构的石英晶体谐振器

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Publication number Publication date
WO2017107307A1 (zh) 2017-06-29
CN105634436A (zh) 2016-06-01
TW201724587A (zh) 2017-07-01
TWI602327B (zh) 2017-10-11
JP2018504793A (ja) 2018-02-15

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