KR20150142026A - 진공 펌프를 세정하는 방법 - Google Patents

진공 펌프를 세정하는 방법 Download PDF

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Publication number
KR20150142026A
KR20150142026A KR1020157032217A KR20157032217A KR20150142026A KR 20150142026 A KR20150142026 A KR 20150142026A KR 1020157032217 A KR1020157032217 A KR 1020157032217A KR 20157032217 A KR20157032217 A KR 20157032217A KR 20150142026 A KR20150142026 A KR 20150142026A
Authority
KR
South Korea
Prior art keywords
cleaning
vacuum pump
rotor
rotor shaft
pump
Prior art date
Application number
KR1020157032217A
Other languages
English (en)
Korean (ko)
Inventor
바실리오 디 니로
슈테판 훈데르트마르크
알렉산드라 발크작
Original Assignee
욀리콘 라이볼트 바쿰 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 욀리콘 라이볼트 바쿰 게엠베하 filed Critical 욀리콘 라이볼트 바쿰 게엠베하
Publication of KR20150142026A publication Critical patent/KR20150142026A/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
KR1020157032217A 2013-04-12 2014-03-19 진공 펌프를 세정하는 방법 KR20150142026A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013206526.4 2013-04-12
DE102013206526.4A DE102013206526A1 (de) 2013-04-12 2013-04-12 Verfahren zur Reinigung einer Vakuumpumpe
PCT/EP2014/055535 WO2014166714A1 (de) 2013-04-12 2014-03-19 Verfahren zur reinigung einer vakuumpumpe

Publications (1)

Publication Number Publication Date
KR20150142026A true KR20150142026A (ko) 2015-12-21

Family

ID=50349603

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157032217A KR20150142026A (ko) 2013-04-12 2014-03-19 진공 펌프를 세정하는 방법

Country Status (5)

Country Link
JP (1) JP2016514802A (ja)
KR (1) KR20150142026A (ja)
CN (1) CN105074222A (ja)
DE (1) DE102013206526A1 (ja)
WO (1) WO2014166714A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112196812B (zh) * 2015-05-20 2022-06-07 菲舍尔和佩克尔应用有限公司 风扇或泵布置和操作方法
JP6635011B2 (ja) * 2016-12-13 2020-01-22 株式会社豊田自動織機 内燃機関の制御システム
JP6927735B2 (ja) * 2017-04-20 2021-09-01 エドワーズ株式会社 真空ポンプ、磁気軸受装置及びロータ
FR3111958B3 (fr) * 2020-06-26 2022-07-15 Pfeiffer Vacuum Dispositif, procédé de surveillance de dépôts et pompe à vide
CN114576181B (zh) * 2022-05-05 2022-07-05 成都高真科技有限公司 一种高真空涡轮分子泵

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59168295A (ja) * 1983-03-16 1984-09-21 Hitachi Ltd タ−ボ分子ポンプ
FR2681689B1 (fr) * 1991-09-25 1993-11-12 Alcatel Cit Detecteur de fuite a gaz traceur.
JP3550465B2 (ja) * 1996-08-30 2004-08-04 株式会社日立製作所 ターボ真空ポンプ及びその運転方法
DE10338167A1 (de) * 2003-08-20 2005-04-07 Lust Antriebstechnik Gmbh Hermetisch dichte Prozeßkammer
JP5062964B2 (ja) * 2004-04-27 2012-10-31 株式会社大阪真空機器製作所 分子ポンプ
GB0511877D0 (en) * 2005-06-10 2005-07-20 Boc Group Plc Vacuum pump
JP5190215B2 (ja) * 2007-03-30 2013-04-24 東京エレクトロン株式会社 ターボ分子ポンプの洗浄方法
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
DE102008053522A1 (de) * 2008-10-28 2010-04-29 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen einer Vakuumpumpe
DE202010009989U1 (de) * 2010-07-07 2012-02-22 Alexander Hartwig Staubfilter sowie Vorrichtung zu dessen Reinigung

Also Published As

Publication number Publication date
DE102013206526A1 (de) 2014-10-16
JP2016514802A (ja) 2016-05-23
WO2014166714A1 (de) 2014-10-16
CN105074222A (zh) 2015-11-18

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