CN105074222A - 用于清洁真空泵的方法 - Google Patents

用于清洁真空泵的方法 Download PDF

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Publication number
CN105074222A
CN105074222A CN201480019786.XA CN201480019786A CN105074222A CN 105074222 A CN105074222 A CN 105074222A CN 201480019786 A CN201480019786 A CN 201480019786A CN 105074222 A CN105074222 A CN 105074222A
Authority
CN
China
Prior art keywords
rotor shaft
electromagnet
pump
vacuum pump
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201480019786.XA
Other languages
English (en)
Chinese (zh)
Inventor
巴西利奥·迪尼罗
斯特凡·洪德特马克
亚历山德拉·瓦尔恰克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of CN105074222A publication Critical patent/CN105074222A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CN201480019786.XA 2013-04-12 2014-03-19 用于清洁真空泵的方法 Pending CN105074222A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013206526.4A DE102013206526A1 (de) 2013-04-12 2013-04-12 Verfahren zur Reinigung einer Vakuumpumpe
DE102013206526.4 2013-04-12
PCT/EP2014/055535 WO2014166714A1 (de) 2013-04-12 2014-03-19 Verfahren zur reinigung einer vakuumpumpe

Publications (1)

Publication Number Publication Date
CN105074222A true CN105074222A (zh) 2015-11-18

Family

ID=50349603

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480019786.XA Pending CN105074222A (zh) 2013-04-12 2014-03-19 用于清洁真空泵的方法

Country Status (5)

Country Link
JP (1) JP2016514802A (ja)
KR (1) KR20150142026A (ja)
CN (1) CN105074222A (ja)
DE (1) DE102013206526A1 (ja)
WO (1) WO2014166714A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108223112A (zh) * 2016-12-13 2018-06-29 株式会社丰田自动织机 内燃机的控制系统

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112196812B (zh) * 2015-05-20 2022-06-07 菲舍尔和佩克尔应用有限公司 风扇或泵布置和操作方法
JP6927735B2 (ja) * 2017-04-20 2021-09-01 エドワーズ株式会社 真空ポンプ、磁気軸受装置及びロータ
FR3111958B3 (fr) * 2020-06-26 2022-07-15 Pfeiffer Vacuum Dispositif, procédé de surveillance de dépôts et pompe à vide
CN114576181B (zh) * 2022-05-05 2022-07-05 成都高真科技有限公司 一种高真空涡轮分子泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5961291A (en) * 1996-08-30 1999-10-05 Hitachi, Ltd. Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump
US20080236629A1 (en) * 2007-03-30 2008-10-02 Tokyo Electron Limited Cleaning method for turbo molecular pump
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
CN102202805A (zh) * 2008-10-28 2011-09-28 厄利孔莱博尔德真空技术有限责任公司 用于清洁真空泵的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59168295A (ja) * 1983-03-16 1984-09-21 Hitachi Ltd タ−ボ分子ポンプ
FR2681689B1 (fr) * 1991-09-25 1993-11-12 Alcatel Cit Detecteur de fuite a gaz traceur.
DE10338167A1 (de) * 2003-08-20 2005-04-07 Lust Antriebstechnik Gmbh Hermetisch dichte Prozeßkammer
JP5062964B2 (ja) * 2004-04-27 2012-10-31 株式会社大阪真空機器製作所 分子ポンプ
GB0511877D0 (en) * 2005-06-10 2005-07-20 Boc Group Plc Vacuum pump
DE202010009989U1 (de) * 2010-07-07 2012-02-22 Alexander Hartwig Staubfilter sowie Vorrichtung zu dessen Reinigung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5961291A (en) * 1996-08-30 1999-10-05 Hitachi, Ltd. Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump
US20080236629A1 (en) * 2007-03-30 2008-10-02 Tokyo Electron Limited Cleaning method for turbo molecular pump
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
CN102202805A (zh) * 2008-10-28 2011-09-28 厄利孔莱博尔德真空技术有限责任公司 用于清洁真空泵的方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108223112A (zh) * 2016-12-13 2018-06-29 株式会社丰田自动织机 内燃机的控制系统
CN108223112B (zh) * 2016-12-13 2020-12-18 株式会社丰田自动织机 内燃机的控制系统

Also Published As

Publication number Publication date
WO2014166714A1 (de) 2014-10-16
DE102013206526A1 (de) 2014-10-16
KR20150142026A (ko) 2015-12-21
JP2016514802A (ja) 2016-05-23

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Address after: Cologne, Germany

Applicant after: LEYBOLD Co. Ltd.

Address before: Cologne, Germany

Applicant before: Oerlikon Leybold Vacuum GmbH

COR Change of bibliographic data
RJ01 Rejection of invention patent application after publication

Application publication date: 20151118

RJ01 Rejection of invention patent application after publication