Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
  • F04D19/00—Axial-flow pumps
  • F04D19/02—Multi-stage pumps
  • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
  • F04D19/044—Holweck-type pumps
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
  • F04D19/00—Axial-flow pumps
  • F04D19/02—Multi-stage pumps
  • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
  • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
  • F04D29/00—Details, component parts, or accessories
  • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
  • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
  • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
  • F05D2260/00—Function
  • F05D2260/60—Fluid transfer
  • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

• the invention relates to a method for cleaning a vacuum pump, in particular a Holweck pump, wherein the Holweck pump can be designed as Holweck- level.
• the object of the invention is to provide a method for cleaning a vacuum pump, in particular a Holweck pump, with which a cleaning of the rotor element can be carried out in a simple manner.
• a vacuum pump to be cleaned by the method according to the invention has a rotor shaft which carries at least one rotor element.
• the rotor element may be a tubular rotor element of a Holweck pump and / or rotor disks of a turbomolecular pump. Usually cooperates with the rotor element carried by a pump housing stationary stator.
• the Holweck stage is a helical channel surrounding the tubular rotor element.
• a turbomolecular pump is a stator disk, which is arranged between the rotor disks.
• the rotor shaft is rotatably supported via a bearing element in the pump housing. Furthermore, a drive device such as an electric motor is connected to the rotor shaft.
• an electromagnet which acts on the rotor shaft.
• the electromagnet is connected to a control device.
• a change of the magnetic field in this case, for example, the electromagnet can act directly on an at least partially metallic rotor shaft or on a permanent magnet arranged on the rotor shaft.
• the rotor shaft and thus the at least one rotor element carried by the rotor shaft can be set in vibration. Vibration releases deposits on the rotor element.
• a magnetic field change in periods of about 10 - 1000 Hz.
• the magnetic field change is in this case preferably periodically.
• the control device acts on a plurality of electromagnets. This makes it possible for forces to act in different directions on the rotor shaft and thus on the at least one rotor element at short intervals. In particular, it is opposite forces, so that a Vibration with high amplitude and the shortest possible acceleration times can be realized.
• the force generated by the at least one electromagnet in this case preferably acts substantially translationally and axially to the rotor shaft, so that in a very effective manner vibration of the rotor shaft and thus of the at least one rotor element carried by the rotor shaft can be caused.
• the execution of the cleaning step by vibration during the standstill of the rotor shaft i. if the rotor shaft is not offset by the electric motor in a rotational movement takes place. Possibly. In addition, a slow rotation to assist the cleaning process may be appropriate.
• an electromagnet is used, which is part of a magnetic bearing.
• fast rotating rotor shafts are often mounted such that one of the two bearing elements is designed as a magnetic bearing. This is usually the suction side arranged bearing.
• vacuum pumps usually have an internal control device or are connected to an external control device, it is further preferred that the control according to the invention of the at least one To realize electromagnet for generating vibrations by this control device.
• Figure 1 is a simplified schematic representation of a
• Figure 2 is a diagram of a vibration routine for cleaning a
• the illustrated vacuum pump is a turbomolecular pump with Holweck stage.
• the turbomolecular pump has a rotor shaft 12 mounted in an optionally multi-part pump housing 10.
• the rotor shaft is mounted on the suction side via a ball bearing 14 and the pressure side via an electromagnetic bearing 16.
• the rotor shaft 12 carries a plurality of rotor disks 20 having rotor element to form a molecular stage 18.
• the rotor disks 20 cooperate with stator disks 22 arranged between the rotor disks 20.
• the stator disks 22 are arranged stationarily in the housing 10.
• a disc-shaped element 26 connected to the rotor shaft 10 is connected to a tube cylinder 28.
• the tube cylinder 28 is surrounded by arranged in a housing wall or a separate component of the housing 10 helical groove 30. With the aid of the turbomolecular pump shown, the gas can thus be sucked through an inlet 32 in the direction of an arrow 34 and ejected from an outlet 36.
• the rotor element 28 is the rotor shaft 12 according to the invention set in vibrations, so that the rotor element 28, which is fixedly connected to the rotor shaft, vibrates.
• the cleaning is carried out in a particularly preferred embodiment of the method according to the invention in that at least one electromagnet 38 of the magnetic bearing 16 is controlled via a control device 40.
• the rotor shaft is moved in a substantially radial direction 42.
• a vibration routine for cleaning a vacuum pump is shown, which is an example of a magnetic bearing turbomolecular pump and a periodic magnetic field change in translational and axial direction takes place with short acceleration times and high amplitudes.
• the amplitude is plotted against time, with the solid line representing the axial movement and the dashed line the translational movement.

Landscapes

• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Non-Positive Displacement Air Blowers (AREA)
• Structures Of Non-Positive Displacement Pumps (AREA)

Priority Applications (3)

Applications Claiming Priority (2)

Publications (1)

Family

ID=50349603

Family Applications (1)

Country Status (5)

Cited By (1)

Families Citing this family (4)

Citations (4)

Family Cites Families (6)

• 2013
  • 2013-04-12 DE DE102013206526.4A patent/DE102013206526A1/de not_active Ceased
• 2014
  • 2014-03-19 WO PCT/EP2014/055535 patent/WO2014166714A1/de active Application Filing
  • 2014-03-19 KR KR1020157032217A patent/KR20150142026A/ko not_active Application Discontinuation
  • 2014-03-19 CN CN201480019786.XA patent/CN105074222A/zh active Pending
  • 2014-03-19 JP JP2016506831A patent/JP2016514802A/ja active Pending

Patent Citations (4)

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