KR20140074308A - 마이크로다이어프램 펌프 - Google Patents

마이크로다이어프램 펌프 Download PDF

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Publication number
KR20140074308A
KR20140074308A KR1020147007966A KR20147007966A KR20140074308A KR 20140074308 A KR20140074308 A KR 20140074308A KR 1020147007966 A KR1020147007966 A KR 1020147007966A KR 20147007966 A KR20147007966 A KR 20147007966A KR 20140074308 A KR20140074308 A KR 20140074308A
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KR
South Korea
Prior art keywords
valve
diaphragm
valve plate
plate
valve seat
Prior art date
Application number
KR1020147007966A
Other languages
English (en)
Korean (ko)
Inventor
야스나리 가바사와
다카시 고베
Original Assignee
가부시키가이샤 기쿠치 세이사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 기쿠치 세이사쿠쇼 filed Critical 가부시키가이샤 기쿠치 세이사쿠쇼
Publication of KR20140074308A publication Critical patent/KR20140074308A/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
KR1020147007966A 2011-09-27 2011-09-27 마이크로다이어프램 펌프 KR20140074308A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/072056 WO2013046330A1 (ja) 2011-09-27 2011-09-27 マイクロダイヤフラムポンプ

Publications (1)

Publication Number Publication Date
KR20140074308A true KR20140074308A (ko) 2014-06-17

Family

ID=47994445

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147007966A KR20140074308A (ko) 2011-09-27 2011-09-27 마이크로다이어프램 펌프

Country Status (5)

Country Link
US (1) US20140248170A1 (ja)
EP (1) EP2762725A4 (ja)
KR (1) KR20140074308A (ja)
CN (1) CN103906923A (ja)
WO (1) WO2013046330A1 (ja)

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US10344753B2 (en) * 2014-02-28 2019-07-09 Encite Llc Micro pump systems
US10330095B2 (en) 2014-10-31 2019-06-25 Encite Llc Microelectromechanical systems fabricated with roll to roll processing
WO2016133024A1 (ja) * 2015-02-17 2016-08-25 大研医器株式会社 ポンプユニット及びその製造方法
JP6639212B2 (ja) * 2015-12-09 2020-02-05 株式会社エンプラス エミッタおよび点滴灌漑用チューブ
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203077B1 (en) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Piezoelectric actuator
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203079B1 (en) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelectric actuator
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
JP6765239B2 (ja) * 2016-07-12 2020-10-07 日本ピラー工業株式会社 ダイアフラムポンプ
JP6981762B2 (ja) * 2016-08-08 2021-12-17 株式会社エンプラス 流体取扱装置および流体取扱方法
TWI658211B (zh) * 2016-10-27 2019-05-01 Nitto Kohki Co., Ltd. Liquid pump
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
TWI686537B (zh) * 2016-11-10 2020-03-01 研能科技股份有限公司 微型氣壓動力裝置
CN108506197A (zh) * 2017-02-24 2018-09-07 研能科技股份有限公司 流体输送装置
CN110546415B (zh) * 2017-12-22 2021-09-24 株式会社村田制作所 阀、应用设备
TWI663507B (zh) * 2018-04-09 2019-06-21 中原大學 微型散熱系統
KR20230049729A (ko) * 2020-09-16 2023-04-13 프로리 시스템스 인코포레이티드 Mems-기반 냉각 시스템들을 제조하기 위한 방법 및 시스템

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US2856955A (en) * 1955-08-02 1958-10-21 Winkelman James Valve structure for aerators or the like
US3814552A (en) * 1973-04-17 1974-06-04 Atomic Energy Commission Personal air sampling pump
JPS61171891A (ja) * 1985-01-25 1986-08-02 Nec Corp 圧電型ポンプ
JP2510589Y2 (ja) * 1990-07-19 1996-09-11 三菱化学株式会社 圧電ポンプ
JPH051669A (ja) 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
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US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
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JP3946178B2 (ja) * 2003-09-05 2007-07-18 松下電器産業株式会社 マイクロポンプ用逆止弁装置およびその製造方法
JP4036834B2 (ja) * 2004-01-21 2008-01-23 松下電器産業株式会社 マイクロポンプ用逆止弁の製造方法
JP4501517B2 (ja) * 2004-04-21 2010-07-14 パナソニック電工株式会社 圧電ダイヤフラムポンプ
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JP4285518B2 (ja) * 2006-03-28 2009-06-24 カシオ計算機株式会社 接続構造体、流路制御部、燃料電池型発電装置及び電子機器
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WO2010035862A1 (ja) * 2008-09-29 2010-04-01 株式会社村田製作所 圧電ポンプ

Also Published As

Publication number Publication date
EP2762725A4 (en) 2015-06-10
CN103906923A (zh) 2014-07-02
WO2013046330A1 (ja) 2013-04-04
US20140248170A1 (en) 2014-09-04
EP2762725A1 (en) 2014-08-06

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