EP2762725A4 - MICRODIAPHRAGM PUMP - Google Patents

MICRODIAPHRAGM PUMP

Info

Publication number
EP2762725A4
EP2762725A4 EP11873526.5A EP11873526A EP2762725A4 EP 2762725 A4 EP2762725 A4 EP 2762725A4 EP 11873526 A EP11873526 A EP 11873526A EP 2762725 A4 EP2762725 A4 EP 2762725A4
Authority
EP
European Patent Office
Prior art keywords
microdiaphragm pump
microdiaphragm
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11873526.5A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2762725A1 (en
Inventor
Yasunari Kabasawa
Takashi Kobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kikuchi Seisakusho Co Ltd
Original Assignee
Kikuchi Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kikuchi Seisakusho Co Ltd filed Critical Kikuchi Seisakusho Co Ltd
Publication of EP2762725A1 publication Critical patent/EP2762725A1/en
Publication of EP2762725A4 publication Critical patent/EP2762725A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP11873526.5A 2011-09-27 2011-09-27 MICRODIAPHRAGM PUMP Withdrawn EP2762725A4 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/072056 WO2013046330A1 (ja) 2011-09-27 2011-09-27 マイクロダイヤフラムポンプ

Publications (2)

Publication Number Publication Date
EP2762725A1 EP2762725A1 (en) 2014-08-06
EP2762725A4 true EP2762725A4 (en) 2015-06-10

Family

ID=47994445

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11873526.5A Withdrawn EP2762725A4 (en) 2011-09-27 2011-09-27 MICRODIAPHRAGM PUMP

Country Status (5)

Country Link
US (1) US20140248170A1 (ja)
EP (1) EP2762725A4 (ja)
KR (1) KR20140074308A (ja)
CN (1) CN103906923A (ja)
WO (1) WO2013046330A1 (ja)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10344753B2 (en) * 2014-02-28 2019-07-09 Encite Llc Micro pump systems
US10330095B2 (en) 2014-10-31 2019-06-25 Encite Llc Microelectromechanical systems fabricated with roll to roll processing
KR102435914B1 (ko) * 2015-02-17 2022-08-24 다이켄 이키 가부시키가이샤 펌프 유닛 및 그 제조 방법
JP6639212B2 (ja) * 2015-12-09 2020-02-05 株式会社エンプラス エミッタおよび点滴灌漑用チューブ
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
EP3203079B1 (en) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelectric actuator
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203077B1 (en) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Piezoelectric actuator
JP6765239B2 (ja) * 2016-07-12 2020-10-07 日本ピラー工業株式会社 ダイアフラムポンプ
JP6981762B2 (ja) * 2016-08-08 2021-12-17 株式会社エンプラス 流体取扱装置および流体取扱方法
DK3534002T3 (da) * 2016-10-27 2021-04-06 Nitto Kohki Co Væskepumpe
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
TWI686537B (zh) * 2016-11-10 2020-03-01 研能科技股份有限公司 微型氣壓動力裝置
CN108506197A (zh) * 2017-02-24 2018-09-07 研能科技股份有限公司 流体输送装置
CN110546415B (zh) * 2017-12-22 2021-09-24 株式会社村田制作所 阀、应用设备
TWI663507B (zh) * 2018-04-09 2019-06-21 中原大學 微型散熱系統
GB2599820B (en) * 2019-07-03 2023-04-26 Murata Manufacturing Co Fluid control apparatus
WO2022060594A1 (en) * 2020-09-16 2022-03-24 Frore Systems Inc. Method and system for fabricating mems-based cooling systems
KR102694550B1 (ko) * 2022-11-28 2024-08-09 주식회사 위일트로닉 피에조펌프 제조방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
US20020155010A1 (en) * 2001-04-24 2002-10-24 Karp Christoph D. Microfluidic valve with partially restrained element
US20050158188A1 (en) * 2004-01-21 2005-07-21 Matsushita Elec. Ind. Co. Ltd. Micropump check valve and method of manufacturing the same

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US2856955A (en) * 1955-08-02 1958-10-21 Winkelman James Valve structure for aerators or the like
US3814552A (en) * 1973-04-17 1974-06-04 Atomic Energy Commission Personal air sampling pump
JPS61171891A (ja) * 1985-01-25 1986-08-02 Nec Corp 圧電型ポンプ
JP2510589Y2 (ja) * 1990-07-19 1996-09-11 三菱化学株式会社 圧電ポンプ
JPH051669A (ja) 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
JPH0693972A (ja) 1992-09-11 1994-04-05 Seiko Epson Corp マイクロポンプ及びその製造方法
JP3202643B2 (ja) 1997-02-19 2001-08-27 セイコーインスツルメンツ株式会社 マイクロポンプおよびマイクロポンプの製造方法
JP4010639B2 (ja) * 1998-03-31 2007-11-21 株式会社アルバック 往復動式真空ポンプ
JP2000274374A (ja) * 1999-03-24 2000-10-03 Kasei Optonix Co Ltd 小型ポンプ
JP3888015B2 (ja) * 1999-12-22 2007-02-28 松下電工株式会社 圧電ダイヤフラムポンプの密封方法
JP4396095B2 (ja) * 2002-06-03 2010-01-13 セイコーエプソン株式会社 ポンプ
JP4529915B2 (ja) * 2002-08-16 2010-08-25 日本電気株式会社 圧電ポンプおよびこれを用いた冷却装置
JP3946178B2 (ja) * 2003-09-05 2007-07-18 松下電器産業株式会社 マイクロポンプ用逆止弁装置およびその製造方法
JP4501517B2 (ja) * 2004-04-21 2010-07-14 パナソニック電工株式会社 圧電ダイヤフラムポンプ
CN2703141Y (zh) * 2004-05-30 2005-06-01 卢启明 直流自吸泵
JP2006063960A (ja) * 2004-08-30 2006-03-09 Star Micronics Co Ltd 逆止弁及びダイヤフラムポンプ
JP2006161779A (ja) 2004-12-10 2006-06-22 Kanagawa Acad Of Sci & Technol マイクロポンプ及びその製造方法
JP4285518B2 (ja) * 2006-03-28 2009-06-24 カシオ計算機株式会社 接続構造体、流路制御部、燃料電池型発電装置及び電子機器
US8256465B2 (en) * 2006-05-01 2012-09-04 Google Inc. Microfluidic valve structure
JP5221993B2 (ja) 2008-03-28 2013-06-26 公立大学法人首都大学東京 マイクロバルブ及びマイクロポンプ
CN101550924A (zh) * 2008-03-31 2009-10-07 研能科技股份有限公司 非对称双腔流体输送装置
CN102165193B (zh) * 2008-09-29 2014-07-16 株式会社村田制作所 压电泵

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
US20020155010A1 (en) * 2001-04-24 2002-10-24 Karp Christoph D. Microfluidic valve with partially restrained element
US20050158188A1 (en) * 2004-01-21 2005-07-21 Matsushita Elec. Ind. Co. Ltd. Micropump check valve and method of manufacturing the same

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
NGUYEN N-T ET AL: "A fully polymeric micropump with piezoelectric actuator", SENSORS AND ACTUATORS B: CHEMICAL: INTERNATIONAL JOURNAL DEVOTED TO RESEARCH AND DEVELOPMENT OF PHYSICAL AND CHEMICAL TRANSDUCERS, ELSEVIER S.A, CH, vol. 97, no. 1, 5 June 2003 (2003-06-05), pages 137 - 143, XP004483107, ISSN: 0925-4005, DOI: 10.1016/S0925-4005(03)00521-5 *
See also references of WO2013046330A1 *

Also Published As

Publication number Publication date
US20140248170A1 (en) 2014-09-04
WO2013046330A1 (ja) 2013-04-04
KR20140074308A (ko) 2014-06-17
CN103906923A (zh) 2014-07-02
EP2762725A1 (en) 2014-08-06

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