KR20130051889A - 고밀도 프린트 헤드에 대한 본딩된 실리콘 구조 - Google Patents

고밀도 프린트 헤드에 대한 본딩된 실리콘 구조 Download PDF

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Publication number
KR20130051889A
KR20130051889A KR1020120125280A KR20120125280A KR20130051889A KR 20130051889 A KR20130051889 A KR 20130051889A KR 1020120125280 A KR1020120125280 A KR 1020120125280A KR 20120125280 A KR20120125280 A KR 20120125280A KR 20130051889 A KR20130051889 A KR 20130051889A
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KR
South Korea
Prior art keywords
layer
transducers
print head
semiconductor substrate
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020120125280A
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English (en)
Korean (ko)
Inventor
피터 제이 니스트롬
비조이라지 사후
Original Assignee
제록스 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 제록스 코포레이션 filed Critical 제록스 코포레이션
Publication of KR20130051889A publication Critical patent/KR20130051889A/ko
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR1020120125280A 2011-11-10 2012-11-07 고밀도 프린트 헤드에 대한 본딩된 실리콘 구조 Ceased KR20130051889A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/293,235 2011-11-10
US13/293,235 US8727508B2 (en) 2011-11-10 2011-11-10 Bonded silicon structure for high density print head

Publications (1)

Publication Number Publication Date
KR20130051889A true KR20130051889A (ko) 2013-05-21

Family

ID=48280234

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120125280A Ceased KR20130051889A (ko) 2011-11-10 2012-11-07 고밀도 프린트 헤드에 대한 본딩된 실리콘 구조

Country Status (4)

Country Link
US (1) US8727508B2 (enExample)
JP (1) JP5886723B2 (enExample)
KR (1) KR20130051889A (enExample)
CN (1) CN103112253B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
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US9550358B2 (en) 2014-05-13 2017-01-24 Xerox Corporation Printhead with narrow aspect ratio
TWI551353B (zh) * 2014-07-08 2016-10-01 中華大學 陣列式噴頭裝置
US10442188B2 (en) * 2016-02-10 2019-10-15 Seiko Epson Corporation Liquid ejecting head and liquid ejecting apparatus
US10761262B2 (en) * 2017-08-01 2020-09-01 Rockley Photonics Limited Module with transmit and receive optical subassemblies with specific pic cooling architecture
US10877217B2 (en) 2017-01-06 2020-12-29 Rockley Photonics Limited Copackaging of asic and silicon photonics
CN116001447A (zh) * 2023-01-10 2023-04-25 北京大学 压电式打印喷头及其制备方法

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US6616270B1 (en) * 1998-08-21 2003-09-09 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus comprising the same
JP3422364B2 (ja) * 1998-08-21 2003-06-30 セイコーエプソン株式会社 インクジェット式記録ヘッド及びインクジェット式記録装置
JP3973340B2 (ja) * 1999-10-05 2007-09-12 Ｎｅｃエレクトロニクス株式会社 半導体装置、配線基板、及び、それらの製造方法
US6494567B2 (en) * 2000-03-24 2002-12-17 Seiko Epson Corporation Piezoelectric element and manufacturing method and manufacturing device thereof
JP4221929B2 (ja) * 2000-03-31 2009-02-12 富士フイルム株式会社 マルチノズルインクジエットヘッド
US6443179B1 (en) * 2001-02-21 2002-09-03 Sandia Corporation Packaging of electro-microfluidic devices
JP4058691B2 (ja) * 2002-09-17 2008-03-12 セイコーエプソン株式会社 液体吐出ヘッド及び液体吐出装置
JP4453655B2 (ja) * 2003-09-24 2010-04-21 セイコーエプソン株式会社 液体噴射ヘッド及びその製造方法並びに液体噴射装置
JP4590854B2 (ja) * 2003-10-28 2010-12-01 セイコーエプソン株式会社 圧電体デバイスの製造方法
KR100537522B1 (ko) * 2004-02-27 2005-12-19 삼성전자주식회사 압전 방식의 잉크젯 프린트헤드와 그 노즐 플레이트의제조 방법
KR100528350B1 (ko) * 2004-02-27 2005-11-15 삼성전자주식회사 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법
US20060012646A1 (en) * 2004-07-13 2006-01-19 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator, ink jet head, and method of manufacturing them
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JP5023488B2 (ja) * 2005-03-09 2012-09-12 セイコーエプソン株式会社 デバイス実装構造とデバイス実装方法、液滴吐出ヘッド及び駆動ユニット並びに半導体装置
US7524024B2 (en) * 2005-03-15 2009-04-28 Fuji Xerox Co., Ltd. Electrical connection substrate, droplet discharge head, and droplet discharge apparatus
JP4504237B2 (ja) * 2005-03-18 2010-07-14 富士通株式会社 ウエットエッチング方法、マイクロ可動素子製造方法、およびマイクロ可動素子
JP4930678B2 (ja) * 2005-03-30 2012-05-16 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
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JP4800666B2 (ja) * 2005-05-27 2011-10-26 富士フイルム株式会社 液体吐出ヘッド及びその製造方法
JP2007097280A (ja) * 2005-09-28 2007-04-12 Kyocera Corp 圧電アクチュエータおよびその製造方法、並びにインクジェット記録ヘッド
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JP5115330B2 (ja) * 2008-05-22 2013-01-09 セイコーエプソン株式会社 液体噴射ヘッドおよびそれを備えた液体噴射装置
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JP5552825B2 (ja) * 2010-02-10 2014-07-16 セイコーエプソン株式会社 アクチュエータ、液滴噴射ヘッド及びその製造方法、並びに液滴噴射装置
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Also Published As

Publication number Publication date
US8727508B2 (en) 2014-05-20
US20130120505A1 (en) 2013-05-16
JP5886723B2 (ja) 2016-03-16
CN103112253A (zh) 2013-05-22
CN103112253B (zh) 2015-12-02
JP2013103499A (ja) 2013-05-30

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