KR20100071995A - 이축성 복굴절 컴포넌트, 액정 프로젝터, 및 이축성 복굴절 컴포넌트의 제조 방법 - Google Patents

이축성 복굴절 컴포넌트, 액정 프로젝터, 및 이축성 복굴절 컴포넌트의 제조 방법 Download PDF

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Publication number
KR20100071995A
KR20100071995A KR1020107005966A KR20107005966A KR20100071995A KR 20100071995 A KR20100071995 A KR 20100071995A KR 1020107005966 A KR1020107005966 A KR 1020107005966A KR 20107005966 A KR20107005966 A KR 20107005966A KR 20100071995 A KR20100071995 A KR 20100071995A
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KR
South Korea
Prior art keywords
liquid crystal
substrate
refractive index
deposition
biaxial birefringent
Prior art date
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Withdrawn
Application number
KR1020107005966A
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English (en)
Korean (ko)
Inventor
겐이치 나카가와
히로키 다카하시
다로 하시즈메
Original Assignee
후지필름 가부시키가이샤
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Publication of KR20100071995A publication Critical patent/KR20100071995A/ko
Withdrawn legal-status Critical Current

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/083Oxides of refractory metals or yttrium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225Oblique incidence of vaporised material on substrate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/005Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/006Projectors using an electronic spatial light modulator but not peculiar thereto using LCD's
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/20Lamp housings
    • G03B21/2073Polarisers in the lamp house
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00Details of colour television systems
    • H04N9/12Picture reproducers
    • H04N9/31Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3102Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
    • H04N9/3105Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying all colours simultaneously, e.g. by using two or more electronic spatial light modulators
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00Details of colour television systems
    • H04N9/12Picture reproducers
    • H04N9/31Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141Constructional details thereof
    • H04N9/315Modulator illumination systems
    • H04N9/3167Modulator illumination systems for polarizing the light beam
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3083Birefringent or phase retarding elements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2413/00Indexing scheme related to G02F1/13363, i.e. to birefringent elements, e.g. for optical compensation, characterised by the number, position, orientation or value of the compensation plates
    • G02F2413/10Indexing scheme related to G02F1/13363, i.e. to birefringent elements, e.g. for optical compensation, characterised by the number, position, orientation or value of the compensation plates with refractive index ellipsoid inclined, or tilted, relative to the LC-layer surface O plate
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2413/00Indexing scheme related to G02F1/13363, i.e. to birefringent elements, e.g. for optical compensation, characterised by the number, position, orientation or value of the compensation plates
    • G02F2413/12Biaxial compensators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Polarising Elements (AREA)
  • Liquid Crystal (AREA)
  • Projection Apparatus (AREA)
KR1020107005966A 2007-09-21 2008-09-18 이축성 복굴절 컴포넌트, 액정 프로젝터, 및 이축성 복굴절 컴포넌트의 제조 방법 Withdrawn KR20100071995A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-245921 2007-09-21
JP2007245921A JP2009075459A (ja) 2007-09-21 2007-09-21 二軸性複屈折体の製造方法、二軸性複屈折体及び液晶プロジェクタ

Publications (1)

Publication Number Publication Date
KR20100071995A true KR20100071995A (ko) 2010-06-29

Family

ID=40468025

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107005966A Withdrawn KR20100071995A (ko) 2007-09-21 2008-09-18 이축성 복굴절 컴포넌트, 액정 프로젝터, 및 이축성 복굴절 컴포넌트의 제조 방법

Country Status (7)

Country Link
US (1) US8605241B2 (enExample)
EP (1) EP2191307B1 (enExample)
JP (1) JP2009075459A (enExample)
KR (1) KR20100071995A (enExample)
CN (1) CN101802663B (enExample)
TW (1) TWI443427B (enExample)
WO (1) WO2009038218A1 (enExample)

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JP2009161843A (ja) * 2008-01-10 2009-07-23 Fujinon Corp ワーク支持部材、光学素子、位相差素子及び偏光ビームスプリッタ
JP5568937B2 (ja) * 2009-10-02 2014-08-13 セイコーエプソン株式会社 液晶装置、電子機器および投射型表示装置
JP5924376B2 (ja) * 2014-06-23 2016-05-25 セイコーエプソン株式会社 液晶装置および電子機器
JP2017049594A (ja) * 2016-10-17 2017-03-09 デクセリアルズ株式会社 位相差素子及びその製造方法、液晶表示装置、並びに投射型画像表示装置
JP7236225B2 (ja) * 2018-05-31 2023-03-09 デクセリアルズ株式会社 位相差補償素子、液晶表示装置および投射型画像表示装置
TWI826607B (zh) 2018-12-07 2023-12-21 美商思娜公司 顯示系統、空間光調變器系統及顯示系統的形成方法
JP7477609B2 (ja) * 2020-06-30 2024-05-01 富士フイルム株式会社 位相差板、液晶プロジェクタ及びコントラスト調整方法
JP7491117B2 (ja) * 2020-07-23 2024-05-28 セイコーエプソン株式会社 液晶装置および電子機器
JP2023098288A (ja) 2021-12-28 2023-07-10 富士フイルム株式会社 位相差補償素子、液晶表示素子及び液晶プロジェクタ

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JPH05132768A (ja) 1991-11-13 1993-05-28 Ricoh Co Ltd 複屈折板およびその製造方法
US5638197A (en) * 1994-04-04 1997-06-10 Rockwell International Corp. Inorganic thin film compensator for improved gray scale performance in twisted nematic liquid crystal displays and method of making
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JP5098375B2 (ja) 2007-03-12 2012-12-12 セイコーエプソン株式会社 液晶装置の製造方法

Also Published As

Publication number Publication date
TW200921215A (en) 2009-05-16
JP2009075459A (ja) 2009-04-09
CN101802663A (zh) 2010-08-11
WO2009038218A1 (en) 2009-03-26
US8605241B2 (en) 2013-12-10
EP2191307A1 (en) 2010-06-02
TWI443427B (zh) 2014-07-01
CN101802663B (zh) 2013-01-23
EP2191307B1 (en) 2019-09-11
EP2191307A4 (en) 2012-11-21
US20100231835A1 (en) 2010-09-16

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PA0105 International application

Patent event date: 20100318

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid