KR20090053680A - Pellicle, pellicle container for receiving pellicle, and method of keeping pellicle in pellicle container - Google Patents

Abstract

An object of this invention is to store a pellicle in a pellicle container, without using a separator in a large sized pellicle.

To this end, an uncoated region of the mask adhesive is formed in a part of the mask adhesive side end face of the pellicle frame, and the uncoated region is mounted on a pellicle frame support made of a silicone gel or the like provided inside the pellicle container. The pellicle frame is held and fixed to the pellicle storage container by a pin inserted into a hole formed in the side of the pellicle frame and a holding mechanism of the pin. Since a pressure-sensitive adhesive layer can be protected even without using a separator, the separator becomes unnecessary.

Pellicle

Description

PELLICLE, PELLICLE CONTAINER FOR RECEIVING PELLICLE, AND METHOD OF KEEPING PELLICLE IN PELLICLE CONTAINER}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to pellicles used as dust shields in the manufacture of semiconductor devices, printed boards or liquid crystal displays, and in particular large pellicles used in liquid crystal display manufacture.

In the manufacture of semiconductors or liquid crystal displays, such as LSI and ultra-LSI, patterns are produced by irradiating light onto a semiconductor wafer or a liquid crystal display plate, but dust is applied to a photomask or reticle (hereinafter, referred to as photomask). If attached, the dust absorbs light or refracts the light, which causes problems such as deterioration of the transferred pattern, roughness of the edges, staining of the lower surface, blackness, and the like.

For this reason, these operations are usually performed in a clean room, but nevertheless, it is difficult to keep a photomask clean all the time. Therefore, exposure is performed after the pellicle is attached to the surface of the photomask as a dust barrier. In this case, since the foreign matter is not directly attached to the surface of the photomask but adheres to the pellicle, if the focus is on the pattern of the photomask during lithography, the foreign material on the pellicle becomes irrelevant to the transfer.

Generally, a pellicle adheres to or adheres to a top surface of a pellicle frame made of aluminum, stainless steel, polyethylene, or the like, which is transparent to light rays made of nitrocellulose, cellulose acetate, fluorine resin, or the like which transmits light well. Further, at the lower end of the pellicle frame, a release layer (separator) for the purpose of protecting the pressure-sensitive adhesive layer and the pressure-sensitive adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin or the like for mounting on a photomask is formed. And when storing and conveying a pellicle, it is mounted in a storage container through a separator.

The separator apply | coats a mold release agent on the thin film of about 100-200 micrometers, such as PET resin normally, and what cut and processed to the desired shape is used. In addition to the thinness of the film, the separator has a frame shape that is almost the same as the outline of the frame, so that the separator becomes like a string, making it difficult to cleanly clean, and handling in the operation such as adhesion to the mask adhesive layer. There is a problem that is very uncomfortable.

In addition, the separator needs to be manufactured by a seamless sheet of raw material. This is because when there is a step such as a joint, the shape is transferred to the attached mask adhesive layer, which may affect the stability of the mask after the attachment. For this reason, for large pellicles, especially for large pellicles having a side length of more than 500 mm, it is difficult to manufacture a sheet, and it is also difficult to apply a release agent over the entire surface without defects, and it is easy to manufacture and obtain such a separator. I did not.

The separator has a function of protecting the pressure-sensitive adhesive, and is peeled off and discarded when using a pellicle. If you can omit the separator, you can ultimately solve these problems. In order to omit a separator, for example, a pellicle usually accommodates an adhesive toward the lower side (the pellicle storage container side), but it is considered to mount the adhesive surface side of the pellicle film on the lower side with the adhesive as the upper side. In this case, however, the inside of the pellicle film is directed upward in the pellicle storage container, and foreign matters may adhere to the part that must be most protected. For this reason, the pellicle and the pellicle container which do not require a separator during storage so far have not been proposed.

Fixing a pellicle to a pellicle container is usually based on clamping a pellicle by a container main body and a lid, but attempting to fix a pellicle frame to a pellicle container by a pin (refer patent document 1). Also in this trial, the separator could not be lacked even in patent document 1 in that the pellicle was mounted on the container main body until the pin was engaged with the pellicle frame.

Until now, the mask pressure-sensitive adhesive layer is generally formed over the entire width of the pellicle film, but attempts have been made to make the mask pressure-sensitive adhesive layer narrower than the width of the pellicle frame by forming grooves in the bottom surface of the pellicle frame (see Patent Document 2). By forming a pressure-sensitive adhesive layer (adhesive layer for pellicle film) in the groove part, the pressure-sensitive adhesive layer is prevented from becoming convex due to the surface tension, and the surface flatness is improved, and the problem is to be solved without using a separator. no.

It is also attempted to form the part in which the mask adhesive is not apply | coated to a pellicle frame by forming the protrusion part narrower than the width of a pellicle frame (refer patent document 3, patent document 4). The former is to engage the release port in the step where the adhesive of the pellicle frame is not applied when peeling the pellicle from the photomask, and the latter is not intended to be solved without using a separator in the pellicle, and the latter is an area protruding from the separator. Is formed, and the protrusions are fixed to the pellicle storage container to assist the peeling of the separator from the mask adhesive layer, and not all of them use the separator.

[Patent Document 1] Japanese Patent Application Laid-Open No. 2006-267178

[Patent Document 2] Japanese Patent Application Laid-Open No. 2005-338722

[Patent Document 3] Japanese Patent Application 2006-135186

[Patent Document 4] Japanese Patent Application No. 2007-286483

It is an object of the present invention to provide a pellicle and a pellicle storage container which are free from delamination even when a separator is not used for a pellicle, especially a large pellicle having at least one side length of more than 500 mm.

In the pellicle of the present invention, an uncoated area of the mask adhesive is formed in a part of the surface where the pressure-sensitive adhesive layer for sticking to the mask of the pellicle frame is formed, and the upper and lower end surfaces of the pellicle frame contact the pellicle storage container on the side of the pellicle frame. It is characterized in that the non-penetrating hole is formed that can be inserted without the pin can be fixed.

In addition, the pellicle container of the present invention is a pellicle container consisting of a tray on which the pellicle is mounted and an upper cover for sealing the pellicle storage surface of the tray. The tray has a pin holding mechanism for supporting a pellicle frame supporting portion in the tray and for installing a pin for fixing the upper and lower end faces of the pellicle frame without contacting the pellicle container. The material of the pellicle frame support may be one selected from the group consisting of resin, rubber and silicone gel, and the pellicle frame support preferably has antistatic performance.

Further, the method of storing the pellicle in the pellicle storage container of the present invention mounts the uncoated region of the mask adhesive formed on the pellicle frame on the pellicle frame support, and holds the pin in the pin insertion hole formed on the side of the pellicle frame. The pellicle is fixed in the pellicle container by inserting a pin provided in the mechanism.

(Effects of the Invention)

According to the present invention, the pellicle can be stored and stored without disturbing the pellicle container even without using a separator. In particular, the problem of obtaining raw materials of the separator in a large pellicle can be solved. Since the oscillation from the separator itself in the absence disappears, the effect is also great from the viewpoint of preventing foreign matter adhesion. In addition, not only the cost of the separator itself, but also the processes involved in cleaning, attaching, and the like can be reduced, thereby reducing the manufacturing cost.

EMBODIMENT OF THE INVENTION Hereinafter, although the best form for implementing this invention is demonstrated, this invention is not limited to this.

The top view and cross-sectional schematic of the state which accommodated the pellicle in the pellicle container by FIG. 1 at this invention are shown. The uncoated area a of the mask adhesive 12 is formed in a part of the cross section of the mask adhesive application side of the pellicle frame 11, and the above-mentioned adhesive is not applied to the frame support part 18 provided on the pellicle storage container tray 14. It mounts so that only area | region a may contact.

In addition, the pin 17 having an elastic body such as rubber inserted in the hole b formed in the side surface of the pellicle frame 11 at its tip (not shown) to prevent the pellicle from moving in the pellicle storage container during transportation. The pellicle frame 11 is fixed to the pellicle container by the holding mechanism 16. As a result, the mask adhesion layer 12 is hold | maintained and fixed in the pellicle storage container, without contacting the pellicle storage container tray 14. Therefore, it is not necessary to protect the mask adhesion layer 12 by a separator, and use of a separator can be skipped.

Here, the method of fixing the pellicle is most preferred by the pin inserted in the above-described frame, but for example, the method may be such that the holder is brought into close contact with the side face of the pellicle frame or the end face of the pellicle film adhesive layer. It is not limited to these.

In addition, the material of the frame support portion 18 supporting the pressure-sensitive adhesive-coated side end face of the pellicle frame on the pellicle storage container tray 14 is further reduced in order to prevent damage to the surface of the pellicle frame, and also to reduce oscillation when rubbed with the pellicle frame. It is preferable that it is resin in order to do so. The material of the resin may have a suitable hardness so that it is difficult to be oscillated, and may be any surface that can be smoothly processed. For example, polyimide, polyamide, PEEK, PTFE, POM or the like can be used.

If the surface is smooth, the material may be rubber. For example, NBR, EPR, urethane, FKM or the like can be used. However, more preferably, the material is made of silicone gel. In addition to lower elastic modulus than rubber, there is a slight tuck on the surface, so the friction with the pellicle frame due to vibration during transportation is very small, and the possibility of oscillation is greatly reduced.

Moreover, it is more preferable to set it as the material which has antistatic performance by mixing various electroconductive substances, such as carbon and metal (powder), in these resins and rubber | gum. Charging of the pellicle during transport or withdrawal from the pellicle storage container can be prevented, and the risk of occurrence of foreign matter adhesion due to static electricity or electrostatic breakage of the mask pattern during pellicle attachment is reduced.

In addition, although eight places are provided in the example of FIG. 1 about the attachment position, the number, and each shape of the pellicle frame support part 18, it can design suitably according to the shape of the pellicle frame and a storage container to accommodate. Basically, even if the pellicle frame is moved due to vibration during transportation or the like, the gap between the mask adhesive layer 12, the pellicle storage container tray 14, and the pellicle frame support portion 18 may be securely ensured.

(Example)

Hereinafter, although the Example of this invention is described, this invention is not limited to this.

The pellicle as shown in FIG. 2 was produced. That is, as the pellicle frame 21, a 5000 series aluminum alloy having a long side external dimension of 1600 mm, a short side external dimension of 1500 mm, a height of 5.8 mm, and a width of 13 mm was cut by machining, and the surface was subjected to black anodized treatment. After washing and drying this pellicle frame with pure water, the silicone adhesive (Shin-Etsu Chemical Co., Ltd. make, brand name KR-3700) is diluted with toluene as the mask adhesive layer 22, and is made to orthogonal triaxial dispenser robot. Was applied. In addition, the mask adhesive layer 22 was made into the semicircular cross-sectional shape of width 4mm and height 1.5mm. At this time, since the mask adhesive layer of 4 mm is formed with respect to the width of 13 mm of a pellicle frame, there exists an uncoated area | region of width 9mm width on the outer side.

Moreover, after apply | coating so that the thickness after a silicone adhesive (Shin-Etsu Chemical Co., Ltd. make, brand name KR-3700) as a pellicle film adhesive layer 23 with a toluene may be 0.1 mm in thickness after drying, it heats at 130 degreeC. This cured them. The pellicle film 24 coated a fluorine resin (Asahi Glass Co., Ltd., brand name; Saitop) by the die-coating method on the rectangular quartz substrate which smoothly polished the surface of 1600x1700 mm, and dried a solvent. After making it peel, it peeled from a quartz substrate and obtained the pellicle film of 4 micrometers in thickness. And this pellicle film was affixed to the said pellicle frame, the outer unnecessary film was cut out by the cutter, and the pellicle was completed.

On the other hand, the pellicle container of FIG. 1 shape | molded the black antistatic ABS resin (Toray Co., Ltd. make, brand name: Toyo Rock Farrel) of thickness 5mm by the vacuum molding method, and produced the pellicle container container 14. As shown in FIG. In addition, the pellicle storage container cover 15 was produced by the vacuum molding method similarly using the transparent antistatic ABS resin (made by Toray Co., Ltd., brand name Toyo Rock Farrel) of thickness 5mm. On the pellicle storage container tray 14, the pin 17 and the pin holding mechanism 16 produced by injection molding the ABS resin were positioned to fit the jig hole b formed on the outer side of the pellicle frame, and then adhesively fixed. . Furthermore, the silicone gel (Shin-Etsu Chemical Co., Ltd. make, brand name: KE1056) is located in eight positions where the uncoated area a of the mask adhesive of the pellicle frame 11 contacts on the pellicle storage container tray 14. ) Was molded into a diameter of 8 mm and a thickness of 4 mm and attached as the frame support 18.

After the pellicle container was purely washed and dried in a clean room, the pellicle was accommodated and the pellicle was fixed by the pin 17 and the pin holding mechanism 16.

As the evaluation, the pellicle storage container in which the pellicle was stored was held vertically and held for 1 minute, and then the horizontal return operation was performed three times, and the adhesion state of the foreign matter to the pellicle was examined in the dark room in the clean room. As a result, no increase in foreign matter adhering to the pellicle was seen at all. Further, no traces such as foreign matter adhered to the position of contact with the frame support 18, and of course, no defects such as contact marks were seen in the mask adhesive layer.

According to the present invention, since the adhesive layer can be protected even without using a separator, a pellicle and a pellicle storage container which do not require a separator during storage can be obtained. Therefore, in particular, the difficulty of obtaining raw materials of separator raw materials in a large pellicle Besides being able to solve the problem, since the oscillation from the separator itself is eliminated during transportation or peeling off of the separator, it is also effective from the standpoint of preventing foreign matter adhesion. Since the process involved can be reduced, manufacturing cost can be reduced, and thus the industrial use value is very high.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view and sectional schematic drawing which shows the state which accommodated the pellicle in the pellicle container by this invention.

2 is an explanatory diagram showing a pellicle of the present invention.

(Explanation of symbols for the main parts of the drawing)

11: pellicle frame 12: mask adhesion layer (mask adhesive)

13: pellicle film 14: pellicle storage container tray

15: pellicle storage container cover 16: pin holding mechanism

17: pin 18: frame support

21: pellicle frame 22: mask adhesive layer

23: film adhesive layer 24: pellicle film

a: uncoated area (of mask adhesive)

b: hole {formed on side of pellicle frame 11]

Claims (5)

The uncoated area of the mask adhesive is formed in a part of the surface on which the pressure-sensitive adhesive layer for sticking to the mask of the pellicle frame is formed, and the upper and lower end surfaces of the pellicle frame can be fixed to the side of the pellicle frame without contacting the pellicle storage container. A pellicle, characterized in that a non-penetrating hole is formed into which a pin can be inserted. A pellicle container comprising a tray on which a pellicle is mounted and an upper cover for sealing the pellicle receiving surface of the tray, wherein the pellicle frame support portion supporting the pellicle is brought into contact with only the uncoated area of the mask adhesive formed on the pellicle frame. And a pin holding mechanism in the tray, in which the pin can be fixed without the upper and lower end faces of the pellicle frame contacting the pellicle storage container. The pellicle container according to claim 2, wherein the pellicle frame support is made of one kind selected from the group consisting of resin, rubber and silicone gel. 4. The pellicle container according to claim 2 or 3, wherein the pellicle frame support has an antistatic performance. The uncoated area of the mask adhesive formed on the pellicle frame is mounted on the pellicle frame support portion, and the pin provided in the pin holding mechanism is inserted into the pin insertion hole formed on the side of the pellicle frame to fix the pellicle in the pellicle storage container. A method for storing a pellicle in a pellicle container.

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