JP5349519B2 - Pellicle storage method - Google Patents
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- JP5349519B2 JP5349519B2 JP2011071582A JP2011071582A JP5349519B2 JP 5349519 B2 JP5349519 B2 JP 5349519B2 JP 2011071582 A JP2011071582 A JP 2011071582A JP 2011071582 A JP2011071582 A JP 2011071582A JP 5349519 B2 JP5349519 B2 JP 5349519B2
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Description
本発明は、クリーンルーム内で製造される製品(特にはペリクル)を収納するペリクル収納方法に関する。 The present invention relates to a pellicle storage method for storing a product (particularly a pellicle) manufactured in a clean room.
クリーンルーム内で製造されたリソグラフィ用ペリクルは、専用の容器に収納された後、樹脂製の袋に収納される。ペリクル容器(ケース)やペリクルの帯電を防止するために、一般にこの袋は、帯電防止タイプの袋が使われてきた。 A pellicle for lithography manufactured in a clean room is stored in a dedicated container and then stored in a resin bag. In order to prevent charging of the pellicle container (case) and the pellicle, an antistatic type bag has generally been used.
帯電防止タイプの袋の場合、袋に導電性を持たせるために、帯電防止剤が練り込まれていたり、表面に金属薄膜を蒸着したりしているため、これらが発塵の原因となり、ペリクル容器の輸送状態や環境によっては袋に収納されたペリクル容器を汚染したり、さらに、ペリクル容器を袋から出して蓋を開ける際に、ペリクル容器の蓋等に付着した帯電防止剤等によって、内部に収納されたペリクルを汚染することがあった。 In the case of an antistatic type bag, an antistatic agent is kneaded or a metal thin film is deposited on the surface to give conductivity to the bag. Depending on the transport state and environment of the container, the pellicle container contained in the bag may be contaminated, or when the pellicle container is removed from the bag and the lid is opened, the anti-static agent attached to the pellicle container lid etc. In some cases, the pellicle stored in the container was contaminated.
以上の事情に鑑みて、本発明は、保管・輸送・開封に際しても、発塵することが少なく、袋に収納する製品、特にはペリクル容器の内部に収納されたペリクルを汚染することのないペリクル収納方法を提供することを課題とする。 In view of the above circumstances, the present invention is a pellicle that is less likely to generate dust during storage, transportation, and opening, and that does not contaminate the product stored in the bag, particularly the pellicle stored inside the pellicle container. It is an object to provide a storage method.
本発明は、このような課題を解決するためのものであって、本発明のペリクル収納方法は、ペリクルを収納した容器をクリーン仕様の第一の袋に入れてその口を閉じ、次いでこれを帯電防止機能を有する第二の袋に入れてその口を閉じ、更に帯電防止機能を有する第三の袋に入れて密閉することを特徴としている。
前記クリーン仕様の袋は、少なくとも清浄度1000以下のクリーンルーム内で製造された清浄度管理のされたものであり、前記帯電防止機能を有する袋は、少なくとも9.9×1011Ω/cm2以下の表面抵抗で帯電防止特性を有する。なお、前記密閉作業が清浄度1以上のクリーンルーム内において行われる。
The present invention is for solving such problems. In the pellicle storage method of the present invention, the container storing the pellicle is placed in a clean first bag, and the mouth is closed. It is characterized in that it is put in a second bag having an antistatic function and the mouth is closed, and further sealed in a third bag having an antistatic function.
Bag of the clean specification, which has been the least cleanliness 1000 produced in the following clean room cleanliness management bag having the antistatic function is at least 9.9 × 10 11 Ω / cm 2 or less of the surface Resistant and antistatic properties. The sealing operation is performed in a clean room with a cleanliness level of 1 or higher.
本発明によれば、最も内側の第一の袋にクリーンな袋を用い、第二、第三の袋に帯電防止タイプの袋を使用することによって、製品(ペリクル)を収納する容器ひいては製品に異物が付着することを防止すると共に、袋から容器を取り出すまでの帯電を最小限にとどめ、製品の汚れを防止することができる。 According to the present invention, a clean bag is used for the innermost first bag, and an antistatic type bag is used for the second and third bags. It is possible to prevent foreign matter from adhering and to minimize the electrification until the container is removed from the bag, thereby preventing the product from being soiled.
本発明は、クリーンルーム内で、ペリクルを収めたペリクル容器を袋に収納するペリクル収納方法に関し、ペリクルを収めたペリクル容器を、内側より、非帯電防止のクリーン袋、帯電防止袋、帯電防止袋の順に3重に収納し、包装するものであり、ペリクル容器を帯電防止剤入りの袋に直接触れさせないことでペリクル容器、ひいては内部に収納したペリクルの汚染を防止するとともに、袋の帯電による静電気障害を最内側のクリーン袋によって防止することを基本とする。 The present invention relates to a pellicle storage method for storing a pellicle container in which a pellicle is stored in a clean room, and the pellicle container in which the pellicle is stored is connected to an antistatic clean bag, an antistatic bag, and an antistatic bag from the inside. It is housed and packaged in triplicate in order to prevent contamination of the pellicle container, and thus the pellicle stored inside, by preventing the pellicle container from directly touching the bag containing the antistatic agent, and electrostatic damage due to charging of the bag Basically, this is prevented by the innermost clean bag.
以下、本発明について、図を用いてさらに詳細に説明する。
図1において、ペリクル1を内部に収めたペリクル容器2が、クリーン仕様の第一袋3に収められ、その外側に帯電防止機能を有する第二袋4に収められ、さらにその外側に帯電防止機能を有する第三袋5に収められている。
本発明で使用される袋は、寸法に関しては、ペリクルの収納容器(ケース)を収納でき、かつ内部に収納する袋を外側の袋が収納できるサイズであれば、特に制限はない。厚さに関しては、各袋の口を閉じる際に、例えば、熱シールによって閉じる場合、軟化しすぎて破れたり切れたりすることが無いように、ある程度の厚さがあることが好ましい。逆に、融着しにくいほどに厚いと密閉がうまくできないことがあるため、厚さとしては、50〜200μmのものが好ましい。
Hereinafter, the present invention will be described in more detail with reference to the drawings.
In FIG. 1, a
The size of the bag used in the present invention is not particularly limited as long as it is a size that can store a pellicle storage container (case) and can store a bag stored inside the outer bag. Regarding the thickness, when closing the mouth of each bag, for example, when it is closed by heat sealing, it is preferable that there is a certain thickness so that the bag is not softened and is not torn or cut. On the contrary, if the thickness is so large that it is difficult to fuse, the sealing may not be performed properly, so that the thickness is preferably 50 to 200 μm.
袋の材質としては、特に制限はないが、最も内側のペリクル容器と接触する袋(第一袋)に関しては、ポリエチレン、ナイロン、ポリプロピレン、ポリエステル等の樹脂のみからなるもの、またはこれらを適宜積層したものを使用するのが好ましい。第一袋は、直接製品を収納した容器と触れるものであるから、クリーン仕様のもので、清浄度1000以下のクリーンルーム内で製造された清浄度管理のされたものである必要がある。 The material of the bag is not particularly limited, but for the bag (first bag) that comes into contact with the innermost pellicle container, the bag is made of only resin such as polyethylene, nylon, polypropylene, polyester, or these are appropriately laminated. It is preferable to use one. Since the first bag is directly in contact with the container containing the product, it must have a clean specification and a cleanliness controlled product manufactured in a cleanroom with a cleanness of 1000 or less.
この第一袋は、第二の袋に収納される。この第二袋については、第一袋と同様に、ポリエチレン、ナイロン、ポリプロピレン、ポリエステル等の樹脂からなり、これらの樹脂に金属薄膜を蒸着したものや帯電防止剤を添加したもの、さらには前記樹脂を積層したものに帯電防止機能を付与したもの等が挙げられる。帯電防止性能としては一般的に用いられる程度の帯電防止性能を有していれば良いが、帯電防止袋として一般的な性能である、少なくとも9.9×1011Ω/cm2以下の表面抵抗であることが望ましい。 The first bag is stored in the second bag. About this 2nd bag, like the 1st bag, it consists of resin, such as polyethylene, nylon, a polypropylene, polyester, and what added the metal thin film to these resins, added the antistatic agent, and also said resin And the like in which the antistatic function is added to the laminate. As long as it has antistatic performance that is generally used as antistatic performance, it has a surface resistance of at least 9.9 × 10 11 Ω / cm 2 , which is a general performance as an antistatic bag. It is desirable.
この第二袋にまで入れられたペリクル容器は、更に第三の袋に収納される。この第三袋は、外部と直接触れるものであるため、クリーンルーム内に搬入する直前に開封されて、外部の汚れをクリーンルーム内に持ち込まないようにするためのものである。
従って、搬入するクリーンルームのクリーン度に応じて、この第三袋は、第四の袋、第五の袋等へと、さらに収納する袋を増やしても良い。
The pellicle container placed in the second bag is further stored in the third bag. Since the third bag is in direct contact with the outside, the third bag is opened immediately before being carried into the clean room so as not to bring outside dirt into the clean room.
Therefore, according to the cleanliness of the clean room to be carried in, the third bag may be further accommodated in the fourth bag, the fifth bag, and the like.
第三袋の材質については、第二袋と同様に、ポリエチレン、ナイロン、ポリプロピレン、ポリエステル等の樹脂からなり、これらの樹脂に金属薄膜を蒸着したものや帯電防止剤を添加したもの、さらには前記樹脂を積層したものに帯電防止機能を付与したもの等が挙げられる。
第四袋以降の袋についても同様である。
As for the material of the third bag, like the second bag, it is made of a resin such as polyethylene, nylon, polypropylene, polyester, etc., those obtained by depositing a metal thin film on these resins, those added with an antistatic agent, and further, Examples include those obtained by laminating a resin and imparting an antistatic function.
The same applies to the fourth and subsequent bags.
以下に実施例について述べる。なお、以下の実施例、参考例及び比較例で使用したクリーン仕様の袋は、清浄度1000以下のクリーンルーム内で製造洗浄されたポリエチレン製の袋であり、帯電防止袋には、ポリエチレンに帯電防止剤を添加して帯電防止機能(少なくとも9.9×1011Ω/cm2以下の表面抵抗で帯電防止特性)を持たせたポリエチレン製の袋を使用した。 Examples will be described below. The clean specification bags used in the following examples, reference examples and comparative examples are polyethylene bags manufactured and washed in a clean room with a cleanliness of 1000 or less. A polyethylene bag with an antistatic function (antistatic property with a surface resistance of at least 9.9 × 10 11 Ω / cm 2 or less) added with an agent was used.
[実施例1]
先ず、厚さ70μmのクリーン仕様の第一袋に、ペリクルを収納したペリクル容器を袋の最奥部まで入れ、袋の口を熱シールによって閉じた。次に、厚さ70μmの帯電防止袋である第二袋に、ペリクル容器を収めた第一袋を入れ、袋の口を熱シールで閉じた。
最後に、このものを厚さ100μmの帯電防止袋である第三袋に入れて、袋の口を熱シールで閉じた。これをクッション材を入れたダンボール箱に収納し、密閉して振動試験機に載せ、10Hz、上下方向に1Gの加速度で24時間振動を与えた。
[Example 1]
First, a pellicle container containing a pellicle was placed in the first bag of clean specification having a thickness of 70 μm to the innermost part of the bag, and the bag mouth was closed by heat sealing. Next, a first bag containing a pellicle container was placed in a second bag, which is an antistatic bag having a thickness of 70 μm, and the mouth of the bag was closed with a heat seal.
Finally, this was put in a third bag which is an antistatic bag having a thickness of 100 μm, and the mouth of the bag was closed with a heat seal. This was housed in a cardboard box containing a cushioning material, sealed and placed on a vibration tester, and subjected to vibration for 24 hours at an acceleration of 1 G in the vertical direction of 10 Hz.
次いで、このものをクリーンルーム内に持ち込み、開封したところ、第二袋、第三袋の表面に白く帯電防止剤と思われるものがブリードアウトしていた。このものは第一袋表面にも付着していたが、その中の容器表面は清浄であり、クリーンルーム内の暗室にて、30万ルクスの集光ランプで検査したが付着異物等は認められなかった。
また、収納容器を開いて製品(ペリクル)を上記方法にて検査したが、特に製品表面に付着物は無かった。
Next, when this product was brought into a clean room and opened, what appeared to be an antistatic agent in white on the surfaces of the second and third bags was bleeding out. This was also attached to the surface of the first bag, but the container surface in it was clean, and inspected with a 300,000 lux condensing lamp in a dark room in a clean room, but no adhered foreign matter was found. It was.
Further, the storage container was opened and the product (pellicle) was inspected by the above method, but there was no deposit on the product surface.
[参考例1,2]
参考例1は、第一袋、第二袋に厚さ70μmのクリーン仕様の袋を使用し、第三袋には、厚さ100μmの帯電防止袋を使用した。参考例2は、第一袋、第二袋、第三袋のいずれにも厚さ70μmのクリーン仕様の袋を使用した。これ以外は、実施例1と同様にして袋の口を熱シールして24時間の振動試験を行った後、クリーンルーム内で開封し、収納容器を開いて製品(ペリクル)を取出し、クリーンルーム内の暗室にて30万ルクスの集光ランプによって検査したところ、いずれも製品上に異物の増加が認められた。この結果を、実施例1の結果と共にまとめて表1に示した。
[Reference Examples 1 and 2]
In Reference Example 1, a clean bag having a thickness of 70 μm was used for the first bag and the second bag, and an antistatic bag having a thickness of 100 μm was used for the third bag. In Reference Example 2, a clean bag having a thickness of 70 μm was used for each of the first bag, the second bag, and the third bag. Except for this, the bag mouth was heat-sealed in the same manner as in Example 1 and the vibration test was performed for 24 hours. Then, the bag was opened in a clean room, the storage container was opened, the product (pellicle) was taken out, When inspected with a 300,000 lux condenser lamp in a dark room, any increase in foreign matter was observed on the product. The results are shown in Table 1 together with the results of Example 1.
[参考例3〜5]
第一袋として、厚さ70μmの帯電防止袋を使用し、第二袋、第三袋には、帯電防止袋又はクリーン袋を適宜組み合わせて使用した以外は、実施例1と同じ構成で試験を行った(表1参照)。このものをクリーンルーム内に持ち込み、開封したところ、第一袋、第二袋、第三袋の何れの表面にも白く帯電防止剤と思われるものがブリードアウトしていた。
さらに、容器表面にも白い粉状のものが付着していることが確認された。クリーンルーム内の暗室にて30万ルクスの集光ランプによって検査したが、容器表面に白い粉状の付着物があった。また、収納容器を開いて製品を上記方法にて検査したが、付着異物があり、顕微IR分光分析によってこの付着物が第一袋に含有される帯電防止剤と同じ成分であることが確認された。この結果は、表1にまとめて示した。
[Reference Examples 3 to 5]
The test was performed with the same configuration as in Example 1 except that an antistatic bag having a thickness of 70 μm was used as the first bag, and an antistatic bag or a clean bag was appropriately combined with the second and third bags. (See Table 1). When this product was brought into a clean room and opened, the surface of each of the first bag, the second bag, and the third bag was white and bleeded out as an antistatic agent.
Furthermore, it was confirmed that the white powdery thing had adhered also to the container surface. Inspected with a 300,000 lux condenser lamp in a dark room in a clean room, there was a white powdery deposit on the surface of the container. In addition, the container was opened and the product was inspected by the above method, but there was an attached foreign matter, and it was confirmed by microscopic IR spectroscopic analysis that the attached matter was the same component as the antistatic agent contained in the first bag. It was. The results are summarized in Table 1.
[比較例1]
従来行われていた帯電防止袋のみを使用した例であり、厚さ100μmの帯電防止袋にペリクルを収納したペリクル容器を入れ、袋の口を熱シールによって閉じた後、実施例1と同様にして、24時間の振動試験後、クリーンルーム内で開封し、収納容器を開いて製品(ペリクル)を取出し、クリーンルーム内の暗室にて30万ルクスの集光ランプによって検査したところ、製品上に異物の増加が認められた。この結果を、上記実施例、参考例の結果と共に表1に示した。
[Comparative Example 1]
This is an example of using only an antistatic bag, which has been conventionally performed. A pellicle container containing a pellicle is placed in an antistatic bag having a thickness of 100 μm, the bag mouth is closed by heat sealing, and then the same as in Example 1. After a 24-hour vibration test, the product was opened in a clean room, the storage container was opened, the product (pelicle) was taken out, and inspected with a 300,000 lux condenser lamp in a dark room in the clean room. An increase was observed. The results are shown in Table 1 together with the results of the above examples and reference examples.
1:ペリクル、
2:ペリクル容器、
3:(クリーン仕様の)第一袋、
4:(帯電防止袋からなる)第二袋、
5:(帯電防止袋からなる)第三袋。
1: Pellicle,
2: Pellicle container
3: First bag (clean specification),
4: Second bag (consisting of antistatic bag),
5: Third bag (consisting of an antistatic bag).
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Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2011071582A JP5349519B2 (en) | 2011-03-29 | 2011-03-29 | Pellicle storage method |
KR1020120018494A KR20120112002A (en) | 2011-03-29 | 2012-02-23 | A method for storing a pellicle |
US13/430,110 US20120247069A1 (en) | 2011-03-29 | 2012-03-26 | Method for storing a pellicle |
TW101110675A TWI460111B (en) | 2011-03-29 | 2012-03-28 | A method for storing a pellicle |
CN2012100886418A CN102736403A (en) | 2011-03-29 | 2012-03-29 | Method for storing a pellicle |
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JP2011071582A JP5349519B2 (en) | 2011-03-29 | 2011-03-29 | Pellicle storage method |
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JP5349519B2 true JP5349519B2 (en) | 2013-11-20 |
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KR (1) | KR20120112002A (en) |
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FR3025450B1 (en) | 2014-09-08 | 2016-12-23 | Thales Sa | REPAIR UNIT FOR NACELLE |
JP6494111B2 (en) * | 2015-11-09 | 2019-04-03 | 信越化学工業株式会社 | Pellicle storage container packaging structure and packaging method thereof |
JP2020019520A (en) * | 2018-07-31 | 2020-02-06 | 住友電気工業株式会社 | Packaging structure of silicon carbide substrate |
JP7548805B2 (en) | 2020-12-21 | 2024-09-10 | 三井化学株式会社 | Storage bag |
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TWI231376B (en) * | 2004-01-06 | 2005-04-21 | Optimax Tech Corp | Package for a optical sheet and a packing method for the same |
JP2005298037A (en) * | 2004-04-15 | 2005-10-27 | Toppan Printing Co Ltd | Packaging bag and electronic component package |
JP2006096851A (en) * | 2004-09-29 | 2006-04-13 | Toppan Printing Co Ltd | Clean film and wrapping bag using the same |
JP4856371B2 (en) * | 2004-11-10 | 2012-01-18 | 昭和電工パッケージング株式会社 | Laminated body for packaging, packaging bag body using the same, and packaging body for electronic material products |
JP2008090206A (en) * | 2006-10-05 | 2008-04-17 | Hoya Corp | Management system for mask blank |
JP5052106B2 (en) * | 2006-11-22 | 2012-10-17 | 旭化成イーマテリアルズ株式会社 | How to store the pellicle |
JP5051840B2 (en) * | 2007-11-22 | 2012-10-17 | 信越化学工業株式会社 | Method for storing a pellicle in a pellicle storage container |
JP5198043B2 (en) * | 2007-11-30 | 2013-05-15 | アイセロ化学株式会社 | Double bag for clean packaging |
JP5133229B2 (en) * | 2008-12-05 | 2013-01-30 | 信越ポリマー株式会社 | Pellicle storage container |
JP2011007827A (en) * | 2009-06-23 | 2011-01-13 | Shin Etsu Polymer Co Ltd | Storage container for large precision member |
JP2011030727A (en) * | 2009-07-31 | 2011-02-17 | Manii Kk | Packaging bag for medical supplies, packaging bag containing medical supplies, and method for packaging medical supplies |
-
2011
- 2011-03-29 JP JP2011071582A patent/JP5349519B2/en active Active
-
2012
- 2012-02-23 KR KR1020120018494A patent/KR20120112002A/en not_active Application Discontinuation
- 2012-03-26 US US13/430,110 patent/US20120247069A1/en not_active Abandoned
- 2012-03-28 TW TW101110675A patent/TWI460111B/en active
- 2012-03-29 CN CN2012100886418A patent/CN102736403A/en active Pending
Also Published As
Publication number | Publication date |
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KR20120112002A (en) | 2012-10-11 |
JP2012208158A (en) | 2012-10-25 |
TWI460111B (en) | 2014-11-11 |
US20120247069A1 (en) | 2012-10-04 |
CN102736403A (en) | 2012-10-17 |
TW201309565A (en) | 2013-03-01 |
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