HK1131444A1 - A pellicle, a container for receiving a pellicle, and a method for receiving a pellicle - Google Patents

A pellicle, a container for receiving a pellicle, and a method for receiving a pellicle

Info

Publication number
HK1131444A1
HK1131444A1 HK09109783.3A HK09109783A HK1131444A1 HK 1131444 A1 HK1131444 A1 HK 1131444A1 HK 09109783 A HK09109783 A HK 09109783A HK 1131444 A1 HK1131444 A1 HK 1131444A1
Authority
HK
Hong Kong
Prior art keywords
pellicle
receiving
container
Prior art date
Application number
HK09109783.3A
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of HK1131444A1 publication Critical patent/HK1131444A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
HK09109783.3A 2007-11-22 2009-10-22 A pellicle, a container for receiving a pellicle, and a method for receiving a pellicle HK1131444A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007303443A JP5051840B2 (en) 2007-11-22 2007-11-22 Method for storing a pellicle in a pellicle storage container

Publications (1)

Publication Number Publication Date
HK1131444A1 true HK1131444A1 (en) 2010-01-22

Family

ID=40725886

Family Applications (1)

Application Number Title Priority Date Filing Date
HK09109783.3A HK1131444A1 (en) 2007-11-22 2009-10-22 A pellicle, a container for receiving a pellicle, and a method for receiving a pellicle

Country Status (5)

Country Link
JP (1) JP5051840B2 (en)
KR (1) KR101515458B1 (en)
CN (1) CN101441405B (en)
HK (1) HK1131444A1 (en)
TW (1) TWI384323B (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102132210B (en) * 2008-09-12 2013-01-23 旭化成电子材料株式会社 Pellicle frame, pellicle and method for using pellicle frame
JP2011034020A (en) * 2009-08-06 2011-02-17 Shin-Etsu Chemical Co Ltd Pellicle storage container
JP2011076042A (en) * 2009-10-02 2011-04-14 Shin-Etsu Chemical Co Ltd Pellicle
JP2011164404A (en) * 2010-02-10 2011-08-25 Shin-Etsu Chemical Co Ltd Pellicle storage container
TWI456341B (en) * 2010-03-10 2014-10-11 Asahi Kasei E Materials Corp Large protective film frame and large protective film
JP5528190B2 (en) * 2010-04-23 2014-06-25 信越化学工業株式会社 Pellicle storage container
JP2011240946A (en) * 2010-05-17 2011-12-01 Shin-Etsu Chemical Co Ltd Airtight enclosing method for bag containing pellicle
JP5349519B2 (en) * 2011-03-29 2013-11-20 信越化学工業株式会社 Pellicle storage method
JP5684752B2 (en) * 2012-03-29 2015-03-18 信越化学工業株式会社 Pellicle storage container
CN106233202B (en) * 2014-04-17 2020-07-10 汉阳大学校产学协力团 Pellicle for EUV lithography
JP6308676B2 (en) * 2014-12-18 2018-04-11 信越化学工業株式会社 Pellicle container for lithography.
JP6320309B2 (en) 2015-01-19 2018-05-09 信越化学工業株式会社 Pellicle storage container
JP6351178B2 (en) * 2015-07-13 2018-07-04 信越化学工業株式会社 Pellicle storage container and pellicle removal method
JP6551837B2 (en) * 2015-08-17 2019-07-31 三井化学株式会社 Pellicle frame and pellicle containing the same
CN106571105A (en) * 2015-10-13 2017-04-19 元太科技工业股份有限公司 Waterproof display apparatus and assembling method therefor
TWI589208B (en) 2015-10-13 2017-06-21 元太科技工業股份有限公司 Waterproof display apparatus and method for assembling the same
JP6604651B2 (en) * 2016-02-22 2019-11-13 信越化学工業株式会社 Pellicle storage container
JP7442291B2 (en) 2019-10-09 2024-03-04 信越化学工業株式会社 Assembly consisting of a pellicle and its dedicated pellicle case

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3071348B2 (en) * 1993-10-21 2000-07-31 信越化学工業株式会社 Pellicle and its peeling method
JPH07204039A (en) * 1993-12-01 1995-08-08 Toppan Printing Co Ltd Built-up type floor cabinet for system kitchen
JP3434731B2 (en) * 1999-06-09 2003-08-11 Ｎｅｃエレクトロニクス株式会社 Pellicle and its case
JP4338467B2 (en) * 2003-07-23 2009-10-07 旭化成イーマテリアルズ株式会社 Large pellicle storage container
JP2006146085A (en) * 2004-11-24 2006-06-08 Shin Etsu Chem Co Ltd Large pellicle
JP4478558B2 (en) * 2004-12-08 2010-06-09 大日本印刷株式会社 Large pellicle transport method, transport jig and pellicle case
JP4391435B2 (en) * 2005-03-22 2009-12-24 信越化学工業株式会社 Pellicle storage container
JP2006301525A (en) * 2005-04-25 2006-11-02 Shin Etsu Chem Co Ltd Pellicle frame
JP4614845B2 (en) * 2005-08-11 2011-01-19 信越ポリマー株式会社 Pellicle storage container
JP2007052217A (en) * 2005-08-18 2007-03-01 Shin Etsu Polymer Co Ltd Storage container for pellicle
JP4649363B2 (en) * 2006-04-19 2011-03-09 信越化学工業株式会社 Pellicle storage container
JP4637053B2 (en) * 2006-05-15 2011-02-23 信越化学工業株式会社 Pellicle and pellicle peeling device
JP5052106B2 (en) * 2006-11-22 2012-10-17 旭化成イーマテリアルズ株式会社 How to store the pellicle
KR101191055B1 (en) * 2007-07-06 2012-10-15 아사히 가세이 이-매터리얼즈 가부시키가이샤 Frame of large pellicle and grasping method of frame

Also Published As

Publication number Publication date
TW200923571A (en) 2009-06-01
CN101441405B (en) 2011-04-13
KR101515458B1 (en) 2015-04-29
JP2009128635A (en) 2009-06-11
KR20090053680A (en) 2009-05-27
TWI384323B (en) 2013-02-01
CN101441405A (en) 2009-05-27
JP5051840B2 (en) 2012-10-17

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20211121