KR20090011432A - Multipurpose carrier of vacuum vapor deposition material and method thereof - Google Patents

Abstract

A method for manufacturing a multipurpose carrier of vacuum deposition material is provided to produce an external of a carrier made of a metal material so as to improve intensity of the multipurpose carrier and efficiency of manufacturing the carrier. A method for manufacturing a multipurpose carrier of vacuum deposition material comprises the following steps. A metal washer covers a cylinder-type or square-type metal container(10). A ring-type frame surrounds the metal washer and compresses or welds the metal washer. The metal material is made of a component or a mixture of stainless steel, iron, copper, molybdenum, tungsten, and titanium.

Description

Multi-Purpose Carrier for Vapor Deposition for Vapor Deposition and Its Manufacturing Method {MULTIPURPOSE CARRIER OF VACUUM VAPOR DEPOSITION MATERIAL AND METHOD THEREOF}

The object of the present invention is to prepare an organic and inorganic compound as well as an organic-inorganic composite compound having a form of a solid, powdery, and various viscous liquids, as well as semi-solid slurries, using the multipurpose carrier prepared according to the present invention. It is an object of the present invention to impregnate and fill various types of deposition materials so as to be uniformly deposited in an evaporator by electron beam heating or resistance heating.

The multi-purpose carrier of the vapor deposition material of the present invention is a stainless steel, iron, copper, molybdenum, tungsten, titanium, etc., the outer container of the metal material and the inner filler of carbon fiber felt, carbon fiber, metal felt and stainless steel of the upper , Iron, Copper, Molybdenum, Tungsten, Titanium, Titanium, Titanium, etc. It is assembled or welded into an integral structure composed of a metal mesh and washer to form a very stable structure.

Impregnating and filling deposition materials composed of organic and inorganic compounds as well as organic and inorganic compounds in the form of powders, granular solids and liquids having various viscosities, as well as semi-solid slurries in the multipurpose carrier prepared by the present invention In the vacuum evaporator, various types of coating materials having various functions to be deposited by heating the multipurpose carrier 100 of the present invention by an electron beam heating method or a resistive heating method can be uniformly deposited in an ultra thin film in the vacuum evaporator. It is a technical feature of the present invention.

In recent years, anti-reflection, optical filtering, control of reflectance and absorptivity, using vacuum deposition processes for various optical lenses and filters including eyeglass lenses, portable electronics and display products such as mobile phones, MP3 players, PMPs, notebooks, Various attempts have been made through deposition coloring. The base material to be vacuum-deposited includes oxides such as silicon oxide, titanium oxide and zirconium oxide, fluorides such as magnesium fluoride, chromium, nickel, aluminum, SUS and the like on the surface of substrates made of glass, plastic and metal materials. Attempts have been made to form a thin film deposition layer using inorganic powders such as metals and granular materials to exhibit various properties.

The deposition layer is composed of metals and metal oxides as described above, which is easily corroded or contaminated by the external environment, resulting in side effects of film deposition. In order to protect this, an organic material is coated to attempt to form a hydrophobic or water repellent film. Among the methods designed for depositing these organic materials, a carrier that can be used in vacuum by impregnating organic deposition materials is used. The carriers used up to now are used by high-temperature heat treatment of a porous ceramic (20-2003-0015078) or Alternatively, high-temperature heat treatment of metal powder and metal felt has been used (10-2003-0058223).

Such deposition is performed by a vacuum deposition method, that is, a deposition method using an electron beam and a resistance heating method that is a thermal method. In general, the deposition method using an electron beam is advantageous in terms of process convenience and automation, but resistance heating method is mainly performed due to the characteristics of the organic deposition material used in vacuum deposition and a carrier that can impregnate it.

However, the porous ceramic carrier has some chemical stability, but in order to impregnate the organic deposition material, pores must be present in the carrier, so the density must be controlled and structural aspects should be considered so as not to leak when the liquid organic deposition material is impregnated. do.

Porous ceramic carriers tend to be damaged by external shock due to the characteristics of ceramics, so that the density is improved when high temperature heat treatment is performed to prevent them, but it is difficult to secure a space that can be impregnated, that is, porosity.

In addition, when a low heat treatment is performed to secure the porosity, the hardness of the ceramic carrier is not easily broken, and thus, there is a disadvantage that dust may be generated in the process, transport, and storage.

These dusts of porous ceramic carriers are thin films deposited by incorporating and depositing these dusts into the thin film deposition material of the substrate when using a high power to heat the ceramics when the electron gun heating method, which is one of vacuum deposition methods, is used. The problem may be that the characteristics of the product do not function properly.

In the case of metal powder and metal felt, as in the case of porous ceramic support, heat treatment at high temperature is required to form a porosity, and thus, manufacturing time and manufacturing cost are high, and are affected by molding pressure and firing temperature. It is difficult to uniformly impart porosity to the entire carrier, which acts as a cause of lowering the efficiency of the organic deposition material.

In the case of porous ceramics, metal powders and metal felts, if the organic organic deposition material is excessively impregnated, the solidification may be exposed to the outside of the carrier, and oxidation reaction with the outside air may occur. Decomposition of the material may occur and this problem may cause high quality thin film to fail to form.

Such porous ceramics, metal powders and metal felt sintered bodies should be used boats made of tungsten, tantalum and molybdenum that can transfer heat even when using a resistive heating method instead of an electron gun heating method, which is a vacuum deposition method. It has the disadvantage of adding inconvenience and cost.

In addition, these resistive heating methods are difficult to automate in vacuum deposition and must only be performed by manual work processes. When such a resistive heating method is used, it is difficult to obtain a homogeneous thin film as compared with the electron gun heating method.

The porous ceramic carrier, the metal powder, and the metal felt carrier sintered as described above can be impregnated only when the organic vapor deposition material is in a liquid state, and since the size of the pores cannot be controlled widely, vacuum deposition is carried out even if a particulate solid organic vapor deposition material is present. It is not possible to use it as a carrier in the present invention, and furthermore, it is not applicable to a solid organic deposition material.

The multipurpose carrier prepared by the present invention is to provide a vacuum deposition carrier which can provide convenience and a wide range of applications while solving the problems of the porous ceramic carrier, the metal powder, and the metal felt carrier which are conventionally used. .

That is, since it is composed of a single body with a top and bottom finish, no dust is generated, and can be applied to a resistive heating method as well as to an electron beam heating method, and to powders, granular solids, and various viscosities in the multipurpose carrier produced by the present invention. The multi-purpose carrier of the present invention by electron beam heating or resistance heating in a vacuum deposition machine by impregnating and filling a deposition material composed of an organic and inorganic compound as well as an organic-inorganic complex compound having a form of a semi-solid slurry or the like. It is a technical feature of the present invention to make it possible to deposit various types of coating materials having various functions to be deposited by heating 100 in a thin film uniformly in a vacuum evaporator.

One preferred embodiment of the carrier for vacuum deposition according to the present invention for achieving the above object is to provide stability during the vacuum deposition work process, storage, transport, stainless steel, iron, copper, without problems in heat transfer, The upper part is covered with a metal washer made of stainless steel, iron, copper, molybdenum, tungsten, or titanium in a cylindrical or square outer metal container made of molybdenum, tungsten, or titanium, and wound by an annular rim. It is characterized in that the welded form.

The multipurpose vacuum deposition carrier of the present invention preferentially utilizes a deposition material composed of organic and inorganic compounds as well as organic and inorganic compounds having a solid, semi-solid, liquid, as well as semi-solid slurry in the form of powder, granules, and the like. It is possible to eliminate the loss of the deposition material that can occur in the impregnation and filling process, it is possible to maximize the vacuum deposition efficiency of the deposition material having a variety of functions and forms.

In addition, it can be applied irrespective of the electron beam heating method and the resistance heating method, which are vacuum deposition methods, and by using a metal material on the outside, it is very stable and reusable in the process, storage and transport.

Furthermore, the multi-purpose vacuum deposition carrier of the present invention can be used not only by impregnating liquid organic and organic-inorganic composite deposition materials, but also by mixing and filling solid and semi-solid organic, inorganic and organic-inorganic composite deposition materials with filler. There are advantages to it.

Hereinafter, the multipurpose carrier of the present invention will be described.

The basic configuration of the present invention, as shown in Figure 1, the outer container 10 is made of stainless steel, iron, copper, molybdenum, tungsten, titanium and the like, the thickness of 0.10mm ~ 0.50mm, diameter Φ5mm ~ Φ60mm It is.

More suitably, a thickness of 0.15mm to 0.35mm and a diameter of Φ10mm to Φ25mm are appropriate. If the thickness is too thin, the material is easily deformed, and if the thickness is too thick, subsequent processing such as assembly and welding is difficult.

The height is 4mm ~ 12mm, more suitably 6mm ~ 8mm.

The outer container protects the fillers inside and impregnates and fills deposition materials composed of organic and inorganic compounds as well as organic and inorganic compounds in the form of powders, granular solids and liquids having various viscosities, as well as semi-solid slurries. It is possible to completely prevent the loss of deposition materials that can occur and the external stainless steel material can play a role in the rapid transfer of heat transfer in any deposition method, such as electron beam heating or resistance heating.

The material of the outer can is not limited to stainless steel, and includes a metal material capable of smoothly transferring heat according to the characteristics of the material to be coated such as iron, copper, molybdenum, tungsten, and titanium.

The internal filler 20, which is one of important parts of the present invention, uses carbon fiber felt, carbon fiber, carbon powder or metal felt and metal powder such as iron, copper, stainless steel, etc. to suit the characteristics of the coating material.

Most suitably, it is most effective to use stable carbon fiber and carbon fiber felt which is stable to the external environment and excellent in heat transfer efficiency.

The size of the carbon fiber can be used by the carbon fiber of various diameters alone to control the size and the porosity of the diameter, it may be controlled by using two or more kinds.

Suitably, the diameter is preferably 20 µm to 500 µm, and more specifically, 100 µm to 300 µm is most effective.

In general, the size and porosity of the pore can be controlled by using the diameter and content of the carbon fiber, and more specific pore size and porosity can be obtained by inserting the carbon fiber into the metal container 10 and then using a stainless steel mesh and a washer. After raising, the upper edge of the metal container 10 is wound in an annular shape to lower the height of the can to adjust the density of the carbon fiber as a filler, thereby controlling the size and porosity of the pore secondarily, thereby making it possible to obtain a solid, granular solid and various viscosities. It can be appropriately adjusted according to the content and density of the deposition material composed of organic and inorganic, as well as organic-inorganic complex compound having the form of a semi-solid slurry or the like liquid phase having.

In addition, the carbon fiber has excellent heat transfer efficiency, so it can transfer the heat transferred during resistive heating or electron beam heating to the deposition material very efficiently when the organic deposition material is deposited, thereby inducing rapid vaporization of the deposition material and maximizing the efficiency of thin film deposition. It has advantages.

The carbon fiber has a further advantage that the carrier of the present invention can be reused after a high temperature heat treatment, unlike the metal material, which can be stored for a long time without changing the external environment.

The upper portion is composed of a metal mesh 40 and a metal washer 50, such as stainless steel, iron, copper, molybdenum, tungsten and titanium.

The metal mesh 40 serves to prevent the particulate carbon fiber used as the filler from falling out of the can.

For more specific protection, by inserting the fine carbon fiber into the can and covering the thin carbon fiber felt 30 thereon, it is possible to ensure the dispersion of the carbon fiber that can occur when the fine carbon fiber is out of the can or vacuum deposition. You can stop it.

The metal washer 50 serves to finally control the size and porosity of the pores using carbon fibers by applying a constant pressure to the entire filler when the upper portion of the can is wound.

In addition, it plays a role of stably protecting the carbon fiber, carbon fiber felt and protective mesh as a whole, and at the same time serves to prevent the emission of heat transferred by electron beam or resistance heating. In addition, the most important role is a key element that forms a circular hole in the center of the metal washer and serves as an outlet for the vaporized organic vapor deposition material to move to the substrate to be deposited by the heat transferred during vacuum deposition.

The size of the passage should be properly adjusted according to the size and height of the vacuum deposition and the size of the stainless steel outer metal container, but 3mm ~ 20mm is appropriate, more specifically 5mm ~ 8mm is appropriate.

The passage size of the washer plays a very important role because the angle at which the vaporized organic material is dispersed while moving in a vacuum is determined, and the loss of the organic deposition material can be minimized.

The following describes the manufacturing process of the multipurpose vacuum deposition carrier of the present invention.

Example 1

Charge the carbon fiber powder 20 and the carbon fiber felt 30 in the metal container 10 described above, cover with a metal mesh 40 and a metal washer 50, assemble and round weld to impregnate 60 mg of the liquid fluorine compound. The vacuum evaporation material impregnated with the evaporation material was prepared.

Example 2

The vacuum deposition material prepared in Example 1 was loaded into the electron beam port of the vacuum evaporator, and the glass was pre-loaded at an electron beam current of 20 mA by setting the diameter size of the electron beam to Φ 30 at a vacuum degree of 5 x 10 ^-5 torr. , PC, PET was coated on the plate.

Example 3

The vacuum vapor deposition material prepared in Example 1 was loaded into the molybdenum heating element boat of the vacuum vapor deposition machine and coated on the glass, PMMA, PC, and PET sheet previously loaded at a current of ⁵⁰ mA at a vacuum degree of 5 × 10 ^-5 torr. It was.

1 is an overall structural diagram of a carrier of the present invention

<Description of the symbols for the main parts of the drawings>

10: metal outer metal container

20: carbon fiber (felt) filler

30: carbon felt

40: protective metal mesh

50: metal washer

Claims (7)

It is possible to provide stability during work process, storage, and transfer, and the upper part is made of stainless steel, cylindrical or rectangular outer metal container made of metal material of stainless steel, iron, copper, molybdenum, tungsten, and titanium which have no problem in heat transfer. A vacuum evaporation carrier comprising a metal washer made of a metal material of iron, copper, molybdenum, tungsten, and titanium, which is wound around an annular edge and pressed or welded. The method of claim 1, The vacuum evaporation carrier which can control the density of the inner filling material by adjusting the height of the outer can because the upper part of the outer can is wound around the annular rim. The method of claim 1, A vacuum evaporation carrier made of fillers such as carbon fiber, carbon fiber felt, carbon powder, metal powder, and metal felt that can control the pore size and porosity so as to easily impregnate the liquid vapor deposition material. The method of claim 3, wherein A vacuum deposition carrier comprising a mesh made of metal such as stainless steel, iron, copper, molybdenum, tungsten, and titanium, which can act as a protective material to prevent the material used as a filler from escaping to the outside. A vacuum deposition carrier comprising a washer made of a metal material such as stainless steel, iron, copper, molybdenum, tungsten, and titanium with a circular hole to protect the filler and the mesh and to allow the organic vapor deposition material to come out. In addition to impregnating liquid organic, inorganic, or organic-inorganic compound deposition materials, solid organic, inorganic, or organic-inorganic compound deposition materials in the form of powders and granules can be mixed with carbon fibers, carbon powders, and metal powders. Designed vacuum deposition carrier. The method of claim 6, A vacuum deposition carrier designed to be used in combination with carbon fibers, carbon powders, metal powders, and the like, in which sol and gel highly viscous deposition materials of organic, inorganic and organic-inorganic complex compounds are mixed.

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