CN210657114U - Screen cloth device and point source crucible of point source crucible - Google Patents
Screen cloth device and point source crucible of point source crucible Download PDFInfo
- Publication number
- CN210657114U CN210657114U CN201921526708.5U CN201921526708U CN210657114U CN 210657114 U CN210657114 U CN 210657114U CN 201921526708 U CN201921526708 U CN 201921526708U CN 210657114 U CN210657114 U CN 210657114U
- Authority
- CN
- China
- Prior art keywords
- screen
- point source
- cover
- source crucible
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a screen device of a point source crucible and the point source crucible, which comprises an elastic clamp, a screen body and a screen cover body; the elastic hoop supports the screen body, and the screen cover body is arranged on the upper part of the screen body and is in locking connection with the screen body; the screen cloth cover is characterized in that a first screen mesh layer communicated with the upper end and the lower end of the screen cloth body is arranged in the screen cloth body, a second screen mesh layer communicated with the upper end and the lower end of the screen cloth cover is arranged in the screen cloth cover, and a material filling cavity is formed between the first screen mesh layer and the second screen mesh layer. The utility model discloses make the screen cloth device of point source crucible have the commonality, can adapt to the point source crucible of different internal diameter size and avoid extravagant, can prevent simultaneously that the SiC granule from splashing.
Description
Technical Field
The utility model relates to a OLED processing equipment technical field especially relates to a screen cloth device and point source crucible of point source crucible.
Background
The fabrication process of small molecule Organic Light Emitting Diode (OLED) is well-established, but the organic light emitting material is easily damaged by oxygen and water vapor, so a vacuum system is used in the film forming process. Vacuum deposition methods are classified into resistance heating deposition methods, electron beam deposition methods, and the like. Since the energy of the electron beam is too high, the organic material itself is decomposed, and therefore, in the case of the OLED device, the evaporation of the organic material layer is mostly performed by resistance heating evaporation. The common resistance heating evaporation method is that a crucible containing organic matters is placed in a vacuum evaporation machine, resistance wires inside the crucible are electrified and heated to evaporate or gasify the organic materials, and then the organic materials are attached to a fixed substrate to finally form a film layer.
In the manufacturing process of the OLED, organic film layers related to vacuum evaporation include functional layers such as HIL, HTL, EML (R/G/B color resistance), ETL, EIL, Cathode, and Charge generation layer, and are respectively deposited on the surface of the TFT substrate in the form of a thin film. Due to different process parameters, different functional layers need to be carried out in different evaporation machine cavities, and simultaneously, the substrate is transferred among different cavities through a mechanical arm after evaporation is finished.
The evaporation source in the evaporation process is divided into a line source crucible and a point source crucible. The screen cloth device has been placed in the time source crucible when the point source crucible is as the evaporation source, organic material is placed to screen cloth device's below, screen cloth device is provided with double-deck screen cloth, it has the SiC material layer to place to fill in it, make the organic material sublimation back in the point source crucible after the resistance wire heating, gasified organic molecule escapes to the SiC layer through screen cloth device's bottom screen cloth, then through the orderly glass substrate diffusion to through upper screen cloth, and in the substrate range of single point source crucible charge evaporation coating, form thin thick and density homogeneous, the rete of surfacing.
Because different organic film functional layers such as HIL, HTL, EML, ETL, EIL and the like have different process conditions, and the replacement of materials and the like need to be carried out in point source crucibles with different cavity sizes, in the prior art, a screen device is generally fixed in size and cannot be adjusted, after the size of a point source crucible is changed, a screen device with a corresponding size needs to be configured, the previous screen device can be scrapped to cause cost waste, meanwhile, the existing screen device does not fasten a double-layer screen, and granular SiC can splash due to overlarge pressure of gas-phase substances in the evaporation process.
Therefore, the prior art has yet to be developed.
SUMMERY OF THE UTILITY MODEL
In view of the weak point of above-mentioned prior art, the utility model aims at providing a screen cloth device and point source crucible of point source crucible aims at making the screen cloth device of point source crucible have the commonality, can adapt to the point source crucible of different internal diameter size, can prevent that the SiC granule from splashing simultaneously.
In order to achieve the purpose, the utility model adopts the following technical proposal:
a screen device of a point source crucible comprises an elastic hoop, a screen body and a screen cover body;
the elastic hoop supports the screen body, and the screen cover body is arranged on the upper part of the screen body and is in locking connection with the screen body;
the screen cloth cover is characterized in that a first screen mesh layer communicated with the upper end and the lower end of the screen cloth body is arranged in the screen cloth body, a second screen mesh layer communicated with the upper end and the lower end of the screen cloth cover is arranged in the screen cloth cover, and a material filling cavity is formed between the first screen mesh layer and the second screen mesh layer.
The elastic clamp, the screen body and the screen cover body are made of stainless steel or titanium materials.
Wherein the elastic hoop comprises an annular hoop body which is not closed end to end, and adjusting contacts which are arranged at the two ends of the hoop body and are bent inwards,
the hoop body is provided with a plurality of inward-protruding supporting parts at intervals in the circumferential direction, and the supporting parts and the adjusting contacts are in contact with the bottom end of the screen body and used for supporting the screen body.
The screen body and the screen cover body are both in a cylindrical shape, the first screen layer is arranged at the bottom end of the screen body, the second screen layer is arranged at the bottom end of the screen cover body, and the screen cover body is sleeved in the screen body on the upper portion of the screen body.
The inner wall of the screen body is provided with a bearing platform above the first screen layer, and the screen body is provided with a plurality of clamping blocks protruding inwards at intervals in the circumferential direction above the bearing platform;
the screen cover body is sleeved in the screen body and can rotate, the bottom wall of the screen cover body is abutted against the bearing platform, and the top wall of the screen cover body is abutted against the clamping block;
the outer wall of the screen cover body is vertically provided with a plurality of mounting grooves corresponding to the clamping blocks of the screen body, and the mounting grooves are used for the screen cover body to be mounted in or taken out of the clamping blocks of the screen body.
And a rotating handle is arranged on the inner wall of the screen cover body above the second screen layer.
The utility model also provides a point source crucible, wherein, including foretell screening device, still include hollow crucible body, screening device locates the inner wall of crucible body through the elasticity clamp card.
The utility model discloses a screen cloth device of point source crucible, support the screen cloth body through setting up the elasticity clamp, the screen cloth lid sets up on the screen cloth body and with screen cloth body locking connection, thus, when the internal diameter size of point source crucible changes in certain extent, the size of adduction or outer expansion elasticity clamp and the inner wall of point source crucible laminate the chucking can, a whole set of screen cloth device need not be changed, the commonality of screen cloth device has been improved and the waste of material has been avoided, the cost is saved, screen cloth lid and screen cloth body locking connection simultaneously, can prevent effectively that evaporation coating by vaporization in-process SiC granule from splashing.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a first embodiment of a screen device for a point source crucible according to the present invention;
FIG. 2 is an exploded view of FIG. 1;
FIG. 3 is a schematic cross-sectional view of the screen body and screen cover of FIG. 1 in an unlocked state;
FIG. 4 is a schematic cross-sectional view of the screen body and screen cover of FIG. 1 in a locked position;
FIG. 5 is a schematic structural view of a first embodiment of the point source crucible of the present invention;
fig. 6 is a cross-sectional schematic view of the structure of fig. 5.
Description of reference numerals:
100-screen device, 1-elastic clamp, 11-clamp body, 111-support part, 12-adjusting contact, 2-screen body, 21-first screen layer, 22-bearing platform, 23-clamping block, 3-screen cover body, 31-second screen layer, 32-mounting groove, 33-rotating handle, 4-filling cavity, 200-point source crucible, 201-crucible body and 202-organic material.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
In the present application, unless expressly stated or limited otherwise, the terms "connected" and "fixed" are to be construed broadly, e.g., "connected" may be a fixed connection or a removable connection, or may be integral therewith; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In addition, descriptions in the present application as to "first", "second", and the like are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit to the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature.
In a first embodiment, please refer to fig. 1 to 4, the present invention provides a screen device 100 for a point source crucible, which includes an elastic clamp 1, a screen body 2 and a screen cover 3.
The elastic clamp 1 supports the screen body 2, and the screen cover body 3 is arranged on the upper part of the screen body 2 and is in locking connection with the screen body 2. The elastic clamp 1 can be contracted or expanded to enable the outer diameter of the elastic clamp to be adjusted to be smaller or larger, and the outer diameters of the screen body 2 and the screen cover body 3 are generally smaller than the minimum outer diameter size of the elastic clamp 1. Thus, under the condition that the sizes of the screen body 2 and the screen cover body 3 are not changed, the elastic hoop 1 is changed within a certain range, so that the whole set of screen device 100 can adapt to the change of the inner diameter size of the point source crucible within a certain range. The universality of the screen device 100 is improved, the material waste caused by frequent replacement of the screen device 100 due to the change of the inner diameter size of the point source crucible is avoided, and the processing and production cost is saved.
The utility model discloses a be provided with the first screen cloth layer 21 at both ends about the intercommunication screen cloth body 2 in the screen cloth body 2, be provided with the second screen cloth layer 31 at both ends about the intercommunication screen cloth cover 3 in the screen cloth cover 3, and form a material between first screen cloth layer 21 and the second screen cloth layer 31 and fill lacuna 4. The first screen layer 21 and the second screen layer 31 both include a plurality of meshes arranged in an array. The material filling cavity 4 is used for filling SiC particles, the arrangement of the two screen layers is used for controlling the ideal thickness of the filling material in the material filling cavity 4, and the distance between the first screen layer 21 and the second screen layer 31 is designed adaptively according to actual needs. After the resistance wire is heated, the organic material in the point source crucible is sublimated, gasified organic molecules escape from the SiC layer in the material filling cavity 4 through the first sieve mesh layer 21 of the sieve device 100, and then are orderly diffused to the glass substrate through the second sieve mesh layer 31 to form a film layer with uniform thickness and density and smooth surface. Meanwhile, the screen cover body 3 is connected with the screen body 2 in a locking manner, so that the splashing of granular SiC caused by overlarge pressure of gas-phase substances can be effectively prevented.
Preferably, the utility model discloses an elasticity clamp 1, screen cloth body 2 and screen cloth lid 3 adopt stainless steel or titanium material preparation. For example, SUS316L is used for stainless steel, and TA1 is used for titanium material, so that the physical and chemical properties of the material are relatively stable in vacuum and high-heat environment, and deformation, elastic potential reduction, metallographic structure change and the like are avoided, thereby ensuring high purity and no pollution of evaporation space and evaporation material.
Specifically, as shown in fig. 2, the elastic clamp 1 includes an annular clamp body 11 that is not closed end to end, and adjusting contacts 12 that are provided at both ends of the clamp body 11 and are bent inward.
When the screen device 100 is installed corresponding to point source crucibles with different sizes and specifications, as long as external force is slightly applied, the position of the adjusting contact 12 is extruded towards the center of the annular hoop body 11 and is released after being placed into the inner wall of the crucible, and the stress of the material of the elastic hoop 1 can enable the inner wall of the elastic hoop 1 to be in good contact with the inner wall of the crucible, so that bearing strength is ensured. The installation height of the elastic clamp 1 in the crucible can be properly adjusted according to the requirement, but the installation height only meets the capacity height of the crucible.
The hoop body 11 is provided with a plurality of inward protruding supporting parts 111 at intervals in the circumferential direction, and the supporting parts 111 and the adjusting contacts 12 contact the bottom end of the screen body 2 to support the screen body 2. Thus, the bottom end of the screen body is in point contact with the elastic clamp 1 through the supporting part 111 and the adjusting contact 12, the contact area is reduced to control the attachment surface of the gas-phase organic matter, and the loss of the organic matter is reduced.
Specifically, referring to fig. 2, fig. 3 and fig. 4, the screen body 2 and the screen cover 3 of the present invention are both in a cylindrical shape, the bottom end of the screen body 2 is provided with the first screen layer 21, the bottom end of the screen cover 3 is provided with the second screen layer 31, and the screen cover 3 is sleeved on the upper portion of the screen body 2 and is disposed in the screen body 2. Namely, the outer diameter of the middle screen cover body 3 is smaller than the inner diameter of the screen body 2 and is nested in the screen body 2.
The utility model discloses an inner wall of screen cloth body 2 is provided with cushion cap 22 above first screen cloth layer 21, screen cloth body 2 is provided with a plurality of inside convex fixture blocks 23 in cushion cap 22 top hoop interval. The screen cover 3 is rotatably sleeved in the screen body 2, the bottom wall of the screen cover abuts against the bearing platform 22, and the top wall of the screen cover abuts against the fixture block 23. The outer wall of the screen cover body 3 is vertically provided with a plurality of mounting grooves 32 corresponding to the clamping blocks 23 of the screen body 2, and the mounting grooves 32 are used for the screen cover body 3 to be mounted in or taken out from the clamping blocks 23 of the screen body 2.
That is, the utility model discloses the locking connection of screen cloth body 2 and screen cloth cover body 3 is realized between the cushion cap 22 and the briquetting 23 of screen cloth body 2 through the diapire and the roof crimping of screen cloth cover body 3. Meanwhile, the outer wall of the screen cover body 3 is provided with the mounting groove 32, when the screen cover body 3 is installed into the screen body 2, the mounting groove 32 of the screen cover body 3 is aligned with the fixture block 23 of the screen cover body 3 above the screen body 2, the screen cover body 3 is inserted downwards after the mounting groove is formed, until the bottom wall of the screen cover body 3 is in contact with the bearing platform 22 of the screen body 2, at the moment, the top wall of the screen cover body 3 is located below the plane of the fixture block 23 of the screen body 2, the top wall of the screen cover body 3 is not abutted to the fixture block 23, and the screen cover body 3 and the screen body 2 are in an unlocking. Then, the screen cover 3 is rotated, so that the mounting groove 32 of the screen cover 3 is staggered with the fixture block 23 of the screen body 2, the top wall of the screen cover 3 is abutted to the fixture block 23, and the screen cover 3 and the screen body 2 at this time are in a locked state, as shown in fig. 4.
Preferably, a rotating handle 33 is provided on the inner wall of the screen cover 3 above the second screen layer 31. The rotation handle 33 is provided to facilitate the rotation operation of the screen cover 3.
As shown in fig. 5 and fig. 6, the utility model also provides a point source crucible 200, including the above-mentioned screen device 100, still include hollow crucible body 201, screen device 100 locates the inner wall of crucible body 201 through elasticity clamp 1 card. The organic material 202 to be evaporated is provided in the lower part of the crucible main body 201.
The embodiment of the utility model provides a screen cloth device 100 and point source crucible 200 of point source crucible, support screen cloth body 2 through setting up elasticity clamp 1, screen cloth lid 3 sets up on screen cloth body 1 and with screen cloth body 2 locking connection, thus, when point source crucible 200's internal diameter size changes in the certain limit, adduction or expand elasticity clamp 1's size and point source crucible's inner wall carry out laminating chucking can, a whole set of screen cloth device 100 need not be changed, the commonality that has improved screen cloth device 100 and avoided the waste of material, the manufacturing cost of OLED has been saved. Meanwhile, the screen cover body 3 is connected with the screen body 2 in a locking mode, so that SiC particles can be effectively prevented from splashing in the evaporation process.
The above only be the preferred embodiment of the utility model discloses a not consequently restriction the utility model discloses a patent range, all are in the utility model discloses a conceive, utilize the equivalent structure transform of what the content was done in the description and the attached drawing, or direct/indirect application all is included in other relevant technical field the utility model discloses a patent protection within range.
Claims (7)
1. A screen device of a point source crucible is characterized by comprising an elastic hoop, a screen body and a screen cover body;
the elastic hoop supports the screen body, and the screen cover body is arranged on the upper part of the screen body and is in locking connection with the screen body;
the screen cloth cover is characterized in that a first screen mesh layer communicated with the upper end and the lower end of the screen cloth body is arranged in the screen cloth body, a second screen mesh layer communicated with the upper end and the lower end of the screen cloth cover is arranged in the screen cloth cover, and a material filling cavity is formed between the first screen mesh layer and the second screen mesh layer.
2. The screen apparatus of the point source crucible as claimed in claim 1, wherein the elastic clamp, the screen body and the screen cover body are made of stainless steel or titanium material.
3. The screen device for the point source crucible as claimed in claim 1, wherein the elastic hoop comprises an annular hoop body which is not closed end to end, adjusting contacts which are arranged at two ends of the hoop body and are bent inwards,
the hoop body is provided with a plurality of inward-protruding supporting parts at intervals in the circumferential direction, and the supporting parts and the adjusting contacts are in contact with the bottom end of the screen body and used for supporting the screen body.
4. The screen device for the point source crucible as claimed in claim 1, wherein the screen body and the screen cover are both cylindrical, the first screen layer is disposed at the bottom end of the screen body, the second screen layer is disposed at the bottom end of the screen cover, and the screen cover is sleeved in the screen body at the upper part of the screen body.
5. The screen device for the point source crucible as claimed in claim 4, wherein a bearing platform is arranged on the inner wall of the screen body above the first screen layer, and a plurality of inward-protruding clamping blocks are arranged on the screen body above the bearing platform at intervals in the circumferential direction;
the screen cover body is sleeved in the screen body and can rotate, the bottom wall of the screen cover body is abutted against the bearing platform, and the top wall of the screen cover body is abutted against the clamping block;
the outer wall of the screen cover body is vertically provided with a plurality of mounting grooves corresponding to the clamping blocks of the screen body, and the mounting grooves are used for the screen cover body to be mounted in or taken out of the clamping blocks of the screen body.
6. The screen device for the point source crucible as claimed in claim 5, wherein the inner wall of the screen cover body is provided with a rotating handle above the second screen layer.
7. A point source crucible, comprising the screen device as claimed in any one of claims 1 to 6, and further comprising a hollow crucible body, wherein the screen device is clamped to the inner wall of the crucible body by an elastic clamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921526708.5U CN210657114U (en) | 2019-09-12 | 2019-09-12 | Screen cloth device and point source crucible of point source crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921526708.5U CN210657114U (en) | 2019-09-12 | 2019-09-12 | Screen cloth device and point source crucible of point source crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210657114U true CN210657114U (en) | 2020-06-02 |
Family
ID=70818061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921526708.5U Active CN210657114U (en) | 2019-09-12 | 2019-09-12 | Screen cloth device and point source crucible of point source crucible |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210657114U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116121711A (en) * | 2023-03-30 | 2023-05-16 | 京东方科技集团股份有限公司 | Auxiliary evaporation device and evaporation crucible |
-
2019
- 2019-09-12 CN CN201921526708.5U patent/CN210657114U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116121711A (en) * | 2023-03-30 | 2023-05-16 | 京东方科技集团股份有限公司 | Auxiliary evaporation device and evaporation crucible |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7473411B2 (en) | Carbon nanotube foam and method of making and using thereof | |
| JP7060437B2 (en) | Carbon agglomeration assembly and its uses | |
| CN210657114U (en) | Screen cloth device and point source crucible of point source crucible | |
| Marichy et al. | Carbon-nanostructures coated/decorated by atomic layer deposition: Growth and applications | |
| US9906170B2 (en) | Triboelectric energy harvester including coating electrification layer and manufacturing method thereof | |
| TWI409350B (en) | A deposition source, an apparatus for producing organic el element | |
| Shah et al. | Electrochemical double layer capacitor electrodes using aligned carbon nanotubes grown directly on metals | |
| US6290880B1 (en) | Electrically conducting ruthenium dioxide-aerogel composite | |
| US7807131B2 (en) | Hydrogen producing fuel for power generator | |
| US10040687B2 (en) | Carbon nanotube sponge and method for making the same | |
| US20080118426A1 (en) | Varied morphology carbon nanotubes | |
| JP5188575B2 (en) | Multipurpose container for vacuum deposition material and method for manufacturing the same | |
| US20100097742A1 (en) | Electrodes Synthesized from Carbon Nanostructures Coated with a Smooth and Conformal Metal Adlayer | |
| Lin et al. | Supercapacitors based on pillared graphene nanostructures | |
| CN1590581A (en) | Evaporation source for evaporating an organic electroluminescent layer | |
| KR20010031027A (en) | Process of forming a membrane electrode | |
| JP2007533165A5 (en) | ||
| JPH11116399A (en) | Coating of tantalum carbide and single crystal production apparatus produced by the coating | |
| JP2010105909A (en) | High-density carbon nanotube assembly and method for producing the same | |
| US20090117423A1 (en) | Fuel cell stack for hydrogen fuel power generator | |
| JP2006131995A (en) | Heating vessel and vapor deposition apparatus provided with the same | |
| US9029038B2 (en) | Method of forming a fuel cell stack | |
| JP2019528372A (en) | Vapor phase coating with polymers of boron nitride nanotubes | |
| CN102126703A (en) | Two-dimensional multi-shell hollow sphere ordered structure array and preparation method thereof | |
| Li et al. | A Pore‐Forming Strategy Toward Porous Carbon‐Based Substrates for High Performance Flexible Lithium Metal Full Batteries |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |