JP5188575B2 - Multipurpose container for vacuum deposition material and method for manufacturing the same - Google Patents

Description

  An object of the present invention is to uniformly deposit various deposition materials impregnated or filled into a multipurpose container by an electron beam heating method or a resistance heating method in a vacuum deposition apparatus. Here, the vapor deposition material is an organic and / or inorganic compound having a solid state such as powder and particles, a liquid state having various viscosities, and a semi-solid state such as slurry. Consists of.

  The multipurpose container of the vacuum deposition material of the present invention includes an outer container, an inner filler, a mesh, and a washer. The outer container is made of a metal material such as stainless steel, iron, copper, molybdenum, tungsten, or titanium. The internal filler is made of carbon fiber felt, carbon fiber, metal felt or the like. The mesh and washer are made of a metal material such as stainless steel, iron, copper, molybdenum, tungsten, or titanium, and are disposed on the internal filler. These components are assembled or welded as a stable monolithic structure.

  The technical feature of the present invention is that various vapor deposition materials having various functions impregnated or filled in a multipurpose container are uniformly deposited as an ultrathin film by an electron beam heating method or a resistance heating method in a vacuum vapor deposition apparatus. It is in. Here, the deposition material may be an organic and / or inorganic compound having a solid state such as powder and particles, a liquid state having various viscosities, and a semi-solid state such as slurry. Become.

  Recently, not only optical lenses / filters such as eyeglass lenses, but also portable electronic products and display products such as mobile phones, MP3 players, PMPs, notebook computers, antireflection, optical filtering, absorptance and reflectance. Various attempts using a vacuum deposition process have been made for adjusting the color and coloring process. In the vacuum deposition process, the thin film deposition layer is made of an oxide such as silicon oxide, titanium oxide or zirconium oxide, a fluoride such as magnesium fluoride, or a metal inorganic powder such as chromium, nickel, aluminum or SUS / It is made of a particulate material and formed on a substrate made of glass, plastic or metal.

  However, vacuum deposited layers made of metals and metal oxides are easily corroded or contaminated in the external environment. As a result, peeling of the deposited layer occurs. In order to prevent the vapor deposition layer from peeling off, attempts have been made to form a hydrophobic film or a water repellent film by coating the vapor deposition layer with an organic material.

  In order to vacuum deposit organic materials, a container impregnated with an organic deposition material is used in a vacuum apparatus. Patent Document 1 discloses a container made of a porous ceramic material heat-treated at high temperature. Moreover, patent document 2 is disclosing the metal powder and metal felt which were heat-processed at high temperature.

  In general, in the vapor deposition step, a method using heat such as a vacuum vapor deposition method using an electron beam and a resistance heating method is used. The vapor deposition method using an electron beam is advantageous in terms of convenience and automation of the vapor deposition process, but at present, the resistance heating method is more widely used. The resistance heating method uses a container impregnated with an organic vapor deposition material in consideration of the characteristics of the organic vapor deposition material used in the vacuum vapor deposition process.

  Even if the porous ceramic container has a certain degree of chemical stability, it is necessary to adjust the density of the micropores because the micropores exist inside the container impregnated with the organic vacuum deposition material. . It is also necessary to consider a structure for preventing leakage while the container is impregnated with a liquid organic vapor deposition material.

  Since the porous ceramic container is formed of a ceramic material, it is easily damaged by an external impact. Therefore, high-temperature heat treatment is necessary to prevent damage to the container due to such breakage. However, the heat treatment can improve the density, but it is difficult to secure a desired porosity (that is, a void impregnated with the vapor deposition material).

  Furthermore, low temperature heat treatment to ensure the desired porosity reduces the hardness of the ceramic container. As a result, the ceramic container is easily damaged and generates dust during processing, transfer and storage.

  When the electron beam heating method, which is one of the vacuum deposition methods, is used in a high power state capable of heating the ceramic, the dust in the porous ceramic container is mixed with the deposition material and deposited on the substrate. This prevents the desired functional properties of the deposited thin film from being fully exhibited.

  Like porous ceramic containers, metal powder and metal felt also require high-temperature heat treatment to make them porous. For this reason, considerable time and manufacturing cost are required in the manufacturing process. And since the pressure and temperature for shape | molding a container are needed, the porosity for making a container impregnate a vapor deposition substance is not constant in the whole container, and, thereby, the effectiveness of an organic type vapor deposition substance falls.

  Also, if a porous ceramic material, metal powder and metal felt are used, and the liquid organic vapor deposition material is excessively impregnated in the container, the vapor deposition material solidifies in a state exposed to the outside of the container, It undergoes an oxidation reaction with the air outside the container and is decomposed by the electron beam. Therefore, such problems prevent the formation of a good quality thin film.

  When porous ceramic, metal powder or metal felt is heated by resistance heating instead of vacuum deposition (ie, electron beam heating), a boat made of tungsten, tantalum, or molybdenum and having thermal conductivity is used. However, there is a disadvantage that these boats must be changed after several uses. As a result, extra costs and inconveniences resulting from boat replacement occur.

  Furthermore, since the resistance heating method is difficult to automate at the time of vacuum deposition, the deposition process is a manual operation. Compared to the electron beam heating method, it is difficult to obtain a homogeneous thin film in the resistance heating method.

  In the case of sintered porous ceramic containers, metal powder containers, and metal felt containers, only liquid organic vapor deposition materials are impregnated in the container. Since the size of the void cannot be easily adjusted, it cannot be used when vacuum-depositing a fine solid organic vapor deposition material. Furthermore, the container cannot be used for solid organic vapor deposition materials. Therefore, the range of use of these containers is very limited.

Korean Utility Model Registration Application No. 20-2003-0015078 Korean Patent Application No. 10-2003-0058223

  An object of the present invention is to provide a multi-purpose container for solving problems caused by a porous ceramic container, a metal powder container, and a metal felt container, and providing a vacuum deposition container having great convenience and a wide range of application fields. It is in.

  Another object of the present invention is to provide a multipurpose container that has an integrated structure with the upper and lower parts closed, does not generate dust, and can apply both the electron beam heating method and the resistance heating method. There is.

  Still another object of the present invention is to uniformly deposit various deposition materials having various functions impregnated or filled into a multipurpose container as an ultrathin film by an electron beam heating method or a resistance heating method in a vacuum deposition apparatus. It is in. Here, the deposition material may be an organic and / or inorganic compound having a solid state such as powder and particles, a liquid state having various viscosities, and a semi-solid state such as slurry. Become.

  A preferred embodiment of the vacuum evaporation container according to the present invention includes a cylindrical or square tube-shaped external metal container and a metal washer. The external metal container is made of stainless steel, iron, copper, molybdenum, tungsten, or titanium, and has stability during processing, storage, and transfer, and can transfer heat. The metal washer is made of stainless steel, iron, copper, molybdenum, tungsten, and titanium. The upper edge of the metal container is formed in a ring shape. The metal washer is adapted to press the deposition material downward from the upper edge of the metal container or is welded to the metal container.

The multipurpose container of the present invention has the following effects.
(1) A deposition material formed from an organic and / or inorganic compound having a solid state such as powder and particles, a liquid state having various viscosities, and a semi-solid state such as slurry. In the process of impregnating or filling the container, loss of the vapor deposition material can be prevented, and the vacuum vapor deposition efficiency of various vapor deposition materials having various functions can be maximized.
(2) Both the electron beam heating method and the resistance heating method can be applied to the container of the present invention.
(3) Since the container of the present invention is made of a metal material, it is stable during processing, storage, and transfer, and can be reused.
(4) The multipurpose container of the present invention can be impregnated with a liquid organic / inorganic vapor deposition material. Further, a solid organic / inorganic vapor deposition material and a semi-solid organic / inorganic vapor deposition material can be mixed with a filler and filled into a container for use.

It is a disassembled perspective view of the container of this invention.

  As shown in FIG. 1, the basic configuration of the present invention includes a cylindrical outer container 10. The outer container 10 is made of stainless steel, iron, copper, molybdenum, tungsten, or titanium. The outer container has a thickness of 0.10 mm to 0.50 mm, and the outer container has a diameter of 5 mm to 60 mm.

  Preferably, the outer container has a thickness of 0.15 mm to 0.35 mm, and the outer container has a diameter of 10 mm to 25 mm. If the outer container is too thin, it is likely to be deformed, and if it is too thick, it is difficult to perform post-processing such as assembly and welding.

  The height of the outer container is 4 mm to 12 mm, preferably 6 mm to 8 mm.

  The outer container protects the filler contained therein. Loss of vapor deposition materials composed of organic and / or inorganic compounds having a solid state such as powder and particles, a liquid state having various viscosities, and a semi-solid state such as slurry. Is completely prevented. The outer container is made of stainless steel and can effectively transfer heat regardless of the electron beam heating method or the resistance heating method.

  The material of the outer container is not limited to stainless steel, and may be a metal material that can effectively transfer heat, such as iron, copper, molybdenum, tungsten, or titanium.

  Depending on the properties of the coating material, the inner filler 20 which is one of the key components of the present invention is a carbon fiber felt, carbon fiber, carbon powder, and metal felt / metal such as iron, copper, stainless steel. It is appropriately selected from the group of powders.

  In particular, very light carbon fibers and carbon fiber felts are most effective with high stability to the external environment and high heat transfer efficiency.

  In order to adjust the size and porosity of the void, one type of carbon fiber having various diameters may be used, or at least two types of carbon fibers may be used.

  Preferably the diameter of the voids is 20 μm to 500 μm, most preferably 100 μm to 300 μm.

  In general, the size and porosity of the void are controlled by the diameter and carbon fiber content of the carbon fiber. Specifically, the size and the porosity of the void are determined by inserting carbon fiber into the metal container 10, placing a stainless steel mesh and a washer on the carbon fiber, and pushing down from the ring-shaped upper edge of the metal container 10. Thus, it is controlled by adjusting the density of the filler (ie, carbon fiber). Thus, the size and porosity of the voids can be organic systems having any one of solid states such as powders and particles, liquid states having various viscosities, and semi-solid states such as slurries and / or It is controlled by the density and content of the vapor deposition material made of an inorganic compound.

  Also, since carbon fiber has excellent heat transfer efficiency, the heat generated by the resistance heating method or the electron beam heating method is effectively transferred to the vapor deposition material, which causes the vapor deposition material to be vaporized sharply, thereby reducing the thickness of the thin film. There is an advantage that the efficiency of vapor deposition is maximized.

  Unlike metal materials, carbon fibers do not change with respect to the external environment and can be stored for a long time. Thereby, the container of this invention can be reused even after high temperature heat processing.

  A metal mesh 40 and a metal washer 50 are disposed on the top of the filler. The metal mesh 40 and the metal washer 50 are made of stainless steel, iron, copper, molybdenum, tungsten, or titanium.

  The metal mesh 40 prevents the fine carbon fibers used as the filler from detaching from the container.

  More effectively, in order to prevent the detachment of the filler or to prevent the filler from being dispersed in the vacuum deposition process, the carbon fiber felt 30 is thinly disposed on the fine carbon fiber accommodated inside the container. The carbon fiber is covered.

  The metal washer 50 is lowered from the ring-shaped upper edge of the container and presses the filler as a whole. Thereby, the size and porosity of the void are finally controlled through the pressed carbon fiber.

  The metal washer 50 stably protects the carbon fiber, the carbon fiber felt, or the protective mesh, and prevents the heat transferred by the resistance heating method or the electron beam heating method. Furthermore, in the vacuum deposition process, the organic vapor deposition material vaporized by heat moves to the substrate through a circular hole formed in the center of the metal washer.

  The size of the hole can be appropriately determined according to the size and height of the vacuum deposition chamber and the size of the external container. The size of the hole is 3 mm to 20 mm, preferably 5 mm to 8 mm.

  The size of the washer hole is very important. The size of the washer hole determines the angle at which the vaporized organic vapor deposition material travels straight toward the substrate during the vacuum vapor deposition process, minimizing the loss of the organic vacuum vapor deposition material. it can.

  The manufacturing process of the multipurpose vacuum evaporation container of the present invention will be described below.

Example 1
The container 10 is filled with the carbon fiber powder 20 and the carbon fiber felt 30, and then the metal mesh 40 and the metal washer 50 are disposed on the carbon fiber felt 30 so as to cover the carbon fiber powder 20 and the carbon fiber felt 30. Weld to the container. Thus, the vacuum vapor deposition material impregnated with the vapor deposition material is produced by impregnating 60 mg of the liquid fluorine-based compound.

(Example 2)
The material for vacuum deposition manufactured in Example 1 is charged into the electron beam port of the vacuum deposition apparatus. The diameter of the electron beam is set to 30 mm with a vacuum degree of 5 × 10 ⁻⁵ torr and an electron beam current of 20 mA using a vacuum deposition apparatus. A vacuum deposition material is then coated on the glass, PMMA, PC and PET substrates.

(Example 3)
The material for vacuum deposition manufactured in Example 1 is charged into a molybdenum heating element boat of a vacuum deposition apparatus. Coating on glass, PMMA, PC and PET substrates with a vacuum of 5 × 10 ⁻⁵ torr and a current of 50 mA.

DESCRIPTION OF SYMBOLS 10 External metal container 20 Carbon fiber (felt) filler 30 Carbon felt 40 Metal mesh for protection 50 Metal washer

Claims (7)

The upper edge is formed in a ring shape , and the inside is impregnated or filled in an internal filler selected from the group consisting of carbon fiber felt, carbon fiber, carbon powder, and metal felt / metal powder. a metal container housing the deposited substances,
A metal washer housed in the metal container and disposed on the internal filler ;
The vacuum evaporation container, wherein the metal washer is lowered from an upper edge of the metal container and fixed to the metal container in a state of pressing the internal filler . Inside, a metal container housing the carbon fiber felt, carbon fibers, carbon powder, and the deposition material which is impregnated or filled in selected interior filler and internal within the filler from the group of metal felt / metal powder When,
A metal washer housed in the metal container and disposed on the internal filler ;
The vacuum evaporation container, wherein the metal washer is welded to the metal container in a state where the inner filler is pressed. The vacuum deposition according to claim 1, further comprising a metal mesh that is disposed between the inner filler and the metal washer and prevents the inner filler from being detached from the metal container. container. The said metal container, the said metal washer, and the said metal mesh consist of stainless steel, iron, copper, molybdenum, tungsten, or titanium, The container for vacuum evaporation of Claim 3 characterized by the above-mentioned. The vacuum deposition according to claim 1, further comprising a carbon fiber felt that is disposed between the inner filler and the metal washer and prevents the inner filler from being detached from the metal container. Container.   The container for vacuum evaporation according to claim 1 or 2, wherein the metal container has a cylindrical shape or a rectangular tube shape.   The said metal washer has a hole in the center, The container for vacuum evaporation of Claim 1 or 2 characterized by the above-mentioned.

Images